高速激光切割机床数控系统探究

随着经济的迅速发展,我国工业技术也有了较大的改善。现如今切割技术也有了很大的创新改进,新兴的激光切割,它目前已成为热切割技术发展的热点之一,激光切割技术相比较传统切割技术多了高精度、高效率、低污染等优点。为了满足激光切割装备的数字化、精密化等要求,实现此种技术的国产化。本文就高速激光切割机床数控系统各方面进行了研究分析,以此来满足我国对激光切割机床数控技术发展的要求。     

数控激光切割加工机床的型谱分析与系列化设计

分析研究了各类激光切割加工机床的规格尺寸、技术参数和结构特点以及激光切割加工的对像和用户要求；提供了用于新型激光切割机床设计的系列化型谱，为进一步开发研究提供了方便。     

中低功率双CO_2激光切割机的开发与应用

研究了大功率单CO2激光切割机和小功率双CO2激光切割机的切割原理,分析了在用这两种形式的激光切割机切割非金属材料木质模切板时,激光功率、切割速度与切割深度、切割的缝形缝宽之间的关系。试验结果表明,用中小功率双CO2激光切割机切割非金属木质板材,无论是设备的制造成本、运行成本,还是切割的精度和缝形缝宽,同用大功率单CO2激光头切割机相比有很多优势。     

激光切割厚板材

装有 1～ 2 k W激光器的机床是为切割薄板材料而设计的 ,正逐渐被用户所需的更大功率激光切割机床取代。这使得一些制造商重新考虑他们的机器和控制 /软件的设计 ,以满足不断提高的计算机数字控制处理参数、材料增重和操作灵活性的要求。虽然更高功率 (3～ 6 k W)的激光能够加工 0 .75～ 1.2 5英寸的厚板 ,但它们不可能取代等离子体的切割和含氧切割 ,然而它们确实以最小的热效应区制造出更加精密的零件。许多用户不断需要切割更厚的板 ,然而要求却无法满足。十年前 ,最大的切割能力为 0 .5英寸。本文针对大功率激光的使用给新老激光用户提…     

武汉新特光电新研制“高功率Nd∶YAG自浮激光切割头”

激光切割头是激光切割机最重要的配件之一。传统的切割头只有聚焦透镜和喷嘴,没有自动对焦功能。在大幅面激光切割机中,不同地方的加工高度略有不同,致使材料的表面偏离焦距,从而在不同的地方聚焦光斑大小不同,功率密度也不同．不同切割位置的激光切割质量很不一致,达不到激光切割的质量要求。     

光纤传输脉冲固体激光切割机系统

介绍了光纤传输脉冲固体激光切割机系统的设计原理及工作特点,主要是优化设计光纤传输系统,使光纤输出后的激光束聚焦光斑直径尽量小;满足激光切割所需功率密度要求。系统使用双灯单棒的聚光腔,光纤输出后的功率达到400W,最小光斑直径小于0.25mm,可满足1~4mm内的碳钢、不锈钢等金属材料的切割要求。该系统可配合数控工作台、...     

三维激光切割的发展现状

三维激光切割在汽车工业和航天航空工业等领域已得到广泛的应用。综述了国内外三维激光切割机的发展历史、三维激光切割的应用现状及存在的问题。     

长春光机所激光加工中心

中国科学院长春光学精密机械研究所是光、机、电综合技术研究所。1976年，光机所研制出第一台CO2激光数控切割机床。已在汽车工业中应用。最近又研制成功一台新型快速轴流CO2激光数控切割机床。现已有产品对外出售，并建立了激光加工中心，对外承揽加工。     

晶圆激光切割技术的研究进展

综述了半导体领域晶圆切割技术的发展进程,介绍了刀片切割技术、传统激光切割技术、新型激光切割技术及整形激光切割技术的特点、工作原理和优缺点以及国内外使用晶圆切割技术获得的研究成果及其应用前景.与刀片切割技术相比,激光切割技术具有切割质量好、切割速度快等优点.详细介绍了以进一步改善晶圆切割质量和提高切割速度为目的的几类整形激光切割技术,包括微水导激光切割技术、隐形切割技术、多焦点光束切割、“线聚焦”切割、平顶光束切割和多光束切割等.随着技术的不断完善、切割设备的不断成熟,整形激光切割技术在未来的晶圆切割领域将具有广阔的应用前景.     

四十五所:料摆动多线切割机对蓝宝石切割试验成功

正近日,中国电子科技集团公司第四十五研究所用改造的料摆动多线切割机对蓝宝石进行了切割试验获得成功。切割蓝宝石晶片TTV误差小于±10μm,切割速度、效率均满足工艺要求,设备运行稳定。此款蓝宝石切割设备是在原有DXQ-601B多线切割机的基础上改进而来,在继承四十五所多线切割机现有成熟技术的基础上,     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.