磁控溅射制备的Cr/CrN和Cr/CrN/CrAlN涂层耐腐蚀性能对比研究

目的比较Cr/CrN/CrAlN涂层和Cr/CrN交替涂层的耐腐蚀性能。方法利用电化学极化曲线、阻抗谱和中性盐雾试验进行测量,结合扫描电子显微镜(SEM)和原子力显微镜(AFM)表征微观形貌,分析两种涂层耐腐蚀性能的差异。同时,为研究涂层在服役中的损伤工况,分析了预制划痕对Cr/CrN/CrAlN涂层耐腐蚀性能的影响。结果Cr/CrN/CrAlN涂层的自腐蚀电流密度较Cr/CrN交替涂层和TC4基体低2个数量级,腐蚀速率较小。无损伤的Cr/CrN/CrAlN涂层的极化电阻Rp为868.7 kΩ·cm^2,预制1条损伤划痕涂层的极化电阻为792.0 kΩ·cm^2,而带有5条损伤划痕涂层的极化电阻Rp仅为77.2 kΩ·cm^2,减小至原始涂层的8%。Cr/CrN/CrAlN涂层经288 h连续盐雾腐蚀后增重仅为0.1 mg/cm^2,远小于CrN涂层和TC4基体,且增重速率趋于平缓。CrN涂层在连续盐雾腐蚀24 h后,腐蚀增重速率明显增加。结论由于Cr/CrN/CrAlN涂层结构增加了微裂纹和位错运动的界面阻塞,避免孔隙的连通,阻碍了腐蚀介质进入基体,因此涂层的耐腐蚀性能提高。对于表面预制划痕的Cr/CrN/CrAlN涂层,首先发生涂层的局部腐蚀,通过阴极极化加速后,腐蚀凹坑延伸到涂层/基体界面,加剧涂层的局部剥离。     

调制周期对Cr/CrN纳米多层膜的结构与性能的影响

采用多弧离子镀技术在65Mn钢表面制备了不同调制周期的Cr/CrN纳米多层膜.采用俄歇能谱仪(AES)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米硬度仪、轮廓仪和划痕仪,分析了不同调制周期Cr/CrN纳米多层膜的成分分布、微观结构、力学性能、残余应力和结合强度.结果表明,Cr/CrN纳米多层膜的表面平整致密,截面层状调制结构清晰,其调制结构为Cr层-过渡层-CrN层的"三明治"结构,调制比约为1∶ 1.多层膜由CrN、Cr2N和Cr相组成,在CrN(200)方向上出现择优取向.当调制周期为80 nm时,多层膜的硬度值相对较高.随调制周期的增大,Cr/CrN多层膜的残余应力值减小,结合强度值先增大后减小.当调制周期为120 nm时,涂层的划痕临界载荷值相对较高,为69 N.     

基体材料对Cr/CrN多层涂层在海水环境中磨蚀性能的影响

目的 讨论海水环境下不同基体材料对Cr/CrN交替的多层复合涂层磨蚀性能的影响,为海水环境下耐磨蚀材料基体的选择和应用提供参考。方法 采用多弧离子镀技术在316L不锈钢和TC4钛合金基体上沉积Cr/CrN多层复合涂层,通过XRD、SEM等技术对涂层材料的微观结构进行表征,通过硬度测试、结合力测试、电化学分析、摩擦磨损试验等技术对涂层材料的力学性能、电化学性能以及摩擦学性能进行分析,比较不同基体对Cr/CrN多层涂层在海水环境中磨蚀性能的影响。结果 以TC4钛合金为基体的Cr/CrN多层涂层的硬度为1727.2HV0.3,虽略小于以316L不锈钢为基体的涂层硬度（2241.5HV0.3）,但其在膜-基结合力、海水环境下电化学性能和摩擦学性能等方面均优于以316L不锈钢为基体的涂层。结合力测试中,以TC4为基体的多层涂层初始裂纹出现在31 N,扩展裂纹出现在42 N,大于316L基体涂层的22 N和35 N。电化学测试中TC4基体涂层的腐蚀电位为?0.20 V,大于316L基体涂层的腐蚀电位（?0.21 V）。海水环境下TC4基体涂层的平均摩擦系数和磨损率分别为0.35和2.9950×10?5 mm3/(N?m),均小于316 L基体涂层的平均摩擦系数（0.36）和磨损率（4.9895×10?5 mm3/(N?m)）。结论 TC4钛合金更适合作为海水环境用Cr/CrN多层涂层耐磨蚀材料的基体材料。     

