Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates

A maximum processing temperature of 250/spl deg/C is used to fabricate capacitive micromachined ultrasonic transducers (CMUTs) on silicon and quartz substrates for immersion applications. Fabrication on silicon provides a means for electronics integration via post-complementary metal oxide semiconductor (CMOS) processing without sacrificing device performance. Fabrication on quartz reduces parasitic capacitance and allows the use of optical displacement detection methods for CMUTs. The simple, low-temperature process uses metals both as the sacrificial layer for improved dimensional control, and as the bottom electrode for good electrical conductivity and optical reflectivity. This, combined with local sealing of the vacuum cavity by plasma-enhanced chemical-vapor deposition of silicon nitride, provides excellent control of lateral and vertical dimensions of the CMUTs for optimal device performance. In this paper, the fabrication process is described in detail, including process recipes and material characterization results. The CMUTs fabricated for intravascular ultrasound (IVUS) imaging in the 10-20 MHz range and interdigital CMUTs for microfluidic applications in the 5-20 MHz range are presented as device examples. Intra-array and wafer-to-wafer process uniformity is evaluated via electrical impedance measurements on 64-element ring annular IVUS imaging arrays fabricated on silicon and quartz wafers. The resonance frequency in air and collapse voltage variations are measured to be within 1% and 5%, respectively, for both cases. Acoustic pressure and pulse echo measurements also have been performed on 128 /spl mu/m/spl times/32 /spl mu/m IVUS array elements in water, which reveal a performance suitable for forward-looking IVUS imaging at about 16 MHz.     

Volumetric ultrasound imaging using 2-D CMUT arrays

Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a candidate to overcome the difficulties in the realization of 2-D arrays for real-time 3-D imaging. In this paper, we present the first volumetric images obtained using a 2-D CMUT array. We have fabricated a 128 x 128-element 2-D CMUT array with through-wafer via interconnects and a 420-microm element pitch. As an experimental prototype, a 32 x 64-element portion of the 128 x 128-element array was diced and flip-chip bonded onto a glass fanout chip. This chip provides individual leads from a central 16 x 16-element portion of the array to surrounding bondpads. An 8 x 16-element portion of the array was used in the experiments along with a 128-channel data acquisition system. For imaging phantoms, we used a 2.37-mm diameter steel sphere located 10 mm from the array center and two 12-mm-thick Plexiglas plates located 20 mm and 60 mm from the array. A 4 x 4 group of elements in the middle of the 8 x 16-element array was used in transmit, and the remaining elements were used to receive the echo signals. The echo signal obtained from the spherical target presented a frequency spectrum centered at 4.37 MHz with a 100% fractional bandwidth, whereas the frequency spectrum for the echo signal from the parallel plate phantom was centered at 3.44 MHz with a 91% fractional bandwidth. The images were reconstructed by using RF beamforming and synthetic phased array approaches and visualized by surface rendering and multiplanar slicing techniques. The image of the spherical target has been used to approximate the point spread function of the system and is compared with theoretical expectations. This study experimentally demonstrates that 2-D CMUT arrays can be fabricated with high yield using silicon IC-fabrication processes, individual electrical connections can be provided using through-wafer vias, and flip-chip bonding can be used to integrate these dense 2-D arrays with electronic circuits for practical 3-D imaging applications.     

Synthetic aperture-based beam compression for intravascular ultrasound imaging

In this paper, intravascular ultrasound (IVUS) images acquired with a 64-element array transducer using a multistatic acquisition scheme are presented. The images are reconstructed from a collection of pulse-echo measurements using a synthetic aperture array imaging technique. The main limitations of IVUS imaging are a poor lateral resolution and elevated grating lobes caused by the imaging geometry. We propose a Synthetic Aperture Focusing Technique (SAFT), which uses a limited number of A-scan signals. The focusing process, which is performed in the Fourier domain, requires far less computation time than conventional delay-and-sum methods. Two different reconstruction kernel functions have been derived and are compared for the processing of experimental data     

