铁电微管的制备与表征

采用化学浸润法在多孔硅模板上制备了锆钛酸铅(PbZr0.52Ti0.48O3,PZT)铁电微管,X射线衍射分析表明铁电微管为钙钛矿结构.运用扫描电子显微镜和原子力显微镜对铁电微管的微现形貌进行了观察,其姑果显示两种方法所测得的铁电微管直径不同.利用压电响应力显微镜观察到了铁电微管的电畴图像,并测得了铁电微管的微区电滞回...     

PT种子层对PZT薄膜结晶及压电性能的影响

采用溶胶-凝胶法(Sol-Gel)在Pt/Si衬底上制备了PbTiO3 (PT)薄膜和Pb (Zrx,Ti1-x)O3(PZT)薄膜,研究了退火温度以及PT种子层对PZT薄膜结晶及压电性能的影响。X射线衍射(XRD)结果表明,制备的PZT薄膜为纯钙钛矿结构的多晶薄膜,有PT种子层的PZT薄膜晶粒尺寸更大,(110)面取向度更高,结晶性能更好;原子力显微镜(AFM)结果表明,制备的薄膜表面形貌比较平整、均匀、无裂纹;压电力显微镜(PFM)结果表明,压电力显微镜(PFM)结果表明,有PT种子层时,PZT薄膜的平均压电系数d33为128～237 pm/V,无PT种子层时平均压电系数d33为21～29 pm/V。在升温速率为10 ℃/s的退火条件下保温10 min时,随着退火温度的升高,PZT薄膜晶粒尺寸增大,粗糙度增大,(110)面取向度升高,平均压电系数d33增大。PT种子层能够有效的改善PZT薄膜的结晶性能和压电性能。     

(Bi,Yb)4Ti3O12薄膜退火研究

采用溶胶-凝胶旋涂法在Pt(111)/Ti/SiO2/Si(100)基底上成功地沉积出(Bi,Yb)4Ti3O12[Bi3.4Ybo.6Ti3O12,BYT]铁电薄膜.系统地研究了退火温度对BYT铁电薄膜的晶体结构、表面形貌以及铁电性能(剩余极化强度)的影响.揭示了退火温度对BYT薄膜的晶体结构、表面形貌以及铁电性能有着明显的影响,给出了最佳退火温度为700℃左右.     

铁酸铋薄膜柔性化微纳制造及铁电性能

研究了铁酸铋薄膜的柔性化可控制造方法及其电畴调控动态。利用脉冲激光沉积法制备了周期性畴结构的铁酸铋薄膜,结合可控剥离技术,完成了铁酸铋薄膜从刚性基底到柔性基底的制备过程。利用原子力显微镜和压电力显微镜技术对柔性化铁酸铋薄膜的微观形貌和铁电特性进行表征。结果表明,柔性化后的铁酸铋薄膜保持完整的表面形貌特征(粗糙度保持不变),电畴反转特性保持可调,且保持良好的铁电特性及电畴反转响应。该研究为铁酸铋薄膜的柔性化制备提供了一种新思路。     

射频磁控溅射法制备（Ba0.7Sr0.3）TiO3铁电薄膜

采用射频磁控溅射法制备了用于非致冷红外焦平面阵列的（Ba0.7Sr0.3）TiO3（BST）铁电薄膜。研究了BST铁电薄膜的制备工艺,分析了BST铁电薄膜的晶体结构和微观形貌。测试了其介电特性,测得的相对介电常数－温度曲线表明制备的（Ba0.7Sr0.3）TiO3铁电薄膜的居里温度在室温附近,约30℃处。     

（Pb0.76Ca0.24）TiO3薄膜电畴反转行为的压电力显微镜研究

用溶胶-凝胶法在（Pt／Ti／SiO2/Si）衬底制备了（Pb0.76Ca0.24）TiO3（PCT）薄膜。利用扫描力显微镜（SFM）的压电响应模式（PFM）观测了PCT薄膜的纳米尺度畴结构。畴结构和晶粒尺寸相关,尺寸在100nm左右的晶粒表现为单畴,尺寸较大的晶粒表现为多畴。利用压电力显微镜研究了PCT薄膜中电畴的极化反转行为。通过SFM探针对畴施加一系列直流偏压极化,在每次极化后,利用压电响应模式扫描进行压电力成像,获得了与极化电压相关的畴反转信息。用探针施加电压对薄膜极化后,在不同的时间进行压电力成像,研究了电畴的退极化行为。     

改善(Pb,Ca)TiO_3薄膜的铁电性能研究

用溶胶-凝胶法和快速退火工艺在LaNiO3/Si(111)基片制备出高度(100)取向生长的钙钛矿相(Pb0.76Ca0.24)TiO3(PCT)薄膜。用原子力显微镜分析了薄膜的表面形貌;测试了薄膜的铁电和介电特性。PCT薄膜的剩余极化强度和矫顽场分别为9.3μC/cm2和64kV/cm,在100kHz薄膜的介电系数和损耗分别为231和0.045。比较了在不同电极制备PCT薄膜的结果,用LaNiO3作底电极,改善了铁电性,降低了矫顽场。     

(Bi3.7Dy0.3)(Ti2.8V0.2)O12铁电薄膜的制备及退火影响

铁电材料在铁电存储器等领域具有良好的应用前景,受到极大的关注,其中铋层状铁电薄膜因为其良好的铁电性,得到了广泛的研究.采用溶胶-凝胶法在Pt(111)/Ti/SiO2/Si(100)基底成功沉积出(Bi3.7Dy0.3)(Ti2.8V0.2)O12(BDTV)的A、B位同时掺杂的铁电薄膜,发现这种双掺能够显著改善薄膜的铁电性.研究了650～800℃不同退火温度下,BDTV铁电薄膜的铁电性能、晶体结构及表面形貌变化.通过SEM分析发现,温度为750℃时,薄膜的颗粒生长较好,薄膜的铁电性能最佳.     

改善(Pb,Ca)TiO3薄膜的铁电性能研究

用溶胶-凝胶法和快速退火工艺在LaNiO3／Si(111)基片制备出高度(100)取向生长的钙钛矿相(Pb0.76Ca0.24)TiO3(PCT)薄膜。用原子力显微镜分析了薄膜的表面形貌；测试了薄膜的铁电和介电特性，PCT薄膜的翻余极化强度和矫顽场分别为9.3μC/cm^2和64kV／cm，在100kHz薄膜的介电系数和损耗分别为231和0．045。比较了在不同电极制备PCT薄膜的结果，用LaNiO3作底电极，改善了铁电性，降低了矫顽场。     

硅基PZT铁电薄膜的制备与性能研究

用溶胶-凝胶（Sol-Gel）方法制备了硅基Pb(Zr0.53Ti0.47)O3(PZT)铁电薄膜。分析了PZT铁电薄膜的表面形貌、晶化程度、界面状态等性质。基于上述分析结果提出并实现了低温退火处理制备有PT过渡层的PZT铁电薄膜的工艺流程。测试了低温制备的PZT铁电薄膜的C-V、漏电等电性能,发现在Sol-Gel法制备PZT铁电薄膜的工艺中加入PT过渡层,有助于提高PZT薄膜的品质。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.