多孔硅在传感器中的应用研究进展

多孔硅由于其制备方法简单、拥有极大的内表面积、广泛的孔径尺寸、可控的表面改性以及与传统硅集成技术兼容等特点,成为传感器件中理想的敏感材料。简述了多孔硅电化学传感器和光学传感器的研究进展,包括多孔硅湿度传感器、多孔硅气敏传感器、多孔硅有机蒸气传感器、多孔硅生物传感器。最后指出了阻碍多孔硅基传感器商业化的影响因素,并展望了多孔硅传感器的发展方向。     

电容式多孔硅湿敏元件初探

阐述了电容式多孔硅湿敏元件的制备方法,并且研究了它的湿敏特性.实验结果表明:电容式多孔硅湿敏元件的电容值随着湿度的增大而显著增大,在中湿区(43.16%RH～68.86%RH)容湿特性为线性,而且有较小的湿滞.     

ZnO多孔纳米固体厚膜气敏传感器的制备和性质表征

以ZnO纳米粉(平均粒径30nm)为原料,利用水热热压方法制备了多孔的ZnO体块纳米固体,测试了以多孔纳米固体为原料制成的厚膜气敏传感器对挥发性有机化合物(VOCs)乙醇、丙酮、苯、甲苯和二甲苯蒸气的气敏特性,并与用ZnO纳米粉制备的厚膜传感器进行了比较.结果发现,与ZnO纳米粉相比,用ZnO多孔纳米固体制备的厚膜传感器在空气中的电阻大大减小,最佳敏感温度降低、响应时间和恢复时间大大缩短.通过综合分析ZnO纳米粉和ZnO多孔纳米固体的XRD、TEM及厚膜传感器的SEM测试结果研究了厚膜传感器气敏特性的差异.     

用于MEMS热敏传感器中绝热层的多孔硅性能研究

利用电化学方法制备了多孔硅,利用显微拉曼光谱法测量多孔硅样品的热导率和多孔硅中的残余应力,利用纳米压入测量仪测量多孔硅显微硬度与弹性模量.研究了多孔硅绝热性能和力学性能与微观结构的关系,认为通过控制制备条件可以得到绝热性能和力学性能满足MEMS热敏传感器结构性能要求的多孔硅.     

掺杂Fe2 O3对ZnO多孔纳米固体厚膜气敏传感器性能的影响

以ZnO纳米粉(平均粒径30 nm)和Fe2O3,纳米粉(平均粒径90 nm)为原料,利用传统的厚膜气敏传感器制备工艺,制备了纯ZnO多孔纳米固体厚膜气敏传感器和掺杂Fe2O3(掺杂量为1wt%,2wt%和5wt%)的ZnO厚膜气敏传感器.分别测试了这四种厚膜气敏传感器的本征电阻(传感器在空气中的电阻值)及其对乙醇,汽油,丙酮,对二甲苯,氢气,甲烷和CO敏感特性.结果表明:当工作温度在较低时,Fe2O13,的掺杂可明显降低ZnO多孔纳米固体厚膜气敏传感器的本征电阻,并提高其工作稳定性,而适量Fe2O3的掺杂可以提高ZnO多孔纳米固体厚膜气敏传感器对乙醇蒸气和汽油的灵敏度.结合对传感器厚膜的显微结构分析结果,我们对出现上述差异的原因进行了初步讨论.     

多孔硅气体传感器的制备及其气敏性能的研究

以P+型硅片为基底,利用双槽电化学腐蚀方法制备不同孔隙率的多孔硅(Porous Silicon),介绍多孔硅气体传感器的原理和优点,通过SEM和AFM对PS薄膜的表面形貌进行分析,研究不同孔隙率条件下PS薄膜的气敏灵敏特性.结果表明:随着孔隙率的增加,PS薄膜的响应/恢复时间不断减小,薄膜对空气中较低浓度的NO2(体积分数为0.1×10-6～6×10-6)具有优异的敏感特性和响应特性.     

