共查询到18条相似文献,搜索用时 187 毫秒
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基于电容感应元的多层液位传感器的研究 总被引:1,自引:0,他引:1
在分析各种液位传感器的基础上,提出一种新型的基于电容感应元的多层液位传感器。介绍了其小电容节点式的结构、电容感应元的测量原理及误差分析,最后给出了变送器的设计思路。该传感器能满足一定使用条件下多层液位的测量。 相似文献
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提出一种双轴电容式微机械加速度计的结构形式.采用一个质量块敏感两个正交方向的加速度,设计的弹性支撑结构巧妙地实现了正交方向的解耦,且结构稳定性好,以梳齿电容实现差动的静电驱动、电容检测.利用MATLAB软件对敏感结构参数、性能参数进行了计算、分析,用ANSYS仿真软件对敏感结构进行了静态和模态分析,从理论上验证了所提出的双轴电容式微机械加速度计整体结构的可行性. 相似文献
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电阻式湿度传感器的制作方法 总被引:1,自引:0,他引:1
现时,用于测量相对湿度的传感器有机械式、电阻式等多种。其中电阻式湿度传感器的感应速度较快,结构较紧凑,而且适应性也优于机械式传感器。其代表性产品如磺化聚苯乙烯薄膜式湿度传感器。就现有的电阻式湿度传感器而言,多采用与敏感层粘着方式,相互保持一定间隔,对所配置的一对薄电极间的电阻变化进行测量。一般感湿层的电阻都很高,或增大电极的对向面积,或缩小电极的间隔,以 相似文献
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一种新型变电容面积MEMS惯性传感器与传统的梳齿电容传感器相比,具有对梳齿电容不平行敏感度低,可加测试电压高等优点。通过对该传感器在低真空封装条件下的惯性阶跃响应特性分析,着重研究了不同梳齿电容倾斜角度对该传感器的阶跃惯性信号响应的影响,以及不同倾斜角度梳齿的位移响应和测试电压、空气真空度的关系,并把该结果和梳齿结构的情况进行比较。结果表明,工艺因素对变电容面积MEMS惯性传感器在低真空封装下的阶跃惯性响应影响很小;另外,该结构上可加的测试电压可以是梳齿电容结构上可加测试电压的近10倍,这有利于减小接口电路的噪声。以上分析论证了该新型传感器有利于降低器件的工艺要求和提高传感器的分辨率。 相似文献
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一种新型变电容面积MEMS惯性传感器与传统的梳齿电容传感器相比,具有对梳齿电容不平行敏感度低,可加测试电压高等优点.通过对该传感器在低真空封装条件下的惯性阶跃响应特性分析,着重研究了不同梳齿电容倾斜角度对该传感器的阶跃惯性信号响应的影响,以及不同倾斜角度梳齿的位移响应和测试电压、空气真空度的关系,并把该结果和梳齿结构的情况进行比较.结果表明,工艺因素对变电容面积MEMS惯性传感器在低真空封装下的阶跃惯性响应影响很小;另外,该结构上可加的测试电压可以是梳齿电容结构上可加测试电压的近10倍,这有利于减小接口电路的噪声.以上分析论证了该新型传感器有利于降低器件的工艺要求和提高传感器的分辨率. 相似文献
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Sougata Kumar Kar K. B. M. Swamy Banibrata Mukherjee Siddhartha Sen 《Microsystem Technologies》2013,19(1):79-87
The present paper discusses a method for testing a MEMS capacitive accelerometer structure through electrical actuation. The response of a standard MEMS capacitive accelerometer structure for different electrical actuation voltages has been analyzed. The accelerometer structure along with a capacitance sensing integrated circuit (IC) MS3110 is modeled and simulated. A set of proto-type accelerometer structures is fabricated and packaged in PGA packages. The packaged MEMS structures and MS3110 IC are integrated on a printed circuit board. The MEMS structure is actuated by applying the electrical signal through the actuation fingers and the change in capacitance is measured by the MS3110 IC. The simulated and measured results show some interesting phenomenon like dipping and frequency doubling which are useful for initial testing and characterization of a MEMS accelerometer structure. 相似文献
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The performance of micro-machined sensors is primarily determined via the sensitivity of sensing electrode to displacement. This paper presents the design, modelling, optimization and fabrication of an active gap reduction mechanism used on a conventional comb drive to enhance the capacitance in a three axes capacitive micro accelerometer. The design parameters of the active gap reduced comb drive (AGRCD) are optimized for best performance. The finite element analysis of the AGRCD is performed for design verification. The modeling and simulation results demonstrated a 534 % increase in sensitivity of the three axes capacitive micro accelerometer. The three axes capacitive micro accelerometer with AGRCD is fabricated using a commercially available standard metal-multi user MEMS processes. 相似文献
