Analysis of the energy distribution of interface traps related to tunnel oxide degradation using charge pumping techniques for 3D NAND flash applications

The energy distribution and density of interface traps (D_it) are directly investigated from bulk-type and thin-film transistor (TFT)-type charge trap flash memory cells with tunnel oxide degradation, under program/erase (P/E) cycling using a charge pumping (CP) technique, in view of application in a 3-demension stackable NAND flash memory cell. After P/E cycling in bulk-type devices, the interface trap density gradually increased from 1.55 × 10¹² cm⁻² eV⁻¹ to 3.66 × 10¹³ cm⁻² eV⁻¹ due to tunnel oxide damage, which was consistent with the subthreshold swing and transconductance degradation after P/E cycling. Its distribution moved toward shallow energy levels with increasing cycling numbers, which coincided with the decay rate degradation with short-term retention time. The tendency extracted with the CP technique for D_it of the TFT-type cells was similar to those of bulk-type cells.     

Deterioration and recovery in the resistivity of Al-doped ZnO films prepared by the plasma sputtering

A hot-cathode plasma sputtering technique was used for fabricating the highly transparent and conducting aluminum-doped zinc oxide (AZO) films on glass substrates from a disk-shaped AZO (Al₂O₃: 2 wt.%) target. Under particular conditions where the target voltage was V_T = −200 V and the plasma excitation pressure was P_S = 1.5 × 10⁻³ Torr, the lowest resistivity of 4.2 × 10⁻⁴ Ω cm was obtained at 400 nm, and this was associated with a carrier density of 8.7 × 10²⁰ cm⁻³ and a Hall mobility of 17 cm²/V s. From the annealing experiment of the AZO films in the oxygen and nitrogen gases of the atmospheric pressure it was revealed that both the oxygen vacancies and the grain boundaries in the polycrystalline AZO film played an important role in the electrical properties of the film.     

Structural and optical properties of γ-alumina thin films prepared by pulsed laser deposition

Preparation of γ-alumina thin films by pulsed laser deposition from a sintered α-alumina target is investigated. The films were deposited on (100) silicon substrates at 973 K with varying oxygen partial pressures in the range 2.0 × 10⁻⁵-3.5 × 10^− 1 mbar. X-ray diffraction results indicated that the films were polycrystalline γ-Al₂O₃ with cubic structure. The films prepared in the oxygen partial pressure range 2.0 × 10^− 5-3.5 × 10^− 2 mbar contained nanocrystals of sizes in the range 10-16 nm, and became amorphous at pressures > 3.5 × 10^− 1 mbar. Topography of the films was examined by atomic force microscopy using contact mode and it showed the formation of nanostructures. The root-mean square surface roughness of the film prepared at 2.0 × 10^− 5 mbar and 3.5 × 10^− 1 mbar were 1.4 nm and 3.5 nm, respectively. The thickness and optical properties were studied using ellipsometry in the energy range 1.5-5.5 eV for three different angles of incidence. The refractive index was found to decrease from 1.81 to 1.73 with the increase of oxygen partial pressures from 2.0 × 10^− 5 to 3.5 × 10^− 2 mbar. The variation in the refractive index has been found to be influenced by the microstructure of the films obtained as a function of oxygen partial pressure.     

The effect of deposition parameters on the properties of SrCu2O2 films fabricated by pulsed laser deposition

SrCu₂O₂ (SCO) thin films have been fabricated by pulsed laser deposition at oxygen partial pressures between 5 × 10^− 5-5 × 10^− 2 mbar and substrate temperatures from 300 °C to 500 °C. All films were single-phase SrCu₂O₂, p-type materials. Films deposited at a substrate temperature of 300 °C and oxygen pressure 5 × 10^− 4 mbar exhibited the highest transparency (∼ 80%), having conductivity 10^− 3 S/cm and carrier concentration around 10¹³ cm^− 3. Films deposited at oxygen partial pressure higher than 10^− 3 mbar exhibited higher conductivity and carrier concentration but lower transmittance. Depositions at substrate temperatures higher than 300 °C gave films of high crystallinity and transmittance even for films as thick as 800 nm. The energy gap of SrCu₂O₂ thin films was found to be around 3.3 eV.     

