一种低成本压电无阀微泵的研制

提出了一种低成本的由压电材料驱动的平面扩张/收缩管无阀微泵的制作工艺.通过数值模拟确定了扩张/收缩管扩张角的最优值,在此基础上,采用光刻和湿法刻蚀工艺,刻蚀了300μm深的泵腔基片和100 μm深的盖片;使用等离子体清洗技术将其与PDMS薄膜键合,完成了可以实现单向泵送的压电无阀微泵样机制作.研究了该压电无阀微泵样机的...     

Study of an innovative one-sided actuating piezoelectric valveless micropump with a secondary chamber

Previous studies have indicated that a one-sided actuating piezoelectric micropump (OAPMP) combined with two valves may enhance the liquid flow rate to 4.1 ml/s and make it possible to reach the maximum pump head of 9807 Pa in a limited space. In this study, an innovative one-sided actuating piezoelectric valveless micropump (OAPMP-valveless) has been developed to actuate fluid at a higher flow rate in one direction by adding a secondary chamber. The secondary chamber plays a key role in the application of the valveless micropump: the flow rate of the pump can reach 0.989 ml/s by adding a secondary chamber. The maximum pump head is 1522.5 Pa when using the 0.3 mm-thick secondary diaphragm and the 0.5 mm-thick primary diaphragm. In addition, if a nozzle/diffuser element is applied to the OAPMP-valveless with a secondary chamber, the flow rate can be further improved to 1.183 ml/s at a frequency of 150 Hz. A three-dimensional numerical model of the valveless micropump has been built to compare the measured results with the simulated results.     

A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass

A thermopneumatic-actuated polydimethylsiloxane (PDMS)-based micropump has been fabricated and its properties have been characterized. Diffusers are used as flow-rectifying elements instead of passive check valves. The advantages of the proposed micropump are the low cost fabrication process and the transparent properties of the PDMS and indium tin oxide (ITO)-coated glass. We present a PDMS micropump that is easily integrated with in-channel PDMS microvalves on the same substrate. The flow rate of the micropump increases linearly with increasing applied pulse voltage to the ITO heater with resistance of 6.54 kΩ. The peak flow rate of 78 nl/min is observed at the duty ratio of 10% for the applied pulse voltage of 55 V at 6 Hz.     

A micropump using amplified deformation of resilient membranes through oil hydraulics

Toward the development of micropumps that operate under low external air pressures, a new polydimethylsiloxane (PDMS), pneumatic micropump using amplified deformation of resilient PDMS membranes through oil hydraulics was presented in this study. The new micropump employed oil-hydraulic chambers with pre-filled mineral oil to amplify the deformation of flexible PDMS membranes; it therefore delivered a higher pumping rate and withstood a greater back pressure while requiring a significantly lower external air pressure for actuation. The optimized pumping rate and back pressure of the oil-hydraulic micropump compared favorably to previous pneumatic micropumps. Characterization of the micropump revealed that the oil hydraulics amplified the deformation of PDMS membranes by approximately threefold and improved the pumping rate and the back pressure by 77 and 21 %, respectively. With high pumping performances and the capability to be driven with only a low air pressure, this new micropump may therefore become a key component in future microfluidic devices and lab-on-a-chip systems.     

Fully coupled modeling and design of a piezoelectric actuation based valveless micropump for drug delivery application

The precise control over the drug delivery involved in several vital applications including healthcare is required for achieving a therapeutic effect. For such precise control/manipulation of the drugs, micropumps are used. These micropumps are basically of two types viz. check valve-based and valveless micropumps. The valveless micropumps are preferable due to the congestion-free operation of diffuser/nozzle valves. In this paper, design optimization of a valveless piezo-electric actuation based micropump is carried out using COMSOL Multiphysics 5.0 by coupling two Multiphysics interface modules namely fluid–structure interaction and piezoelectric physics modules. Using simulation studies, the influence of pump design parameters including diffuser angle, diffuser length, neck width, chamber depth, chamber diameter and diaphragm thickness on net flow rate is studied. An optimal set of design parameters for the proposed micropump is identified. Further, the influence of actuation frequency on the flow rate is analysed. It is found that the proposed micropump is capable to deliver a net flow rate of 20 µl/min and a maximum back pressure attainable is 200 Pa.

