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非球面曲面的超精密加工与测量技术的研究 总被引:9,自引:0,他引:9
全面介绍了“九五”重点预研课题——“非球面曲面的超精密加工与测量技术”的研究内容及其成果。其主要研究内容有:非球面曲面的超精密加工系统的研究、非球面曲面的超精密加工工艺的研究、非球面曲面的超精密测量技术的研究。其主要研究成果有:高精度、高刚性高速空气静压主轴技术,高精度、高刚性闭式液体静压导轨技术,超精密车削系统,超精密磨削系统,高性能、开放式数控系统基础集成技术等其它相关技术。 相似文献
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2003年5月的一天,一块亮如镜面的铝材凸球面车削样件被小心翼翼地从非球面曲面超精加工机床卸下,送入国家级光学计量检验中心检验。检验结果为:车削加工样件的面形精度PV=0.228μm,表面粗糙度Ra=0.0078μm,这意味着表面粗糙度仅有不到8nm。这是三○三所研制的非球面曲面超精密加工机床在用户西安应用光学研究所进行交付验收时的一个场景。非球面曲面超精密加工机床的成功研制,表明三○三所超精密加工技术国防科技重点实验室比较全面地攻克了非球面曲面光学零件的超精密加工与测量的关键技术,打破了国外的技术封锁,使我国的非球面曲面光学… 相似文献
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非球面光学零件的超精密磨削技术 总被引:5,自引:1,他引:5
本文首先介绍了非球面光学零件的作用、硬脆材料的超精密加工的一个热点──延性方式磨削,实现延性方式磨削的条件和应用了延性方式磨削技术的非球面光学零件的超精密磨削加工机床,最后介绍了非球面光学零件的ELID起精密后削技术。 相似文献
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超精密非球面镜面模具直轴磨削的研究 总被引:2,自引:6,他引:2
研究了非球面镜面模具直轴超精密磨削技术,给出了非球面镜面模具超精密加工机理、算法原理、软硬件结构、系统实现、工艺分析及实例应用,开发了小型超精密非球面镜面加工系统SGTCAM1.0.研究结果表明,系统原理正确,加工出的非球面光学零部件形状误差在100 nm以下,表面粗糙度在5 nm以下,达到纳米级加工精度.开发的系统使用方便,成本低. 相似文献
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脆性材料的光学非球面零件以其特有的优势,在军用和民用产品中越来越普及.光学非球面器件材料有一系列不利于加工的特点,被公认为是最难加工的光学零件.概述了超精密加工中单点金刚石车削技术在脆性材料非球面加工中的应用,并详细地分析了单点金刚石车削加工时刀具几何参数、X偏置、刀具半径补偿对非球面加工表面质量的影响. 相似文献
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脆性材料的光学非球面零件以其特有的优势,在军用和民用产品中越来越普及。光学非球面器件材料有一系列不利于加工的特点,被公认为是最难加工的光学零件。概述了超精密加工中单点金刚石车削技术在脆性材料非球面加工中的应用,并详细地分析了单点金刚石车削加工时刀具几何参数、X偏置、刀具半径补偿对非球面加工表面质量的影响。 相似文献
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G. V. Borovskii M. A. Shavva E. M. Zakharevich S. V. Grubyi A. R. Maslov 《Russian Engineering Research》2015,35(12):883-886
Basic design principles for ultraprecision equipment are outlined. The parameters of the basic components are considered, and machining technology for brittle optical materials is described. 相似文献
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Aspheric ultraprecision machining is increasingly important to the manufacturing industry. The performance of aspheric optical components manufactured by mass-production is largely dependent on the form error of molds and dies. It is believed that productivity of a machining process could be improved if the form error is predictable. In this study, the response surface methodology (RSM) was employed to derive predictive models of rough and compensation cuttings for an aspheric convex mold, with an outer aperture of ϕ12 mm and curve height of 0.6 mm. Two control factors, the depth of cut and spindle speed, were selected for study. The 2K factorial design with four center points was adopted. Two linear models for both rough and compensation cuttings were derived experimentally based on the form errors obtained. The models adequacy was examined through ANOVA (analysis of variance) results for the surface responses. It was found that the linear model of rough cutting is adequate, reflected by the significant regress coefficients and the high R2 value. However, the model of compensation cutting was found to be inadequacy. 相似文献
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静压气浮溜板主要用在超精密加工机床中,它的振动将通过刀架直接反映到被加工工件表面,影响工件的表面质量。采用自行研制的空气作动器作为执行器,以实现无摩擦接触;采用神经网络-PID控制策略,通过BP神经网络在线学习调整PID控制参数,实现最佳参数组合。实验结果表明气浮溜板的振动主动控制系统是可行性的和有效性的。 相似文献
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Yingchun Liang Wanqun Chen Yazhou Sun Xichun Luo Lihua Lu Haitao Liu 《The International Journal of Advanced Manufacturing Technology》2014,70(9-12):1915-1921
