Characteristics of inductively coupled plasma(ICP) and helicon plasma in a singleloop antenna

Large area uniform plasma sources, such as high-density magnetized inductively coupled plasma(ICP) and helicon plasma, have broad applications in industry. A comprehensive comparison of ICP and helicon plasma, excited by a single-loop antenna, is presented in this paper from the perspectives of mode transition, hysteresis behavior, and density distribution. The E-H mode transition in ICP and the E-H-W mode transition in helicon plasma are clearly observed in the experiments. Besides, the considerable variation of hysteresis behavior from inverse hysteresis to normal hysteresis by the influence of the magnetic field is explored. The bi-Maxwellian and Maxwellian electron energy distribution functions in each discharge are used to explain this phenomenon, which is essentially related to the transition from a nonlocal kinetic property to a local kinetic property of electrons. In addition, we notice that the plasma density, in the radial direction, is peaked in the center of the tube in ICP, but a complicated distribution is formed in helicon plasma. In the axial direction, the maximum plasma density is still in the center of the antenna in ICP, whereas the highest plasma density is located downstream, far away from the antenna, in helicon plasma. It is believed that the reflected electrons in the sheath and pre-sheath by the upper metallic endplate and downstream propagated helicon wave will be responsible for this plasma density profile in helicon plasma. Due to the constrained electron motion in the magnetic field, an extremely uniform density distribution will be obtained with an appropriate axial magnetic field in the wave discharge mode.     

Comparison of double layer in argon helicon plasma and magnetized DC discharge plasma

We present in this paper the comparison of an electric double layer (DL) in argon helicon plasma and magnetized direct current (DC) discharge plasma. DL in high-density argon helicon plasma of 13.56 MHz RF discharge was investigated experimentally by a floating electrostatic probe and local optical emission spectroscopy (LOES). The DL characteristics at different operating parameters, including RF power (300–1500 W), tube diameter (8–60 mm), and external magnetic field (0–300 G), were measured. For comparison, DL in magnetized plasma channel of a DC discharge under different conditions was also measured experimentally. The results show that in both cases, DL appears in a divergent magnetic field where the magnetic field gradient is the largest and when the plasma density is sufficiently high. DL strength (or potential drop of DL) increases with the magnetic field in two different structures. It is suggested that the electric DL should be a common phenomenon in dense plasma under a gradient external magnetic field. DL in magnetized plasmas can be controlled properly by magnetic field structure and discharge mode (hence the plasma density).     

Axial profiles of argon helicon plasma by optical emission spectroscope and Langmuir probe

We present the axial profiles of argon helicon plasma measured by a local optical emission spectroscope (OES) and Langmuir RF-compensated probe. The results show that the emission intensity of the argon atom lines (750 nm, 811 nm) is proportional to the plasma density determined by the Langmuir probe. The axial profile of helicon plasma depends on the discharge mode which changes with the RF power. Excited by helical antenna, the axial distribution of plasma density is similar to that of the external magnetic field in the capacitive coupled mode (E-mode). As the discharge mode changes into the inductively coupled mode (H-mode), the axial distribution of plasma density in the downstream can still be similar to that of the external magnetic field, but becomes more uniform in the upstream. When the discharge entered wave coupled mode (W-mode), the plasma becomes nearly uniform along the axis, showing a completely different profile from the magnetic field. The W-mode is expected to be a mixed pattern of helicon (H) and Trivelpiece-Gould (TG) waves.     

Development of a compact high-density blue core helicon plasma device under 2000 G magnetic field of ring permanent magnets

A helicon wave plasma source in a tube of ring permanent magnets (PMs) has been constructed to study the effect of the configuration of the magnetic field with zero magnetic points on plasma parameters. This device also serves as an exploration platform for a simple, compact helicon wave plasma source adaptable to engineering applications. A small-diameter (26 mm) high-density (∼1018 m−3) blue core plasma is produced in ∼1 Pa argon by helicon RF (radio-frequency) discharge using a Nagoya III antenna under magnetic field (∼2 kG) of compact ring PMs (length ∼204 mm). Operational parameters, i.e. RF power and neutral gas pressure are scanned and plasma density is measured by an RF compensated probe to explore the operating characteristics of the device. Iconic feature of a helicon discharge, such as blue core plasmas and E-H-W mode transitions are well observed in the device, despite the wavelength calculated using the conventional dispersion relation of a bounded whistler waves (Chen 1991 Plasma Phys. Control. Fusion 33 339) is order of magnitudes longer than the length of the plasma in this device which seems to suggest that such helicon device is impossible. Surprisingly, the wavelength calculated by the unbounded whistle wave dispersion formula in turn suggests the occurrence of a half wavelength resonance.     

