Three-channel false colour AFM images for improved interpretation of complex surfaces: A study of filamentous cyanobacteria

Imaging signals derived from the atomic force microscope (AFM) are typically presented as separate adjacent images with greyscale or pseudo-colour palettes. We propose that information-rich false-colour composites are a useful means of presenting three-channel AFM image data. This method can aid the interpretation of complex surfaces and facilitate the perception of information that is convoluted across data channels. We illustrate this approach with images of filamentous cyanobacteria imaged in air and under aqueous buffer, using both deflection-modulation (contact) mode and amplitude-modulation (tapping) mode. Topography-dependent contrast in the error and tertiary signals aids the interpretation of the topography signal by contributing additional data, resulting in a more detailed image, and by showing variations in the probe-surface interaction. Moreover, topography-independent contrast and topography-dependent contrast in the tertiary data image (phase or friction) can be distinguished more easily as a consequence of the three dimensional colour-space.     

Iterative image-based modeling and control for higher scanning probe microscope performance

In this article, we develop an image-based approach to model and control the dynamics of scanning probe microscopes (SPMs) during high-speed operations. SPMs are key enabling tools in the experimental investigation and manipulation of nano- and subnanoscale phenomena; however, the speed at which the SPM probe can be positioned over the sample surface is limited due to adverse dynamic effects. It is noted that SPM speed can be increased using model-based control techniques. Modeling the SPM dynamics is, however, challenging because currently available sensing methods do not measure the SPM tip directly. Additionally, the resolution of currently available sensing methods is limited by noise at higher bandwidth. Our main contribution is an iterative image-based modeling method which overcomes these modeling difficulties (caused by sensing limitations). The method is applied to model an experimental scanning tunneling microscope (STM) system and to achieve high-speed imaging. Specifically, we model the STM up to a frequency of 2000 Hz (corresponds to approximately 23 of the resonance frequency of our system) and achieve approximately 1.2% error in 1 nm square images at that same frequency.     

轻敲式扫描探针显微镜

介绍了扫描探针显微镜的发展与分类，对原子力显微镜的三种工作模式的优劣作了比较；重点叙述了轻敲式原子力显微镜的工作原理；引出了轻敲式原子力显微镜应用的一种新技术－相位成像技术，最后简单介绍了由北京市中科机电设备公司于2001年9月推出的Nspm-6800型扫描探针显微镜。     

扫描探针显微镜的研究

介绍了扫描探针显微镜的起源及其发展过程，同时对扫描探针显微镜中最常用的两种：STM、AFM作了原理和结构介绍，最后介绍了SPM探针的形状及其性能数据。     

原子力显微镜发展近况及其应用

扫描隧道显微镜(简称STM)和原子力显微镜(简称AFM),它们也可统称为扫描探针显微镜(简称SPM)。原子力显微镜(AFM) 是近十几年来表面成像技术中最重要的进展之一。与扫描电子显微镜相比,它具有较高的分辨率。本文将讨论原子力显微镜的工作原理、原子力显微镜的发展概况和应用。     

MEMS-based fast scanning probe microscopes

Scanning probe microscopy is a frequently used nanometer-scale surface investigation technique. Unfortunately, its applicability is limited by the relatively low image acquisition speed, typically seconds to minutes per image. Higher imaging speeds are desirable for rapid inspection of samples and for the study of a range of dynamic surface processes, such as catalysis and crystal growth. We have designed a new high-speed scanning probe microscope (SPM) based on micro-electro mechanical systems (MEMS). MEMS are small, typically micrometer size devices that can be designed to perform the scanning motion required in an SPM system. These devices can be optimized to have high resonance frequencies (up to the MHz range) and have very low mass (10⁻¹¹ kg). Therefore, MEMS can perform fast scanning motion without exciting resonances in the mechanical loop of the SPM, and hence scan the surface without causing the image distortion from which conventional piezo scanners suffer. We have designed a MEMS z-scanner which we have integrated in commercial AFM (atomic force microscope) and STM (scanning tunneling microscope) setups. We show the first successful AFM experiments.     

