C4NP-无铅倒装晶片焊凸形成生产工艺与可靠性数据

受控倒塌芯片连接新工艺是一种由IBM公司开发、由Suss Micro Tec公司推向商品化的新型焊凸形成技术。受控倒塌芯片连接新工艺采用各种无铅焊料合金致力于解决现有的凸台。形成技术限定,使低成本小节距焊凸形成成为可能。受控倒塌芯片连接新工艺是一种焊球转移技术,熔焊料被注入预先制成并可重复使用的玻璃模板(模具)。这种注满焊料的模具在焊料转入圆片之前先经过检查以确保高成品率。注满焊料的模具与圆片达到精确的接近后以与液态熔剂复杂性无关的简单工序转移在整个300mm(或300mm以下)圆片上。受控倒塌芯片连接新工艺技术能够在焊膏印刷中实现小节距凸台形成的同时提供相同合金选择的适应性。这种简单的受控倒塌芯片连接新工艺使低成本、高成品率以及快速封装周期的解决方法对于细节距FCiP以及WLCSP凸台形成均能适用。     

BGA／CSP和倒装焊芯片面积阵列封装技术

随着表面安装技术的迅速发展,新的封装技术不断出现,面积阵列封装技术成了现代封装的热门话题,而BGA／CSP和倒装焊芯片（F1iPChip）是面积阵列封装主流类型。BGA／CSP和倒装焊芯片的出现,适应了表面安装技术的需要,解决了高密度、高性能、多功能及高I／O数应用的封装难题。本文介绍了BGA／CSP和倒装焊芯片的封装理论和技术优势及制造流程,并阐述了植球机的基本构成和工作原理。     

用于先进PCB制造工艺的叠层封装

在20世纪90年代,球栅阵列封装(BGA)和芯片尺寸封装(CSP)在封装材料和加工工艺方面达到了极限。这2种技术如同20世纪80年代的表面安装器件(SMD)和70年代通孔安装器件(THD)一样,在电学、机械、热性能、尺寸、质量和可靠性方面达到最大值。目前,三维封装正在成为用于未来采用的先进印制板(PCB)制造工艺的下一个阶段。它们可以分为圆片级封装、芯片级封装、和封装面。叠层封装(PoP)是一种封装面叠层封装类型的三维封装技术[15]。     

Drop impact reliability analysis of CSP packages at board and product levels through modeling approaches

Chip scale package (CSP) and fine pitch ball grid array (BGA) packages have been increasingly used in portable electronic products such as mobile cell phones and PDA, etc. Drop impact which is inevitable during its usage could cause not only housing crack but also package to board interconnect failure, such as BGA solder breaks. Various drop tests have been used to ensure high reliability performance of packaging to withstand such impact and shock load. Due to extreme difficulty in directly measuring responses in solder joint during drop shock event, computer simulation based modeling approach has been increasingly played an important role in evaluating product reliability performance during product development. An advanced modeling technique with a comprehensive failure criterion including high strain rate effect needs to be developed to quantitatively evaluate package reliability performance especially in cross comparisons between different board and system level designs. In this paper, three drop tests have been modeled, namely, bare board drop, board with fixture drop or shock, and system level phone drop. Submodeling and explicit-implicit sequential modeling techniques are used to characterize the dynamic responses of CSP/BGA packages in different board designs. Failure criteria and effects of strain rate and edge support on BGA in multicomponent boards are also investigated. A validation test with data acquisition is used to correlate the test results with numerical results.     

WLCSP封装技术中的集成无源器件

芯片规模封装技术一直倍受高性能、小形状因素解决方案在各类应用中的关注。芯片规模封装与球栅阵列(BGA)封装之间的区别变得不可分辨,已成为“细间距BGA”的同义词。芯片规模封装成本也是业界关注的焦点之一。芯片规模晶圆级封装是提供小形状、高性能和低成本的最快途径。论述了集成无源器件加工、低成本化的晶圆级芯片规模封装技术。     

