通用型高温压阻式压力传感器研究

针对石油化工等领域高温下压力测量的要求,设计了压阻式压力传感器硅芯片,采用SIMOX 技术SOI晶片,在微加工平台上制作了硅芯片.对不同的用户工况设计了装配结构,采用耐高温封装工艺,研究了耐高温微型压力传感器封装材料匹配与热应力消除技术,解决了内外引线的技术难点.从低成本、易操作性出发,设计了温度系数补偿电路,研制了精度高、稳定性佳的耐高温通用压力传感器.     

光纤法珀式SiC耐高温压力传感器的制造与测试

针对高温环境下压力参数的原位测试需求,基于碳化硅（SiC）材料优异的耐高温特性,研制了一种光纤法珀式全SiC结构耐高温压力传感器。采用超声振动铣磨的加工方法制备了表面粗糙度Ra约11.9 nm的SiC传感膜片。利用SiC晶片氢氟酸辅助直接键合技术,实现SiC传感膜片与SiC基板的高强度气密性键合。搭建了高温压力测试系统,对制备的SiC耐高温压力传感器样机进行了高温环境下的性能测试。结果表明,该传感器能够实现600 ℃高温环境下 0~4 MPa范围内的压力测量;600 ℃下传感器的压力灵敏度达到104.42 nm/MPa,具有较高的线性度,R2＞0.99。     

基于虚拟仪器的压力传感器自动补偿校正系统

针对压力传感器的误差和温度漂移问题，推导了传感器组件的输出电压与压力、温度的关系，并提出了一种基于虚拟仪器技术的压力传感器自动补偿校正系统。该系统能对压力传感器的零点误差、灵敏度误差和温度漂移进行自动的补偿校正。实际测试显示，补偿校正前传感器相对期望值的精度≤13．2％，经补偿校正后，传感器组件相对期望值的精度≤1％。这说明该系统可高效地对压力传感器进行补偿校正，且补偿校正效果好，适合对压力传感器进行批量补偿校正。     

The consistency of pressure effects between three identical Coriolis flow meters

Coriolis flow meters are one of the most popular flow measurement technologies in the world today for high accuracy measurement of single-phase liquids, gases and even slurries. They are capable of measuring both mass and density directly and can also infer the volume flow. They can be installed in challenging process environments and have been successfully deployed with non-Newtonian fluids, high viscosity fluids, pulsating flows and even at extreme temperatures and pressures.However, it is known that operating most Coriolis flow meters at a pressure which differs from the original calibration pressure requires compensation else significant measurement errors will occur. Pressure compensation coefficients appear to vary by manufacturer, meter geometry and sensor material. Furthermore, the manufacturer published pressure compensation coefficients are not fully traceable. To date, there has not been sufficient research exploring the consistency of the pressure compensation for identical Coriolis flow meters.This paper presents the findings of a research conducted at the TÜV SÜD National Engineering Laboratory (NEL) Elevated Pressure and Temperature (EPAT) oil flow facility to investigate the pressure effect uniformity for matching Coriolis devices. The first stage of the experimental programme calibrated three identical DN80 Coriolis flow meters at a range of pressures with no pressure compensation applied. A pressure compensation coefficient was then derived from the data and the Coriolis meters were then calibrated at two alternative pressures to ascertain the robustness of the coefficients and whether the compensation could be extrapolated successfully.From the experimental results, it can be concluded that the pressure effect for the three DN80 Coriolis flow meters was extremely repeatable and consistent with a discrepancy of less than 0.025% between the devices at 80 bar. Whilst the mass flow was significantly affected by fluid pressure, the fluid density did not appear to be influenced. The pressure corrected results were also well within the manufacturer specification of ±0.1%.     

基于USB的数字压力传感器的补偿方法

介绍了压阻型扩散硅压力传感器的温漂及补偿方法,设计了一种基于USB接口传递的数字压力传感器实现温漂的数字补偿.传感器包括了压力传感器、补偿电路和上位机界面等3部分.对数字补偿的硬件电路进行了详细介绍,数字补偿电路以ATmega8单片机和FT232为核心.传感器通过采集压力传感器的输出信号,再对采集到的信号进行分析处理后将数据打包通过USB接口给上位机,压力值在上位机界面显示出来,可实现对测量压力的数字化补偿和实时传送.     

