采用AFM研究单晶硅纳米加工特性

为获得AFM金刚石微探针在纳米尺度上加工脆性材料的加工特性,在AFM系统上对单晶硅表面进行了刻划、加工实验.实验结果与宏观车削加工结果进行了对比,得出在纳米尺度上进行的加工属塑性域加工.采用AFM金刚石微探针加工硅表面的加工质量主要受材料残留高度和形成的切屑在已加工表面的粘结两个因素影响.验证了AFM作为一种加工工具,受其刻划方向的影响,可以很容易地实现纳米量级材料的去除,得到厚度为数个纳米的切屑.     

基于原子力显微镜(AFM)的微加工系统

目前原子力显微镜(AFM)已经成为纳米加工领域中一种重要的加工手段,但由于其自身扫描陶管及针尖等因素的影响,AFM的微加工能力在很大程度上受到限制。利用三维微动工作台结合原子力显微镜以及锋利的金刚石针尖组成微加工系统,通过编程获取微结构的轮廓,选择RS-232串口作为通讯方式,发送字符串命令控制工作台的运动实现预定的轨迹,从而消除了扫描陶管运动范围有限且存在漂移和滞后的影响,解决了氮化硅和单晶硅针尖加工材料范围有限的问题,提升了AFM的加工能力,并加工出较为复杂的微结构及微传感器。实验表明这是一种可行的微加工方法。     

AFM针尖"突跳"研究

为了研究原子力显微镜（AFM）“突跳”现象的产生机理，基于经典弹性理论和Lennard-Jones势能定律建立了AFM针尖与样品纳米接触的弹性模型。给出了在AFM针尖逐渐趋近样品表面的过程中，AFM针尖与样品间的粘着力、样品表面的轮廓曲线和样品表面的变形量随AFM针尖与样品表面间距的变化规律。分析了AFM“突跳”现象的产生机理和影响因素。研究表明，AFM“突跳”现象主要是由样品表面在粘着引力的作用下产生拉伸变形并与AFM针尖“突跳”接触引起的。     

用于纳米光电子器件加工的纳米金属膜的制作

在利用Top-Down方式加工纳米电子器件和纳米光电子器件的研究中,纳米薄膜的制作和加工技术是一个关键环节.采用金属Ti-SOS结构的纳米器件,Ti膜的厚度和成膜质量成为影响基于AFM针尖诱导氧化加工Ti纳米氧化线/电路图形结构质量的重要因素.文中叙述了Ti膜的制备和检测方法,给出了纳米Ti膜的制备和在一定环境下对其进行氧化加工的结果.     

基于原子力显微镜的PMMA飞秒激光纳米加工

介绍了一种基于原子力显微镜(AFM)的激光近场增强纳米加工方法。探讨了作为主要影响因素的激光场增强效应,用时域有限差分法对AFM探针下光场的空间分布进行了数值分析。研究了飞秒激光入射到AFM探针的PMMA材料的图形化,在PMMA材料表面加工了不同宽度的线条和字母。利用AFM对所得纳米图形进行了原位测试。在激光参数未经优化的情况下,其线宽可达100 nm,超过了实验室飞秒激光远场加工的分辨能力(200 nm)。     

基于原子力显微镜的PMMA飞秒激光纳米加工

介绍了一种基于原子力显微镜（AFM）的激光近场增强纳米加工方法。探讨了作为主要影响因素的激光场增强效应，用时域有限差分法对AFM探针下光场的空间分布进行了数值分析。研究了飞秒激光入射到AFM探针的PMMA材料的图形化，在PMMA材料表面加工了不同宽度的线条和字母。利用AFM对所得纳米图形进行了原位测试。在激光参数未经优化的情况下，其线宽可达100nm，超过了实验室飞秒激光远场加工的分辨能力（200nm）。     