Bump formation for flip chip and CSP by solder paste printing

Area array packages (flip chip, CSP and BGA) require the formation of bumps for the board assembly. Since the established bumping methods need expensive equipment or are limited by the throughput, minimal pitch and yield the industry is currently searching for new and lower cost bumping approaches. In this paper the experimental work of stencil printing to create solder bumps for flip chip and wafer level CSP (CSP-WL) is described in detail.This paper is divided into two parts. In the first part of the paper a low cost wafer bumping process for flip chip applications will be studied in particular. The process is based on an electroless Nickel under bump metallization and solder bumping by stencil printing. The experimental results for this technology will be presented and the limits concerning pitch, reproducibility and bump height will be discussed in detail. The second part of the paper is focused on solder paste printing for wafer-level CSPs. In order to achieve large bumps an optimized printing method will be presented. Additionally advanced stencil design will be shown and the achieved results will be compared with conventional methods.     

基于埋置式基板的3D-MCM封装结构的研制

研制一种用于无线传感网的多芯片组件(3D-MCM).采用层压、开槽等工艺获得埋置式高密度多层有机(FR-4)基板,通过板上芯片(COB)、板上倒装芯片(FCOB)、球栅阵列(BGA)等技术,并通过引线键合、倒装焊等多种互连方式将不同类型的半导体芯片三维封装于一种由叠层模块所形成的立体封装结构中;通过封装表层的植球工艺形成与表面组装技术(SMT)兼容的BGA器件输出端子;利用不同熔点焊球实现了工艺兼容的封装体内各级BGA的垂直互连,形成r融合多种互连方式3D-MCM封装结构.埋置式基板的应用解决了BGA与引线键合芯片同面组装情况下芯片封装面高出焊球高度的关键问题.对封装结构的散热特性进行了数值模拟和测试,结果表明组件具有高的热机械可靠性.电学测试结果表明组件实现了电功能,从而满足了无线传感网小型化、高可靠性和低成本的设计要求.     

电子器件封装工艺技术新进展

该文扼要分析了电子器件封装技术迅速发展的成因，预测了电子封装新技术的发展方向，深入阐述了引脚布置方式的突破，BGA技术的发展，GBA和倒装芯片结合的优势，CSP产业化的关键，在晶圆片上进行CSP封装的新工艺，以及倒装芯片和CSP封装的综合比较。     

基于埋置式基板的3D-MCM封装结构的研制

研制一种用于无线传感网的多芯片组件（3D-MCM) . 采用层压、开槽等工艺获得埋置式高密度多层有机（FR-4）基板,通过板上芯片（COB) 、板上倒装芯片（FCOB) 、球栅阵列（BGA）等技术,并通过引线键合、倒装焊等多种互连方式将不同类型的半导体芯片三维封装于一种由叠层模块所形成的立体封装结构中;通过封装表层的植球工艺形成与表面组装技术（SMT）兼容的BGA器件输出端子;利用不同熔点焊球实现了工艺兼容的封装体内各级BGA的垂直互连,形成了融合多种互连方式3D-MCM封装结构. 埋置式基板的应用解决了BGA与引线键合芯片同面组装情况下芯片封装面高出焊球高度的关键问题. 对封装结构的散热特性进行了数值模拟和测试,结果表明组件具有高的热机械可靠性. 电学测试结果表明组件实现了电功能,从而满足了无线传感网小型化、高可靠性和低成本的设计要求.     

0.5mm间距CSP/BGA器件无铅焊接工艺技术研究

芯片级封装器件因其小尺寸、低阻抗、低噪声等优点广泛应用于电子信息系统中.从器件封装、印制板焊盘设计、焊膏印刷、贴装以及回流焊接等方面探讨了0.5 mm间距CSP/BGA器件无铅焊接工艺技术.     

Characterization of chip scale packaging materials

The mechanical stability of Chip Scale Packages (CSP) used in surface mount technology is of primary concern. The dominant issues are package warpage and solder fatigue in solder joints under cyclic loads. To address these issues, molding compound and die attach film were characterized with finite element method which employed a viscoelastic and viscoplastic constitutive model. The model was verified with experiments on package warpage, PCB warpage and solder joint reliability. After the correlation was observed, the effect of molding compound and die attach film on package warpage and solder joint reliability was investigated. It was found that package warpage tremendously affected solder joint reliability. Furthermore, a die attach film was developed based on results of the modeling. CSP with the developed die attach film are robust and capable of withstanding the thermal stresses, humidity and high temperatures encountered in typical package assembly and die attach processes. Also, a lead free solder is discussed based on the results of creep testing. This paper presents the viscoelastic and viscoplastic constitutive model and its verification, the optimum material properties, the experimental and simulated reliability and performance results of the u*BGA packages, and the lead free solder creep.     

