Radio frequency source power effect on silicon nitride films deposited by a room-temperature pulsed-PECVD

Silicon nitride (SiN) films deposited by using a pulsed-plasma enhanced chemical vapor deposition system at room temperature were investigated as a function of radio frequency source power and duty ratio in the experimental ranges of 200-800 W and 40-90%, respectively. Diagnostic parameters, measured using a non-invasive ion energy analyzer, were related to SiN deposition rate. Decreasing the source power increased high ion energy, but decreased low ion energy. A high similarity between ion energy flux and ion energy was observed. Decreasing the source power increased the deposition rate for all duty ratios. For all the variations in the power and duty ratio, the deposition rate varied in the range of 290-640 Å/min. Decreasing the duty ratio was effective in increasing the deposition rate. The deposition rate was strongly correlated to high ion energy and high ion energy flux as a function of source power.     

Refraction properties of PECVD of silicon nitride film

Using a neural network, the refractive index of a film deposited in a plasma enhanced chemical vapor deposition is characterized. The deposition process was characterized by a 2^6-1 fractional factorial experiment. Experimental variables and ranges include 20-40 W radio frequency (RF) power, 80-160 Pa pressure, 180-260 sccm SiH₄ flow rate, 1-1.4 sccm NH₃ flow rate, 0-1000 sccm N₂ flow rate, and 200-300°C substrate temperature. To examine the effect of the interaction between variables on the refractive index, a predictive neural network model was constructed. Prediction accuracy was optimized as a function of training factors. Model predictions were certified experimentally. Many complex interactions between the variables not reported previously were revealed. The power effect was transparent only in such plasma conditions as high SiH₄ or NH₃ flow rate. The temperature effect was conspicuous under high pressure. Deposition mechanisms were qualitatively estimated in conjunction with the reported linear dependency of refractive index on SiH/NH ratio.     

Sputter-assisted plasma CVD of polymer-like amorphous CNx:H films using supermagnetron plasma

By using a sputter-assisted chemical vapor deposition (CVD) of supermagnetron plasma, amorphous CN_x:H films were deposited on the lower part of two parallel electrodes. By applying rf power to the upper electrode (UPRF) at 5 W to 800 W, polymer-like a-CN_x:H films were deposited on substrates placed on the lower electrode with an rf power (LORF) of 10 W. The deposition rate increased as UPRF increased. The hardness was as low as about 6.5 GPa, which is less than that of glass (13.1 GPa). The refractive index changed only slightly as UPRF changed from 1.6 to 1.75. The FT-IR spectrum showed strong absorption bands of NH and CH bonds at high and low UPRFs, respectively. The optical band gap was as large as 2.1 to 2.5, and it decreased as UPRF increased. These a-CN_x:H films showed white photoluminescence (PL) with broadband. With the increase of UPRF from 5 W to 800 W, the PL peak energy shifted down from 2.3 eV to 1.9 eV.     

The selective growth of rutile thin films using radio-frequency magnetron sputtering

Using unbalanced radio-frequency (RF) magnetron sputtering crystalline rutile films were synthesised on glass substrates at (combined Ar and O₂) pressures of 0.4 Pa or less, at RF powers of 500 and 600 W with substrate to magnetron distances of 40 mm or longer. Anatase films were deposited at the greater pressure of 1.2 Pa (substrate to magnetron distance of 40 mm) or shorter substrate to magnetron distance of 20 mm (at 0.4 Pa). A mixture of anatase and rutile was formed at 0.5 Pa with all other conditions being as for those required for rutile or the power was reduced along with the substrate to magnetron distance (500 W and 20 mm). The crystallite sizes of rutile obtained were 1 - 3 nm. It is proposed that the greater the energy imparted to the substrate surface by the impinging positive species the greater the activation energy to crystalline phase formation that can be overcome. Hence the formation of rutile over anatase is favoured at greater power, longer magnetron to substrate distances and decreased pressure. Moreover, not only is it possible to control the phase of TiO₂ formed it appears to be possible to control the degree of oxygen non-stoichiometry in the rutile films formed. Smaller O₂ partial pressures, shorter substrate to magnetron distances and greater RF power are believed to produce an environment of reduced reaction of sputtered Ti species with O₂ and to result in the formation of non-stoichiometric rutile structures resulting in increased band gap energies and decreased refractive indices.     