Relationship of mode transitions and standing waves in helicon plasmas

Helicon wave plasma sources have the well-known advantages of high efficiency and high plasma density, with broad applications in many areas. The crucial mechanism lies with mode transitions, which has been an outstanding issue for years. We have built a fluid simulation model and further developed the Peking University Helicon Discharge code. The mode transitions, also known as density jumps, of a single-loop antenna discharge are reproduced in simulations for the first time. It is found that large-amplitude standing helicon waves (SHWs) are responsible for the mode transitions, similar to those of a resonant cavity for laser generation. This paper intends to give a complete and quantitative SHW resonance theory to explain the relationship of the mode transitions and the SHWs. The SHW resonance theory reasonably explains several key questions in helicon plasmas, such as mode transition and efficient power absorption, and helps to improve future plasma generation methods.     

Preliminary Study of a Hybrid Helicon-ECR Plasma Source

A new type of hybrid discharge is experimentally investigated in this work. A helicon source and an electron cyclotron resonance(ECR) source were combined to produce plasma. As a preliminary study of this type of plasma, the optical emission spectroscopy(OES) method was used to obtain values of electron temperature and density under a series of typical conditions. Generally,it was observed that the electron temperature decreases and the electron density increases as the pressure increased. When increasing the applied power at a certain pressure, the average electron density at certain positions in the discharge does not increase significantly possibly due to the high degree of neutral depletion. Electron temperature increased with power in the hybrid mode.Possible mechanisms of these preliminary observations are discussed.     

Directional power absorption in helicon plasma sources excited by a half-helix antenna

This paper deals with the investigation of the power absorption in helicon plasma excited through a half-helix antenna driven at 13.56 MHz. The simulations were carried out by means of a code,HELIC. They were carried out by taking into account different inhomogeneous radial density profiles and for a wide range of plasma densities, from 10~(11) cm~(-3) to 10~(13) cm~(-3). The magnetic field was 200, 400, 600 and 1000 G. A three-parameter function was used for generating various density profiles with different volume gradients, edge gradients and density widths. The density profile had a large effect on the efficient Trivelpiece–Gould(TG) and helicon mode excitation and antenna coupling to the plasma. The fraction of power deposition via the TG mode was extremely dependent on the plasma density near the plasma boundary. Interestingly, the obtained efficient parallel helicon wavelength was close to the anticipated value for Gaussian radial density profile.Power deposition was considerably asymmetric when the n/B_0 ratio was more than a specific value for a determined density width. The longitudinal power absorption was symmetric at approximately n_0 =10~(11) cm~(-3), irrespective of the magnetic field supposed. The asymmetry became more pronounced when the plasma density was 10~(12) cm~(-3). The ratio of density width to the magnetic field was an important parameter in the power coupling. At high magnetic fields, the maximum of the power absorption was reached at higher plasma density widths. There was at least one combination of the plasma density, magnetic field and density width for which the RF power deposition at both side of the tube reached its maximum value.     

Comparison of heating mechanisms of argon helicon plasma in different wave modes with and without blue core

In this work,we investigated the discharge characteristics and heating mechanisms of argon helicon plasma in different wave coupled modes with and without blue core.Spatially resolved spectroscopy and emission intensity of argon atom and ion lines were measured via local optical emission spectroscopy,and electron density was measured experimentally by an RFcompensated Langmuir probe.The relation between the emission intensity and the electron density was obtained and the wavenumbers of helicon a...     

Effect of Radial Density Configuration on Wave Field and Energy Flow in Axially Uniform Helicon Plasma

The effect of the radial density configuration in terms of width, edge gradient and volume gradient on the wave field and energy flow in an axially uniform helicon plasma is studied in detail. A three-parameter function is employed to describe the density, covering uniform,parabolic, linear and Gaussian profiles. It finds that the fraction of power deposition near the plasma edge increases with density width and edge gradient, and decays in exponential and "bumpon-tail" profiles, respectively, away from the surface. The existence of a positive second-order derivative in the volume density configuration promotes the power deposition near the plasma core, which to our best knowledge has not been pointed out before. The transverse structures of wave field and current density remain almost the same during the variation of density width and gradient, confirming the robustness of the m=1 mode observed previously. However, the structure of the electric wave field changes significantly from a uniform density configuration, for which the coupling between the Trivelpiece-Gould(TG) mode and the helicon mode is very strong, to non-uniform ones. The energy flow in the cross section of helicon plasma is presented for the first time, and behaves sensitive to the density width and edge gradient but insensitive to the volume gradient. Interestingly, the radial distribution of power deposition resembles the radial profile of the axial component of current density, suggesting the control of the power deposition profile in the experiment by particularly designing the antenna geometry to excite a required axial current distribution.     

