Long-wavelength In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As large-area avalanche photodiodes and arrays

Large-area (500-/spl mu/m diameter) mesa-structure In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiodes (APDs) are reported. The dark current density was /spl sim/2.5/spl times/10/sup -2/ nA//spl mu/m/sup 2/ at 90% of breakdown; low surface leakage current density (/spl sim/4.2 pA//spl mu/m) was achieved with wet chemical etching and SiO/sub 2/ passivation. An 18 /spl times/ 18 APD array with uniform distributions of breakdown voltage, dark current, and multiplication gain has also been demonstrated. The APDs in the array achieved 3-dB bandwidth of /spl sim/8 GHz at low gain and a gain-bandwidth product of /spl sim/120 GHz.     

A general-purpose processor-per-pixel analog SIMD vision chip

A smart-sensor VLSI circuit suitable for focal-plane low-level image processing applications is presented. The architecture of the device is based on a fine-grain software-programmable SIMD processor array. Processing elements, integrated within each pixel of the imager, are implemented utilising a switched-current analog microprocessor concept. This allows the achievement of real-time image processing speeds with high efficiency in terms of silicon area and power dissipation. The prototype 21 /spl times/ 21 vision chip is fabricated in a 0.6 /spl mu/m CMOS technology and achieves a cell size of 98.6 /spl mu/m /spl times/ 98.6 /spl mu/m. It executes over 1.1 giga instructions per second (GIPS) while dissipating under 40 mW of power. The architecture, circuit design and experimental results are presented in this paper.     

640 /spl times/ 512 pixel long-wavelength infrared narrowband, multiband, and broadband QWIP focal plane arrays

A 640 /spl times/ 512 pixel, long-wavelength cutoff, narrowband (/spl Delta//spl lambda///spl lambda//spl sim/10%) quantum-well infrared photodetector (QWIP) focal plane array (FPA), a four-band QWIP FPA in the 4-15 /spl mu/m spectral region, and a broadband (/spl Delta//spl lambda///spl lambda/ /spl sim/ 42%) QWIP FPA having a 15.4 /spl mu/m cutoff have been demonstrated. In this paper, we discuss the electrical and optical characterization of these FPAs, and their performance. In addition, we discuss the development of a very sensitive (NEDT /spl sim/ 10.6 mK) 640 /spl times/ 512 pixel thermal imaging camera having a 9 /spl mu/m cutoff.     

A 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode array

We report a 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode (APD) array. The mean breakdown voltage of the APD was 57.9 V and the standard deviation was less than 0.1 V. The mean dark current was /spl sim/2 and /spl sim/300 nA, and the standard deviation was /spl sim/0.19 and /spl sim/60 nA at unity gain (V/sub bias/ = 13.5 V) and at 90% of the breakdown voltage, respectively. External quantum efficiency was above 40% in the wavelength range from 1.0 to 1.6 /spl mu/m. It was /spl sim/57% and /spl sim/45% at 1.3 and 1.55 /spl mu/m, respectively. A bandwidth of 13 GHz was achieved at low gain.     

Mid-infrared (8.5 /spl mu/m) semiconductor lasers operating at room temperature

The room-temperature pulsed operation of a semiconductor laser emitting at 8.5 /spl mu/m is reported. This device is an optimized vertical transition quantum cascade (QC) laser. At 300 K the peak output power from a single facet is 15 mW, and the current density at threshold is /spl sim/8 kA/cm/sup 2/. The temperature dependence of the threshold current density is described by a high T/sub 0/ (107 K) in the 200-320 K temperature range.     

液氮制冷的AlGaN/GaN HEMT太赫兹探测器阵列特性研究

为充分发挥AlGaN/GaN高电子迁移率晶体管 (High-Electron-Mobility Transistor, HEMT)太赫兹探测器阵列的高电子迁移率优势,文中研究了HEMT太赫兹探测器阵列在77 K下的探测特性。使用液氮杜瓦为降温主体搭建了适用于焦平面 (Focal-Plane Array, FPA)芯片的低温系统,实现了对焦平面芯片常温与低温下的对比测试。温度从300 K降到77 K时,探测器阵列像元的平均响应度提高近3倍,平均噪声有小幅增大,340 GHz时平均噪声等效功率 (Noise Equivalent Power, NEP)从45.1 pW/Hz1/2降低到了19.4 pW/Hz1/2,灵敏度提高两倍以上。与硅透镜耦合的单元探测器相比,阵列像元的灵敏度提升仍有较大空间。主要是由于各像素点最佳工作电压的不一致,导致在给定统一工作电压下像元间的响应度和噪声都表现出较大的离散性,文中讨论了降低最佳工作电压离散度的可能解决方案。     