Quasi-phase matching of third harmonic generation in corrugated discharge capillary

Quasi-phase matching third harmonic of Ti:sapphire laser was measured by propagation through corrugated discharge capillaries. The 1 cm long capillary with periodical varying inner radius was used with corrugation frequency of 200 μm. The longitudinal plasma density was periodically varied by a discharge current ablating the inner capillary walls, altering the refractive index accordingly. Average plasma density measured was 10¹⁸ cm⁻³ at minimum corrugation radius. Peak laser intensity was 10¹⁰ W/cm² allowing enough pondermotive energy to the electron for high harmonic generation.     

The gain and noise figure of Yb-Er-codoped fiber amplifiers based on the temperature-dependent model

A novel temperature-dependent model for Yb³⁺-Er³⁺-codoped fiber amplifier (EYDFA) based on the energy transfer from Yb³⁺ to Er³⁺ is established. Using appropriate fiber and energy transfer parameters, the coupled rate equations is numerically solved at 25 and 40 °C. The pumping powers are 100 and 200 mW at a pump wavelength of 1060 nm. The signal gain and noise characteristics of a 0.3 m erbium/ytterbium co-doped fiber (EYDF) in a single-pass configuration are investigated by using 1, 10 and 100 μW signals at 1535 nm. A maximum signal gain of 40.5 dB and a corresponding noise figure of 3.65 dB at the temperature of 25 °C are achieved.     

Ellipsometric studies on cupric telluride thin films

The optical properties of cupric telluride (CuTe) thin films have been studied in the wavelength range 310-800 nm using spectroscopic ellipsometry (SE). Thin films of thickness between 30 and 150 nm were prepared by thermal evaporation at the rate of 15.6 Å/s on well cleaned glass substrates kept at 300 K under the vacuum better than 2×10⁻⁵ mbar. It has been found that the optical band gap increases with the thickness of the films. The refractive index of the films increases with the energy but the extinction coefficient first increases and then decreases gradually with energy. The analysis of the absorption coefficient determined from the extinction coefficient reveals that there is allowed direct transition with a band gap of about 1.5 eV. The increase in the band gap with the increase in the film thickness has been ascribed to defect levels in the band gap formed by defects in the films.     

Third-order optical nonlinear absorption in Bi1.95La1.05TiNbO9 thin films

Single phase Bi_1.95La_1.05TiNbO₉ (LBTN-1.05) thin films with a layered aurivillius structure have been fabricated on fused silica substrates by pulsed laser deposition at 700 °C. The X-ray diffraction pattern revealed that the films are single-phase aurivillius. The band gap, linear refractive index and linear absorption coefficient were obtained by optical transmittance measurements. The film exhibits a high transmittance (> 70%) in visible-infrared region and the dispersion relation of the refractive index vs. wavelength follows the single electronic oscillator model. The nonlinear optical absorption property of the film was determined by the single beam Z-scan method using 800 nm with a duration of 100 fs. A large positive nonlinear absorption coefficient β = 5.95 × 10^− 8 m/W was determined experimentally. The results showed that the LBTN-1.05 is a promising material for applications in absorbing-type optical devices.     

Aging of silicon-based dielectric coatings deposited by plasma polymerization

Silicon-based dielectric coatings were deposited from tetravinylsilane or a mixture of tetravinylsilane with oxygen gas by pulsed plasma. The coatings in the form of a-SiC:H or a-SiOC:H alloy were stored at ambient conditions for 800 h to investigate aging effects. The SiH, SiC, and CH_x species in the plasma polymer film were identified as responsible for strong oxidation of the deposited material. The increased oxygen concentration up to 19 at.% in the dielectric coatings resulted in a decrease of the refractive index. Oxygen concentrations > 10 at.% resulted in reduction of mechanical properties of dielectric coatings deposited at powers ≥ 2.5 W. Suitable deposition conditions were deduced to reduce aging effects.     