     

Novel surface acoustic wave (SAW)-driven closed PDMS flow chamber

In this article, we demonstrate a novel microfluidic flow chamber driven by surface acoustic waves. Our device is a closed loop channel with an integrated acoustic micropump without external fluidic connections that allows for the investigation of small fluid samples in a continuous flow. The fabrication of the channels is particularly simple and uses standard milling and PDMS molding. The micropump consists of gold electrodes deposited on a piezoelectric substrate employing photolithography. We show that the pump generates a pressure-driven Poiseuille flow, investigate the acoustic actuation mechanism, characterize the flow profile for different channel geometries, and evaluate the driving pressure, efficiency and response time of the acoustic micropump. The fast response time of our pump permits the generation of non-stationary flows. To demonstrate the versatility of the device, we have pumped a red blood cell suspension at a physiological rate of 60?beats/min.     

A PMMA valveless micropump using electromagnetic actuation

We have fabricated and characterized a polymethylmethacrylate (PMMA) valveless micropump. The pump consists of two diffuser elements and a polydimethylsiloxane (PDMS) membrane with an integrated composite magnet made of NdFeB magnetic powder. A large-stroke membrane deflection (~200 m) is obtained using external actuation by an electromagnet. We present a detailed analysis of the magnetic actuation force and the flow rate of the micropump. Water is pumped at flow rates of up to 400 µl/min and backpressures of up to 12 mbar. We study the frequency-dependent flow rate and determine a resonance frequency of 12 and 200 Hz for pumping of water and air, respectively. Our experiments show that the models for valveless micropumps of A. Olsson et al. (J Micromech Microeng 9:34, 1999) and L.S. Pan et al. (J Micromech Microeng 13:390, 2003) correctly predict the resonance frequency, although additional modeling of losses is necessary.     

Peristaltic micropump system with piezoelectric actuators

This work presents a driving system for a peristaltic micropump that is based on piezoelectric actuation. The effects of the actuation sequence on pump performance are also considered. A valveless peristaltic micropump based on piezoelectric actuation is designed and fabricated using microelectromechanical system technology. The pump has three parts––silicon, Pyrex glass and commercially available bulk PZT (lead zirconate titanate) chips. The peristaltic micropump actuated by PZT chips comprises three chambers that are in series. The driving system consists of an ATmega 8535 microprocessor, a high voltage power supply, three differential amplifiers, a phase controller, an A/D converter, a 555 oscillator and an LCD module. It is supplied via a 110 Vrms 60-Hz AC line and is programmable. The system can produce step-function signals with voltages of up to 100 V_pp and frequencies ranging from 10 Hz to 1 kHz, as the inputs for the pump. Fluid pumping with air is successfully demonstrated. Additionally, 3-, 4- and 6-phase actuation sequences for the pump are designed and used to study the effects on pump performance, as revealed by the flow rate and the displacement of a pump diaphragm. The experimental results show that the flow rate and the displacement of the diaphragm actuated by the 4-phase sequence exceed those actuated by the 3- and 6-phase sequences. A flow rate of 17.6 μl min⁻¹ and a displacement of 2.91 μm (peak-to-peak) in 4-phase peristaltic motion are achieved at 100 Hz and 100 V_pp. The results demonstrate that the pump actuated in the 4-phase sequence is the most efficient. Consequently, the actuation sequences can affect the pump performance.     

一种基于MEMS技术的压电微泵的研究

介绍了一种基于MEMS技术的压电微泵。该微泵利用聚二甲基硅氧烷(PDMS)作为泵膜,使用了一个主动阀和一个被动阀,并利用压电双晶片作为驱动部件。压电双晶片和PDMS泵膜的组合可以产生较大的泵腔体积改变和压缩比,显著降低了加工成本,并提高了成品率。对压电微泵的输出流量进行了测试,结果显示:电压、频率以及背压对流量均有显著影响。在100 V,25Hz的方波驱动下,该压电微泵的最大输出流量为458μL/m in,最大输出压力为6 kPa。     

Design and fabrication of an electrochemically actuated microvalve

A microfluidic valve based on electrochemical (ECM) actuation was designed, fabricated using UV-LIGA microfabrication technologies. The valve consists of an ECM actuator, polydimethylsiloxane (PDMS) membrane and a micro chamber. The flow channels and chamber are made of cured SU-8 polymer. The hydrogen gas bubbles were generated in the valve microchamber with Pt black electrodes (coated with platinum nanoparticles) and filled with 1 M of NaCl solution. The nano particles coated on the working electrode helps to boost the surface-to-volume ratio of the electrode for faster reversible electrolysis and faster valve operation. To test the functionality of the microvalve, a simple micropump based on ECM principle was also integrated in the system to deliver a microscopic volume of fluid through the valve. The experimental results have showed that an approximately 300 μm deflection of valve membrane was achieved by applying a bias voltage of ?1.5 V across the electrodes. The pressure in the valve chamber was estimated to be about 200 KPa. Experimental results proved that the valve can be easily operated by controlling the electrical signals supplied to the ECM actuators.     