TiAlN单层和TiAlN/CrN多层涂层的微结构与耐腐蚀性能研究

本文采用多弧离子镀技术制备了TiAlN单层和TiAlN/CrN多层涂层,通过扫描电子显微分析、X射线衍射、电化学腐蚀测试以及浸泡腐蚀试验等方法研究其微观结构和耐腐蚀性能。结果表明：相比于TiAlN单层涂层,TiAlN/CrN多层涂层具有相同的NaCl型面心立方结构,其表面大颗粒及孔洞等缺陷明显减少、结构更为致密、晶粒细化。另外,TiAlN/CrN多层涂层的开路电位趋稳时间短且稳态值更高;其自腐蚀电流密度由TiAlN单层涂层的1.213×10^-7A·cm^-2降为4.366×10^-9A·cm^-2,极化电阻则由320 kΩ·cm^-2升高至10 169 kΩ·cm^-2,阻抗模值也相应提升了5倍左右。在10%NaCl(质量分数)溶液中浸泡360 h后,TiAlN/CrN多层涂层的表面腐蚀痕迹并不明显,且其腐蚀前后的质量变化明显低于TiAlN单层涂层和TC4钛合金基体,表明其具有更加优异的耐腐蚀性能。CrN插入层的本征良好耐腐蚀性能、显著减少的表面缺陷和孔隙率是TiA...     

多弧离子镀制备的大厚度Cr/Cr_2N/CrN多层涂层的结构和力学性能（英文）

采用多弧离子镀制备一种厚度为24.4μm的Cr/Cr2N/CrN多层结构涂层。采用场发射扫描电子显微镜(FESEM)、X射线光电子能谱(XPS)、能量散射谱(EDS)、X射线衍射(XRD)和透射电镜(TEM)对涂层进行表征,并用纳米压痕和划痕仪测试其硬度和结合力。用UMT-3MT往复式摩擦磨损试验机对涂层在大气和海水环境中的摩擦性能进行测试。结果表明,该涂层由3种相结构组成,分别是Cr相、Cr2N相和CrN相。相对于单层CrN涂层,多层涂层的结合力明显提高,该涂层的硬度为(21±2)GPa。多层结构涂层在人工海水中的耐蚀性能显著优于单层CrN涂层的耐蚀性能,且在大气和海水中多层结构涂层的摩擦因数均低于单层CrN涂层的摩擦因数。     

Si含量对CrN/TiSiN纳米多层膜显微结构和力学性能的影响

采用不同Si含量的TiSi复合靶和Cr靶,用射频磁控溅射工艺在Si基底片上沉积不同Si含量的CrN/TiSiN纳米多层膜。采用X射线衍射仪(XRD)、高分辨透射电子显微镜(HRTEM)和纳米压痕仪研究Si含量对CrN/TiSiN纳米多层膜显微结构和力学性能的影响。结果表明:随着Si含量的增加,CrN相的结晶程度先增加后降低,涂层的力学性能先提高后降低,当n(Si):n(Ti)=7:18时获得最高硬度为31.5GPa。HRTEM观测表明,在n(Si):n(Ti)=7:18时,TiSiN层在CrN层的模板作用下呈面心立方结构,并且与CrN层形成共格外延生长结构;当n(Si):n(Ti)=11:14时,TiSiN层总体呈非晶结构,与CrN层的共格外生长结构被破坏。硬度的升高主要与TiSiN与CrN形成共格外延生长结构有关。     