AFM的纳米硬度测试与分析

基于原子力显微镜(AFM)和金刚石针尖建立了一套纳米压痕测量系统。通过向系统发送控制电压使金刚石针尖在完成加载和卸载全过程的同时进行实时的数据采集并直接绘出载荷-压深曲线。利用该系统,对单晶铝和单晶铜薄膜材料进行了单点压痕实验,用美国Hysitron公司的纳米原位测量仪(TriboIndenter)做了验证试验。实验结果表明,该系统适合测量较软材料的纳米硬度。分析了基体材料对薄膜硬度和弹性模量的影响,在薄膜厚度低于5~10倍压入深度时,基体对薄膜材料的力学性能影响很大;并根据获得的载荷－压深曲线分析得出由于尺度效应的影响,随着压痕深度的减小,薄膜的硬度值呈明显的上升趋势,弹性模量没有这个趋势。     

用AFM压痕技术定量介观硬度的方法研究

用原子力显微镜(AFM)纳米压痕方法结合扫描力显微镜技术，表征类金刚石(DLC)膜，金块Au，单晶硅Si的纳米硬度。用能量密度理论解释基于AFM压痕技术测定纳米硬度的机理，给出AFM纳米压痕的能量平衡方程。对DLC膜，金块，单晶硅进行纳米压痕试验，表明在同样载荷下，不同材料的压痕深度是不相同的。DLC膜具有较高的抗压性能，Si其次，Au的抗压性能最低。通过曲线拟合技术，定量给出金块的纳米硬度分析模型：H=(2．83／Df) 2．86。     

纳米ZrO2陶瓷的超声振动延性域磨削特性研究

本文分析了纳米ZrO2陶瓷在普通和超声磨削状态下的裂纹扩展过程及延性去除机理;通过对不同磨削状态的磨削力及AFM和SEM对表面质量的观察,做了在普通和超声磨削状态下的对比试验,研究了临界延性磨削深度对磨削力及表面质量的影响关系;基于超声振动磨削过程及磨削力的分析,讨论了超声振动增加延性磨削深度的原因,最后通过AFM对延性域加工表面形貌的形成机理进行了观察。研究表明：超声加工能明显提高纳米ZrO2陶瓷的临界延性磨削深度,振动方向垂直于砂轮线速度方向时,其磨削效果要优于振动方向平行于砂轮速度方向的磨削效果。通过在延性域范围内磨削,超声加工能高效地获得纳米加工表面,超精密磨削表面是由不同幅值多种波形叠加的结果。     

切点约束和探针针尖半径补偿的金刚石刀具刃口钝圆半径求解方法

本文对金刚石刀具刃口钝圆半径求解方法展开研究,以有效提升金刚石刀具刃口锋利度的测量精度。文中分析了原子力显微镜(AFM)扫描探针几何形貌对金刚石刀具刃口锋利度测量结果的影响,并提出了基于切点约束和AFM探针针尖半径补偿的刀具刃口钝圆半径求解方法;讨论了消噪滤波、测量角度误差以及切点分离方法对测量结果的影响;在高精度测量平台上完成了金刚石刀具刃口锋利度测量,并将被测量的刀具用于飞切加工KDP晶体。结果表明:提出的刃口钝圆半径求解方法能够准确求解金刚石刀具的刃口锋利度,测量结果能很好地描述金刚石刀具的刃口锋利程度,可以为金刚石超精密切削加工的选刀和用刀提供有效指导。     

Nano-wear of the diamond AFM probing tip under scratching of silicon, studied by AFM

In order to improve such a widely used microtribological testing procedure as surface scratching by an AFM diamond tip, an experimental study has been carried out using single-crystalline silicon as the tested material. Wear of the AFM diamond tip under scratching was observed by a decrease in the scratch depth with increasing wear cycles and by the direct imaging of the diamond tip shape using a Si₃N₄ AFM tip. It was shown that the current widely used experimental method, which assumes the diamond tip to be non-wearable, introduces uncontrollable error into the obtained values for the tested material's wear rate. The harder the tested material, the larger may be the tip wear, and, therefore, the bigger may be its effect on the obtained wear rate values. The specific wear rates for the diamond tip and a silicon wafer were estimated to be 1.4 × 10^-9 and 4.5 × 10^-4 mm³/(N m), respectively.     