LIGA fabrication and test of a DC type magnetohydrodynamic (MHD) micropump

 This paper reports a research effort to design, microfabricate and test a DC type magnetohydrodynamic (MHD) micropump using LIGA method (Menz et al., 1991). The micropump is driven using the Lorentz force and can be used to deliver electrically conductive fluids. In operation, a DC voltage is supplied across the electrodes to generate the distributed body force on the fluid in the pumping chamber, and therefore a constant pressure difference along the pumping chamber. The external magnetic field was supplied using permanent magnets. The major advantage of a MHD-based micropump is that it does not contain any moving parts. It may have potential applications in medicine delivery, biological and biomedical studies. The test of the DC prototype micropump shows that bubble generation mechanism affect the performance significantly and an AC driving mechanism may be used to improve the performance.     

Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers

We developed an innovative type of varifocal liquid lens actuated by electrostatic parallel plates. The 3 mm diameter lens is made of a polymer membrane that encapsulates a high permittivity liquid in a cavity on top of a glass wafer. Annular electrodes situated below the membrane and on the glass wafer form the electrostatic parallel plates actuator. By applying a voltage between the electrodes, the electrostatic actuation generated reduces the gap and pushes the liquid towards the center of the lens changing the curvature of the membrane.Compared to previous liquid lenses, very compact devices (≤6 mm × 6 mm × 0.7 mm) working at a reduced supply voltage (<25 V) are demonstrated. Wave front measurements indicate an optical power change of 8 m⁻¹ at 22 V_RMS that can be further improved. The lenses were fabricated on 200 mm wafers using standard microelectronics processes that make our solution a promising small outline, low voltage and low cost candidate for auto-focus devices in camera phones.     

磁能驱动微型泵的性能实验研究

在电磁场驱动原理的基础上,设计并研制了一种磁能驱动的微型泵。微型泵包括进／出液管、扩散管／喷管、驱动薄膜、腔体、电磁线圈和永磁体。微型泵的整体尺寸约为Ф11mm×4mm,腔室半径为5mm,深2mm。利用正交实验方法,对微型泵的性能进行了测试。在电压为4V、驱动薄膜厚度为6μm、频率为5Hz方波脉冲的最佳实验条件下,微型泵的最大泵送流速约为0．21mL／min。     

Magnetically controlled valve for flow manipulation in polymer microfluidic devices

A simple, external in-line valve for use in microfluidic devices constructed of polydimethylsiloxane (PDMS) is described. The actuation of the valve is based on the principle that flexible polymer walls of a liquid channel can be pressed together by the aid of a permanent magnet and a small metal bar. In the presence of a small NdFeB magnet lying below the channel of interest, the metal bar is pulled downward simultaneously pushing the thin layer of PDMS down thereby closing the channel stopping any flow of fluid. The operation of the valve is dependent on the thickness of the PDMS layer, the height of the channel, the gap between the chip and the magnet and the strength of the magnet. The microfluidic channels are completely closed to fluid flows ranging from 0.1 to 1.0 μL/min commonly used in microfluidic applications.     

Contact CMOS imaging of gaseous oxygen sensor array

We describe a compact luminescent gaseous oxygen (O₂) sensor microsystem based on the direct integration of sensor elements with a polymeric optical filter and placed on a low power complementary metal-oxide semiconductor (CMOS) imager integrated circuit (IC). The sensor operates on the measurement of excited-state emission intensity of O₂-sensitive luminophore molecules tris(4,7-diphenyl-1,10-phenanthroline) ruthenium(II) ([Ru(dpp)₃]²⁺) encapsulated within sol-gel derived xerogel thin films. The polymeric optical filter is made with polydimethylsiloxane (PDMS) that is mixed with a dye (Sudan-II). The PDMS membrane surface is molded to incorporate arrays of trapezoidal microstructures that serve to focus the optical sensor signals on to the imager pixels. The molded PDMS membrane is then attached with the PDMS color filter. The xerogel sensor arrays are contact printed on top of the PDMS trapezoidal lens-like microstructures. The CMOS imager uses a 32 × 32 (1024 elements) array of active pixel sensors and each pixel includes a high-gain phototransistor to convert the detected optical signals into electrical currents. Correlated double sampling circuit, pixel address, digital control and signal integration circuits are also implemented on-chip. The CMOS imager data is read out as a serial coded signal. The CMOS imager consumes a static power of 320 μW and an average dynamic power of 625 μW when operating at 100 Hz sampling frequency and 1.8 V DC. This CMOS sensor system provides a useful platform for the development of miniaturized optical chemical gas sensors.     