纳米多孔硅膜在医学上的应用

采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜,可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。纳米多孔硅膜具有优异的耐热性和化学稳定性,且可回收利用。在医学上的纳米多孔硅膜可作为药物载体、免疫隔离生物胶囊、纳米硅微镜和纳米多孔硅生物传感器。     

利用纳米ZnO粉制备厚膜气敏传感器的研究

以ZnO纳米粉(平均粒径30nm)为原料,利用水热热压方法制备了ZnO多孔纳米固体,同时用通常的水热法对ZnO纳米粉进行了预处理(预处理ZnO纳米粉)。然后,分别以ZnO多孔纳米固体和预处理ZnO纳米粉为原料,制备了厚膜气敏传感器。本征电阻的测试结果表明,这两种厚膜气敏传感器的本征电阻比用未经处理的ZnO纳米粉(以下简称“原料ZnO纳米粉”)制备的厚膜气敏传感器大大降低并很快达到稳定状态。有效地改善了器件工作的稳定性。结合对三种传感器的显微结构分析,对出现上述差异的原因进行了讨论。     

基于热绝缘的多孔硅技术及其在微传感器中的应用

介绍了多孔硅的热导率特性以及孔径、孔隙率、热处理等因素对其影响.分析了目前基于热绝缘的多孔硅制备技术发展现状,着重对阶梯电流法和脉冲电流法进行了介绍和比较, 认为脉冲电流法因为其特殊的优势,将在以后的发展中得到更广泛的应用.多孔硅由于其热绝缘特性以及技术优势,已经在微传感器领域得到广泛的应用.     

多孔硅的制备方法和成核机制

目前多孔硅研究已经成为众多研究者关注的热点之一，它在微电子机械、激光器、探测器、传感器、燃料电池，太阳能电池等许多领域具有巨大的应用替力。首先陈述了常见的多孔硅制备方法，其中超声声空化物理化学综合法将光致发光峰半峰宽压缩至3．8mm的报告振奋人心。随后引出比较流行的3种多孔硅成核机制模型，量子限制模型得到大多数的认可。最后，分析了最近国内外多孔硅的研究和应用情况，并指出尺寸厚度精确可控、机械硬度高、孔隙分布均匀、发光稳定性高的多孔硅依然是制备工艺追求的目标。     

Overview of automotive sensors

An up-to-date review paper on automotive sensors is presented. Attention is focused on sensors used in production automotive systems. The primary sensor technologies in use today are reviewed and are classified according to their three major areas of automotive systems application-powertrain, chassis, and body. This subject is extensive. As described in this paper, for use in automotive systems, there are six types of rotational motion sensors, four types of pressure sensors, five types of position sensors, and three types of temperature sensors. Additionally, two types of mass air flow sensors, five types of exhaust gas oxygen sensors, one type of engine knock sensor, four types of linear acceleration sensors, four types of angular-rate sensors, four types of occupant comfort/convenience sensors, two types of near-distance obstacle detection sensors, four types of far-distance obstacle detection sensors, and and ten types of emerging, state-of the-art, sensor technologies are identified     

碳纳米管及其掺杂氧化物半导体气敏传感器

碳纳米管气敏传感器以其工作温度低和最低检出限较低等优点而备受关注,而碳纳米管掺杂氧化物半导体气敏传感器兼备了氧化物半导体气敏传感器和碳纳米管气敏传感器二者的优点,具有灵敏度较高、最低检出限低和工作温度低等特性。综述了这两类传感器的研究进展,介绍了其气敏机理,并对相应存在的问题及今后的发展趋势进行了概述。     

Development of Low-cost Chemical and Micromechanical Sensors Based on Thick-film,Thin-film and Electroplated Films

Various films could be used as sensing materials or as constructional materials for the fabrication of chemical and micromechanical sensors. To illustrate this potential, three sensors fabricated by very different film deposition technologies are given as examples. The sensors are a humidity sensor in thickfilm technology, a multi-functional gas sensor in thin-film technology and a three-dimensional acceleration sensor chip manufactured by electroplating techniques. Design, fabrication and characterisation of these sensors are described in this paper.     

The potential of microacoustic SAW- and BAW-based sensors for automotive applications - a review

In recent years, sensors and sensor systems have gained increasing importance for automotive electronics. In this paper, the suitability and the perspectives in the application of microacoustic surface- and bulk-acoustic-wave sensors in the fields of angular rate sensors, pressure sensors, wireless sensor readout, and liquid sensors are discussed.     

