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1.
We present the formation of MgB2 coatings by simple and novel aerosol deposition technique which has a potential to escalate towards the fabrication of long superconducting tapes. The thin MgB2 coatings were produced by using pre-synthesized MgB2 powder. The ability of this technique to form a precursor powder in a thin film form has greatly reduced the intricacies involved in the synthesis of MgB2 by other techniques like hybrid physical chemical vapor deposition etc. The as-synthesized thin films were characterized by the x-ray diffraction technique to study the structural properties. The thin films were found to be x-ray amorphous in nature depicting the formation of frustrated structure which showed a superconducting transition onset at around 36 K.  相似文献   

2.
We hereby report on the role of the surface morphology of various substrates in the enhancement of the superconducting critical temperature of MgB2. MgB2 thin layers were grown by hybrid physical–chemical vapour deposition on silicon carbide SiC substrates/fibers and several other substrates, characterized by diverse surface morphologies. By investigating the structural, morphological and transport properties of MgB2 thin layers, the presented data show that the superconducting critical temperature T c exceeds the bulk value only when the MgB2 films are grown on atomically flat (0001) SiC single crystals and on MgB2 bottom layers. These results further confirm the interpretation of the coalescence-driven tensile strain mechanism behind the enhancement of superconducting properties in MgB2 thin films.  相似文献   

3.
The structure and spectroscopic properties of nano-structured silicon carbide (SiC) thin films were studied for films obtained through deposition of decomposed ethylene (C2H4) on silicon wafers via hot filament chemical vapor deposition method at low temperature followed by annealing at various temperatures in the range 300-700 °C. The prepared films were analyzed with focus on the early deposition stage and the initial growth layers. The analysis of the film's physics and structural characteristics was performed with Fourier transform infrared spectroscopy and Raman spectroscopy, scanning electron microscopy with energy dispersive X-ray spectroscopy, and X-ray diffraction. The conditions for forming thin layer of cubic SiC phase (3C-SiC) are found. X-ray diffraction and Raman spectroscopy confirmed the presence of 3C-SiC phase in the sample. The formation conditions and structure of intermediate SiC layer, which reduces the crystal lattice mismatch between Si and diamond, are essential for the alignment of diamond growth. This finding provides an easy way of forming SiC intermediate layer using the Si from the substrate.  相似文献   

4.
Magnesium diboride is a promising material for superconducting RF (SRF) cavity applications. Compared to the currently used superconductor for SRF cavities Nb, MgB2 has the potential to achieve lower RF loss and higher acceleration field due to its higher critical temperature and thermodynamic critical magnetic field. Since the RF field only penetrates a few penetration depths into a superconductor, a superconducting coating of several hundred nanometers on a metal cavity is sufficient for superb SRF cavity performances. In this work, we report the properties of MgB2 thin films deposited by the hybrid physical–chemical vapor deposition (HPCVD) technique on different metal substrates including Nb, Mo, Ta, and stainless steel. All the films were polycrystalline, as indicated by X-ray diffractometry and scanning electron microscopy, and showed T c ~39 K, determined by resistance versus temperature, magnetic susceptibility, and dielectric resonator measurements. MgB2 films deposited on Nb substrates polished to various degrees of smoothness exhibit similar T c . The result is a promising step in the investigation of using MgB2 as an alternative to Nb for SRF cavities.  相似文献   

5.
In this paper we study the changes in the microstructural and optical properties of silicon thin films produced by the variation of the parameters (temperature and pressure) of the low-pressure chemical vapour deposition (LPCVD) process. Silicon thin films prepared by LPCVD on oxidized silicon substrates over a large range of process parameters (Tdep=500-615°C, pdep=20-100 Pa) have been characterized by Raman spectroscopy, spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. The phase transition of as-deposited silicon from an amorphous to a crystalline phase via an intermediate mixed phase (few grains in amorphous silicon matrix) can be monitored by the changes in the optical properties and in the Raman spectra. LPCVD parameters, which control the deposition kinetics, are able to influence the optical properties, the structure and/or morphology of the as-deposited LPCVD silicon films. The SE and Raman results prove that it is possible to grow by LPCVD (from pure silane), a silicon film in a (poly)crystalline state at a temperature as low as 500°C.  相似文献   

6.
The recently discovered superconductor MgB2 with T c at 39 K has great potential in superconducting electronics. In this paper, we review the deposition techniques used for MgB2 thin films in the light of a thermodynamic study of the Mg-B system with the calculation of phase diagrams (CALPHAD) modeling technique. This thermodynamic study identifies a growth window in the pressure–temperature phase diagram, in which the magnesium pressure is very high for likely in situ growth temperatures. A Hybrid Physical–Chemical Vapor Deposition (HPCVD) technique that successfully achieves such a high Mg pressure is shown to produce in situ epitaxial MgB2 thin films with bulk superconducting properties.  相似文献   

