Short wavelength (/spl lambda//spl sim/4.3 /spl mu/m) high-performance continuous-wave quantum-cascade lasers

We report continuous-wave (CW) operation of a 4.3-/spl mu/m quantum-cascade laser from 80 K to 313 K. For a high-reflectivity-coated 11-/spl mu/m-wide and 4-mm-long laser, CW output powers of 1.34 W at 80 K and 26 mW at 313 K are achieved. At 298 K, the CW threshold current density of 1.5 kA/cm/sup 2/ is observed with a CW output power of 166 mW and maximum wall-plug efficiency of 1.47%. The CW emission wavelength varies from 4.15 /spl mu/m at 80 K to 4.34 /spl mu/m at 298 K, corresponding to a temperature-tuning rate of 0.87 nm/K. The beam full-width at half-maximum values for the parallel and the perpendicular far-field patterns are 26/spl deg/ and 49/spl deg/ in CW mode, respectively.     

Continuous-wave operation of quantum cascade laser emitting near 5.6 /spl mu/m

Buried heterostructure quantum cascade lasers emitting at 5.64 /spl mu/m are presented. Continuous-wave (CW) operation has been achieved at -30/spl deg/C for junction down mounted devices with both facets coated. A 750 /spl mu/m-long laser exhibited 3 mW of CW power with a threshold current density of 5.4 kA/cm/sup 2/.     

Type-II interband cascade lasers in the 4.3-4.7-/spl mu/m wavelength region

Operation of type-II interband cascade lasers in the 4.3-4.7-/spl mu/m wavelength region has been demonstrated at temperatures up to 240 K in pulsed mode. These lasers fabricated with 150-/spl mu/m-wide mesa stripes operated in continuous-wave (CW) mode up to a maximum temperature of 110 K, with an output power exceeding 30 mW/f and a threshold current density of about 41 A/cm/sup 2/ at 90 K. The maximum CW operation temperature of 110 K is largely limited by the high specific thermal resistance of the 150-/spl mu/m-wide broad area lasers. A 20-/spl mu/m-wide mesa stripe laser was able to operate in CW mode at higher temperatures up to 125 K as a result of the reduced specific thermal resistance of a smaller device.     

Low-threshold continuous-wave 1.5-/spl mu/m GaInNAsSb lasers grown on GaAs

We present the first continuous-wave (CW) edge-emitting lasers at 1.5 /spl mu/m grown on GaAs by molecular beam epitaxy (MBE). These single quantum well (QW) devices show dramatic improvement in all areas of device performance as compared to previous reports. CW output powers as high as 140 mW (both facets) were obtained from 20 /spl mu/m /spl times/ 2450 /spl mu/m ridge-waveguide lasers possessing a threshold current density of 1.06 kA/cm/sup 2/, external quantum efficiency of 31%, and characteristic temperature T/sub 0/ of 139 K from 10/spl deg/C-60/spl deg/C. The lasing wavelength shifted 0.58 nm/K, resulting in CW laser action at 1.52 /spl mu/m at 70/spl deg/C. This is the first report of CW GaAs-based laser operation beyond 1.5 /spl mu/m. Evidence of Auger recombination and intervalence band absorption was found over the range of operation and prevented CW operation above 70/spl deg/C. Maximum CW output power was limited by insufficient thermal heatsinking; however, devices with a highly reflective (HR) coating applied to one facet produced 707 mW of pulsed output power limited by the laser driver. Similar CW output powers are expected with more sophisticated packaging and further optimization of the gain region. It is expected that such lasers will find application in next-generation optical networks as pump lasers for Raman amplifiers or doped fiber amplifiers, and could displace InP-based lasers for applications from 1.2 to 1.6 /spl mu/m.     

Continuous-wave operation of GaInAs-AlGaAsSb quantum cascade lasers

We report on the demonstration of continuous-wave (CW) operation of GaInAs-AlGaAsSb quantum cascade (QC) lasers. By placing a 2.5-/spl mu/m-thick gold layer on both sides of the laser ridge to extract heat from the active region in the lateral direction, together with mounting the device epilayer down, we have achieved CW operation of GaInAs-AlGaAsSb QC lasers composed of 25 stages of active/injection regions. The maximum CW operating temperature of the lasers is 94 K, and the emission wavelength is around /spl lambda//spl sim/4.65 /spl mu/m. For a device with the size of 10/spl times/2000 /spl mu/m/sup 2/, the CW optical output power per facet is 13 mW at 42 K and 4 mW at 94 K. The CW threshold current density is 1.99 kA/cm/sup 2/ at 42 K, and 2.08 kA/cm/sup 2/ at 94 K, respectively.     