Multifunctional catheters combining intracardiac ultrasound imaging and electrophysiology sensing

A family of 3 multifunctional intracardiac imaging and electrophysiology (EP) mapping catheters has been in development to help guide diagnostic and therapeutic intracardiac EP procedures. The catheter tip on the first device includes a 7.5 MHz, 64-element, side-looking phased array for high resolution sector scanning. The second device is a forward-looking catheter with a 24-element 14 MHz phased array. Both of these catheters operate on a commercial imaging system with standard software. Multiple EP mapping sensors were mounted as ring electrodes near the arrays for electrocardiographic synchronization of ultrasound images and used for unique integration with EP mapping technologies. To help establish the catheters' ability for integration with EP interventional procedures, tests were performed in vivo in a porcine animal model to demonstrate both useful intracardiac echocardiographic (ICE) visualization and simultaneous 3-D positional information using integrated electroanatomical mapping techniques. The catheters also performed well in high frame rate imaging, color flow imaging, and strain rate imaging of atrial and ventricular structures. The companion paper of this work discusses the catheter design of the side-looking catheter with special attention to acoustic lens design. The third device in development is a 10 MHz forward-looking ring array that is to be mounted at the distal tip of a 9F catheter to permit use of the available catheter lumen for adjunctive therapy tools.     

Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

Piezoelectric materials have dominated the ultrasonic transducer technology. Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative technology offering advantages such as wide bandwidth, ease of fabricating large arrays, and potential for integration with electronics. The aim of this paper is to demonstrate the viability of CMUTs for ultrasound imaging. We present the first pulse-echo phased array B-scan sector images using a 128-element, one-dimensional (1-D) linear CMUT array. We fabricated 64- and 128-element 1-D CMUT arrays with 100% yield and uniform element response across the arrays. These arrays have been operated in immersion with no failure or degradation in performance over the time. For imaging experiments, we built a resolution test phantom roughly mimicking the attenuation properties of soft tissue. We used a PC-based experimental system, including custom-designed electronic circuits to acquire the complete set of 128 x 128 RF A-scans from all transmit-receive element combinations. We obtained the pulse-echo frequency response by analyzing the echo signals from wire targets. These echo signals presented an 80% fractional bandwidth around 3 MHz, including the effect of attenuation in the propagating medium. We reconstructed the B-scan images with a sector angle of 90 degrees and an image depth of 210 mm through offline processing by using RF beamforming and synthetic phased array approaches. The measured 6-dB lateral and axial resolutions at 135 mm depth were 0.0144 radians and 0.3 mm, respectively. The electronic noise floor of the image was more than 50 dB below the maximum mainlobe magnitude. We also performed preliminary investigations on the effects of crosstalk among array elements on the image quality. In the near field, some artifacts were observable extending out from the array to a depth of 2 cm. A tail also was observed in the point spread function (PSF) in the axial direction, indicating the existence of crosstalk. The relative amplitude of this tail with respect to the mainlobe was less than -20 dB.     

Volumetric real-time imaging using a CMUT ring array

A ring array provides a very suitable geometry for forward-looking volumetric intracardiac and intravascular ultrasound imaging. We fabricated an annular 64-element capacitive micromachined ultrasonic transducer (CMUT) array featuring a 10-MHz operating frequency and a 1.27-mm outer radius. A custom software suite was developed to run on a PC-based imaging system for real-time imaging using this device. This paper presents simulated and experimental imaging results for the described CMUT ring array. Three different imaging methods--flash, classic phased array (CPA), and synthetic phased array (SPA)--were used in the study. For SPA imaging, two techniques to improve the image quality--Hadamard coding and aperture weighting--were also applied. The results show that SPA with Hadamard coding and aperture weighting is a good option for ring-array imaging. Compared with CPA, it achieves better image resolution and comparable signal-to-noise ratio at a much faster image acquisition rate. Using this method, a fast frame rate of up to 463 volumes per second is achievable if limited only by the ultrasound time of flight; with the described system we reconstructed three cross-sectional images in real-time at 10 frames per second, which was limited by the computation time in synthetic beamforming.     