Effects of magnetic field on electron power absorption in helicon fluid simulation

In this study, a code, named Peking University Helicon Discharge(PHD), which can simulate helicon discharge processes under both a background magnetic field greater than 500 G and a pressure less than 1 Pa, is developed. In the code, two fluid equations are used. The PHD simulations led to two important findings:(1) the temporal evolution of plasma density with the background magnetic field exhibits a second rapid increase(termed as the second density jump),similar to the transition of modes in helicon plasmas;(2) in the presence of a magnetic field, the peak positions of electron power absorption appeared near the central axis, unlike in the case of no magnetic field. These results may lead to an enhanced understanding of the discharge mechanism.     

Development of a helicon-wave excited plasma facility with high magnetic field for plasma-wall interactions studies

The high magnetic field helicon experiment system is a helicon wave plasma(HWP)source device in a high axial magnetic field(B_0)developed for plasma–wall interactions studies for fusion reactors.This HWP was realized at low pressure(5?×?10~(-3)?-?10 Pa)and a RF(radio frequency,13.56 MHz)power(maximum power of 2 k W)using an internal right helical antenna(5 cm in diameter by 18 cm long)with a maximum B_0of 6300 G.Ar HWP with electron density~10~(18)–10~(20)m~(-3)and electron temperature~4–7 e V was produced at high B_0 of 5100 G,with an RF power of 1500 W.Maximum Ar~+ion flux of 7.8?×?10~(23)m~(-2)s~(-1)with a bright blue core plasma was obtained at a high B_0 of 2700 G and an RF power of 1500 W without bias.Plasma energy and mass spectrometer studies indicate that Ar~+ion-beams of 40.1 eV are formed,which are supersonic(~3.1c_s).The effect of Ar HWP discharge cleaning on the wall conditioning are investigated by using the mass spectrometry.And the consequent plasma parameters will result in favorable wall conditioning with a removal rate of 1.1?×?10~(24)N_2/m~2 h.     

Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

A high growth rate fabrication of diamond-like carbon(DLC)films at room temperature was achieved by helicon wave plasma chemical vapor deposition(HWP-CVD)using Ar/CH_4gas mixtures.The microstructure and morphology of the films were characterized by Raman spectroscopy and scanning electron microscopy.The diagnosis of plasma excited by a helicon wave was measured by optical emission spectroscopy and a Langmuir probe.The mechanism of high growth rate fabrication for DLC films by HWP-CVD has been discussed.The growth rate of the DLC films reaches a maximum value of 54μm h~(-1)at the CH_4flow rate of 85 sccm,which is attributed to the higher plasma density during the helicon wave plasma discharge.The CH and H_αradicals play an important role in the growth of DLC films.The results show that the H_αradicals are beneficial to the formation and stabilization of C=C bond from sp~2to sp~3.     

Modification of exposure conditions by the magnetic field configuration in helicon antenna-excited helium plasma

Modification of exposure conditions downstream in the diffusion chamber has been performed in helicon antenna-excited helium plasma by adjusting the magnetic field(intensity and geometry).In the inductively coupled mode(H mode), a reduction in ion and heat fluxes is found with increasing magnetic field intensity, which is further explained by the more highly magnetized ions off-axis around the last magnetic field lines(LMFL). However, in helicon wave mode(W mode), the increase in magnetic field intensity can dramatically increase the ion and heat fluxes.Moreover, the effect of LMFL geometry on exposure conditions is investigated. In H mode with contracting LMFL, off-axis peaks of both plasma density and electron temperature profiles shift radially inwards, bringing about a beam with better radial uniformity and higher ion and heat fluxes. In W mode, although higher ion and heat fluxes can be achieved with suppressed plasma cross-field diffusion under converging LMFL, the poor radial uniformity and a small beam diameter will limit the size of samples suitable for plasma irradiation experiments.     

Observation of low-frequency oscillation in argon helicon discharge

We present here a kind of low-frequency oscillation in argon helicon discharge with a half helical antenna. This time-dependent instability shows a global quasi-periodic oscillation of plasma density and electron temperature, with a typical frequency of a few tens of Hz which increases with external magnetic field as well as radiofrequency(RF) power. The relative oscillation amplitude decreases with magnetic field and RF power, but the rising time and pulse width do not change significantly unde...     

Reversal of radial glow distribution in helicon plasma induced by reversed magnetic field

In this work,the reversal of radial glow distribution induced by reversed magnetic field is reported.Based on the Boswell antenna which is symmetric and insensitive to the magnetic field direction,it seems such a phenomenon in theory appears impossible.However,according to the diagnostic of the helicon waves by magnetic probe,it is found that the direction of magnetic field significantly affects the propagation characteristic of helicon waves,i.e.,the interchange of the helicon waves at the upper and the lower half of tube was caused by reversing the direction of magnetic field.It is suggested that the variation of helicon wave against the direction of magnetic field causes the reversed radial glow distribution.The appearance of the traveling wave does not only improve the discharge strength,but also determines the transition of the discharge mode.     

