KDP晶体微塑性域增强金刚石切削方法研究

针对KDP在SPDT切削过程中容易产生凹坑、划痕、裂纹等表面缺陷问题,提出利用热激励的方式增大KDP晶体塑性切削域深度,降低各向异性、机床运动误差、环境振动等因素对加工过程的影响,进而提高SPDT切削加工过程稳定性的方法。通过纳米压痕试验获得了KDP晶体表面在不同温度状态下的硬度和脆塑性转变深度变化规律,并在SPDT机床上采用金刚石刀具开展了KDP晶体飞切划痕实验,进一步验证了适当提高KDP晶体温度可以增大KDP晶体脆塑性转变临界切削深度。在此基础上,对KDP晶体开展了不同温度状态下的切削实验,实验结果表明在相同工艺参数下,随着温度的升高,表面粗糙度Sa值从3.2nm降低至1.6nm。     

超精密平面飞切机床关键技术研究

研制了一种用于KDP晶体加工的平面飞切机床,该机床直线轴基于直线电动机驱动、液体静压导轨支承;刀具旋转轴采用高刚度气浮主轴+高刚度主轴旋转机构。基于高精度分辨率位置反馈+线性驱动器+PID控制算法,直线轴获得了1 mm/min速度下,0.018 mm/min的低速波动以及±0.01μm的位置精度;刀具微进给装置采用差动螺纹进给来实现,最终获得了进给分辨率1μm、锁紧后位置移动量小于1μm高精度进给。在优化工艺参数后,金刚石飞切机床加工100 mm×100 mm×10mm的KDP晶体后获得表面粗糙度Rq优于2 nm高精度指标;加工400 mm×400 mm×30 mm的铝镜后获得面形PV值优于3μm的高精度指标。     

KDP晶体侧棱高效高精加工装备研制

研制了一种用于KDP晶体侧棱加工的磨削+飞切组合加工装备,该装备采用气体静压主轴与气体静压导轨,同时设计专用的高刚度角度调节机构,以适应不同侧棱角度的加工。该装备解决了现有KDP晶体侧棱加工中加工效率和精度的问题。经实验测试,获得了KDP晶体侧棱面的高精度粗糙度指标(2.4 nm),同时采用磨飞组合加工效率为单纯飞切加工的7倍。     

DFC-800LC超精密单点金刚石飞切机床控制系统设计与开发

根据超精密单点金刚石飞切机床工艺特点,采用"IPC+总线+伺服驱动器"架构实现X轴/主轴的运动控制,并通过IPC与西门子PLC的OPC通讯,实现飞切机床逻辑控制及智能状态监测。针对测控系统新架构进行功能梳理,基于Qt5.9开发平台,完成飞切机床人机交互界面的开发。经过长时间工艺实验测试,机床软硬件运行良好,控制系统性能稳定,实现KDP晶体加工粗糙度达1.173nm,大口径铝件加工PV值优于3μm的高精度指标。     

KDP晶体表面波纹度的监测与分析

采用二次通用回归旋转组合设计方法和单点金刚石飞刀切削(Single Point Diamond Turning,简称SPDT)技术,对KDP晶体进行切削试验。利用声发射技术对KDP晶体不同表面波纹度的信号进行采集,对试验结果进行测量与分析。通过时域分析可得到:均方值可作为KDP晶体加工过程中表面波纹度在线监测的重要时域特征量;通过频域分析可得到:150~200 k Hz可作为在线监测KDP晶体表面波纹度度的特征频段。     

KDP晶体飞切加工主轴气膜波动分析

大口径KDP晶体因其特殊的物理材料属性,常通过单点金刚石飞切加工[1].提出了一种基于大涡模拟的气膜波动模型,针对空气静压轴承内部结构,研究涡流的运动变化,通过对流场时变特性的分析得到气膜波动形成的原因,以便更好地理解主轴气膜波动对于飞切加工的影响,为提高加工精度和效率奠定理论基础.     

KDP晶体表面波纹度的分析与研究

针对工艺参数对KDP晶体表面波纹度值的影响问题,基于二次通用回归旋转组合方法优化KDP晶体单点金刚石飞刀切削工艺参数组合,采用单因素和多因素法分析各因素对表面波纹度的影响规律,并以此为基础优化工艺参数,进行KDP晶体切削实验。试验表明:各因素对表面波纹度的影响程度大小顺序为:进给量二次项、进给量、转速、转速与进给量的交互作用。优化出表面波纹度值最小时的加工工艺参数组合:刀具圆弧半径为9mm;转速为633r/min;进给量为11.8μm/r;背吃刀量为21μm,利用此组工艺参数加工出KDP晶体的表面波纹度为0.02μm。     