7.
The recently discovered superconductor MgB2 with T c at 39 K has great potential in superconducting electronics. In this paper, we review the deposition techniques used for MgB2 thin films in the light of a thermodynamic study of the Mg-B system with the calculation of phase diagrams (CALPHAD) modeling technique. This thermodynamic study identifies a growth window in the pressure–temperature phase diagram, in which the magnesium pressure is very high for likely in situ growth temperatures. A Hybrid Physical–Chemical Vapor Deposition (HPCVD) technique that successfully achieves such a high Mg pressure is shown to produce in situ epitaxial MgB2 thin films with bulk superconducting properties.  相似文献   

8.
The experimental thermodynamic of MgB2 synthesis process and phase compositions have been investigated by diffraction thermal analysis (DTA) technology and X-ray diffraction. The fabrication of MgB2 bulks and superconducting properties at the temperatures range from 600 to 800°C were reported. And microstructure of MgB2 bulks were observed by scanning electron microscope (SEM). A method was developed to determine the porosity of MgB2 and the highest density can be obtained in MgB2 prepared at 650°C at ambient pressure. It is found that the vapor pressure of Mg increases remarkably at high temperature, leading to the high porosity in MgB2 samples. MgB2 bulk with good superconducting property and fine microstructure was synthesized at 750°C.  相似文献   

9.
Raman spectroscopy and X-ray diffraction (XRD) methods were applied to characterize ZrO2 and HfO2 films grown by atomic layer deposition (ALD) on silicon substrates in chloride- based processes. A dramatic enhancement in spectral quality of Raman data resulted from the use of the film’s freestanding edges for experimental runs between 80 and 800 cm−1. Both techniques detected a preferential formation of a metastable phase in ZrO2 and HfO2 films at 500 and 600C, respectively, during the initial stages of ALD. In the case of ZrO2 films this phase was identified as the tetragonal polymorph of ZrO2 (t-ZrO2). XRD and Raman spectroscopy data showed that, in contrast to the monoclinic phase (m-ZrO2), the absolute amount of t-ZrO2 remained approximately constant while its relative amount decreased with the increase of the film thickness from 56 to 660 nm. Neither XRD nor Raman spectroscopy allowed unambiguous identification of the metastable phase formed in otherwise monoclinic HfO2 films.  相似文献   

10.
Surface morphology and superconducting properties of MgB2 superconducting thin films prepared by ex-situ annealing of multilayer Mg/B precursors in Mg vapor are studied.Depending on the precursor structure different physical and microstructural properties of the superconductor evolve. Structure and composition of the films are analyzed by scanning electron microscopy and wavelength dispersive x-ray spectroscopy. It is found that certain precursor structures can lead to high quality superconducting films, however, in specific precursor structures mechanical stress leads to the formation of wrinkles strongly affecting the superconducting homogeneity of the films. A correlation between microstructure and superconducting properties, such as pinning or critical current density, can be provided via magneto-optical Faraday microscopy.  相似文献   

11.
The iron (Fe) diffusion in superconducting MgB2 bulk samples has been studied for sintering time durations of 15 min, 30 min, 1 h, 2 h, and 4 h at 900°C. Fe coating bulk polycrstalline superconducting MgB2 samples for Fe coating were prepared by pelletizing and used in the diffusion experiments with initial sintering at 800°C for 1 h. A thin layer of Fe was coated on MgB2 pellets by evaporation in vacuum. Effects of Fe diffusion on the structural, electrical, and superconducting properties of MgB2 have been investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), infrared spectroscopy (IR), energy-dispersive X-ray spectroscopy (EDS), and resistivity measurements. Fe diffused samples have slightly increased critical transition temperatures and have larger lattice parameter c values, in comparison with bare samples. Fe diffusion coefficients were calculated from depth profiles of c parameter and room temperature resistivity values. Depth profiles were obtained by successive removal of thin layers from Fe diffused surfaces of the samples. Our results have shown that the Fe diffusion coefficient decreases with increasing sintering time and resistivity measurements can be utilized for determination of diffusion coefficient.  相似文献   

12.
Electrochemical deposition of Prussian blue (PB) was performed by cyclic voltammetry on hydrogen terminated n-type Si(111) surface. The characterization of the samples based on atomic force microscopy and X-ray diffraction spectroscopy showed a nanocrystal form of the PB films on the silicon surface. The thickness of PB films as a function of the potential cycling number was monitored simultaneously by Raman spectroscopy, proving that the growth of the films is in a good controllable manner.  相似文献   

13.
We have grown magnesium oxide (MgO) films by the simple evaporation of MgB2 powders. The subsequent deposition of ZnO by using an atomic layer deposition (ALD) technique generated the ZnO rods on MgO films, realizing the first production of rod-like structures using ALD. We have employed X-ray diffraction, scanning electron microscopy, transmission electron microscopy and photoluminescence (PL) spectroscopy to characterize the samples. PL of MgO films exhibited two emission bands peaked in the blue and blue-green region, respectively. The deposition of ZnO rods changed the shape of the PL spectrum.  相似文献   