Realization of high mobility p-type co-doped ZnO: AlN film with a high density of nitrogen-radicals

High mobility p-type ZnO:AlN thin films have been efficiently realized by utilizing pre-activated nitrogen (N) plasma sources with an inductively coupled dual target co-sputtering system. High density of N-plasma-radicals was generated with an additional RF power applied through a ring-shaped quartz-tube located inside the chamber during co-sputtering process. The AlN codoped ZnO film shows excellent p-type behavior with a high mobility and a hole concentration of 154 cm^2°V^− 1s^− 1 and about 3 × 10^18°cm^− 3 at 600 °C, respectively. Electrical properties of p-n homo-junction devices based on p-type ZnO film are also discussed.     

Surface phonon polariton of wurtzite AlN thin film grown on sapphire

Polarized infrared attenuated total reflection (ATR) with Otto configuration was employed to access the surface phonon polariton (SPP) characteristics of wurtzite aluminium nitride (AlN) thin film grown on sapphire (Al₂O₃) substrate. The surface and guided wave polariton dispersion curves for the studied structure were derived by taking into account thin film and substrate anisotropy. From the p-polarized ATR spectrum, one prominent peak corresponds to the SPP mode of AlN thin film was clearly observed at 824 cm⁻¹. In addition, four guided wave modes were also detected at 467, 593.5, 633.5 and 668 cm⁻¹. For the s-polarized ATR spectrum, five pronounced dips associated to the guided wave modes were detected. The obtained results were in good agreement with the ATR spectra calculated based on the standard transfer matrix formulation. The origin of the observed ATR dips were verified from the dispersion curves simulated based on air/AlN epilayer/AlN buffer layer/Al₂O₃ model.     

Electrical characterization of high-k gate dielectrics on Ge with HfGeN and GeO2 interlayers

Two kinds of HfSiO_x/interlayers (ILs)/Ge gate stack structures with HfGeN- and GeO₂-ILs were fabricated using electron cyclotron resonance (ECR) plasma sputtering and the subsequent post deposition annealing (PDA). It was found that HfGe was formed by the deposition of Hf metal on Ge and changed to HfGeN by N₂ ECR-plasma irradiation, which was used as IL. Another IL was GeO₂, which was grown by thermal oxidation at 500 °C. For dielectrics with HfGeN-IL, PDA of 550 °C resulted in effective oxide thickness (EOT) of 2.2 nm, hysteresis of 0.1 V, and interface state density (D_it) = 7 × 10¹² cm^− 2 eV^− 1. For dielectrics with GeO₂-IL, PDA of 500 °C resulted in EOT of 2.8 nm, hysteresis of 0.1 V, and D_it = 1 × 10¹² cm^− 2 eV^− 1. The structural change of HfSiO_x/GeO₂/Ge during the PDA was clarified by using X-ray photoelectron spectroscopy, and the gate stack formation for obtaining the good IL was discussed.     

High frequency characteristics of tin oxide thin films on Si

High frequency characteristics of tin oxide (SnO₂) thin films were studied. SnO₂ thin films have been successfully grown on n-type Si (111) substrates by using a spray deposition technique. The capacitance-voltage (C-V) and conductance-voltage (G/ω-V) characteristics of the metal-oxide-semiconductor (Au/SnO₂/n-Si) Schottky diodes were investigated in the high frequency range from 300 kHz to 5 MHz. It has been shown that the interface state density, D_it, ranges from 2.44 × 10¹³ cm⁻² eV⁻¹ at 300 kHz to 0.57 × 10¹³ cm⁻² eV⁻¹ at 5 MHz and exponentially decreases with increasing frequency. The C-V and G/ω-V characteristics confirm that the interface state density and series resistance of the diode are important parameters that strongly influence the electrical parameters exhibited by the metal-oxide-semiconductor structure.     