Optical constants of silicone-like (Si:Ox:Cy:Hz) thin films deposited on quartz using hexamethyldisiloxane in a remote RF hollow cathode discharge plasma

Deposition of amorphous silicone-like (Si:O_x:C_y:H_z) thin films in a remote RF hollow cathode discharge plasma using hexamethyldisoloxane as monomer and Ar as feed gas has been investigated for films optical constants and plasma diagnostic as a function of RF power (100-300 W) and precursor flow rate (1-10 sccm). Plasma diagnostic has been performed using Optical Emission Spectroscopy (OES). The optical constants (refractive index, extinction coefficient and dielectric constant) have been obtained by reflection/transmission measurements in the range 300-700 nm. It is found that the refractive index increases from 1.92 to 1.97 with increasing power from 100 to 300 W, and from 1.70 to 1.92 with increasing precursor flow rate from 1 to 10 sccm. The optical energy band gap E_g and the optical-absorption tail ΔE have been estimated from optical absorption spectra, it is found that E_g decreases from 3.28 to 3.14 eV with power increase from 100 to 300 W, and from 3.54 to 3.28 eV with precursor flow rate increase from 1 to 10 sccm. ΔE is found to increase with applied RF power and precursor flow rate increase. The dependence of optical constants on deposition parameters has been correlated to plasma OES.     

Compact and vertically-aligned ZnO nanorod thin films by the low-temperature solution method

Highly c-axis-oriented ZnO nanorod thin films were obtained on silica glass substrates by a simple solution-growth technique. The most compact and vertically-aligned ZnO nanorod thin film with the thickness of ∼ 800 nm and average hexagonal grain size of ∼ 200 nm exhibits the average visible transmittance 85%, refractive index 1.74, packing density 0.84, and energy band gap 3.31 eV, and it was fabricated under the optimum parameters: 0.05 M, 75 °C, 6 h, multiple-stepwise, and ZnO seed layer with an average grain size of ∼ 20 nm. The photoluminescence spectrum indicates that the densest ZnO nanorod thin film possesses lots of oxygen vacancies and interstitials. As we demonstrate here, the solution-growth technique was used to produce high-quality and dense ZnO nanorod thin films, and is an easily controlled, low-temperature, low-cost, and large-scale process for the fabrication of optical-grade thin films.     

Thermal annealing effect on the structure, bandgap, and optical constants of Er-Mn oxide thin films

Thin films of erbium-manganese oxide were grown on glass and p-type Si substrates. The films were thermally pre-annealed at different temperatures ranging from 400 to 1000 °C to produce different crystalline structures and agitate a solid-state reaction. The structural characterisation of the films was carried out by X-ray diffraction (XRD) and energy dispersion X-ray fluorescence (XRF). The XRD investigation shows that the films annealed at 400 °C were amorphous and nanocrystals of ErMnO₃ appear under pre-annealing at about 800 °C or more. Mn oxide and Er oxide prevent each other from crystallising alone. The optical properties of the films pre-annealed at different temperatures were studied in the fundamental absorption region of the spectrum in wavelength range 230-800 nm. The spectral complex refractive index, complex optical dielectric constant, and optical bandgap were determined. A modified single-oscillator Forouhi-Bloomer (FB) technique, Wemple-Didomenico (WD) equation, Urbach's relation, Tauc et al. relation, and pointwise unconditioned minimisation approach (PUMA) were used in the analysing of the obtained spectral data.     