High-power continuous-wave operation of quantum-cascade lasers up to 60/spl deg/C

High-temperature high-power continuous-wave (CW) operation of high-reflectivity-coated 12-/spl mu/m-wide quantum-cascade lasers emitting at /spl lambda/ = 6 /spl mu/m with a thick electroplated Au top contact layer is reported for different cavity lengths. For a 3-mm-long laser, the CW optical output powers of 381 mW at 293 K and 22 mW at maximum operating temperature of 333 K (60/spl deg/C) are achieved with threshold current densities of 1.93 and 3.09 kA/cm/sup 2/, respectively. At 298 K, the same cavity gives a maximum wall plug efficiency of 3.17% at 1.07 A. An even higher CW optical output power of 424 mW at 293 K is obtained for a 4-mm-long laser and the device also operates up to 332 K with an output power of 14 mW. Thermal resistance is also analyzed at threshold as a function of cavity length.     

Long-term reliability of single-mode fibers when exposed to high-power laser light

The reliability of a pure silica-core single-mode fiber (SCF) and a germanium-doped fiber [dispersion-shifted fiber (DSF)] with long-term exposure to continuous-wave (CW) high-power laser light is reported. It was found that the optical loss in the 0.6-1.6-/spl mu/m region and the Raman spectra of SCF and DSF remained unchanged after 1900 h of exposure to an 8-W CW laser light and 2000 h of exposure to an 8.5-W CW laser light at 1.48-/spl mu/m, respectively. The nonbridging oxygen hole center (NBOHC) concentration generated in SCF by 1900 h of exposure is estimated to be below the detection limit of 2/spl times/10/sup 12/ cm/sup -3/. SCF and DSF can be expected to exhibit long-term (> 20 years) reliability when exposed to several watts of laser power in the S, C, and L bands in terms of optical degradation due to defect formation via multiphoton absorption.     

Low-threshold operation of 1.34-/spl mu/m GaInNAs VCSEL grown by MOVPE

Low-threshold operation was demonstrated for a 1.34-/spl mu/m vertical-cavity surface-emitting laser (VCSEL) with GaInNAs quantum wells (QWs) grown by metal-organic vapor-phase epitaxy. Optimizing the growth conditions and QW structure of the GaInNAs active layers resulted in edge-emitting lasers that oscillated with low threshold current densities of 0.87 kA/cm/sup 2/ at 1.34 /spl mu/m and 1.1 kA/cm/sup 2/ at 1.38 /spl mu/m, respectively. The VCSEL had a low threshold current of 2.8 mA and a lasing wavelength of 1.342 /spl mu/m at room temperature and operated up to 60/spl deg/C.     

1.3-/spl mu/m InAs quantum-dot laser with high dot density and high uniformity

We realized a triple-stacked 1.3-/spl mu/m InAs quantum dot (QD) with a high density of 2.4/spl times/10/sup 11/ cm/sup -2/ and a high uniformity of below 24 meV that employs an As/sub 2/ source and a gradient composition (GC) strain-reducing layer (SRL) grown on a GaAs substrate. We demonstrated the 1.3-/spl mu/m wavelength emission of this triple-stacked QD laser with a 0.92-mm cavity length and a cleaved facet at room temperature. In addition, we realized the highest maximum modal gain yet reported of 8.1 cm/sup -1/ per QD layer at beyond 1.28 /spl mu/m by using our high-density and high-uniformity QD.     

Room-temperature continuous-wave laser operation of electrically-pumped 1.55 /spl mu/m VECSEL

A report is presented on room-temperature (RT) continuous-wave (CW) laser emission at 1.55 /spl mu/m of an all InP-based electrically-pumped vertical external-cavity surface-emitting laser (EP-VECSEL). Threshold currents of 1.4 kA/cm/sup 2/ and output powers of up to 0.3 mW were measured under CW operation at RT. A maximum output power of 2.7 mW has been obtained in quasi-CW operation at a heatsink temperature of 10.5/spl deg/C. This first result demonstrates that EP-VECSELs are a potential candidate for the realisation of compact vertical-cavity emitting sources.     