Low cost bumping by stencil printing: process qualification for 200 μm pitch

Area array packages (flip chip, CSP (Chip scale packages) and BGA) require the formation of bumps for the board assembly. Since the established bumping methods need expensive equipment and/or are limited by the throughput, minimal pitch and yield, the industry is currently searching for new and lower cost bumping approaches. The experimental work of stencil printing to create solder bumps for flip chip devices is described in detail in this article. In the first part of this article, a low cost wafer bumping process for flip chip applications will be studied in particular. The process is based on an electroless nickel under bump metallization and solder bumping by stencil printing. The experimental results for this technology will be presented, and the limits concerning pitch, stencil design, reproducibility and bump height will be discussed in detail. In the second part, a comparison of measured standard deviations of bump heights as well as the quality demands for ultrafine pitch flip chip assembly are shown.     

Highly reliable non-conductive adhesives for flip chip CSP applications

Non-conductive adhesives (NCA), widely used in display packaging and fine pitch flip chip packaging technology, have been recommended as one of the most suitable interconnection materials for flip-chip chip size packages (CSPs) due to the advantages such as easier processing, good electrical performance, lower cost, and low temperature processing. Flip chip assembly using modified NCA materials with material property optimization such as CTEs and modulus by loading optimized content of nonconductive fillers for the good electrical, mechanical and reliability characteristics, can enable wide application of NCA materials for fine pitch first level interconnection in the flip chip CSP applications. In this paper, we have developed film type NCA materials for flip chip assembly on organic substrates. NCAs are generally mixture of epoxy polymer resin without any fillers, and have high CTE values un-like conventional underfill materials used to enhance thermal cycling reliability of solder flip chip assembly on organic boards. In order to reduce thermal and mechanical stress and strain induced by CTE mismatch between a chip and organic substrate, the CTE of NCAs was optimized by filler content. The flip chip CSP assembly using modified NCA showed high reliability in various environmental tests, such as thermal cycling test (-55/spl deg/C/+160/spl deg/C, 1000 cycle), high temperature humidity test (85/spl deg/C/85%RH, 1000 h) and high temperature storage test (125/spl deg/C, dry condition). The material properties of NCA such as the curing profile, the thermal expansion, the storage modulus and adhesion were also investigated as a function of filler content.     

高密度封装技术的发展

本文简要介绍了BGA与CSP的概念、发展现状、应用情况及发展趋势等。BGA／CSP是现代组装技术的两个新概念，它们的出现促进SMT(表面贴装技术)与SMD(表面贴装元器件)的发展和革新，并将成为高密度、高性能、多功能及高I／O数封装的最佳选择。     

Evolution of a unique flip-chip MCM-L package

Flip-chip (FC) packaging is gaining acceptance in the electronics packaging arena. More sources of bumped die and high density printed wiring boards (PWBs) laminates become available every day. Also, known good die (KGD) issues are being resolved by several companies, and design tools to perform FC packaging designs are becoming more available. This is the infrastructure FC packaging requires to become the packaging method of choice, particularly for >200 I/O applications. FC packages come in a variety of styles: FC plastic ball grid arrays (FC/PBGAs), FC plastic quad flat packs (PC/PQFPs), etc. Presently, the industry's drive is toward single chip packages on low cost laminates; i.e., organic substrates. Work is starting to occur in the area of multichip FC packages, due to the need to increase memory to microprocessor speed communication. In this article, a unique FC/MCM-L package is discussed. Part I will concentrate on the development and reliability testing of a one to four chip leadless FC/MCM-L package. Unlike traditional surface mount (SM) components that are attached to printed wiring boards (PWBs) with leads, the SM pads within the body of the package are used for attachment to a PWB. Collapsible eutectic solder domes are deposited on the SM pads by traditional screen printing. After reflow, these domes are used to connect the FC/MCM-L to the PWB. Challenges encountered during package design, PWB fabrication and first and second level assembly will be discussed. Part II of this article will focus on the extension of this FC/MCM-L package to a BGA second level interconnect. Change of FC attachment method, design enhancements, assembly, and reliability testing results will be presented     