KDP晶体表面质量主要影响因素的研究

针对KDP晶体超精密加工过程中出现的表面波纹度和粗糙度问题,采用二次通用回归旋转组合优化设计法及单点金刚石飞刀切削(SPDT)技术,对KDP晶体进行切削实验,对加工过程进行在线监测,利用多因素交互作用分析KDP晶体表面波纹度和粗糙度的影响规律。最后利用偏最小二乘法及lingo软件获得最佳加工工艺参数组合,即当刀具圆弧半径为9mm;转速为800 r/min;进给量为9.184μm/r;背吃刀量为21μm时,加工出KDP晶体的表面波纹度值为0.020μm,表面粗糙度值为0.017μm,对后续能够加工出更大口径(400×400)mm的高质量KDP晶体以满足航空航天领域应用具有重要的实际意义。     

改普通电机为气浮电机的研究

介绍了超精密加工中主轴电机的振动及其对超精密加工的影响;在原有伺服电机的基础上设计并制作了气浮电机;用加速度传感器提取电机的振动信号,并用AD3525FFT频谱分析仪对电机的振动加速度信号进行了分析,测试出在电机转速为500r/min时普通伺服主轴电机和气浮主轴电机的振动和速度分别为0.436×10-4g和0.108×10-4g,用改造的气浮主轴伺服电机构成的超精密加工系统,加工KDP晶体的表面粗糙度达到了8nm。本项研究对提高超精密加工主轴系统精度具有一定的实用价值。     

超精密加工中表面波纹度与主轴系统不平衡关系

针对超精密加工工件表面出现的表面波纹度问题,研究超精密机床液压主轴系统不平衡问题与表面波纹度之间的关系。加工工件的面形检测结果首先利用选出的最优小波变换进行各个尺度的分解及重构,接着利用功率谱密度分析小波分解后各个尺度上的信号谱能量得到相关频率信息,结合主轴系统部件的模态及旋转频率信息,对检测结果中主要误差特征进行提取。主轴系统频率信息由两种方法进行计算,从面形波纹度中提取出来的典型误差特征包含机床主轴固有频率和旋转频率及其高倍频,电源基频50 Hz及其整数倍频和次谐波信号,这些频率特征正好与主轴系统不平衡频率以及电动机工频噪声干扰频谱特征对应,这说明主轴系统不平衡是导致加工工件波纹度出现的主要原因,这种辨识方法为超精密机床加工精度的提高提供了辨识依据。     

Finite element simulation of diamond tool geometries affecting the 3D surface topography in fly cutting of KDP crystals

Diamond tool has significant influences on the finished surface quality in fly cutting of potassium dihydrogen phosphate (KDP) crystals. In this work, the nanoindentation and dimensional analysis are employed to establish the material constitutive equation of KDP crystals, i.e., the variation curve of flow stress vs. plastic strain. As expected, a novel 3D finite element (FE) model is developed for diamond fly cutting of KDP crystals, and the generation of 3D surface topography is simulated by multi-run cutting calculations, in which the movements of diamond tool are configured to be identical to the actual feed rate and cutting velocity. Subsequently, the coordinates of the nodes on the topmost surface as freshly machined are collected to evaluate the surface roughness, which enables the detailed analyses of the effect of diamond tool geometries on the achieved surface roughness of KDP crystals. The results suggest an optimal selection of tool geometries, i.e. ?25° rake angle and 8° clearance angle. With the increment of tool nose radius, surface roughness decreases correspondingly. Moreover, the larger defect or sharpness of tool cutting edge produces the worse surface roughness. Diamond fly cutting experiments are carried out with different rake angles, in which the cutting parameters are the same as the values used in FE simulations. The measured surface roughness has a satisfied consistency with the simulated data, which demonstrates that the developed 3D FE cutting model and the related simulations are reliable.     

Form error in diamond turning

The main feature of ultraprecision, single point diamond turning (SPDT) is its ability to produce high quality surface finishes on the order of nanometers while meeting tight form tolerances on the order of micrometers. This capability allows for the production of optical devices with minimum post-processing operations. The issue of form error is critical since it may severely compromise the performance of the designed optical system. Tool-workpiece relative vibration is a major cause of this error. In this article, the authors have demonstrated that imbalance of the spindle is a major cause of form error which eventually leads to a structured error called “spindle star” that appears as straight concentric spokes radiating out from the center of the part. The formation of a spindle star pattern can be explained using Campbell's rotordynamics analysis. This analysis explains how assisted air-hammering instability and cross-coupling effect of the air-bearing spindle can contribute to spindle star. This experimental approach used force and accelerometer data with the help of modal analysis to conclude that spindle star is a synchronous error and is a function of rotational frequency of the spindle and its harmonics. The integer harmonic from the Campbell's waterfall diagram predicts the number of spokes in the spindle star. It was also observed that the height of the spindle star undulations increases with higher rotational speed. It was also observed that cutting material and tool geometry has no influence on the spindle star formation; rather this is an inherent characteristic of air-bearing journals. Finally, the analysis was successfully validated by changing the natural frequency of the spindle by adding mass.     