High responsivity InP-InGaAs quantum-well infrared photodetectors: characteristics and focal plane array performance

We report the detailed characteristics of long-wavelength infrared InP-In/sub 0.53/Ga/sub 0.47/As quantum-well infrared photodetectors (QWIPs) and 640/spl times/512 focal plane array (FPA) grown by molecular beam epitaxy. For reliable assessment of the detector performance, characterization was performed on test detectors of the same size and structure with the FPA pixels. Al/sub 0.27/Ga/sub 0.73/As-GaAs QWIPs with similar spectral response (/spl lambda//sub p/=/spl sim/7.8 /spl mu/m) were also fabricated and characterized for comparison. InP-InGaAs QWIPs (20-period) yielded quantum efficiency-gain product as high as 0.46 under -3-V bias with a 77-K peak detectivity above 1/spl times/10/sup 10/ cm/spl middot/Hz/sup 1/2//W. At 70 K, the detector performance is background limited with f/2 aperture up to /spl sim/ 3-V bias where the peak responsivity (2.9 A/W) is an order of magnitude higher than that of the AlGaAs-GaAs QWIP. The results show that impact ionization in similar InP-InGaAs QWIPs does not start until the average electric-field reaches /spl sim/25 kV/cm, and the detectivity remains high under moderately large bias, which yields high responsivity due to large photoconductive gain. The InP-InGaAs QWIP FPA offers reasonably low noise equivalent temperature difference (NETD) even with very short integration times (/spl tau/).70 K NETD values of the FPA with f/1.5 optics are 36 and 64 mK under bias voltages of -0.5 V (/spl tau/=11 ms) and -2 V (/spl tau/=650 /spl mu/s), respectively. The results clearly show the potential of InP-InGaAs QWIPs for thermal imaging applications requiring high responsivity and short integration times.     

Resonant-phonon terahertz quantum-cascade laser operating at 2.1 THz (/spl lambda//spl sime/141 /spl mu/m)

The development of quantum-cascade lasers (QCLs) at 2.1 THz (/spl lambda//spl sime/141 /spl mu/m), which is the longest wavelength QCL to date without the assistance of magnetic fields, is reported. This laser uses a structure based on resonant-phonon depopulation, and a metal-metal waveguide to obtain high modal confinement with low waveguide losses. Lasing was observed up to a heatsink temperature of 72 K in pulsed mode and 40 K in continuous-wave (CW) mode, and 1.2 mW of power was obtained in CW mode at 17 K.     

Characteristics of a photonic crystal defect waveguide-coupled quantum-dot photodiode

We have investigated the characteristics of an In/sub 0.4/Ga/sub 0.6/As self-organized quantum-dot (QD) resonant-cavity photodiode. The QD epitaxy and the design of the two-dimensional photonic crystal cavity are tailored for 1.3-/spl mu/m wavelength operation. The input excitation to the photodiode is provided with an in-plane defect waveguide designed with the same photonic crystal. The measured spectral photocurrent characteristics reflect mode coupling between the waveguide and detector and the resonant cavity effect due to total internal reflection and photonic bandgap confinement. The photocurrent response is explained with a model involving the circulating fields in the cavity. The characteristics are also dependent of cavity size. Enhancement and narrowing (/spl sim/ 10 nm) of the photoresponse at /spl lambda//spl sim/1.3 /spl mu/m are observed. A spectral dip, of /spl sim/ 10-nm width, also observed at 1.3 /spl mu/m is possibly due to the anticrossing mechanism, uniquely present in photonic crystal waveguides.     

Beam steering in high-power CW quantum-cascade lasers

We report the light-current (L-I), spectral, and far-field characteristics of quantum cascade lasers (QCLs) with seven different wavelengths in the /spl lambda/=4.3 to 6.3 /spl mu/m range. In continuous-wave (CW) mode, the narrow-stripe (/spl ap/13 /spl mu/m) epitaxial- side-up devices operated at temperatures up to 340 K, while at 295 K the CW output power was as high as 640 mW with a wallplug efficiency of 4.5%. All devices with /spl lambda//spl ges/4.7 /spl mu/m achieved room-temperature CW operation, and at T=200 K several produced powers exceeding 1 W with /spl ap/10% wallplug efficiency. The data indicated both spectral and spatial instabilities of the optical modes. For example, minor variations of the current often produced nonmonotonic hopping between spectra with envelopes as narrow as 5-10 nm or as broad as 200-250 nm. Bistable beam steering, by far-field angles of up to /spl plusmn/12/spl deg/ from the facet normal, also occurred, although even in extreme cases the beam quality never became worse than twice the diffraction limit. The observed steering is consistent with a theory for interference and beating between the two lowest order lateral modes. We also describe simulations of a wide-stripe photonic-crystal distributed-feedback QCL, which based on the current material quality is projected to emit multiple watts of CW power into a single-mode beam at T=200 K.     