An integrated approach to piezoactuator positioning in high-speed atomic force microscope imaging

In this paper, an integrated approach to achieve high-speed atomic force microscope (AFM) imaging of large-size samples is proposed, which combines the enhanced inversion-based iterative control technique to drive the piezotube actuator control for lateral x-y axis positioning with the use of a dual-stage piezoactuator for vertical z-axis positioning. High-speed, large-size AFM imaging is challenging because in high-speed lateral scanning of the AFM imaging at large size, large positioning error of the AFM probe relative to the sample can be generated due to the adverse effects--the nonlinear hysteresis and the vibrational dynamics of the piezotube actuator. In addition, vertical precision positioning of the AFM probe is even more challenging (than the lateral scanning) because the desired trajectory (i.e., the sample topography profile) is unknown in general, and the probe positioning is also effected by and sensitive to the probe-sample interaction. The main contribution of this article is the development of an integrated approach that combines advanced control algorithm with an advanced hardware platform. The proposed approach is demonstrated in experiments by imaging a large-size (50 microm) calibration sample at high-speed (50 Hz scan rate).     

Atomic force microscope (AFM) combined with the ultramicrotome: a novel device for the serial section tomography and AFM/TEM complementary structural analysis of biological and polymer samples

A new device (NTEGRA Tomo) that is based on the integration of the scanning probe microscope (SPM) (NT‐MDT NTEGRA SPM) and the Ultramicrotome (Leica UC6NT) is presented. This integration enables the direct monitoring of a block face surface immediately following each sectioning cycle of ultramicrotome sectioning procedure. Consequently, this device can be applied for a serial section tomography of the wide range of biological and polymer materials. The automation of the sectioning/scanning cycle allows one to acquire up to 10 consecutive sectioned layer images per hour. It also permits to build a 3‐D nanotomography image reconstructed from several tens of layer images within one measurement session. The thickness of the layers can be varied from 20 to 2000 nm, and can be controlled directly by its interference colour in water. Additionally, the NTEGRA Tomo with its nanometer resolution is a valid instrument narrowing and highlighting an area of special interest within volume of the sample. For embedded biological objects the ultimate resolution of SPM mostly depends on the quality of macromolecular preservation of the biomaterial during sample preparation procedure. For most polymer materials it is comparable to transmission electron microscopy (TEM). The NTEGRA Tomo can routinely collect complementary AFM and TEM images. The block face of biological or polymer sample is investigated by AFM, whereas the last ultrathin section is analyzed with TEM after a staining procedure. Using the combination of both of these ultrastructural methods for the analysis of the same particular organelle or polymer constituent leads to a breakthrough in AFM/TEM image interpretation. Finally, new complementary aspects of the object's ultrastructure can be revealed.     

Investigating ultra-thin lubricant layers using resonant friction force microscopy

The ultrasonic friction mode of an atomic force microscope is a scanning probe technique allowing one to analyze the load and velocity dependence of friction. The technique is based on evaluation of the resonance behavior of an AFM cantilever when in contact with a vibrating sample surface. The effect of load and lateral displacement of the sample surface on the shape of the torsional resonance spectra of the AFM cantilever is evaluated under dry and lubricated sliding conditions. A characteristic flattening of the torsional resonance curve has been observed at large surface displacements, resulting from the onset of sliding friction in the AFM cantilever–sample surface contact. An analytical model describing torsional cantilever vibrations in Hertzian contact with a sample surface is presented, and numerical simulations have been carried out in order to confirm that the flattening of the resonance curve occurs with the onset of the sliding friction in the contact.     

Control of a hybrid active-passive vibration isolation system

Precision vibration control is a major issue in nanotechnology. In particular, nano-precision measurement systems such as Atomic force microscopes (AFM) and Scanning probe microscopes (SPM) are sensitive to ground vibrations. The amplitude of a ground vibration is typically sub-micrometer and ground vibrations adversely affect both the precision and accuracy of these measuring equipment. Consequently, hybrid active-passive vibration isolation systems are typically used as they reduce ground vibrations. This paper presents a hybrid vibration isolation system composed of four spiral metal springs for passive isolation and eight voice coil motors for active isolation. H-infinite and Proportional–integral–derivative (PID) controllers are applied to its 6-DOF vibration control system using six velocity sensors to measure system vibrations. The transmissibility of the presented hybrid isolation system is in the range -10 to -48 dB at its passive resonance frequency and is at least -4 dB better than hybrid isolation systems employing acceleration sensors. The results of various tests conducted to verify the control performance of the developed system with a separately developed shaker indicate that it can serve as a bench-top device for precision measurement machines.     