Investigation of the morphological and fractal behavior at nanoscale of patterning lines by scratching in an atomic force microscope

In this work, the topographical effect of the scratching trajectory and the feed direction on the formation of lithographed lines on the (001) InP surface was investigated using an atomic force microscope (AFM) tip-based nanomachining approach. Nanoscratching tests were carried out using the sharp face of a diamond AFM tip in contact mode. From the topographic maps obtained by AFM, several morphological and fractal parameters were obtained and analyzed. Surface morphology presented a surface smoothing for surfaces with scratches produced in [011] and [001] directions. The height parameters confirmed this behavior because scratches in [001] direction exhibited lower roughness. Moreover, this scratch direction promoted the height distribution most symmetrical and platykurtic. The other morphological parameters revealed that this direction provided a more irregular surface (smaller S_mc and S_xp), peak distribution, denser and pointed, smaller portion of material in the core, less deep furrows, higher spatial frequency components, and high isotropy. Fractal parameters revealed that FRE90 has the highest spatial complexity, it is dominated by higher spatial frequencies, and has the lowest surface percolation. Furthermore, all samples exhibited high topographic uniformity.     

In-plane contributions to phase contrast in intermittent contact atomic force microscopy

Contrast in the phase response of intermittent-contact atomic force microscopy (IC-AFM) reveals in-plane structural and mechanical properties of polymer monolayers. This result is unexpected, as IC-AFM has previously only been considered as a probe of out-of-plane properties. Until now, AFM measurements of nanoscale in-plane properties have employed contact mode techniques. In-plane property measurements are possible with intermittent contact AFM because there is a small but significant component of tip motion parallel to the sample surface. This in-plane component of tip displacement is virtually universal in AFM, implying that oscillating-tip techniques generally are sensitive to in-plane material properties. We present a simple Hertzian model of intermittent-contact AFM that includes such an in-plane displacement.     

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Molecular dynamics simulation of the contact process in AFM surface observations

In the present work, several molecular dynamics simulations have been performed to clarify dynamically the contact mechanism between the specimen surface and probe tip in surface observations by an atomic force microscope (SFM) or friction force microscope (FFM). In the simulation, a three‐dimensional model is proposed where the specimen and the probe are assumed to consist of monocrystalline copper and rigid diamond or a carbon atom, respectively. The effect of the cantilever stiffness of the AFM/FFM is also taken into consideration. The surface observation process is simulated on a well‐defined Cu{100} surface. From the simulation results it has been verified that the surface images and the two‐dimensional atomic‐scale stick‐slip phenomenon, just as is the case for real AFM/FFM surface observations, can be detected from the spring force acting on the cantilever. From the evaluation of the behaviour of specimen surface atoms, the importance of the specimen stiffness in deciding the cantilever properties can also be understood. The influence of the probe tip shape on the force images is also evaluated. From the results it can be verified that the behaviour of the specimen surface atoms as well as the solid surface images in AFM/FFM surface observations can be understood using the molecular dynamics simulation of the model presented.     

Study on effects of tip geometry on AFM nanoscratching tests

To investigate effects of tip geometry on AFM nanoscratching process, an experimental calibration method measuring three-dimensional (3D) scratching forces based on the cantilever deflection is presented. On the surface of single crystal copper and silicon, nanoscratching tests are carried out using a pyramidal diamond tip. Effects of tip geometry (including the hemisphere of the tip and three sides of the pyramid) on scratching forces, friction coefficient and specific energy are studied. Results show that the scratching depth of about 10–15 nm is a transition point in scratching tests for the diamond tip used in this paper. Below this value, the hemisphere is dominant, whereas at the scratching depth of larger than this value, three sides of the tip play the key role in scratching tests. Friction coefficients are different at different tip orientations influenced by the contact area between the tip and the sample and attack angle at the scratching depth of greater than 10–15 nm. Specific energy is not sensitive to tip geometry because it reveals the energy required for removal of materials.     