Intrinsic limits of the efficiency of erbium 3-/spl mu/m lasers

Mathematical modeling, based on rate equations, is used to estimate the theoretical limit of the emission efficiency of 3-/spl mu/m Er:YAG laser (laser transition /sup 4/I/sub 11/2//spl rarr//sup 4/I/sub 13/2/) in both continuous wave (CW) and free-generation regimes. This model exclusively uses spectroscopic data and includes upconversion from both initial and terminal laser levels as well as the cross relaxation from the "pump level" /sup 4/S/sub 3/2/. The recirculation of the excitation on the metastable levels of the Er/sup 3+/ ion - produced by the energy-transfer processes, very active at high erbium concentrations - leads to supraunitary quantum efficiency and high emission efficiency in the CW regime. In the Q-switch regime, in contrast with CW (or free generation) regime, the energy-transfer processes are "frozen" during the giant pulse generation, the access to the stored energy is limited and the laser efficiency is rather low. In this paper, we find simple analytic expressions for the emission efficiency in CW, free-generation, and Q-switch regimes. The same figures of merit are used for all these regimes. The predictions of our model are then compared with available experimental results. Some suggestions to improve the overall efficiency of the 3-/spl mu/m erbium lasers, working in the Q-switch regime, are given.     

Ridge-width dependence on high-temperature continuous-wave quantum-cascade laser operation

We report continuous-wave (CW) operation of quantum-cascade lasers (/spl lambda/=6 /spl mu/m) up to a temperature of 313 K (40/spl deg/C). The maximum CW optical output powers range from 212 mW at 288 K to 22 mW at 313 K and are achieved with threshold current densities of 2.21 and 3.11 kA/cm/sup 2/, respectively, for a high-reflectivity-coated 12-/spl mu/m-wide and 2-mm-long laser. At room temperature (298 K), the power output is 145 mW at 0.87 A, corresponding to a power conversion efficiency of 1.68%. The maximum CW operating temperature of double-channel ridge waveguide lasers mounted epilayer-up on copper heatsinks is analyzed in terms of the ridge width, which is varied between 12 and 40 /spl mu/m. A clear trend of improved performance is observed as the ridge narrows.     

Minimal group refractive index dispersion and gain evolution in ultra-broad-band quantum cascade lasers

The group refractive index dispersion in ultra-broad-band quantum cascade (QC) lasers has been determined using Fabry-Perot spectra obtained by operating the lasers in continuous wave mode below threshold. In the wavelength range of 5-8 /spl mu/m, the global change of the group refractive index is as small as +8.2 /spl times/ 10/sup -3/ /spl mu/m/sup -1/. Using the method of Hakki and Paoli (1975), the subthreshold gain of the lasers has furthermore been measured as a function of wavelength and current. At the wavelength of best performance, 7.4 /spl mu/m, a modal gain coefficient of 16 cm/spl middot/kA/sup -1/ at threshold and a waveguide loss of 18 cm/sup -1/ have been estimated. The gain evolution confirms an earlier assumption that cross-absorption restricted laser action to above 6 /spl mu/m wavelength.     

High-modal gain 1300-nm In(Ga)As-GaAs quantum-dot lasers

A semiconductor laser containing seven InAs-InGaAs stacked quantum-dot (QD) layers was grown by molecular beam epitaxy. Shallow mesa ridge-waveguide lasers with stripe width of 120 /spl mu/m were fabricated and tested. A high modal gain of 41 cm/sup -1/ was obtained at room temperature corresponding to a modal gain of /spl sim/6 cm/sup -1/ per QD layer, which is very promising to enable the realization of 1.3-/spl mu/m ultrashort cavity devices such as vertical-cavity surface-emitting lasers. Ground state laser action was achieved for a 360-/spl mu/m-cavity length with as-cleaved facets. The transparency current density per QD layer and internal quantum efficiency were 13 A/cm/sup 2/ and 67%, respectively.     

High-T/sub 0/ strain-compensated InGaAsSb-AlGaAsSb quantum-well lasers emitting at 2.43 /spl mu/m

Strain-compensated InGaAsSb-AlGaAsSb quantum-well (QW) lasers emitting near 2.5 /spl mu/m have been grown by solid-source molecular beam epitaxy. The relatively high arsenic composition causing a tensile strain in the Al/sub 0.25/GaAs/sub 0.08/Sb barriers lowers the valence band edge and the hole energy level, leading to an increased hole confinement and improved laser performance. A 60% external differential efficiency in pulsed mode was achieved for 1000-/spl mu/m-long lasers emitting at 2.43 /spl mu/m. A characteristic temperature T/sub 0/ as high as 163 K and a lasing-wavelength temperature dependence of 1.02 nm//spl deg/C were obtained at room temperature. For 2000 /spl times/ 200 /spl mu/m/sup 2/ broad-area three-QW lasers without lateral current confinement, a low pulsed threshold of 275 A/cm/sup 2/ was measured.     