Miniature active damping stage for scanning probe applications in ultra high vacuum

Scanning probe microscope (SPM) experiments demand a low vibration level to minimize the external influence on the measured signal. We present a miniature six-degree of freedom active damping stage based on a Gough-Stewart platform (hexapod) which is positioned in ultra high vacuum as close to the SPM as possible. In this way, vibrations originating from the experimental setup can be effectively reduced providing a quiet environment for the SPM. In addition, the hexapod provides a rigid reference point, which facilitates wiring as well as sample transfer. We outline the main working principle and show that for scanning tunneling microscopy (STM) measurements of a Si(111) 7 × 7 surface, the hexapod significantly improves the stability and quality of the topographic images.     

光学原子力显微镜中的蒙特卡罗方法

扫描探针显微镜(Scanning probe microscopy,SPM)是显微镜的一个分支,它利用物理探针扫描标本形成样本表面图像.而原子力显微镜(Atomic force microscopy,AFM)是SPM中一种多功能的表面成像和测量工具,对导电、不导电、真空中、空气中或流体中的各种样本均可测量.原子力显微镜最面临的最大挑战之一是评估其在表面测量过程中所伴随的不确定度.本研究通过XYZ Phase的标定,对一台光学原子力显微镜进行了校准.该方法旨在克服在评估一些无法实验确定的不确定部件时遇到的困难,如尖端表面相互作用力和尖端几何.运用蒙特卡罗方法来确定根据相关容差和概率密度函数(PDFs)随机绘制参数而引起的相关不确定度.整个过程遵循《测量不确定度表示指南》(GUM)补编2.经本方法验证,原子力显微镜的评估不确定度为10nm左右.     

Atomic and magnetic force microscopy imaging of thin-film recording heads

Investigations on the use of the scanning probe microscope (SPM) in the atomic force microscopy (AFM) mode for topography imaging and the magnetic force microscopy (MFM) mode for magnetic imaging are presented for a thin-film recording head. Results showed that the SPM is suitable for imaging the surface profile of the recording head, determining the width of the pole gap region, and mapping the magnetic field patterns of the recording head excited under current bias conditions of different polarity. For the cobalt sputter-coated tips used in MFM imaging, it was found that the magnetic field patterns obtained under different polarities of the current bias to the recording head were similar. This can be explained by the nature of the thin-film MFM tip, in which the direction of the tip magnetic moment can follow the stray magnetic field of the sample as the current bias to the recording head reverses in direction.     

Finite strip modeling of the varying dynamics of thin-walled pocket structures during machining

The structural model of the workpiece is required for modeling, analysis, and avoidance of forced and regenerative (chatter) vibrations in machining of thin-walled parts. Finite element models (FEM) provide a versatile means for modeling the workpiece dynamics, but such models need to be updated frequently as the mass and stiffness of the workpiece varies continuously during machining. The computational time and power that is needed for re-meshing the FEM and then re-computing the natural modes of the workpiece is prohibitive. In this paper, a new approach based on Finite strip modeling (FSM) is presented for modeling the structural dynamics of thin-walled structures during pocket milling operations. The substantially higher computational efficiency of the FSM approach in predicting the varying dynamics of thin-walled pocket structures is verified by comparing its performance against FEM and the multi span plate (MSP) approach presented in (J Manuf Sci Eng 133:021014, 2011). Additionally, the accuracy of the presented approach in analyzing the stability of vibrations and determining the extent of dynamic deflections is verified using experimental results.     

A three-dimensional model for the dynamics of micro-endmills including bending, torsional and axial vibrations

Attainable geometric accuracy and surface finish in a micromilling operation depends on predicting and controlling the vibrations of micro-endmills. The specific multi-scale geometry of micro-endmills results in complexities in dynamic behavior, including three-dimensional vibrations, which cannot be accurately captured using one-dimensional (1D) beam models. This paper presents an analytically based three-dimensional (3D) model for micro-endmill dynamics, including actual cross-section and fluted (pretwisted) geometry. The 3D model includes not only bending, but also coupled axial/torsional vibrations. The numerical efficiency is enhanced by modeling the circular cross-sectioned shank and taper sections using 1D beam equations without compromising in model accuracy, while modeling the complex cross-sectioned and pretwisted fluted section using 3D linear elasticity equations. The boundary-value problem for both 1D and 3D models are derived using a variational approach, and the numerical solution for each section is obtained using the spectral-Tchebychev (ST) technique. Subsequently, component mode synthesis is used for joining the individual sections to obtain the dynamic model for the entire tool. The 3D model is validated through modal experimentation, by comparing natural frequencies and mode-shapes, for two-fluted and four-fluted micro-endmills with different geometries. The natural frequencies from the model was seen to be within 2% to those from the experiments for up to 90 kHz frequency. Comparison to numerically intensive, solid-element finite-elements models indicated that the 3D and FE models agree with less than 1% difference in natural frequencies. The 3D-ST model is then used to analyze the effect of geometric parameters on the dynamics of micro-endmills.     