An Experimental Platform for the Study on Magnetic Reconnection in Laboratory Plasmas

In order to investigate electron dynamics near the electron diffusion region in magnetic reconnection process, an upgrade in the Linear Magnetized Plasma (LMP) device is accomplished at the University of Science and Technology of China. Radio frequency (RF) helicon discharge is used to generate a quasi-stationary plasma, and a time-dependent magnetic field is applied to the plasma, which exhibits an X-type neutral point in vacuum. A two-dimensional sophisticated mobile platform is built up, providing a high spatial resolution, below 0.5mm, for the diagnostics.     

Mode transition induced by gas pressure in dusty acetylene microdischarges: two-dimensional simulation

Radio-frequency microdischarge in acetylene is investigated by use of a fluid model and an aerosol dynamics model in a cylindrical discharge chamber. In this article, the results at a pressure of 100–500 Torr, a voltage of 80–150 V, and an electrode gap of 400–1000 μm are carefully analyzed and discussed. It is shown that two electron heating modes α and γ appear in the microdischarge, and the pressure-dependent transition from α to γ was accompanied by the abrupt decrease of electron density and electron temperature. The mode transition phenomenon is further confirmed by the variation of the electron temperature axial profiles, the profiles vary continuously from a center high at the pressure of 100 Torr to an edge high at the pressure of500 Torr. Furthermore, in the α mode(100 Torr) the plasma density increases linearly with the increase of electrode gap, but decreases sharply with the increase of electrode gap in the γ mode(100 Torr). The gas pressure and applied voltage effects on the nanoparticle density and degree of nonuniformity are also investigated. It has been shown that the gas pressure greatly influences the axial profiles of nanoparticle density and the values of the degree of nonuniformity, while the values of the plasma parameters(electron density and nanoparticle density) strongly depend on the applied voltage.     

Investigation of radial heat conduction with 1D self-consistent model in helicon plasmas

A 1D radially self-consistent model in helicon plasmas has been established to investigate the influence of radial heat conduction on plasma transport and wave propagation.Two kinds of 1D radial fluid models,with and without considering heat conduction,have been developed to couple the 1D plasma-wave interaction model,and self-consistent solutions have been obtained.It is concluded that in the low magnetic field range the radial heat conduction plays a moderate role in the transport of helicon p...     

Effects of discharge parameters on the micro-hollow cathode sustained glow discharge

The effects of parameters such as pressure, first anode radius, and the cavity diameter on the micro-hollow cathode sustained glow discharge are investigated by using a two-dimensional self-consistent fluid model in pure argon. The results indicate that the three parameters influence the discharge in the regions inside and outside of the cavity. Under a fixed voltage on each electrode, a larger volume of high density plasma can be produced in the region between the first and the second anodes by selecting the appropriate pressure, the higher first anode, and the appropriate cavity diameter. As the pressure increases, the electron density inside the hollow cathode, the high density plasma volume between the first anode and second anodes, and the radial electric field in the cathode cavity initially increase and subsequently decrease. As the cavity diameter increases, the high-density plasma volume between the first and second anodes initially increases and subsequently decreases; whereas the electron density inside the hollow cathode decreases. As the first anode radius increases, the electron density increases both inside and outside of the cavity. Moreover, the increase of the electron density is more obvious in the microcathode sustained region than in the micro cavity region. The results reveal that the discharge inside the cavity interacts with that outside the cavity. The strong hollow cathode effect and the high-density plasma inside the cavity favor the formation of a sustained discharge between the first anode and the second anodes. Results also show that the radial boundary conditions exert a considerably weaker influence on the discharge except for a little change in the region close to the radial boundary.     

Study of axial double layer in helicon plasma by optical emission spectroscopy and simple probe

In this work we used a passive measurement method based on a high-impedance electrostatic probe and an optical emission spectroscope (OES) to investigate the characteristics of the double layer (DL) in an argon helicon plasma.The DL can be confirmed by a rapid change in the plasma potential along the axis.The axial potential variation of the passive measurement shows that the DL forms near a region of strong magnetic field gradient when the plasma is operated in wavecoupled mode,and the DL strength increases at higher powers in this experiment.The emission intensity of the argon atom line,which is strongly dependent on the metastable atom concentration,shows a similar spatial distribution to the plasma potential along the axis.The emission intensity of the argon atom line and the argon ion line in the DL suggests the existence of an energetic electron population upstream of the DL.The electron density upstream is much higher than that downstream,which is mainly caused by these energetic electrons.