16-wavelength gain-coupled DFB laser array with fine tunability

16-wavelength semiconductor laser array with fine wavelength tunability is demonstrated, utilizing gain-coupled distributed feedback (DFB) lasers with different ridge waveguide widths. Besides the coarse tuning by the ridge widths, the fine post-fabrication tunability for individual lasers in the array is achieved with a Ti thin-film resistor integrated on the chip. Due to the gain-coupling effect, 16 single-mode lasing wavelengths around 1.55 /spl mu/m in /spl sim/1 nm spacing are obtained simultaneously. An effective fine-tuning up to 1 nm is observed at a moderate heating power of 100 mW.     

Design for high-power single-mode operation from 2-D surface-emitting ROW-DFB lasers

Stable single-mode single-lobe operation to high powers is predicted for two-dimensional surface-emitting lasers, if second-order distributed feedback/distributed Bragg reflector (DFB/DBR) gratings are preferentially placed in the elements of a resonant-optical-waveguide array. Beside their usual functions (i.e., feedback and outcoupling), the gratings act as an effective array-mode selector due to different interaction with the gratings of different array modes. The in-phase array mode is strongly favored to lase around its (lateral) resonance due to better field overlap with DFB region and lower interelement absorption loss than for nonresonant array modes. For 20-element arrays with 700/600 /spl mu/m DFB/DBR gratings, emitting at /spl lambda/=0.98 /spl mu/m, high (/spl sim/100 A/cm/sup 2/) intermodal discrimination /spl Delta/J/sub th/ is obtained. /spl Delta/J/sub th/ is enhanced to /spl sim/225 A/cm/sup 2/ by introducing free-carrier absorption in the array-interelement regions.     

Development of a 64 × 64 CdZnTe array and associated readout integrated circuit for use in nuclear medicine

Previous work has shown that hybrid semiconductor detector arrays similar to those used in infrared focal-plane arrays are very attractive for use in nuclear medicine and other gamma-ray imaging applications. In this paper, we describe the development of a 64 × 64 readout multiplexer specifically for use in gamma-ray imaging; we also describe the construction of 64 × 64 CdZnTe hybrid detector arrays using the new readout. The readout and detector array are both about one inch square (2.5 cm × 2.5 cm) and have 380 μm pixel pitch. Some initial assembly problems have been resolved by stabilizing the hybrids with epoxy. Preliminary testing results are presented that verify that the 64 × 64 CdZnTe arrays perform as excellent imaging spectrometers.     

A 250-MHz BiCMOS receiver channel with leading edge timing discriminator for a pulsed time-of-flight laser rangefinder

An integrated receiver channel of a pulsed time-of-flight (TOF) laser rangefinder for fast industrial measurement applications with the measurement accuracy of a few centimeters in the measurement range from /spl sim/1 m to /spl sim/30 m to noncooperative targets was developed. The receiver channel consists of a fully differential transimpedance amplifier channel, a peak detector, an rms meter and a timing discriminator. In this particular application there is no time to measure the received signal strength beforehand and it is not predictable from previous measurements, so a leading edge timing discriminator with a constant threshold voltage was used. The amplitude of the received pulse is measured with a peak detector and the amplitude information is used to compensate for the resulting walk error. The measured bandwidth of the receiver channel is 250 MHz, the maximum transimpedance 40k/spl Omega/ and the input-referred noise /spl sim/7pA//spl radic/Hz (C/sub photodiode/=2 pF). The timing detection accuracy of the receiver is better than /spl plusmn/35 mm in a single-shot measurement in a dynamic range of 1:4000 and a temperature range of 0/spl deg/C to +50/spl deg/C.     

Multimode optical demultiplexer for DWDM with liquid crystal enabled functionalities

We have developed a liquid-crystal-based multimode optical demultiplexer (DEMUX) with additional functionalities such as switching and power equalization. Demultiplexing 16-channel 100-GHz-spaced signals into a 62.5-/spl mu/m multimode-fiber array is demonstrated. The central wavelength of each channel is designed according to the International Telecommunication Union grid. Adjacent channel crosstalk is less than -30 dB. The average 1and 3-dB passbands of the DEMUX are 12.5 and 22.5 GHz, respectively. A maximum extinction ratio of 16.2 dB is achieved. Different channels can be switched with rise and fall times of /spl sim/10 and /spl sim/70 ms, respectively. The outputs of the channels are equalized to -65 dBm. The variation between different channels reduced from /spl sim/10 dB to less than 0.5 dB.     