The mechanical structure has a main influence of the machining performance and the servo performance. In this study, a mechanical structure-based design method is presented to design and optimize an ultraprecision fly-cutting machine tool. This method takes full account of the influence of mechanical components on the machining performance and servo performance at the design stage. The effect of the components structure on the roughness of machined surface is discussed, and an optimized structural form of the aerostatic spindle is given. The influence of the mechanical structure on the control system and electronic drives is discussed, and an integrated dynamic design model is built and used to optimize the hydrostatic slide. Furthermore, the impact of mechanical system dynamic performance of the machine tool on the processing topography is analyzed by the finite element model of the machine tool. This method provides a theoretical basis for the design and optimization of mechanical components and machine tools stiffness loop. 相似文献
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玻璃精密模压成形是一种高效率、绿色环保的先进光学元件制造技术,近年来得到了飞速发展。本文首先介绍了光学元件的需求与种类,提出玻璃精密模压成形技术存在的问题。综述了国内外近年来精密模压成形光学透镜的重要研究进展,其中包括光学玻璃材料、模具材料与涂层、模具加工、模压过程仿真以及各种参数对透镜质量的影响。阐述了光学模压成形元件的坯料、镀膜技术和冷加工技术、成形元件的残余应力分布以及折射率、模具与玻璃间摩擦效应、模具的补偿技术、成形透镜质量的预测、模压技术的其他应用等。最后,对未来光学玻璃精密模压成形趋势进行了预测。 相似文献
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超声波磁流变复合抛光中几种工艺参数对材料去除率的影响 总被引:1,自引:0,他引:1
提出了一种光学抛光的新方法——超声波磁流变复合抛光。介绍了该抛光方法的基本原理和实验装置,进行了超声波磁流变复合抛光实验,采用轮廓仪实测了光学玻璃超声波磁流变抛光材料去除轮廓曲线。通过该项工艺实验,研究了五种工艺参数(磁场强度、超声振幅、抛光工具头与工件的间隙、抛光工具头转速、工件转速)对光学玻璃材料去除率的影响。在一定实验条件下,获得的材料去除率为0.139 μm/min,并获得了超声波磁流变复合抛光工艺参数与材料去除率的关系曲线,得出了光学玻璃超声波磁流变复合抛光的材料去除规律。 相似文献
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X. D. Zhang F. Z. Fang Q. Q. Wu X. L. Liu H. M. Gao 《The International Journal of Advanced Manufacturing Technology》2013,67(9-12):2217-2224
Off-axis aspheric mirrors are kernel components widely applied in various fields. The off-axis aspheric mirrors with large ratio of sag height to diameter are increasingly employed in many cases for smaller system and better optical performance. Slow slide servo-machining is one of the most currently efficient methods used to fabricate the off-axis aspheric mirrors. However, it is still difficult to machine off-axis aspheric mirrors with large ratio of sag height to diameter. This paper analyzes failure reason in a normal angle, including angle and tool oscillating range. The coordinate transformation machining is proposed to make the machining feasible by reducing the ratio of sag height to diameter. The cutting path is accurately designed by the coordinate transform. Freeform prisms are experimentally machined to prove that the proposed method also works well for complex surfaces. 相似文献
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超高回转精度空气静压轴系是光盘刻槽机的核心部件。本文叙述了空气静压轴承的研制过程,通过实验值与理论值对比,证明本设计合理,计算正确,加工与装配工艺性好,装调后主轴回转精度不大于0.0147μm,满足了不大于0.05μm的使用要求,鉴定认为达到八十年代世界先进水平。 相似文献
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提出一种新型非球面加工技术——弹性变形面形复制加工技术,该技术综合利用光学玻璃材料的线弹性特性以及面形复制加工机理,将复杂的非球面加工转变为简易的平面加工,适合加工薄型大曲率半径非球面。阐述弹性变形面形复制加工技术的基本机理,随后以直径为40 mm、顶点曲率半径为2 500 mm的抛物面作为目标面形,通过有限元仿真确定使工件与靠模紧密贴合所需的工件最小去除厚度,建立加工过程的材料去除模型,并由此确定加工时间。在所搭建的弹性变形面形复制加工系统上进行加工试验,试验结果证明所建立材料去除模型有效。最终工件加工面形精度为PV 0.62 μm。对加工面形精度影响因素进行分析,并提出改进工件加工面形精度的措施。 相似文献