Trans-skull ultrasound therapy: the feasibility of using image-derived skull thickness information to correct the phase distortion

Recent papers have shown that focused ultrasound therapy may be feasible in the brain through an intact human skull by using phased arrays to correct the phase distortion induced by the skull bone. The hypothesis of this study is that the required phase shifts for the phased array can be calculated from the skull shape and thickness provided by modern imaging techniques. The shape and thickness of a piece of human skull was traced from the serial images and used in a theoretical model to calculate the phase distribution for a phased array. A 76-element phased array was manufactured and used in the tests. The piece of skull and the transducer array were positioned in a waterbath, and the ultrasound field distributions were mapped with and without the phase correction. The image-derived phase correction produced a sharp focus through the skull. These results showed that ultrasound brain therapy may be executed completely noninvasively through an intact skull by using a phased array and the skull thickness information derived from MRI scans.     

Imaging with concave large-aperture therapeutic ultrasound arrays using conventional synthetic-aperture beamforming

Several dual-mode ultrasound array (DMUA) systems are being investigated for potential use in image- guided surgery. In therapeutic mode, DMUAs generate pulsed or continuous-wave (CW) high-intensity focused ultrasound (HIFU) beams capable of generating localized therapeutic effects within the focal volume. In imaging mode, pulse-echo data can be collected from the DMUA elements to obtain B-mode images or other forms of feedback on the state of the target tissue before, during, and after the application of the therapeutic HIFU beam. Therapeutic and technological constraints give rise to special characteristics of therapeutic arrays. Specifically, DMUAs have concave apertures with low f-number values and are typically coarsely sampled using directive elements. These characteristics necessitate pre- and post-beamforming signal processing of echo data to improve the spatial and contrast resolution and maximize the image uniformity within the imaging field of view (IxFOV). We have recently developed and experimentally validated beamforming algorithms for concave large-aperture DMUAs with directive elements. Experimental validation was performed using a 1 MHz, 64-element, concave spherical aperture with 100 mm radius of curvature. The aperture was sampled in the lateral direction using elongated elements 1-lambda x 33.3-lambda with 1.333-lambda center-to-center spacing (lambda is the wavelength). This resulted in f-number values of 0.8 and 2 in the azimuth and elevation directions, respectively. In this paper, we present a new DMUA design approach based on different sampling of the shared concave aperture to improve image quality while maintaining therapeutic performance. A pulse-wave (PW) simulation model using a modified version of the Field II program is used in this study. The model is used in generating pulse-echo data for synthetic-aperture (SA) beamforming for forming images of a variety of targets, e.g., wire arrays and speckle-generating cyst phantoms. To provide validation for the simulation model and illustrate the improvements in image quality, we show SA images of similar targets using pulse-echo data acquired experimentally using our existing 64-element prototype. The PW simulation model is used to investigate the effect of transducer bandwidth as well as finer sampling of the concave DMUA aperture on the image quality. The results show that modest increases in the sampling density and transducer bandwidth result in significant improvement in spatial and contrast resolutions in addition to extending the DMUA IxFOV.     

An integrated semicompliant balloon ultrasound catheter for quantitative feedback and image guidance during stent deployment

An integrated balloon ultrasound catheter prototype was designed to image from inside the balloon for real-time guidance during stent deployment. It was fabricated using a semicompliant balloon material (polyethylene) and a 20 MHz, 64-element circumferential ultrasound array. A commercial stent, nominally 4.4 mm in diameter and 12 mm in length, was used for a phantom study and placed along the length of the integrated balloon ultrasound catheter. A rubber phantom was created with an elastic modulus of 175 kPa with a 4.36 mm diameter lumen. Real-time balloon pressure measurements were recorded using a digital pressure sensor, and real-time radio-frequency (RF) data were captured as the balloon was inflated. The slope of the area-pressure ratio (APR) was compared to a reference measure of the balloon and stent expanded in water to determine a measure for optimal stent deployment. The results clearly indicate stent deployment at 11.1 atm using this metric. The APR slope could serve as quantitative feedback parameter for guiding stent deployment to reduce arterial injury and subsequent restenosis. After the stent deployment experiment, RF data were captured as the balloon catheter was moved along the length of the stent in pullback mode to confirm successful stent deployment. Ultimately, an integrated balloon ultrasound catheter could serve as a single catheter intervention device by providing real-time intravascular ultrasound (IVUS) imaging and quantitative feedback during stent deployment.     