Coulomb blockade memory using integrated single-electron transistor/metal-oxide-semiconductor transistor gain cells

A 3/spl times/3-bit Coulomb blockade memory cell array has been fabricated in silicon-on-insulator (SOI) material. In each cell, the Coulomb blockade effect in a single-electron transistor is used to define two charge states. The charge is stored on a memory node of area 1 /spl mu/m/spl times/1 /spl mu/m or 1 /spl mu/m/spl times/70 nm and is sensed with gain by a metal-oxide-semiconductor transistor. The write/read operation for a selected cell within the array is demonstrated. The measured states are separated by /spl sim/1000 electrons for the 1 /spl mu/m/spl times/1 /spl mu/m memory node cell and by 60 electrons for the 1 /spl mu/m/spl times/70 nm memory node cell. Single-electron transistor controlled operation persists up to a temperature of 65 K.     

A biologically inspired analog IC for visual collision detection

We have designed and tested a single-chip analog VLSI sensor that detects imminent collisions by measuring radially expanding optic flow. The design of the chip is based on a model proposed to explain leg-extension behavior in flies during landing approaches. We evaluated a detailed version of this model in simulation using a library of 50 test movies taken through a fisheye lens. The algorithm was evaluated on its ability to distinguish movies ending in collisions from movies in which no collision occurred. This biologically inspired algorithm is capable of 94% correct performance in this task using an ultra-low-resolution (132-pixel) image as input. A new elementary motion detector (EMD) circuit was developed to measure optic flow on a CMOS focal-plane sensor. This EMD circuit models the bandpass nature of large monopolar cells (LMCs) immediately postsynaptic to photoreceptors in the fly visual system as well as a saturating multiplication operation proposed for Reichart-type motion detectors. A 16/spl times/16 array of two-dimensional motion detectors was fabricated in a standard 0.5-/spl mu/m CMOS process. The chip consumes 140 /spl mu/W of power from a 5 V supply. With the addition of wide-angle optics, the sensor is able to detect collisions 100-400 ms before impact in complex, real-world scenes.     

Integrated high-/spl kappa/ (/spl kappa/ /spl sim/19) MIM capacitor with Cu/low-/spl kappa/ interconnects for RF application

We demonstrate a high-performance metal-high /spl kappa/ insulator-metal (MIM) capacitor integrated with a Cu/low-/spl kappa/ backend interconnection. The high-/spl kappa/ used was laminated HfO/sub 2/-Al/sub 2/O/sub 3/ with effective /spl kappa/ /spl sim/19 and the low-/spl kappa/ dielectric used was Black Diamond with /spl kappa/ /spl sim/2.9. The MIM capacitor (/spl sim/13.4 fF//spl mu/m/sup 2/) achieved a Q-factor /spl sim/53 at 2.5 GHz and 11.7 pF. The resonant frequency f/sub r/ was 21% higher in comparison to an equivalently integrated Si/sub 3/N/sub 4/-MIM capacitor (/spl sim/0.93 fF//spl mu/m/sup 2/) having similar capacitance 11.2 pF. The impacts of high-/spl kappa/ insulator and low-/spl kappa/ interconnect dielectric on the mechanism for resonant frequency improvement are distinguished using equivalent circuit analysis. This letter suggests that integrated high-/spl kappa/ MIM could be a promising alternative capacitor structure for future high-performance RF applications.     

Multi-watt, high efficiency, diffraction-limited Nd:YAG planar waveguide laser

An efficient, longitudinally diode-pumped, diffraction-limited, Nd:YAG double-clad planar waveguide laser was operated on four transitions of the Nd/sup 3+/ ion. Optimized output powers of 4.3, 3.5, and 2.7 W were obtained for absorbed pump powers of /spl sim/7 W, for the transitions at the lasing wavelengths of 1.064 /spl mu/m, 946 nm, and 1.3 /spl mu/m, respectively. Operation of the weak /sup 4/F/sub 3/2//spl rarr//sup 4/I/sub 5/2/ transition, lasing at 1.833 /spl mu/m, was demonstrated at an absorbed pump power threshold of 300 mW and an output power of 400 mW, with a nonoptimized output coupling. Diffraction-limited performance was obtained in both the guided and nonguided axes.     

192 GHz push-push VCO in 0.13 /spl mu/m CMOS

A 192 GHz cross-coupled push-push voltage controlled oscillator (VCO) is fabricated using the UMC 0.13 /spl mu/m CMOS logic process. The VCO can be tuned from 191.4 to 192.7 GHz. The VCO provides output power of /spl sim/-20 dBm and phase noise of /spl sim/-100 dBc/Hz at 10 MHz offset, while consuming 11 mA from a 1.5 V supply.