BGA植球工艺技术

BGA(ball grid array)球栅阵列封装技术是20世纪90年代以后发展起来的一种先进的高性能封装技术,是一种用于多引脚器件与电路的封装技术。BGA最大的特点就是采用焊球作为引脚,这不仅提高了封装密度,也提高了封装性能。而植球工艺作为BGA封装中的关键工艺将会直接影响器件与电路的性能及可靠性。影响BGA植球工艺的主要因素有:植球材料、植球工艺及回流焊工艺。文章通过对BGA植球的基板、焊膏/助焊剂、焊球等材料的详细介绍,详实阐述了植球工艺过程,并对BGA后处理的回流焊工艺进行了详细描述,提供了BGA植球工艺的检测方法,对植球工艺的可靠性进行了探讨。     

Mechanical cycling fatigue of PBGA package interconnects

Increased packaging density in micro-electronic products has advantaged attach of BGA, micro-BGA, CSP, and DCA packages. These area array packages are assembled to circuit boards that are reduced in size and thickness, by necessity. These assemblies would include flexible thin laminate circuit boards with area array components attached by solder balls. In normal use, these assemblies would be subjected to numerous ultra-low frequency mechanical deflections; consider a keypad when the user enters telephone numbers. Most of the reliability studies of area array packages have dealt with temperature cycling induced fatigue. However, less attention has been paid to mechanical bending fatigue of these packages.A test method has been developed to elucidate the mechanical bending fatigue issues of BGA, micro-BGA, CSP, and DCA packages attached to printed circuit boards. Appropriate bending fatigue reliability models and their theoretical basis are being developed. The test method and preliminary mechanical cyclic fatigue data on a PBGA package will be presented as a function of printed circuit board thickness. Consideration will be given to fatigue fracture morphology and its relation to solder joint location and rate of crack growth.     

新型微电子封装技术

本论文综述了自二十世纪九十年代以来迅速发展的新型微电子封装技术,包括焊球阵列封装(BGA)、芯片尺寸封装(CSP)、圆片级封装(WLP)、三维封装(3D)和系统封装(SIP)等项技术。同时,叙述了微电子三级封装的概念。并对发展我国新型微电子封装技术提出了一些思索和建议。     

Chip-scale packaging of power devices and its application inintegrated power electronics modules

A power electronics packaging technology utilizing chip-scale packaged (CSP) power devices to build three-dimensional (3-D) integrated power electronics modules (IPEMs) is presented in this paper. The chip-scale packaging structure, termed die dimensional ball grid array (D²BGA), eliminates wire bonds by using stacked solder joints to interconnect power chips. D²BGA package consists of a power chip, inner solder caps, high-lead solder balls, and molding resin. It has the same lateral dimensions as the starting power chip, which makes high-density packaging and module miniaturization possible. This package enables the power chip to combine excellent thermal transfer, high current handling capability, improved electrical characteristics, and ultralow profile packaging. Electrical tests show that the V_CE(sat) and on-resistance of the D²BGA high speed insulated-gate-bipolar transistors (IGBTs) are improved by 20% and 30% respectively by eliminating the device wirebonds and other external interconnections, such as the leadframe. In this paper, we present the design, reliability, and processing issues of D²BGA package, and the implementation of these chip-scale packaged power devices in building 30 kW half-bridge power converter modules. The electrical and reliability test results of the packaged devices and the power modules are reported     

高密度封装技术现状及发展趋势

综述了对半导体集成电路发展有深刻影响的微电子封装技术的现状 ,指出了适用于高密度封装的载带封装 (TCP)、球栅阵列封装 (BGA)、倒装片 (FCT)、芯片规模封装 (CSP)、多芯片组件 (MCM)、三维封装等关键技术及其发展趋势