Optimizing the radiation pattern of sparse periodic linear arrays

We have developed a method for designing sparse periodic arrays. Grating lobes in the two-way radiation pattern are avoided by using different element spacings on transmission and reception. The transmit and receive aperture functions are selected such that the convolution of the aperture functions produces a desired effective aperture. A desired effective aperture is simply an aperture with an appropriate width, element spacing, and shape such that the Fourier transform of this function gives the desired two-way radiation pattern. If a synthetic aperture approach is used, an exact solution to the problem is possible. However, for conventional imaging, often only an approximation of the desired effective aperture can be found. Different strategies for obtaining these approximate solutions are described. The radiation pattern of a sparse array designed using the effective aperture concept is compared experimentally with the radiation patterns of a dense array, and sparse arrays with periodic and random element spacing. We show that the number of elements in a 128-element linear array can be reduced by at least four times with little degradation of the beam forming properties of the array     

Coherent array imaging using phased subarrays. Part II: simulations and experimental results

The basic principles and theory of phased subarray (PSA) imaging imaging provides the flexibility of reducing the number of front-end hardware channels between that of classical synthetic aperture (CSA) imaging--which uses only one element per firing event--and full-phased array (FPA) imaging-which uses all elements for each firing. The performance of PSA generally ranges between that obtained by CSA and FPA using the same array, and depends on the amount of hardware complexity reduction. For the work described in this paper, we performed FPA, CSA, and PSA imaging of a resolution phantom using both simulated and experimental data from a 3-MHz, 3.2-cm, 128-element capacitive micromachined ultrasound transducer (CMUT) array. The simulated system point responses in the spatial and frequency domains are presented as a means of studying the effects of signal bandwidth, reconstruction filter size, and subsampling rate on the PSA system performance. The PSA and FPA sector-scanned images were reconstructed using the wideband experimental data with 80% fractional bandwidth, with seven 32-element subarrays used for PSA imaging. The measurements on the experimental sector images indicate that, at the transmit focal zone, the PSA method provides a 10% improvement in the 6-dB lateral resolution, and the axial point resolution of PSA imaging is identical to that of FPA imaging. The signal-to-noise ratio (SNR) of PSA image was 58.3 dB, 4.9 dB below that of the FPA image, and the contrast-to-noise ratio (CNR) is reduced by 10%. The simulated and experimental test results presented in this paper validate theoretical expectations and illustrate the flexibility of PSA imaging as a way to exchange SNR and frame rate for simplified front-end hardware.     

Forward-viewing CMUT arrays for medical imaging

This paper reports the design and testing of forward-viewing annular arrays fabricated using capacitive micromachined ultrasonic transducer (CMUT) technology. Recent research studies have shown that CMUTs have broad frequency bandwidth and high-transduction efficiency. One- and two-dimensional CMUT arrays of various sizes already have been fabricated, and their viability for medical imaging applications has been demonstrated. We fabricated 64-element, forward-viewing annular arrays using the standard CMUT fabrication process and carried out experiments to measure the operating frequency, bandwidth, and transmit/receive efficiency of the array elements. The annular array elements, designed for imaging applications in the 20 MHz range, had a resonance frequency of 13.5 MHz in air. The immersion pulse-echo data collected from a plane reflector showed that the devices operate in the 5-26 MHz range with a fractional bandwidth of 135%. The output pressure at the surface of the transducer was measured to be 24 kPa/V. These values translate into a dynamic range of 131.5 dB for 1-V excitation in 1-Hz bandwidth with a commercial low noise receiving circuitry. The designed, forward-viewing annular CMUT array is suitable for mounting on the front surface of a cylindrical catheter probe and can provide Doppler information for measurement of blood flow and guiding information for navigation through blood vessels in intravascular ultrasound imaging.     