耐高温压阻式压力传感器研究与进展

传统的硅扩散压阻式压力传感器用重掺杂4个P型硅应变电阻构成惠斯顿电桥的力敏检测模式，采用PN结隔离，高温压阻式压力传感器取消了PlN结隔离，与半导体集成电路平面工艺兼容，符合传感器的发展方向。根据力敏材料的分类，分别介绍了多晶硅中高温压力传感器、SiC高温压力传感器和单晶硅SOI（silicon on insulator）高温压力传感器的基本工作原理和国内外的发展现状，重点论述了BESOI（bonding and etch-backSOI）、SMARTCUT和SIMOX（separation by implanted oxygen）技术的SOI晶片加工工艺。以及由此晶片微机械加工成的芯片封装的高温微型压力传感器部分特性，对此领域的发展作了展望。     

压力传感器温度漂移补偿的RBF网络模型

压力传感器在实际应用中普遍存在着温度漂移现象,这降低了传感器的测量精度,因此需要采取适当的补偿措施对传感器的温度附加误差进行修正,从而提高测量的准确性.本文针对在压力传感器电路中采用温度硬件补偿措施成本较高且精度不高的情况,建立了RBF网络软件补偿模型.RBF网络具有良好的非线性映射能力和泛化能力,采用带遗忘因子的梯度下降算法进行RBF网络的参数调整,实验表明RBF算法学习速度快,精度高.对实验中采集的数据进行非线性补偿,取得了良好的效果,大大提高了压力传感器的性能和测量精度.     

基于电化学传感器的SF6分解气体检测技术研究

SF_6气体绝缘类电力设备具有体积小、结构紧凑、绝缘性能稳定、运行可靠等优点,被广泛应用于特高压和超高压电力系统中。当电力设备内部发生绝缘故障时,绝缘气体SF_6由于局部放电及局部过热发生分解反应,最终生成数种稳定SF_6分解气体,通过对这些分解气体组分进行定量检测和分析,可反演出设备内的故障或安全隐患。通过搭建电化学传感器响应特性的测试平台,在气体检测罐中模拟SF_6分解气体并进行检测,得到了CO、SO_2和H_2S气体电化学传感器的响应特性。实验结果显示出CO传感器有负的温度特性,SO_2和H_2S电化学传感器具有正的温度特性,并采用二次曲线拟合确定了传感器的温度补偿曲线;同时还发现CO、SO_2和H_2S气体传感器均具有良好的线性特性,但SO_2传感器会对H_2S气体做出响应,通过采用交叉干扰计算,建立传感器信号矩阵算法保证了测量结果的准确度。最后,通过运用多组分混合气体验证了传感器信号矩阵算法具有很高的可靠性和准确度。     

Lamb波压差式微流量传感器

为提高微流体系统中的流量检测灵敏度,增大动态检测范围,实现温度补偿,提出了一种基于Lamb波的压差式微流量传感系统.该传感系统主要由两个Lamb波压力传感器和微通道组成,它利用Lamb波薄膜内应力的敏感特性,以频率计量的方式间接测量微通道两端的压力差;并采用双Lamb波压力传感器构成差动式测量结构进行温度补偿.对长20 mm,宽1 mm,高50 μm的微通道进行了流量测试实验,结果表明:在流量测试范围内,微通道两端的频率差与流量基本呈线性变化,其线性相关系数为0.999 9;在微流量传感器未进行优化的前提下,最小检测量为0.627 μL/s.     

曲线拟合在航空发动机内壁温度测试中的应用

借助螺塞热电偶温度传感器和多路数据采集卡,建立了瞬态温度测试系统,提出利用曲线拟合外推法来实现对发动机内壁瞬态温度的测量.在此基础上,利用氢氧焰模拟航空发动机内部瞬态高温源,分别得出了传感器和红外测温仪测得的发动机内壁表面温度变化曲线.实验结果表明:2条结果曲线的整体变化趋势,特别是在峰值处具有较好的一致性,且其精度达到1.84％,从实验上验证了该方法的可行性.     