High-power 2.3-/spl mu/m GaSb-based linear laser array

High-power 2.3-/spl mu/m In(Al)GaAsSb-GaSb type-I double quantum-well diode laser arrays were fabricated and characterized. Linear laser arrays with 19 100-/spl mu/m-wide elements on a 1-cm-long bar generated 10 W in continuous-wave (CW) mode and 18.5 W in quasi-CW mode (30 /spl mu/s/300 Hz) at a heatsink temperature of 18/spl deg/C. Array power conversion efficiency peaked at 30 A and was about 9%. Device internal efficiency was about 50%. Individual laser differential gain with respect to current was about twice as high as in InP-based laser heterostructures, demonstrating the potential of GaSb-based material system for high-power CW room-temperature laser diode arrays.     

Room-temperature 2.81-/spl mu/m continuous-wave operation of GaInAsSb-AlGaAsSb laser

GaInAsSb-AlGaAsSb multiple quantum-well (QW) lasers with an emission wavelength of 2.81 /spl mu/m are reported. The ridge waveguide lasers with highly strained QWs show continuous-wave laser emission up to 25/spl deg/C; in pulsed mode, the lasers operate up to 60/spl deg/C. For pulsed operation, a threshold current density of 360 A/cm/sup 2/ is found for devices with 30-/spl mu/m stripe width and 2-mm cavity length at room temperature. A low threshold current density at infinite length of 248 A/cm/sup 2/ is derived.     

Room temperature performance of low threshold 1.34-1.44-/spl mu/m GaInNAs-GaAs quantum-well lasers grown by molecular beam epitaxy

Room temperature lasing emission at 1.338 and 1.435 /spl mu/m with threshold current densities of 1518 and 1755 A/cm/sup 2/, respectively, is obtained in broad area GaInNAs-GaAs laser diodes (LDs) grown by molecular beam epitaxy. The 1.338-/spl mu/m LDs show a power output per facet up to 0.20 W/A, a characteristic temperature (T/sub 0/) of 78 K, and an external transparency current density (J/sub tr/) of 0.77 kA/cm/sup 2/. Increasing the lasing wavelength to 1.435 /spl mu/m results in a larger J/sub tr/ of 1.16 kA/cm/sup 2/ and a lower T/sub 0/ of 62 K, due to larger nonradiative recombination. However, the 1.435-/spl mu/m LDs still display a power output per facet up to 0.15 W/A, and a high internal quantum efficiency of 52%. These improved performances are achieved without the need to use strain compensation layers, Sb as a surfactant during the quantum-well growth, or a postgrowth thermal anneal cycle.     

Fabrication of high-performance InGaAsN ridge waveguide lasers with pulsed anodic oxidation

We have demonstrated high-performance InGaAsN triple-quantum-well ridge waveguide (RWG) lasers fabricated using pulsed anodic oxidation. The lowest threshold current density of 675 A/cm/sup 2/ was obtained from a P-side-down bonded InGaAsN laser, with cavity length of 1600 /spl mu/m and contact ridge width of 10 /spl mu/m. The emission wavelength is 1295.1 nm. The transparency current density from a batch of unbonded InGaAsN RWG lasers was 397 A/cm/sup 2/ (equivalent to 132 A/cm/sup 2/ per well). High characteristic temperature of 138 K was also achieved from the bonded 10/spl times/1600-/spl mu/m/sup 2/ InGaAsN laser.     

High-performance poly-Si TFTs made by Ni-mediated crystallization through low-shot laser annealing

High-performance polycrystalline silicon (poly-Si) thin-film transistors (TFTs) have been fabricated using metal-induced crystallization followed by laser annealing (L-MIC). Laser annealing after MIC was found to yield a major improvement to the electrical characteristics of poly-Si TFTs. At a laser fluence of 330 mJ/cm/sup 2/, the field effect mobility increased from 71 to 239 cm/sup 2//Vs, and the minimum leakage current reduced from around 3.0/spl times/10/sup -12/ A//spl mu/m to 2.9/spl times/10/sup -13/ A//spl mu/m at a drain voltage of 5 V. In addition, the dependence of the TFT characteristics on the laser energy density was much weaker than that for conventional excimer laser annealed poly-Si TFTs.