Crystallinity and electrical conductivity of sulfur-containing microcrystalline diamond thin film

Hydrogen sulfide (H₂S) was introduced into a microwave plasma chemical vapor deposition of microcrystalline diamond thin film. Secondary-ion mass spectroscopy showed that sulfur concentration was controlled from 2 × 10¹⁵ to 9 × 10¹⁷ cm^− 3 by controlling the H₂S/CH₄ ratio, while that of hydrogen concentration was around 5 × 10²⁰ cm^− 3 and was independent of the H₂S/CH₄ ratio. Electrical conductance increased linearly as the S concentration increased from 2 × 10¹⁵ to 3 × 10¹⁶ cm^− 3 without significant deterioration of film crystallinity, i.e., the amount of sp² phase did not increase. Non-ohmic conduction was converted to ohmic conduction when the S concentration reached 9 × 10¹⁷ cm^− 3 by increasing the H₂S/CH₄ ratio to 30,000 ppm. This modification was consistent to the formation of a graphitic phase by heavy S-doping, which was identified by Raman spectra and surface morphology.     

The third-order optical nonlinearity of Bi3.25La0.75Ti3O12 ferroelectric thin film on quartz

Bi_3.25La_0.75Ti₃O₁₂ (BLT) thin film was prepared on quartz substrates using chemical solution deposition. The sign and magnitude of both real and imaginary parts of third-order nonlinear susceptibility χ⁽³⁾ of the BLT thin film have been determined by the Z-scan technique performed at 800 nm with a femtosecond laser. The nonlinear refractive index coefficient γ and the nonlinear absorption coefficient β of the BLT thin film are − 1.915 × 10^− 12 cm² / W and − 6.764 × 10^− 8 m/W, respectively, the real part and imaginary part of the third-order nonlinear susceptibility χ⁽³⁾ of the BLT thin film are − 5.81 × 10^− 18 m² / V² and − 1.31 × 10^− 18 m² / V², respectively. Both the real and the imaginary parts of the third-order nonlinear susceptibility χ⁽³⁾ contribute to the nonlinearity of the film. These experimental results show that BLT thin film is a promising material for applications in nonlinear optical devices.     

The impact of high-dose implantation into manganin on its thermo-resistance properties under high pressure

Using high-dose implantation into manganin of 253 MeV Kr ions (a surface dose of 2.5×10¹⁵ ion/cm²), as well as 250 keV Bi ions (a surface dose of 10¹⁷ ion/cm²) and 250 keV Kr ions (a surface dose of 10¹⁶ ion/cm²), the pressure and temperature sensitivities of manganin foil have been investigated. It was found that the pressure sensitivity of manganin increased (α=2.45×10⁻⁵ MPa⁻¹ before implantation and α_imp=4.60×10⁻⁵ MPa⁻¹ after complex implantation with 250 keV of Bi and Kr ions, the accuracy of estimation does not exceed 0.01×10⁻⁵ MPa⁻¹) and its temperature sensitivity remained appreciably reduced.     

Structural, optical and electrical properties of In doped CdO thin films for optoelectronic applications

Thin films of indium doped cadmium oxide were deposited on quartz substrate using pulsed laser deposition technique. The effect of growth temperature and partial oxygen pressure on structural, optical and electrical properties was studied. We find that the optical transparency of the films largely depends on the growth temperature, while partial oxygen pressure has virtually no effect on the transparency of the films. Electrical properties are found to be sensitive to both the growth temperature and oxygen pressure. It is observed that conductivity and carrier concentration decreases with temperature. The film grown at 200 °C under an oxygen pressure of 5.0 × 10^− 4 mbar shows high mobility (155 cm²/V s), high carrier concentration (1.41 × 10²¹ cm³), and low resistivity (2.86 × 10^− 5 Ω cm).     

Photovoltaic and interface state density properties of the Au/n-GaAs Schottky barrier solar cell

The electrical and photovoltaic properties of the Au/n-GaAs Schottky barrier diode have been investigated. From the current-voltage characteristics, the electrical parameters such as, ideality factor and barrier height of the Au/n-GaAs diode were obtained to be 1.95 and 0.86 eV, respectively. The interface state distribution profile of the diode as a function of the bias voltage was extracted from the capacitance-voltage measurements. The interface state density D_it of the diode was found to vary from 3.0 × 10¹¹ eV⁻¹ cm⁻² at 0 V to 4.26 × 10¹⁰ eV⁻¹cm⁻² at 0.5 V. The diode shows a non-ideal current-voltage behavior with the ideality factor higher than unity due to the interfacial insulator layer and interface states. The diode under light illumination exhibits a good photovoltaic behavior. This behavior was explained in terms of minority carrier injection phenomenon. The photovoltaic parameters, such as open circuit voltage and short circuit current density were obtained to be 362 mV and J_sc = 28.3 μA/cm² under AM1, respectively.     