Optimizing the beam pattern of a forward-viewing ring-annular ultrasound array for intravascular imaging

Intravascular ultrasound (IVUS) imaging systems using circumferential arrays mounted on cardiac catheter tips fire beams orthogonal to the principal axis of the catheter. The system produces high resolution cross-sectional images but must be guided by conventional angioscopy. A real-time forward-viewing array, integrated into the same catheter, could greatly reduce radiation exposure by decreasing angiographic guidance. Unfortunately, the mounting requirement of a catheter guide wire prohibits a full-disk imaging aperture. Given only an annulus of array elements, prior theoretical investigations have only considered a circular ring of point transceivers and focusing strategies using all elements in the highly dense array, both impractical assumptions. In this paper, we consider a practical array geometry and signal processing architecture for a forward-viewing IVUS system. Our specific design uses a total of 210 transceiver firings with synthetic reconstruction for a given 3-D image frame. Simulation results demonstrate this design can achieve side-lobes under -40 dB for on-axis situations and under -30 dB for steering to the edge of a 60/spl deg/ cone.     

Development of Multi-chroic MKIDs for Next-Generation CMB Polarization Studies

We report on the status of an ongoing effort to develop arrays of horn-coupled, polarization-sensitive microwave kinetic inductance detectors (MKIDs) that are each sensitive to two spectral bands between 125 and 280 GHz. These multi-chroic MKID arrays are tailored for next-generation, large-detector-count experiments that are being designed to simultaneously characterize the polarization properties of both the cosmic microwave background and Galactic dust emission. We present our device design and describe laboratory-based measurement results from two 23-element prototype arrays. From dark measurements of our first engineering array, we demonstrated a multiplexing factor of 92, showed the resonators respond to bath temperature changes as expected, and found that the fabrication yield was 100%. From our first optically loaded array, we found the MKIDs respond to millimeter-wave pulses; additional optical characterization measurements are ongoing. We end by discussing our plans for scaling up this technology to kilo-pixel arrays over the next 2 years.     

Inverse wave field extrapolation: a different NDI approach to imaging defects

Nondestructive inspection (NDI) based on ultrasound is widely used. A relatively recent development for industrial applications is the use of ultrasonic array technology. Here, ultrasonic beams generated by array transducers are controlled by a computer. This makes the use of arrays more flexible than conventional single-element transducers. However, the inspection techniques have principally remained unchanged. As a consequence, the properties of these techniques, as far as characterization and sizing are concerned, have not improved. For further improvement, in this paper we apply imaging theory developed for seismic exploration of oil and gas fields on the NDI application. Synthetic data obtained from finite difference simulations is used to illustrate the principle of imaging. Measured data is obtained with a 64-element linear array (4 MHz) on a 20-mm thick steel block with a bore hole to illustrate the imaging approach. Furthermore, three examples of real data are presented, representing a lack of fusion defect, a surface breaking crack, and porosity.     

Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging

For three-dimensional (3D) ultrasound imaging, connecting elements of a two-dimensional (2D) transducer array to the imaging system's front-end electronics is a challenge because of the large number of array elements and the small element size. To compactly connect the transducer array with electronics, we flip-chip bond a 2D 16 x 16-element capacitive micromachined ultrasonic transducer (CMUT) array to a custom-designed integrated circuit (IC). Through-wafer interconnects are used to connect the CMUT elements on the top side of the array with flip-chip bond pads on the back side. The IC provides a 25-V pulser and a transimpedance preamplifier to each element of the array. For each of three characterized devices, the element yield is excellent (99 to 100% of the elements are functional). Center frequencies range from 2.6 MHz to 5.1 MHz. For pulse echo operation, the average - 6-dB fractional bandwidth is as high as 125%. Transmit pressures normalized to the face of the transducer are as high as 339 kPa and input-referred receiver noise is typically 1.2 to 2.1 mPa/pHz. The flip-chip bonded devices were used to acquire 3D synthetic aperture images of a wire-target phantom. Combining the transducer array and IC, as shown in this paper, allows for better utilization of large arrays, improves receive sensitivity, and may lead to new imaging techniques that depend on transducer arrays that are closely coupled to IC electronics.     