Reflectance spectra and refractive index of a Nd:YAG laser-oxidized Si surface

The reflectance spectra and refractive index of Nd:YAG laser-oxidized SiO₂ layers with thicknesses from 15 to 75 nm have been investigated with respect to the laser beam energy density and substrate temperature. Thickness and refractive index of films have been determined from reflectance measurements at normal light incidence in the spectral range 300–800 nm. It was found that the oxide-growth conditions at higher substrate temperatures and laser powers greater than 3.36 J cm⁻² provides a better film quality in terms of both optical thickness and refractive index. However, the refractive indices of the films are smaller in the whole spectral range studied as compared to that of conventional thermally grown SiO₂. This might be due to the porous structure formed during the laser-assisted oxidation. The results suggest the need of post-oxidation annealing to improve the refractive indices of the films, suitable for Si-device applications.     

Effect of process parameters and post deposition annealing on the optical, structural and microwave dielectric properties of RF magnetron sputtered (Ba0.5,Sr0.5)TiO3 thin films

Thin films of (Ba_0.5,Sr_0.5)TiO₃ (BST5) in the thickness range 400-800 nm have been deposited by RF magnetron sputtering on to quartz substrates at ambient temperature. All the properties investigated, i.e. structure, microstructure, optical and microwave dielectric, show a critical dependence on the processing and post processing parameters. The surface morphology as studied by atomic force microscopy reveals ultra fine grains in the case of as deposited films and coarse grain morphology on annealing. The as-deposited films are X-ray amorphous and exhibit refractive index in the range 1.9-2.04 with an optical absorption edge value between 3.8 and 4.2 eV and a maximum dielectric constant of 35 at 12 GHz. The dispersion in refractive index fits into the single effective oscillator model while the variation in the optical parameters with oxygen percentage in the sputtering gas can be explained on the basis of packing fraction changes. On annealing the films at 900 °C they crystallize in to the perovskite structure accompanied by a decrease in optical band gap, increase in refractive index and increase in the microwave dielectric constant. At 12 GHz the highest dielectric constant achieved in the annealed films is 175. It is demonstrated that with increasing oxygen-mixing percentage in the sputtering gas, the microwave dielectric loss decreases while the dielectric constant increases.     

Silicon nitride deposited by inductively coupled plasma using dichlorosilane and ammonia

Silicon nitride films were deposited at low temperature (350°C and pressure of 60 mTorr), on silicon substrates, using an inductively coupled plasma chemical vapour deposition system. Different ammonia to dichlorosilane flow ratios (1.4-9.5) and RF powers (25 and 50 W) were adopted for comparison. Deposition rates of the order of 2.6-12.3 nm min⁻¹ and refractive indexes ranging from 1.710 to 1.818 were determined by ellipsometry. Fourier transformed infrared spectra revealed the presence of SiN breathing and stretching modes, Si-NH-Si bending mode and NH stretching mode. The dielectric constant (4.5-5.8), dielectric breakdown electric field (0.36 MV/mm) and conductivity (3×10⁻¹² (Ω cm)⁻¹) were determined by capacitance-voltage and current-voltage measurements. The films present low compressive total stress but when increasing the concentration of the nitrogen in the film the total stress tends to become tensile.     

Influence of calcination ambient and film thickness on the optical and structural properties of sol-gel TiO2 thin films

Influence of both calcination ambient and film thickness on the optical and structural properties of sol-gel derived TiO₂ thin films have been studied. X-ray diffraction results show that prepared films are in an anatase form of TiO₂. Films calcined in argon or in low vacuum (∼2 × 10⁻¹ mbar) are found to be smaller in crystallite size, more transparent at low wavelength region of ∼300-450 nm, denser, have higher refractive index and band gap energy compared to air-calcined films. Scanning electron microscopic study reveals that surfaces of TiO₂ films calcined in argon or in low vacuum are formed by densely packed nano-sized particulates. Presence of voids and signs of agglomeration can be seen clearly in the surface microstructure of air-calcined films. In the thickness range ∼200-300 nm, band gap energy and crystallite size of TiO₂ films remain practically unaffected with film thickness but refractive index of thinner film is found to be marginally higher than that of thicker film. In this work, it has been shown that apart from temperature and soaking time, partial pressure of oxygen of the ambient is also an important parameter by which crystallite size, microstructure and optical properties of the TiO₂ films may be tailored during calcination period.     