A pneumatic micropump incorporated with a normally closed valve capable of generating a high pumping rate and a high back pressure

This study reports on a new pneumatic micropump integrated with a normally closed valve that is capable of generating a high pumping rate and a high back pressure. The micropump consists of a sample flow microchannel, three underlying pneumatic air chambers, resilient polydimethylsiloxane (PDMS) membrane structures and a normally closed valve. The normally closed valve of the micropump is a PDMS-based floating block structure located inside the sample flow microchannel, which is activated by hydraulic pressure created by the peristaltic motion of the PDMS membranes. The valve is used to effectively increase pumping rates and back pressures since it is utilized to prevent backflow. Experimental results indicate that a pumping rate as high as 900 μL/min at a driving frequency of 90 Hz and at an applied pressure of 20 psi (1.378 × 10⁵ Nt/m²) can be obtained. The back pressure on the micropump can be as high as 85 cm-H₂O (8,610.5 Nt/m²) at the same operation conditions. The micropump is fabricated by soft lithography processes and can be easily integrated with other microfluidic devices. To demonstrate its capability to prevent cross contamination during chemical analysis applications, two micropumps and a V-shape channel are integrated to perform a titration of two chemical solutions, specifically sodium hydroxide (NaOH) and benzoic acid (C₆H₅COOH). Experimental data show that mixing with a pH value ranging from 2.8 to 12.3 can be successfully titrated. The development of this micropump can be a promising approach for further biomedical and chemical analysis applications.     

Optimization design of multi-material micropump using finite element method

This paper presents a micropump fabricated from low cost materials with specific goal of cost reduction. The micropump does not require any valve flap and comprises one plastic pump polyether–ether–ketone (PEEK) body, one metal diaphragm, and three piezoelectric ceramics to form piezoelectrically actuated diaphragm valves. The valve actuation simplifies micropump structural designs and assembly processes to make the pump attractive for low cost bio-medical drug delivery applications. A detailed optimization design of geometric parameters of the piezoelectrically actuated diaphragm is undertaken by use of 3D finite element method (FEM) to maximize piezoelectric actuation capability and ensure actuation reliability. An optimized geometric dimensional design: the ratio of thicknesses between the piezoelectric ceramics and the metal diaphragm, and the lateral dimension of the piezoelectric ceramic, is obtained through simulations. Based on the optimized design, a good agreement has been reached between simulated and measured strokes of the micropumps. The tested results show that the micropump has a high pump flow rate for air, up to 39 ml/min, and for water, up to 1.8 ml/min, and is capable of ensuring diaphragm’s maximum stress and strain is within material strength for reliable work.     

Normally-closed peristaltic micropump with re-usable actuator and disposable fluidic chip

We present a new peristaltic micropump offering three key features: (i) a disposable pump body and a re-useable actuator unit, (ii) an intrinsic normally-closed mechanism blocking unintended liquid flows up to a pressure of 100 kPa and (iii) a backpressure independent pump performance up to 40 kPa. The modular concept basing on a re-usable actuator unit and a low-cost disposable microfluidic chip enables an easy and cost-efficient exchange of all contaminated parts after use, which addresses especially the needs in the health care sector. The intrinsic normally-closed feature blocks liquid flow in both directions up to a pressure difference of 100 kPa when the electric power is off. The micropump is actuated in a peristaltic manner by three piezostack actuators. Up to a frequency of 15 Hz the pump rate increases linearly with operation frequency leading to a pump rate of 120 μL/min. This was proved for an operation voltage of 140 V by pumping water. In addition the pump rate is independent on backpressure up to 40 kPa and shows a linear decrease for higher pressure differences. The maximum achievable backpressure at zero flow rate was extrapolated to be 180 kPa. As for all peristaltic micropumps, the pump is bidirectional, e.g. the pump direction can be changed forward to reverse mode.     

Valveless micropump with acoustically featured pumping chamber

This article presents a new design of a valveless micropump. The pump consists of a nozzle-shaped actuation chamber with acoustic resonator profile, which functions as both pumping chamber and flow rectification structure. The pump is fabricated by lamination of layers made of polymethyl-methacrylate (PMMA) and dry adhesives, and is driven by a piezoelectric disk. The performance of the pump has been studied by both experimental characterization and numerical simulations. Both the experimental and numerical results show that the pump works well at low frequencies of 20–100 Hz to produce relatively high backpressures and flowrates. Moreover, the numerical simulations show that in the pumping frequency range, the flow patterns inside the chamber are found to be asymmetric in one pumping cycle so as to create a net flowrate, while outside the pumping frequency range, the flow patterns become symmetric in the pumping cycle. The pumping frequency can be shifted by modifying the pump configuration and dimensions. The pump is suitable for microfluidic integrations.