切点约束和探针针尖半径补偿的金刚石刀具刃口钝圆半径求解方法

本文对金刚石刀具刃口钝圆半径求解方法展开研究,以有效提升金刚石刀具刃口锋利度的测量精度。文中分析了原子力显微镜(AFM)扫描探针几何形貌对金刚石刀具刃口锋利度测量结果的影响,并提出了基于切点约束和AFM探针针尖半径补偿的刀具刃口钝圆半径求解方法;讨论了消噪滤波、测量角度误差以及切点分离方法对测量结果的影响;在高精度测量平台上完成了金刚石刀具刃口锋利度测量,并将被测量的刀具用于飞切加工KDP晶体。结果表明:提出的刃口钝圆半径求解方法能够准确求解金刚石刀具的刃口锋利度,测量结果能很好地描述金刚石刀具的刃口锋利程度,可以为金刚石超精密切削加工的选刀和用刀提供有效指导。     

Dynamic characterization of machining systems

In the working space model of machining, an experimental procedure is implemented to determine the elastic behaviour of the machining system. In this paper, a dynamic characterization and vibration analysis has long been used for the detection and identification of the machine tool condition. The natural frequencies of the lathe machining system are required (Ernault HN400??France) according to three different situations with no cutting process are acquired. The system modal analysis is used to identify the natural frequencies. These frequencies are then compared to the ones obtained on the spindle numerical model by finite element method. This work is validated by experimental tests based on measures of the lathe machine tool frequencies domain. The main objective is to identify a procedure giving the natural frequency values for the machine tool components, in order to establish a better condition in the cutting process of the machine tool.     

EFFECT OF CRYSTALLOGRAPHIC ORIENTATION ON CUTTING FORCES AND SURFACE FINISH IN DUCTILE CUTTING OF KDP CRYSTALS

In order to investigate the influence of material anisotropy in ductile cutting of Potassium Dihydrogen Phosphate (KDP) crystals, experiments of face cutting of (001) plane of KDP crystals are carried out by using an ultra-precision lathe with a single point diamond tool. The cutting forces, surface finish, and surface roughness in all crystallographic orientations of the machined surface are measured, and a power spectrum analysis method is used to reveal the cutting force patterns. The experimental results show that the cutting forces and surface roughness vary greatly with different crystallographic orientations of KDP crystal, and that amplitude variation of cutting forces and surface finish is closely related with the cutting parameter of the maximum undeformed chip thickness. With the maximum undeformed chip thickness below 30 nm, the amplitude variation of cutting force and surface finish is minimized, and a super-smooth surface with consistent surface finish in all the crystallographic orientations can be achieved. The surface roughness is 2.698 nm (Ra) measured by Atomic Force Microscope (AFM). These findings provide criteria for achieving a large-scale KDP crystal with consistent super-smooth surface using ductile cutting technology.     

The use of D-optimal design for modeling and analyzing the vibration and surface roughness in the precision turning with a diamond cutting tool

Using a diamond cutting tool in the precision turning process, the vibration of tool-tip has an undesirable effect on the machined surface??s quality. The objective of this paper is to present the mathematical models for modeling and analyzing the vibration and surface roughness in the precision turning with a diamond cutting tool. Machining parameters including the spindle speed, feed rate and cutting depth were chosen as numerical factor, and the status of lubrication was regarded as the categorical factor. An experimental plan of a four-factor??s (three numerical plus one categorical) D-optimal design based on the response surface methodology was employed to carry out the experimental study. A micro-cutting test is conducted to visualize the effect of vibration of tool-tip on the performance of surface roughness. With the experimental values up to a 95% confidence interval, it is fairly well for the experimental results to present the mathematical models of the vibration and surface roughness. Results show that the spindle speed and the feed rate have the greatest influence on the longitudinal vibration amplitude, and the feed rate and the cutting depth play major roles for the transverse vibration amplitude. As the spindle speed increases, the overall vibration of tool-tip tends to more stable condition which leads to the results of the best machined surface. The effects of the feed rate and cutting depth provide the reinforcement on the overall vibration to cause the unstability of cutting process and exhibit the result of the worst machined surface.     

车削精度主动控制系统与动态模型的研究

本文分析了以压电陶瓷作为驱动元件的振动切削刀具的振动特性和实现刀具谐振切削的电路匹配,分析了主轴误差补偿方法的特点,提出以振动切削和误差补偿为基础的提高车削加工精度的主动控制系统,并建立了该系统的动态模型,推导其频率响应函数,实验证实了该方法能全面地提高工件的加工质量。     

KDP晶体各向异性对切削力的影响研究

对KDP晶体单点金刚石切削中动态切削力产生的原因及变化规律进行深入研究,以揭示材料各向异性对KDP晶体超精密加工切削力的影响。以微观塑性力学和断裂力学理论为基础,建立了切削力新模型,并优选出最佳晶体切削方向,以降低由材料各向异性引起的切削力波动对加工表面质量的影响。     

基于ANSYS的CKS6125数控机床主轴的模态分析

建立CKS6125机床主轴的三维实体模型,基于ANSYS有限元分析,对CKS6125机床主轴进行了模态分析,得出了CKS6125机床主轴前五阶固有频率和振型。掌握CKS6125机床主轴各阶振动模态的特点,有利于CKS6125机床主轴结构的设计,对提高数控机床主轴的设计质量具有重要意义。