金属Cr层对Cr/Cr2N纳米多层涂层的性能影响

目的研究金属Cr层对Cr/Cr_2N纳米多层涂层结构和性能的影响,为多层硬质涂层在海洋等腐蚀性介质中的应用提供理论基础。方法采用多弧离子镀技术制备一系列不同金属Cr层厚度的Cr/Cr_2N纳米多层涂层,采用XRD、SEM、纳米压痕及划痕仪测试了多层涂层的结构、微观形貌和机械性能。采用电化学工作站评价了Cr/Cr2N纳米多层涂层在海水环境下的电化学行为,并采用摩擦实验机测试了涂层在海水环境下的摩擦学性能。结果 Cr层对Cr/Cr_2N纳米多层涂层的结构产生了一定的影响。不同Cr层厚度的Cr/Cr_2N纳米多层涂层在海水环境下的磨损率差别不大,均约为1.2×10-6 mm~3/(N·m),具有良好的耐磨损性能。Cr层厚度约为21 nm的Cr/Cr2N纳米多层涂层在海水环境下具有较高的阻抗值,呈现出较高的耐腐蚀性能。结论一定厚度的金属层(如Cr层厚度约为21 nm)和界面是多层涂层呈现较高耐腐蚀性能的关键。Cr/Cr2N纳米多层涂层在海水环境下良好的耐腐蚀和耐磨损性能,使其可应用于海洋等腐蚀性介质中,并发挥良好的表面防护作用。     

Cr基及其化合物过渡层对TiCN涂层性能的影响

为研究过渡层材料及结构对TiCN涂层性能的影响,设计3种Cr基及其化合物过渡层,利用多弧离子镀技术制备TiCN涂层。膜系分别为Cr/TiCN、Cr/CrN/TiCN和Cr/CrN/CrCN/TiCN。利用SEM、XRD、纳米压痕仪、划痕仪、摩擦磨损试验机和球磨仪对涂层的微观结构和性能进行表征。结果表明:随着过渡层由单层Cr依次加入CrN和CrCN,涂层原有的柱状晶生长被抑制并最终消除。与具有Ti过渡层的TiCN相比,涂层不再具有明显择优取向,(111)峰强度大大减弱而(200)峰发生宽化。具有CrN和CrCN过渡层的样品硬度和附着力明显高于以单层Cr为过渡层的样品,Cr/CrN/CrCN/TiCN膜系硬度和附着力最高,分别为(30.11±0.34)GPa和(37.21±0.46)N。摩擦磨损试验结果表明:CrCN过渡层的引入显著提升了涂层耐磨性,其对应样品摩擦因数最低,达到0.111,并在球磨测试中表现稳定,而其它膜系均出现不同程度的磨损形貌。     

TiN/CrN多层薄膜微观结构与力学性能的研究

近些年来,TiN/CrN多层薄膜由于其优良的力学性能被广泛应用于表面防护,提高零部件性能和使用寿命等方面。为了研究TiN/CrN多层薄膜微观结构与力学性能的关系,本文采用磁控溅射技术制备了TiN、CrN单层薄膜和三种不同调制周期的TiN/CrN多层薄膜。通过原子力显微镜和X射线衍射分析了膜的表面形貌和相结构。使用纳米压痕仪测试薄膜的硬度和压入塑性,曲率法测定薄膜的残余应力。结果表明,TiN/CrN的多层薄膜是由TiN和Cr2N两相组成,随着调制周期的增大TiN层与CrN层之间的界面区域变小,界面平滑且明显。力学性能方面,多层薄膜的硬度和压入塑性比单层膜好,并且多层薄膜随调制周期的减小硬度和压入塑性越大,残余应力随周期性的增加而逐渐增大。综上可见,TiN/CrN多层薄膜的力学性能的改善取决于界面区域的大小和形貌,即调制周期,该结论与Hall–Petch理论相吻合。     

CrN/CrAlSiN涂层海水环境下的摩擦学性能

为提高海洋装备摩擦零部件的摩擦学性能,采用多弧离子镀技术在316L不锈钢上制备了CrN/CrAlSiN涂层。通过XRD、XPS表征涂层的物相及成分,SEM和TEM表征涂层的形貌和微观结构,并用纳米压痕仪测试其硬度,采用摩擦磨损试验机对涂层在大气和海水环境中的摩擦磨损性能进行测试。结果表明:CrN/CrAlSiN涂层的微观结构主要有CrN相、AlN相以及非晶态Si_3N_4包裹CrN、AlN相,(111)择优取向最为明显;基于微观结构与CrN过渡层的设计,CrAlSiN涂层硬度高达35.5 GPa;较之于316L基底,涂层致密的结构使其在海水环境下表现出更好的耐腐蚀性能;在大气和海水环境下,CrN/CrAlSiN涂层的摩擦因数及磨损率均明显降低,在海水环境下达到最优。     