Fabrication and dielectric property of ferroelectric PLZT films grown on metal foils

We have grown ferroelectric Pb_0.92La_0.08Zr_0.52Ti_0.48O₃ (PLZT) films on platinized silicon and LaNiO₃-buffered nickel substrates by chemical solution deposition using a sol-gel process based on acetic acid chemistry. The following measurements were obtained under zero-bias field: relative permittivity of ≈960 and dielectric loss of ≈0.04 on the PLZT film grown on Pt/Si substrates, and relative permittivity of ≈820 and dielectric loss of ≈0.06 on the PLZT film grown on LNO-buffered Ni substrates. In addition, a relative permittivity of 125 and dielectric loss of 0.02 were measured at room temperature under a high bias field of 1 × 10⁶ V/cm on PLZT deposited on LNO-buffered nickel substrate. Furthermore, a steady-state leakage current density of ≈8.1 × 10⁻⁹ A/cm² and mean breakdown field strength of 1.7 × 10⁶ V/cm were measured at room temperature. Finally, remanent polarization (P_r) of ≈2.0 × 10⁻⁵ C/cm², coercive electric field (E_c) of ≈3.4 × 10⁴ V/cm, and energy density of ≈45 J/cm³ were determined from room-temperature hysteresis loop measurements on PLZT/LNO/Ni film-on-foil capacitors with 250-μm-diameter platinum top electrodes.     

Structural evolution of PZTN thin films produced by pulsed laser ablation deposition

The study of highly oriented Nb-doped PZT thin films deposited by laser ablation on n-type (111) Si substrates is reported. Sintered ceramics based on the nominal composition Pb_0.995(Zr_0.65Ti_0.35)_0.99Nb_0.01O₃ (PZTN) with an excess of PbO were used as targets. The films were deposited using the 3rd harmonic (355 nm) of a pulsed Nd:YAG laser (7 ns pulse duration) with 7 J/cm² fluence, at different oxygen pressures (from 10⁻¹ to 10⁻⁴ mbar) and at a vacuum of 10⁻⁶ mbar. The substrate temperature was varied in the range of 500-600 °C. In optimized conditions, the as-deposited PZT-based films show perovskite structure oriented along the (110) direction with minor impurities (PbO), as revealed from X-ray diffraction spectra. Further, microstructural analysis of the as-grown including chemical composition is also presented. The relationship between composition of the target, deposition conditions and film properties are then discussed.     

Electrical and chemical analysis of zinc oxide interfaces with high dielectric constant barium tantalate and aluminum oxide in metal-insulator-semiconductor structures fabricated at Low temperatures

Zinc oxide (ZnO) was incorporated into metal-insulator-semiconductor (MIS) structures featuring high dielectric constant (high-κ) barium tantalate (BaTa₂O₆)or alumina (Al₂O₃)as the insulator, and the structures were electrically evaluated for potential applications in transparent thin film transistors. The ZnO films were deposited by radio-frequency magnetron sputtering at 100 °C whereas the dielectric films were deposited by the same method at room temperature. The leakage currents of both the BaTa₂O₆ and Al₂O₃ structures were on the order of 10⁻⁷A/cm². The trap density and trapped charge concentration at the BaTa₂O₆/ZnO interface were determined to be 6.18 × 10¹¹ eV⁻¹ cm⁻²and 5.82 × 10¹¹ cm⁻² from conductance-voltage and capacitance-voltage measurements. At the Al₂O₃/ZnO interface the trap density and trapped charge were more than an order of magnitude smaller at 1.09 × 10¹⁰ eV⁻¹ cm⁻²and 1.04 × 10¹⁰ cm⁻² respectively. The BaTa₂O₆ structures had significantly larger frequency dispersions due to the larger number of interface traps. Chemical analysis using X-ray photoelectron spectroscopy with depth profiling indicates that acceptor type defects associated with a deficiency of oxygen are related to the observed electron trapping in the BaTa₂O₆MIS structure. Overall, the results indicate that Al₂O₃ would be better suited for transparent thin film transistors deposited at low temperature or without substrate heating.     