An edge reversal method for precision measurement of cutting edge radius of single point diamond tools

A method, which is referred to as the edge reversal method, is proposed for precision measurement of the cutting edge radius of single point diamond tools. An indentation mark of the cutting edge which replicates the cutting edge geometry is firstly made on a soft metal substrate surface. The cutting edge of the diamond tool and its indentation mark, which is regarded as the reversal cutting edge, are then measured by utilizing an atomic force microscopy (AFM), respectively. The cutting edge radius can be accurately evaluated through removing the influence of the AFM probe tip radius, which is comparable to the cutting edge radius, based on the two measured data without characterization of the AFM probe tip radius. The results of measurement experiments and uncertainty analysis are presented to demonstrate the feasibility of the proposed method.     

AFM针尖对胶原样品表面一种损伤现象的研究

用AFM对吸附于云母表面的胶原蛋白的研究过程中，观察到一种AFM针尖对样品损伤现象。在小范围的扫描过程中．胶原蛋白在AFM针尖的作用下。产生了明显的移动。改变了其原来平整、均匀分布的表面特征。此现象文献中也曾有报道，在本实验中能重复出现。本文进一步分析讨论这种现象产生的原因，对比了不同成像模式下AFM针尖对样品表面的影响。结果表明，用Tapping Mode(TM)，扫描过程对样品表面几乎不产生影响，但是Non Contact Mode(NCM)在扫描过程中对样品表面产生了损伤作用。证明了TM模式更适合于对生物样品的研究。实验还发现这种损伤的程度和扫描范围的大小、针尖扫描的方向有着很大关系。     

An integrated method for measurement of diamond tools based on AFM

The measurement and evaluation technology of high precision diamond tools is critically important for supporting the ultra-precision machining. In practical cutting process, the edge profile quality of the diamond tool, including sharpness, micro defects, roughness and tip arc waviness, greatly affects the cutting quality. It is very difficult to measure and evaluate the diamond tool edge profile due to the high precision of tool edge profile and complexity of various measurement parameters. In this paper, an integrated method for measurement and characterization of diamond tools is proposed, which is based on an Atomic Force Microscope (AFM) module. Multiple technical indexes of diamond tools are obtained and validated based on the presented research and cutting experiments, and the evaluation model for each technical index is also proposed. The integrated measurement equipment, including an AFM, precision adjustment device and aerostatic bearings, has been established based on the accuracy requirement of measurement parameters. The edge sharpness, micro defects, surface roughness and tip arc waviness have been obtained based on the evaluation model and experimental data. The experimental results show that the measurement accuracy meets the requirements of the comprehensive evaluation of the diamond tool edge profile. The research work will also contribute to the development of ultra-precision machine.     

Rippling on Wear Scar Surfaces of Nanocrystalline Diamond Films After Reciprocating Sliding Against Ceramic Balls

The formation of nanoscopic ripple patterns on top of material surfaces has been reported for different materials and processes, such as sliding against polymers, high-force scanning in atomic force microscopy (AFM), and surface treatment by ion beam sputtering. In this work, we show that such periodic ripples can also be obtained in prolonged reciprocating sliding against nanocrystalline diamond (NCD) films. NCD films with a thickness of 0.8 µm were grown on top of silicon wafer substrates by hot-filament chemical vapor deposition using a mixture of methane and hydrogen. The chemical structure, surface morphology, and surface wear were characterized by Raman spectroscopy, scanning electron microscopy (SEM), and AFM. The tribological properties of the NCD films were evaluated by reciprocating sliding tests against Al₂O₃, Si₃N₄, and ZrO₂ counter balls. Independent of the counter body material, clear ripple patterns with typical heights of about 30 nm induced during the sliding test are observed by means of AFM and SEM on the NCD wear scar surfaces. Although the underlying mechanisms of ripple formation are not yet fully understood, these surface corrugations could be attributed to the different wear phenomena, including a stress-induced micro-fracture and plastic deformation, a surface smoothening, and a surface rehybridization from diamond bonding to an sp ² configuration. The similarity between ripples observed in the present study and ripples reported after repeated AFM tip scanning indicates that ripple formation is a rather universal phenomenon occurring in moving tribological contacts of different materials.