共查询到18条相似文献,搜索用时 93 毫秒
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双频激光干涉仪的原理与应用(三)机械部成都工具研究所(610056)羡一民3.垂直度测量垂直度测量使用直线度干涉仪附件,在测量垂直方向时,需增加一些转向光学附件,如图10所示。图10垂直轴线直线度测量示意图1、激光头2.转向平面镜3.往复反射镜4.夜... 相似文献
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双频激光干涉仪的原理与应用(二)机械部成都工具研究所(610056)羡一民二、双频激光干涉仪在机床检定中的应用机床检定是双频激光干涉仪的主要用途,与传统的检测方法相比,具有以下特点:①可检测项目多。双频激光干涉仪与不同的附件组合,可测量距离、直线度、... 相似文献
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机床导轨直线度误差的测量方法有很多种,其中最常用的是水平仪法、自准直仪法和平尺法。主要介绍的是用激光干涉仪测量直线度误差的方法、原理及误差分析,并提出为减少测量误差在测量过程中应注意的几个问题。 相似文献
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为了实现对数控机床形位误差精密测量,采用扭簧表及大理石平尺搭建导轨直线度测量装置,以HEIDENHAIN绝对式直线光栅尺为定位精度测量硬件,PC端通过数据采集卡获取测量信息,并基于LabVIEW开发虚拟仪器,实现了对数控机床导轨直线度、定位精度和重复定位精度项目的测量;提出了一种基于LabVIEW平台构建数控机床形位误差测量系统的新方案。在相同的检测参数下,对同一台数控机床进行检测,并与激光干涉仪测量的数据比对,激光干涉仪采用GB/T17421.2-2000统计分析方法,实验结果表明,本系统具备较高的测量分辨率和测量精度。 相似文献
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作为天津市技术监督局计量认证及审查认可,并获得了天津市技术监督局颁发的产品监督检验站授权证书的质量监督部门,我站主要负责各类机床及附件等六大类产品的检验工作.其中,数控机床是机床类的主导产品,而对于机床几何精度检验中的关键项:线性运动的直线度,传统的测量手段(平尺、指示器、精密水平仪、角尺等)已远远不能适应机床制造技术突飞猛进的发展的需要,由此诞生了采用激光干涉仪实现数控机床高精度直线度测量的方法. 相似文献
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分析了激光直线度干涉仪的原理,阐述了在激光直线度干涉仪中用Wollaston棱镜作为感知元件的合理性,证明了系统对光束漂移有自适应性,能够实时消除漂移误差,有较强的抗干扰性。 相似文献
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This paper describes evaluation of a method of measuring the straightness of motion of machine tool axes using a taut wire and an optical sensor head mounted at the tool point location. In contrast to commonly used taut wire instruments, straightedges or laser-based methods, this solution combines low cost, simplicity of setup and automated data capture while achieving state of the art accuracy suitable for application on precision machine tools. A series of tests are discussed which examine the performance of the new sensing head and different wires which highlight the suitability of the taut wire properties as a straightness reference. Experimental results obtained on a production machine tool are provided with respect to the accuracy and repeatability of both the proposed taut wire system and a laser interferometer operated under the same conditions. The reference errors of wires made of different materials are compared and the wire catenary is separated from the measurement results. The uncertainty budget for taut wire and laser systems is presented and expanded uncertainty of 4 μm obtained for both. During the experiment, the method showed excellent repeatability with two standard deviations of 1.5 μm over a measuring range of 1.5 m; this performance matches that of a commercial laser interferometer-based straightness reference to within 0.1 μm. 相似文献
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提出一种用于精密线性位移台滚转角和运动直线度同步测量的激光外差干涉系统。该干涉系统由一个Koster棱镜、角隅棱镜、分光镜、1/2波片、直角棱镜、1/4波片以及楔面棱镜和楔面反射镜组成。楔面棱镜作为测量运动直线度和滚转角的传感器固定在线性导轨上,当双频激光器的光射入干涉系统中后,形成空间对称的六光束测量信号。空间结构对称、系统共光路的特点使光学分辨率比普通的迈克尔逊干涉仪高一倍,光程死区达到最小。系统稳定性好,抗环境干扰能力强。光路对称使得增加或减小的光程变化相同,其他自由度引起的光程变化相互抵消,仅有运动直线度和滚转角的变化可以进入光程差,有效地排除其他自由度及阿贝误差的串扰,实现高精密测量。试验证明相互平行且不同频率的两束光在同一反射系统中发生运动直线度偏移和滚转角变化时,通过两束光携带的不同相位信息能直接得到运动直线度和滚转角的变化值。它不需要一条与行程同样长度的大反射镜作参考便能够实现高分辨率测量,简单实用,可直接溯源米定义。 相似文献
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A novel sensitivity improving method for simultaneously measuring five-degree-of-freedom errors of a moving linear stage is proposed based on collimator and interferometry techniques. The measuring principle and parameters of the system are analyzed theoretically. The experimental results proved that the resolution of the linear displacement of the proposed method has twice that of the current linear interferometer, and the resolutions of the two-dimensional straightness error measurement can be improved by a factor of 8 compared with the movement of the retroreflector itself by using multireflection and lens magnification. The resolutions of the pitch and yaw angular error measurement have been improved by a factor of 10 compared with the rotation of the plane mirror itself by using expander lenses. The whole measuring system is characterized of simple structure, small volume, and high precision. The moving component of the measurement system is wireless, which eliminates the errors and inconvenience introduced by the wire connection. Calibration and comparison tests of this system compared with Renishaw laser interferometer system have been carried out. Experimental results show good consistency for measuring a linear guide way. 相似文献