钽酸锂薄膜材料及其热释电红外传感器应用研究进展

介绍了钽酸锂薄膜材料及其热释电红外传感器应用研究概况;简要阐述了热释电红外传感器的工作原理;着重分析了钽酸锂薄膜材料的新制备技术,以及在热释电红外传感器应用方面的研究现状;指出了钽酸锂薄膜材料及其热释电红外传感器应用研究发展前景.     

光纤化学传感器的研究及其在环境分析中的应用

本文综述了光纤化学传感器的特点、工作原理、类型及各类光纤化学传感器(气敏、pH、金属离子和有机化合物等)的研究进展及其在环境分析中的应用,分析了近年来光纤化学传感器的技术发展和应用趋势。     

Emerging MXene-Based Flexible Tactile Sensors for Health Monitoring and Haptic Perception

Due to their potential applications in physiological monitoring, diagnosis, human prosthetics, haptic perception, and human–machine interaction, flexible tactile sensors have attracted wide research interest in recent years. Thanks to the advances in material engineering, high performance flexible tactile sensors have been obtained. Among the representative pressure sensing materials, 2D layered nanomaterials have many properties that are superior to those of bulk nanomaterials and are more suitable for high performance flexible sensors. As a class of 2D inorganic compounds in materials science, MXene has excellent electrical, mechanical, and biological compatibility. MXene-based composites have proven to be promising candidates for flexible tactile sensors due to their excellent stretchability and metallic conductivity. Therefore, great efforts have been devoted to the development of MXene-based composites for flexible sensor applications. In this paper, the controllable preparation and characterization of MXene are introduced. Then, the recent progresses on fabrication strategies, operating mechanisms, and device performance of MXene composite-based flexible tactile sensors, including flexible piezoresistive sensors, capacitive sensors, piezoelectric sensors, triboelectric sensors are reviewed. After that, the applications of MXene material-based flexible electronics in human motion monitoring, healthcare, prosthetics, and artificial intelligence are discussed. Finally, the challenges and perspectives for MXene-based tactile sensors are summarized.     

Embedded Sensors in Rubber and Other Polymer Components

Abstract: Many polymer components are susceptible to catastrophic failure or are critical to the performance of the products they comprise. Because of this, the capability to monitor structural failures or performance reduction in these components is beneficial. It is difficult to fabricate sensors for polymer components because they often have complex shapes or are assembled in isolated locations. To solve this problem, micro‐scale electronic sensors, embedded within polymer components, were developed at Purdue University. Conductive polymer materials were used as the primary sensing element in the sensors. Testing results reveal that embedded sensors in polymer components can successfully indicate significant signal changes more than 100 loading cycles prior to catastrophic failure. Multiple sensing methods and applications have been tested and more are being researched. These findings may open doors for future polymer sensors that can improve safety and provide useful measurements for polymer components.     

Estimating Displacement of Periodic Motion With Inertial Sensors

Inertial sensors, like accelerometers and gyroscopes, are rarely used by themselves to measure displacement. Accuracy of inertial sensors is greatly handicapped by the notorious integration drift, which arises due to numerical integration of the sensors zero bias error. A solution is proposed in this paper to provide drift free estimation of displacement from inertial sensors.     

A novel method for reducing the dimensionality in a sensor array

Specific types of gas sensors are normally produced by adding different dopants to a common substrate. The advancement of technology has made the fabrication of many dopants and consequently various sensors possible. As a result, in each family of gas sensors, one can find tens of different sensors which are only slightly different in the spectrum of response to various volatile compounds. The wide variety of available gas sensors creates a selection problem for any specific application. Sensor selection/reduction becomes even more important when cost and technology limitations are issues of concern. Accordingly, a methodology by which one can tailor a sensor array to a specific need is highly desirable. In this paper, a novel method is introduced to address this task using data from an electronic nose that uses polymer gas sensors. This method has been delineated based on the geometry of eigenvectors in Karhunen-Loeve expansion. The methodology is general and therefore suitable for many other feature selection problems