Design of C8051F350-based Intelligent Pressure Sensor

In order to overcome the deficiencies of traditional pressure sensors,a kind of intelligent pressure sensors with temperature correction is designed.According to the intelligent sensor system of composition and range of applications,with fully taking into account the parameters of the connection between components of co-ordination,we chose a good usability,high reliability and low cost components composed of the entire measurement system,with controlling and dealing with in 80C51 microcontroller,the system had the temperature and pressure parameters with automatic measurement,amplification,A/D conversion,the weak signal locked amplification,as well as Phase-Sensitive Detection(PSD),common-mode signal rejection,the collected signal de-noising processing,cross-sensitivity of the decoupling and show the results.It also has a self-test,automatic temperature compensation and on-site communications and other functions.     

多晶硅纳米薄膜牺牲层压力敏感结构设计

为使多晶硅纳米薄膜良好的压阻特性在MEMS(微机电系统)压阻传感器中得到有效应用,在设计牺牲层结构压力传感器芯片中探索性地采用了多晶硅纳米薄膜作为应变电阻,并给出这种传感器的设计方法。分析了牺牲层结构弹性膜片的应力分布对传感器灵敏度的影响,优化设计了量程为0~0.2 MPa多晶硅纳米膜压力传感器芯片的结构参数。有限元法仿真结果表明:在保证传感器灵敏度大于50 mV/(MPa.V)的前提下,零点温漂系数可小于1×10-3FS/℃;灵敏度温漂(无电路补偿)可小于1×10-3FS/℃.为高灵敏、低温漂、低成本的高温压力传感器集成化发展提供了一条可行途径。     

High resolution gas volume change sensor

Changes of gas quantity in a system can be measured either by measuring pressure changes or by measuring volume changes. As sensitive pressure sensors are readily available, pressure change is the commonly used technique. In many physiologic systems, however, buildup of pressure influences the gas exchange mechanisms, thus changing the gas quantity change rate. If one wants to study the gas flow in or out of a biological gas pocket, measurements need to be done at constant pressure. In this article we present a highly sensitive sensor for quantitative measurements of gas volume change at constant pressure. The sensor is based on optical detection of the movement of a droplet of fluid enclosed in a capillary. The device is easy to use and delivers gas volume data at a rate of more than 15 measurements/s and a resolution better than 0.06 microl. At the onset of a gas quantity change the sensor shows a small pressure artifact of less than 15 Pa, and at constant change rates the pressure artifact is smaller than 10 Pa or 0.01% of ambient pressure.     

Development of a parallel-plate avalanche counter to perform conversion electron Mössbauer spectroscopy at low temperatures

We describe an experimental setup based on a sealed parallel-plate avalanche counter, which allows conversion electron M?ssbauer spectroscopy at temperatures down to 120 K. A study of the counting gas performances is carried out in order to find out the appropriate operating conditions. The detector can work in a wide range of pressures and voltages at room and low temperatures, for both iron- and tin-based M?ssbauer transitions. An estimation of the gas gain is obtained by using a simple approach, which considers the avalanche gas process in parallel-plate geometry. The gas gain as a function of the filling pressure shows a maximum at room temperature and a monotonic increase at low temperature. The experimental setup has been tested with the determination of the Debye temperature of beta-Sn, SnO(2), and epsilon-FeSi.     