Effects of higher oscillation modes on TM-AFM measurements

The finite element method and molecular dynamics simulations are used for modeling the AFM microcantilever dynamics and the tip-sample interaction forces, respectively. Molecular dynamics simulations are conducted to calculate the tip-sample force data as a function of tip height at different lateral positions of the tip with respect to the sample. The results demonstrate that in the presence of nonlinear interaction forces, higher eigenmodes of the microcantilever are excited and play a significant role in the tip and sample elastic deformations. Using comparisons between the results of FEM and lumped models, how some aspects of the system behavior can be hidden when the point-mass model is used is illustrated.     

Active Damping of Milling Vibration Using Operational Amplifier Circuit

The problem of chatter vibration is associated with adverse consequences that often lead to tool impairment and poor surface finished in a workpiece, and thus, controlling or suppressing chatter vibrations is of great significance to improve machining quality. In this paper, a workpiece and an actuator dynamics are considered in modeling and controller design. A proportional-integral controller (PI) is presented to control and actively damp the chatter vibration of a workpiece in the milling process. The controller is chosen on the basis of its highly stable output and a smaller amount of steady-state error. The controller is realized using analog operational amplifier circuit. The work has contributed to planning a novel approach that addresses the problem of chatter vibration in spite of technical hitches in modeling and controller design. The method can also lead to considerable reduction in vibrations and can be beneficial in industries in term of cost reduction and energy saving. The application of this method is verified using active damping device actuator (ADD) in the milling of steel.     

Automatization of nanotomography

An approach for automated nanotomography, a layer-by-layer imaging technique based on scanning probe microscopy (SPM), is presented. Stepwise etching and imaging is done in situ in a liquid cell of an SPM. The flow of etching and rinsing solutions after each etching step is controlled with solenoid valves which allow for an automated measuring protocol. The thermal drift and the drift of the piezo scanner is corrected by applying offsets calculated from the cross correlation coefficients between successive images. As an example, we have imaged human bone with approximately 10 nm resolution using tapping mode SPM and successive etching with hydrochloric acid.     

模块化扫描探针显微镜的研究

介绍一种多功能、模块化扫描探针显微镜,它综合了ＳＴＭ、ＡＦＭ、ＭＦＭ、ＦＦＭ等的功能,不仅能检测物质表面微观形貌,还能检测微小静电力、磁力、原子力和摩擦力,具有较好的灵活性和较宽的应用范围。     

A novel PRC signal drift reduction method for new developed SEM-based nanoindentation/nanoscratch instrument integrated with AFM

In-situ SEM nanoindentation and nanoscratch testing methods are commonly used for mechanical characterization and investigation of the deformation and failure mechanisms of coating materials with micro-to nano-scale thicknesses. However, existing SEM-based integrated nanoindentation and nanoscratch instruments have two main limitations. First, the measured mechanical properties of the coating materials at micro-to nano-scale thicknesses are highly sensitive to surface roughness. Second, the existing SEM-based instruments lack the capability to acquire the morphology of residual imprints in real-time after nanoindentation and nanoscratching. In this study, a novel SEM-based integrated nanoindentation, nanoscratch, and atomic force microscopy (AFM) instrument, namely, NMT-AFM was proposed, developed and fabricated. The self-sensing piezoresistive cantilever (PRC) was selected as the AFM force sensor owing to its miniaturization ability. However, the resistance of the PRC sensor fluctuated because of the electron irradiation from SEM, resulting in the continuous drift of the PRC signal during SEM imaging. To overcome this limitation, a mechanism of PRC signal drift inside SEM was analyzed for the first time, and a PRC signal drift reduction method was proposed based on the mechanism analysis. The experimental results indicated that the PRC signal drift was reduced to 2 nm in 2 min by applied external voltage value U_A of 30 V to modified PRC, which proved the proposed mechanism of PRC signal drift during SEM imaging. Finally, the X–Y fine nanopositioner angle calibration test using AFM calibration chip VGRP-UM and the nanoindentation/nanoscratch characterizations of the TiAlSiN coating material were conducted.