Decorrelation characteristics of transverse blood flow along an intravascular array catheter

In recent years, a new method to measure transverse blood flow based on the decorrelation of radio frequency (RF) signals has been introduced. In this paper, we investigated the decorrelation characteristics of transverse blood flow measurement using an intravascular ultrasound (IVUS) array catheter by means of computer modeling. Blood was simulated as a collection of randomly located point scatterers. Moving this scattering medium transversally across the acoustical beam represented flow. First-order statistics were evaluated, and the signal-to-noise ratio from the signals was measured. The correlation coefficient method was used to present the results. The decorrelation patterns for RF and for RF-envelope signals were studied. The decorrelation patterns from the RF signals were in good agreement with those obtained from theoretical beam profiles. This agreement suggests that the decorrelation properties of an IVUS array catheter for measuring quantitative transverse blood flow can be assessed by measuring the ultrasound beam. A line of point scatterers, moved transversally across the acoustical beam (line spread function), can determine this decorrelation behaviour.     

SPR imaging measurements of 1-D and 2-D DNA microarrays created from microfluidic channels on gold thin films

Microfluidic channels fabricated from poly(dimethylsiloxane) (PDMS) are employed in surface plasmon resonance imaging experiments for the detection of DNA and RNA adsorption onto chemically modified gold surfaces. The PDMS microchannels are used to (i) fabricate "1-D" single-stranded DNA (ssDNA) line arrays that are used in SPR imaging experiments of oligonucleotide hybridization adsorption and (ii) create "2-D" DNA hybridization arrays in which a second set of PDMS microchannels are placed perpendicular to a 1-D line array in order to deliver target oligonucleotide solutions. In the 1-D line array experiments, the total sample volume is 500 microL; in the 2-D DNA array experiments, this volume is reduced to 1 microL. As a demonstration of the utility of these microfluidic arrays, a 2-D DNA array is used to detect a 20-fmol sample of in vitro transcribed RNA from the uidA gene of a transgenic Arabidopsis thaliana plant. It is also shown that this array fabrication method can be used for fluorescence measurements on chemically modified gold surfaces.     

Quantitative blood speed imaging with intravascular ultrasound

Previously, we presented a method of real-time arterial color flow imaging using an intravascular ultrasound (IVUS) imaging system, where real-time RF A-scans were processed with an FIR (finite-impulse response) filter bank to estimate relative blood speed. Although qualitative flow measurements are clinically valuable, realizing the full potential of blood flow imaging requires quantitative flow speed and volume measurements in real time. Unfortunately, the rate of RF echo-to-echo decorrelation is not directly related to scatterer speed in a side-looking IVUS system because the elevational extent of the imaging slice varies with range. Consequently, flow imaging methods using any type of decorrelation processing to estimate blood speed without accounting for spatial variation of the radiation pattern will have estimation errors that prohibit accurate comparison of speed estimates from different depths. The FIR filter bank approach measures the rate of change of the ultrasound signal by estimating the slow-time spectrum of RF echoes. A filter bank of M bandpass filters is applied in parallel to estimate M components of the slow-time DFT (discrete Fourier transform). The relationship between the slow-time spectrum, aperture diffraction pattern, and scatterer speed is derived for a simplified target. Because the ultimate goal of this work is to make quantitative speed measurements, we present a method to map slow time spectral characteristics to a quantitative estimate. Results of the speed estimator are shown for a simulated circumferential catheter array insonifying blood moving uniformly past the array (i.e., plug flow) and blood moving with a parabolic profile (i.e., laminar flow)