沉积时间和靶电流比例对磁控溅射TiAlN涂层耐磨性的影响研究

采用磁控溅射工艺在WC-8Co硬质合金基体表面制备了一层厚度分别为2.5μm、3μm和3.5μm的TiAlN涂层,并制备了不同Ti、Al比例的TiAlN涂层,利用摩擦磨损机考察了涂层的承载能力和摩擦学性能,通过扫描电子显微镜观察了磨损试件的表面形貌,通过摩擦系数和显微组织的演变来评价不同成分和不同厚度TiAlN涂层的摩擦学性能。结果表明,随着涂层厚度的增加,涂层的摩擦系数降低,涂层更不易被磨穿,表明在一定范围内增加涂层厚度有利于提高涂层的耐磨损性能;涂层的成分发生改变时,由于Ti、Al元素的共同作用,呈现不同的摩擦性能,当TiAl比例为50：50时,涂层的耐磨性最好。     

The influence of TiAlN and enamel coatings on the corrosion behavior of Ti6Al4V alloy in the presence of solid NaCl deposit and water vapor at 450 °C

The corrosion behavior of Ti6Al4V alloy with solid NaCl deposit and water vapor at 450 °C has been investigated. Serious corrosion occurred. In order to improve the corrosion resistance, TiAlN and enamel coatings were prepared, and their effectiveness and corrosion resistance were evaluated. The results indicated that both coatings were effective in protecting the alloy against corrosion induced by NaCl deposit and water vapor at 450 °C. The protection mechanisms of these two coatings were also studied.     

Al含量对TiAlN涂层结合强度的影响

采用阴极电弧蒸发工艺在WC-6Co硬质合金表面制备Ti0.5Al0.5N、Ti0.45Al0.55N和Ti0.4Al0.6N涂层,采用声发射划痕仪测定涂层的结合强度。研究了Al含量对TiAlN涂层结合强度的影响及机理,并分析了TiAlN涂层的失效模式。结果表明,随Al含量增加,Ti1-xAlxN(x=0.5~0.6)涂层结合强度下降。TiAlN涂层结合强度受涂层残余应力与膜基硬度差的影响。Ti0.5Al0.5N涂层残余应力较小,且膜基差异性最小,结合强度最高。Ti0.5Al0.5N和Ti0.45Al0.55N涂层均为楔形剥落,Ti0.4Al0.6N涂层则为屈曲剥落。Al含量增加降低TiAlN涂层结合力,但有利于改善涂层韧性。Ti0.4Al0.6N涂层因含少量较软的h-Al N相,其韧性明显提高。     

痕法测定 TiAlN 涂层结合强度的研究

采用磁控溅射法在不锈钢表面制备了TiAlN涂层,采用压入法及划痕法表征了涂层的结合强度。分析表明,压入法只能作为一种定性的测定方法,该法测得TiAlN涂层的结合强度达到HF3。划痕法结合了声信号、摩擦力信号和划痕微观形貌,可以定量测定结合强度,该法测得在压头曲率半径为200μm的情况下,TiAlN涂层的临界载荷达到13 N,比传统TiN涂层提高了45%。     

TiAlN涂层高速钢刀具的制备及钻削性能研究

研究综合采用了电子枪等离子增强、非平衡磁控溅射和多弧离子镀3种物理气相沉积(PVD)技术,在高速钢麻花钻上沉积TiAlN单层涂层。对涂层的硬度、涂层与基体的结合强度、微观形貌进行了测试及分析,并将TiAlN涂层高速钢麻花钻对1Cr18Ni9Ti不锈钢进行干态钻削试验。结果表明,在高速钢麻花钻基体上所制备的TiAlN涂层具有良好的力学性能,可以使高速钢麻花钻的使用寿命提高4倍以上。     

High-Temperature Oxidation of Ti0.3Al0.2N0.5 Thin Films Deposited on a Steel Substrate by Ion Plating

To improve the high-temperature oxidation resistance of STD61 steels used ashot dies or cutting tools, Ti_0.3Al_0.2N_0.5films were deposited on STD61 steel substrates by arc-ion plating. Thedeposited film consisted of Ti₃Al₂N₂ andTi₂N phases. The oxidation characteristics were studied attemperatures ranging from 700 to 900°C in air. The deposited STD61steels displayed excellent oxidation resistance up to 800°C, butexhibited large weight gains and breakaway oxidation at 900°C. Theoxidation products were primarily Fe₂O₃, TiO, TiO₂,and -Al₂O₃, the relative amount of each oxidebeing dependent on the oxidation condition. Among various oxides, TiO₂and -Al₂O₃ were the major oxides at 800°Cfor at least up to 16 hr. However, at a higher temperature or a longeroxidation period, the significant outward diffusion of iron from thesubstrate resulted in the formation of iron oxides, together with otheroxides of Ti and Al.     