Laminar flame speeds for n-butanol/air mixtures at elevated pressures and temperatures: An experimental and numerical study

Laminar flame speeds of n-butanol/air premixed flames were measured experimentally and numerically at elevated pressures and temperatures for a wide range of equivalence ratios. Laminar flame speeds were obtained experimentally from the temporal evaluation of the flame front of spherically outwardly propagating flames at zero stress rate. The shadowgraph technique was employed to gain optical access to the constant volume combustion chamber. Flame propagation images were captured by a high-speed camera and MATLAB codes were used to process the images and calculate laminar flame speeds. Flame speeds have been calculated numerically using CHEMKIN-Pro based on a short reaction mechanism for n-butanol oxidation, which was derived from a previously published full reaction mechanism. Numerical predictions were in qualitative agreement with experimental data. The effects of initial pressure and temperature elevation were analyzed. Also, the effect of simultaneous elevation of initial pressures and temperatures is documented. For all experimental conditions, the maximum flame speed was found at around equivalence ratio 1.1. In general, flame speeds decreased with the elevation of initial pressure and increased with initial temperature elevation.

     

Adsorption-desorption characteristics of explosive vapors investigated with microcantilevers

Understanding the kinetics of adsorption and desorption of explosive vapors such as TNT from surfaces is important in the design of sensors. We report for the first time, the adsorption-desorption characteristics of TNT from a Si-microcantilever exposed to vapors of TNT. It was observed that TNT readily sticks to the exposed Si surface with the adsorption kinetics showing an initial exponential behavior followed by roughly linear kinetics. It was also observed that for cantilever temperatures close to room temperature, TNT desorbs spontaneously from the surface with decaying exponential kinetics. Based on the known equilibrium partial vapor pressures of TNT, the "effective" sticking coefficient for the silicon oxide surface at room temperature under the experimental conditions was calculated to be about 0.02. This information can be very useful in the design of sensors and that of vapor-delivery systems.     

粮食水分在线检测控制系统

介绍了一种用于颗粒状粮食水分在线检测控制系统。该系统将圆柱型结构的粮食水分检测传感器置于干燥设备的出口、入口处，粮食水分变化导致传感器电容量变化，经过精密的信号采集、转换与处理，完成粮食水分的在线实时检测。该传感器还借助微处理器对测量信号的非线性与温度漂移进行了数字化的修正和补偿。反馈信号输出控制变频器，从而实现控制排粮机构运行转速。根据需要，该系统可以增加打印干燥机的多个工作参量，实现对料位及热风温度的控制等辅助功能以及自动报警功能。     

A temperature and pressure controlled calibration system for pressure sensors

A data acquisition and experiment control system has been developed to characterize and calibrate prototype pressure sensors capable of operation in a cryogenic environment. The system consists of: a personal computer for acquisition of sensor output voltage, sensor operating parameters, and data processing including numerically derived corrections for sensor thermal offset, sensitivity variations, and thermal errors; an environmental chamber capable of controlling temperature to within 1 °C over a −184 °C to 220 °C range; a pressure standard capable of generating pressures to within 1 part in 100,000 over a 0 to 344.74 kPa range; and a data logger for recording outputs from system multimeters, precision resistance temperature devices, thermocouples, and power supplies. The system utilizes a modified, commercially available interface board to allow the demultiplexing, digitation, and input of remotely multiplexed, pulse amplitude modulated pressure signals from pressure sensor arrays to the PC bus. System software is discussed and includes: sensor data acquisition, algorithms for numerically derived thermal offset and sensitivity correction, and operation of the environmental chamber and pressure standard.     

探空仪气压传感器温度补偿的新方法

气压传感器是探空仪中的核心部件之一,传统的硅压阻传感器应用于探空仪中还存在着一些不足。本文介绍了一种集成气压传感器,提出了集成气压传感器中的两种新的温度控制补偿方法,并依据试验数据做出了对比分析。     

基于神经网络融合的传感器温度误差补偿

海底油气输送管道漏磁检测装置工作于高温高压环境下,其中的InSb霍尔传感器对温度敏感,需要补偿温度误差。该文构建了多传感器融合模型,将多个霍尔传感器和温度传感器的输出用径向基函数（RBF）神经网络进行融合,用遗传算法对网络进行训练。实验室检测数据和反演出的缺陷形状表明,采用神经网络融合方法进行误差补偿,简单方便,霍尔传感器输出的平均温度敏感系数降低了两个数量级。