14.
Z.Q. Ma  Q. Zhang 《Vacuum》2004,77(1):5-9
The physical characteristics of device-grade thin silicon film at (1 0 0) grown on α-Al2O3 substrate using the chemical vapour deposition (CVD) technique has been studied in this paper. Its thickness, crystalline structure, elemental inter-diffusion in the interface region and the quality were characterized by X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS), core level X-ray photoelectron spectroscopy (XPS) and nuclear resonance reaction 27Al(p,γ)28Si, respectively. The results of stoichiometric defect profile and individual silicon suboxide (such as SiO, and Si2O3 components with respect to the metallic Si element) formation in the intermediate region were observed. The deep traps located around Ec=0.26eV, in ∼500 nm thick n-type Si films, were attributed to the defects caused by the strain of the silicon lattice. Raman spectroscopy was used to evaluate the compressive stress in the Si film.  相似文献   

15.
《Materials Letters》2003,57(24-25):3820-3825
V2O5 films were deposited on silicon (111) substrates by vacuum evaporation technique at various deposition temperatures of 300, 473, 573, 623 and 673 K. X-ray characterization revealed that the films deposited at Ts≤473 K are amorphous and the film deposited at Ts≥573 K is polycrystalline. It is interesting to note that the film deposited at Ts=573 K is strongly oriented with (001) planes parallel to the substrate and the degree of preferred orientation towards (001) planes found to decrease with further increase in the deposition temperature. The influence of deposition temperature on the growth of the V2O5 films has been studied by Raman scattering spectroscopy. The films deposited on the silicon substrates maintained at 573 K are found to have better structural quality.  相似文献   

16.
Vanadium pentoxide thin films have been prepared by the pulsed laser deposition technique. The influence of substrate temperature on the growth of V2O5 films was studied. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM) measurements have been carried out in order to understand the growth mechanism. The crystallization in V2O5 thin films starts at deposition temperatures as low as 473 K and the grain size increased with deposition temperature. The films exhibited predominantly (0 0 1) orientation, representing the orthorhombic layered structure. The infrared (IR) and Raman measurements supported the above data.  相似文献   

17.
Amorphous silicon thin films were formed by chemical vapor deposition of reactive particle beam assisted inductively coupled plasma type with various reflector bias voltages. During the deposition, the substrate was heated at 150 °C. The effects of reflector bias voltage on the physical and chemical properties of the films were systematically studied. X-ray diffraction and Raman spectroscopy results showed that the deposited films were amorphous and the films under higher reflector voltage had higher internal energy to be easily crystallized. The chemical state of amorphous silicon films was revealed as metallic bonding of Si atoms by using X-ray photoelectron spectroscopy. An increase in reflector voltage induced an increase of surface morphology of films and optical bandgap and a decrease of photoconductivity.  相似文献   

18.
Niobium-aluminate (NbAlO) thin films have been prepared on silicon (100) with different Nb2O5:Al2O3 growth cycle ratio by atomic layer deposition (ALD) technology. The structural, chemical and optical properties of NbAlO thin films are investigated using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and spectroscopic ellipsometry (SE). The results show that all the obtained NbAlO films are amorphous and fully oxidized. It is also found that the proportion of components in the NbAlO film can be well-controlled by varying the ALD growth cycles of the independent oxides. Furthermore, the refraction index of the prepared films is observed to increase with an increase of the concentration of Nb in the mixtures.  相似文献   

19.
The GaN film was grown on the (111) silicon-on-insulator (SOI) substrate by metal-organic chemical vapor deposition and then annealed in the deposition chamber. A multiple beam optical stress sensor was used for the in-situ stress measurement, and X-ray diffraction (XRD) and Raman spectroscopy were used for the characterization of GaN film. Comparing the characterization results of the GaN films on the bulk silicon and SOI substrates, we can see that the Raman spectra show the 3.0 cm− 1 frequency shift of E2(TO), and the full width at half maximum of XRD rocking curves for GaN (0002) decrease from 954 arc sec to 472 arc sec. The results show that the SOI substrates can reduce the tensile stress in the GaN film and improve the crystalline quality. The annealing process is helpful for the stress reduction of the GaN film. The SOI substrate with the thin top silicon film is more effective than the thick top silicon film SOI substrate for the stress reduction.  相似文献   

20.
Single-crystal films of TiC (111) have been synthesized at room temperature on Al2O3 (0001) substrates by radio frequency magnetron sputtering using a compound Ti-C target. The substrate temperature and bias were varied to explore the influence of deposition parameters on the crystal structure. Both Al2O3 (0001) and Si (100) substrates were used for epitaxial growth of TiC films. A series of characterizations of TiC films were carried out, including Rutherford backscattering spectroscopy, X-ray diffraction, Raman and X-ray photoelectron spectroscopy. Single-crystal films of TiC (111) on the Al2O3 (0001) were demonstrated.  相似文献   

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