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This paper presents a new micromachined z-axis accelerometer as well as a new method to sense the out-of-plane displacement capacitively via comb finger arrays. The new design built the z-accelerometer using eight folded beam suspension to minimize the off axis sensitivities in both the x- and y- directions. The proposed method implements the sensing electrode as a comb finger arrays surrounding the sensor. This method enables the realization of the sensor by bulk micromachining process, increases the sense capacitance and reduces the off-axis sensitivity. This process allows building the micromachined accelerometer with large inertial mass. This work introduces the design and simulation for this accelerometer. The introduced method results in a high sense capacitance as well as high sensitivity. The simulated sense capacitance is 19.6627 pF. The sensor sensitivity is 2.037 μm/g with a very small total noise equivalent acceleration of 3.096 μg/ $ \sqrt {Hz} $ . 相似文献
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为满足对振动环境下10 Hz以下低频小量程加速度信号的高精度测量需求,提出了一种基于石英微工艺的新型窄带宽MEMS加速度计,其敏感元件采用变间距式差分电容梳齿结构。采用有限元分析手段,对敏感元件质量块尺寸、梳齿长度、U型梁刚度、盖板结构、阻尼和带宽等参数进行了综合优化设计。敏感元件采用石英晶片经湿法腐蚀体工艺制作,加速度计样机经过了实际性能测试和环境适应性试验,带宽为8.9 Hz,非线性度约为0.7%,可以满足飞行器小量程低频加速度参数的测量需求。 相似文献
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改进传感器检测电容几何结构能有效改善传感器的性能。本文对梳齿电极结构、栅形电极结构及梳栅电极结构检测电容的性能特点进行分析比较,重点分析了振子质量、空气阻尼、系统阻尼系数比以及灵敏度等特性,得出在相同的外轮廓尺寸、支撑梁、振子厚度以及振子到衬底的距离的条件下,栅形结构传感器的振子质量最大,空气阻尼最小,适合制作高分辨率的传感器;在大气下,梳齿结构灵敏度增加的同时空气阻尼力也会增加,且振子质量较小,适合制作高灵敏度,低分辨率传感器结构;梳栅结构的特点居于两者之间,适合制作需要兼顾分辨率和灵敏度的传感器。通过实例计算,证明了该结果。 相似文献
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A three-axis SOI accelerometer sensing with both in-plane and vertical comb electrodes 总被引:1,自引:0,他引:1
A three-axis capacitive accelerometer based on silicon-on-insulator is designed and fabricated. In the accelerometer, totally
eight groups of capacitors are compactly arranged around an octagonal proof mass. The four groups of capacitors along orthogonal
direction with in-plane comb electrodes detect XY acceleration, while the other four groups of capacitors along diagonal direction with vertical comb electrodes detect Z acceleration.
Measurements of in-plane and vertical motion by the respective in-plane and vertical comb electrodes enable direct detection
for all the three axes with differential capacitive sensing scheme. For the fabricated accelerometer in the size of 4 × 4 mm2, the capacitance sensitivities of in-plane and out-of-plane accelerometers are 145.3 and 9.1 fF/g, respectively. 相似文献
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A lateral accelerometer has been designed, simulated, and fabricated using a 3-mask high-aspect ratio technology. Electron beam lithography and high-density plasma etching in an inductively coupled plasma source enabled aspect ratios >30 to be achieved. This makes possible beams with very small spring constants. Combining the ability to measure very small displacement of a proof mass due to narrow capacitive gaps between comb fingers, a highly sensitive accelerometer can be obtained. The fabricated accelerometer with 1 μm beams and 0.2 μm comb gaps had a spring constant of 0.127 N/m, which is close to the calculated values of 0.146 N/m. Based on the capacitance measurements, the accelerometer sensitivity is calculated to be 6.3 fF/g. Reducing the beam width to 0.4 μm lowered the spring constant to 0.03 N/m, and an improved equivalent sensitivity of 79.2 fF/g is calculated. The minimum detectable acceleration is on the order of a few microgravity over a range of hundreds of gravities 相似文献