Chemical diffusion coefficient of lithium ion in Li3V2(PO4)3 cathode material

The kinetic properties of monoclinic lithium vanadium phosphate were investigated by potential step chronoamperometry (PSCA) and electrochemical impedance spectroscopy (EIS) method. The PSCA results show that there exists a linear relationship between the current and the square root of the time. The D?_Li values of lithium ion in Li_3-xV₂(PO₄)₃ under various initial potentials of 3.41, 3.67, 3.91 and 4.07 V (vs Li/Li⁺) obtained from PSCA are 1.26 × 10^− 9, 2.38 × 10^− 9, 2.27 × 10^− 9 and 2.22 × 10^− 9 cm²·s^− 1, respectively. Over the measuring temperature range 15-65 °C, the diffusion coefficient increased from 2.67 × 10^− 8 cm²·s^− 1 (at 15 °C) to 1.80 × 10^− 7 cm²·s^− 1 (at 65 °C) as the measuring temperature increased.     

Optimized deposition and characterization of nanocrystalline magnesium indium oxide thin films for opto-electronic applications

Transparent conducting magnesium indium oxide films (MgIn₂O₄) were deposited on to quartz substrates without a buffer layer at an optimized deposition temperature of 450 °C to achieve high transmittance in the visible spectral range and electrical conductivity in the low temperature region. Magnesium ions are distributed over the tetrahedral and octahedral sites of the inverted spinel structure with preferential orientation along (3 1 1) Miller plane. The possible mechanism that promotes conductivity in this system is the charge transfer between the resident divalent (Mg²⁺) and trivalent (In³⁺) cations in addition to the available oxygen vacancies in the lattice. A room temperature electrical conductivity of 1.5 × 10⁻⁵ S cm⁻¹ and an average transmittance >75% have been achieved. Hall measurements showed n-type conductivity with electron mobility value 0.95 × 10⁻² cm² V⁻¹ s⁻¹ and carrier concentration 2.7 × 10¹⁹ cm⁻³. Smoothness of the film surface observed through atomic force microscope measurements favors this material for gas sensing and opto-electronic device development.     

Structural properties of low-temperature grown ZnO thin films determined by X-ray diffraction and X-ray absorption spectroscopy

The epitaxial growth of ZnO thin films on Al₂O₃ (0001) substrates have been achieved at a low-substrate temperature of 150 °C using a dc reactive sputtering technique. The structures and crystallographic orientations of ZnO films varying thicknesses on sapphire (0001) were investigated using X-ray diffraction (XRD). We used angle-dependent X-ray absorption near-edge structure (XANES) and extended X-ray absorption fine structure (EXAFS) spectroscopy to examine the variation of local structure. The XRD data showed that the crystallinity of the film is improved as the film thickness increases and the strain is fully released as the film thickness reached about 800 Å. The Zn K-edge XANES spectra of the ZnO films have a strong angle-dependent spectral feature resulting from the preferred c-axis orientation. The wurtzite structure of the ZnO films was explicitly shown by the XRD and EXAFS analysis. The carrier concentration, Hall mobility and resistivity of the 800 Å-thick ZnO film were 1.84 × 10¹⁹ cm^− 3, 24.62 cm²V^− 1s^− 1, and 1.38 × 10^− 2 Ω cm, respectively.     

Optimization of thermoelectric properties on Bi2Te3 thin films deposited by thermal co-evaporation

The optimization of the thermal co-evaporation deposition process for n-type bismuth telluride (Bi₂Te₃) thin films deposited onto polyimide substrates and intended for thermoelectric applications is reported. The influence of deposition parameters (evaporation rate and substrate temperature) on film composition and thermoelectric properties was studied for optimal thermoelectric performance. Energy-dispersive X-ray spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy and Raman spectroscopy confirmed the formation of Bi₂Te₃ thin films. Seebeck coefficient (up to 250 μV K^− 1), in-plane electrical resistivity (≈10 μΩ m), carrier concentration (3×10¹⁹-20×10¹⁹ cm^− 3) and Hall mobility (80-170 cm² V⁻¹ s^− 1) were measured at room temperature for selected Bi₂Te₃ samples.