Deposition of Al-doped ZnO thin-films with radio frequency magnetron sputtering for a source/drain electrode for pentacene thin-film transistor

Al-doped ZnO thin-films were deposited with the radio frequency magnetron sputtering technique at various temperatures and sputtering powers for a source/drain electrode in the pentacene thin-film transistor. With the increase in the deposition temperature and the decrease in the radio frequency sputtering power, the crystallinity was increased and the surface roughness was decreased, which lead to the decrease in the electrical resistivity of the film. Al-doped ZnO film deposited at 200 °C and sputtering power of 50 W showed a low resistivity (9.73 × 10⁴ μΩcm), high crystallinity, low roughness and uniform surface morphology. The pentacene thin-film transistor fabricated with Al-doped ZnO film as a source/drain electrode showed a device performance, (mobility: 7.89 × 10^− 3 cm²/Vs and on/off ratio: ~ 5 × 10⁴) which is comparable with an indium tin oxide electrode grown at room temperature.     

Synthesis and optical characterization of amorphous carbon nitride thin films by hot filament assisted RF plasma CVD

Carbon nitride thin films were synthesized by hot filament assisted radio frequency plasma chemical vapour deposition using methane and nitrogen gas mixture on silicon and glass substrates. The films were deposited at different substrate bias and at different substrate temperatures. At higher substrate bias (>−120 V) there was no deposition on the substrate, but complete etching of the deposited layer was observed. X-ray diffraction studies indicated the films were amorphous. The Fourier transform infrared spectra showed that the films produced exhibited high transmittance with the presence of the C-N stretching band at 1260 cm⁻¹. For the films deposited at a lower substrate temperature C=N peaks were also present. Raman spectroscopic study indicated the presence of D and G peaks whose relative height varied with substrate temperature. The transmittance versus wavelength measurement in the UV-VIS-NIR region showed the high transmittance in the NIR region. The optical band gap of the films was calculated to be 2.0 eV and the refractive index varied within 1.6-1.7 for the wavelength range 800-1800 nm.     

Hydrogen atom density in a solar plasma reactor

A density of neutral hydrogen atoms was systematically measured in the MESOX solar plasma reactor at different MW powers and flow rates. The H-atom density was measured by a gold fibre optics catalytic probe. The H-atom density was in general increasing with increasing MW power. At a pressure of 40 Pa and a power of 500 W it was about 3.5 × 10²¹ m⁻³ and at a power of 1000 W it was about 4.1 × 10²¹ m⁻³. A degree of dissociation of hydrogen molecules was between 3% and 20% depending on pressure and power. A maximum degree of dissociation was obtained at a pressure of 40 Pa and 1000 W, while the lowest one at 130 Pa and 500 W.     

Effect of tellurium addition on the optical and physical properties of germanium selenide glassy semiconductors

Thin films of the glasses Ge₁₀ Se_90−x Te_x (0 ≤ x ≥ 40) have been prepared by melt quenching technique; thin films were evaporated at a pressure of ≈10⁻⁴ Pa. The optical absorption behavior of these thin films was studied from the reflection and transmission spectrum in the spectral range 200-1200 nm. The optical constants i.e optical band gap (E_opt), absorption coefficient, refractive index (n) are calculated. The optical band gap has been estimated using Tauc extrapolation and found to decrease with Te content. The Dispersion of refractive index has been studied in terms of Wemple - Di Domenico model. The value of static refraction index has been found to increase with Te content. The distribution of the possible chemical bonds has been calculated. The obtained results were correlated with the character of the chemical bond for the prepared compositions through a study of parameters such as average heat of atomization (Hs), the cohesive energies of the bonds (CE), The mean bond energy <E> and average coordination number (m).