Tribological behavior of TiN and CrN coatings sliding against an epoxy molding compound

TiN and CrN coatings were deposited by unbalanced magnetron sputtering, and then rubbed against an epoxy molding compound (EMC). In sliding against an EMC, TiN exhibited an extremely high wear rate and a low friction coefficient, while the CrN-coated sample showed the opposite behavior. To understand this difference, Raman spectroscopy and thermal testing were used to study both coatings. Combining the results of oxidation, Raman spectroscopy and tribological testing, it can be concluded that the oxidation and pore generation occurring in the TiN coating during sliding deteriorated the mechanical properties of the coating and therefore its wear resistance. The excellent wear performance of the CrN coating against EMC was related to its good oxidation resistance, and adhesion to the substrate at high temperature.     

Tribological properties of TiAlN-coated cermets

Ti(C,N)-based cermets were coated with TiAlN using multi-arc ion plating technology. Sliding wear tests were performed on the coated cermets. The microstructure and morphologies of the coated cermets before and after friction and wear tests were characterized. The results show that the TiAlN coating surface was smooth and its root mean square roughness was 16.6 nm. The hardness (HK) of TiAlN coating layers reached approximately 3200 and the critical load (L _c) under which the coating failure occurred was 59 N. The sliding wear test results show that the friction coefficients of the TiAlN-coated cermets were lower than that of the cermets without any coating. Under the same load, the adhesion phenomenon of the counterpart materials on the specimens was improved and the mean friction coefficient increased with increasing sliding velocity. When the sliding velocity was 0.26 m·s⁻¹, the mass of the coated cermets reduced. At the same sliding velocity, the average friction coefficient of the TiAlN-coated cermets was lower under a higher load. The wear mechanisms of the TiAlN-coated cermets were mainly adhesive and abrasive wear.     

Tribological properties of TiA1N-coated cermets

Ti(C,N)-based cermets were coated with TiAlN using multi-arc ion plating technology. Sliding wear tests were performed on the coated cermets. The microstructure and morphologies oftbe coated cermets before and after friction and wear tests were characterized. The results show that the TiAlN coating surface was smooth and its root mean square roughness was 16.6 nm. The hardness (HK) of TiAlN coating lay-ers reached approximately 3200 and the critical load (Lc) under which the coating failure occurred was 59 N. The sliding wear test results show that the friction coefficients of the TiAlN-coated cermets were lower than that of the cermets without any coating. Under the same load, the adhesion phenomenon of the counterpart materials on the specimens was improved and the mean friction coefficient increased with in-average friction coefficient of the TiAlN-coated cermets was lower under a higher load. The wear mechanisms of the TiAIN-coated cermets were mainly adhesive and abrasive wear.     

Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering

Coatings like TiN or TiAlN are well established as hard and wear resistant tool coatings. These coatings often are prepared by PVD techniques like arc evaporation or d.c. magnetron sputtering. Typical micro hardness values of such hard coatings are in the range of 30 GPa. Compared to d.c. magnetron sputtering processes the pulsed magnetron sputter deposition technique could be shown as a clear advancement. Furthermore pure TiAlN hard coatings as well as TiAlN coatings modified by addition of elements like Si and Cr were prepared in order to improve the coating properties using the pulsed magnetron sputter technique in a batch coater equipped with 4 targets. Coatings prepared with the pulsed sputter process showed both high hardness and high wear resistance. The application potential of pulsed sputtered TiAlN coatings is demonstrated by turning test results of coated cemented carbide cutting inserts.Beside hardness and wear, other properties like adhesion or high temperature stability were determined. Cross sectional SEM images revealed the growth structure in dependence of the applied substrate bias and of the added elements. The chemical composition of the coatings was investigated by electron microprobe analysis and the phase and crystal size were determined by X-ray diffraction. Using the pulsed magnetron sputter process the coating properties, especially the hardness and the morphology, could be significantly improved. With indentation hardness values in the range of 40 GPa the region of super hard materials could be reached.