共查询到18条相似文献,搜索用时 140 毫秒
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通过对采用0.18μm CMOS工艺制造的两组不同沟道长度和栅氧厚度的LDD器件电应力退化实验发现,短沟薄栅氧LDD nMOSFET(Lg=0.18μm,Tox=3.2nm)在沟道热载流子(CHC)应力下的器件寿命比在漏雪崩热载流子(DAHC)应力下的器件寿命要短,这与通常认为的DAHC应力(最大衬底电流应力)下器件退化最严重的理论不一致.因此,这种热载流子应力导致的器件退化机理不能用幸运电子模型(LEM)的框架理论来解释.认为这种"非幸运电子模型效应"是由于最大碰撞电离区附近具有高能量的沟道热电子,在Si-SiO2界面产生界面陷阱(界面态)的区域,由Si-SiO2界面的栅和漏的重叠区移至沟道与LDD区的交界处以及更趋于沟道界面的运动引起的. 相似文献
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通过对采用0.18μm CMOS工艺制造的两组不同沟道长度和栅氧厚度的LDD器件电应力退化实验发现,短沟薄栅氧LDD nMOSFET(Lg=0.18μm,Tox=3.2nm)在沟道热载流子(CHC)应力下的器件寿命比在漏雪崩热载流子(DAHC)应力下的器件寿命要短,这与通常认为的DAHC应力(最大衬底电流应力)下器件退化最严重的理论不一致.因此,这种热载流子应力导致的器件退化机理不能用幸运电子模型(LEM)的框架理论来解释.认为这种“非幸运电子模型效应”是由于最大碰撞电离区附近具有高能量的沟道热电子,在Si-SiO2界面产生界面陷阱(界面态)的区域,由Si-SiO2界面的栅和漏的重叠区移至沟道与LDD区的交界处以及更趋于沟道界面的运动引起的. 相似文献
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A novel combined gated-diode technique for qualitatively extracting the lateral distribution of interface traps in N-MOSFETs is presented in this paper. The key of this technique lies in the recombination–generation current peak originating from the interface trap recombination is being modulated by the drain voltage of the combined forward gated-diode architecture. The extraction principle is introduced in detail and the extraction procedure is also erected. The experimental results qualitatively show that the induced interface traps gradually decrease from the drain and source edges to the channel region while showing the highest value near both edges in N-MOSFETs. 相似文献
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Tahui Wang Lu-Ping Chiang Nian-Kai Zous Tse-En Chang Chimoon Huang 《Electron Devices, IEEE Transactions on》1998,45(8):1791-1796
An oxide trap characterization technique by measuring a subthreshold current transient is developed. This technique consists of two alternating phases, an oxide charge detrapping phase and a subthreshold current measurement phase. An analytical model relating a subthreshold current transient to oxide charge tunnel detrapping is derived. By taking advantage of a large difference between interface trap and oxide trap time-constants, this transient technique allows the characterization of oxide traps separately in the presence of interface traps. Oxide traps created by three different stress methods, channel Fowler-Nordheim (F-N) stress, hot electron stress and hot hole stress, are characterized. By varying the gate bias in the detrapping phase and the drain bias in the measurement phase, the field dependence of oxide charge detrapping and the spatial distribution of oxide traps in the channel direction can be obtained. Our results show that 1) the subthreshold current transient follows a power-law time-dependence at a small charge detrapping field, 2) while the hot hole stress generated oxide traps have a largest density, their spatial distribution in the channel is narrowest as compared to the other two stresses, and 3) the hot hole stress created oxide charges exhibit a shortest effective detrapping time-constant 相似文献
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Chih-Tang Sah Neugroschel A. Han K.M. Kavalieros J.T. 《Electron Device Letters, IEEE》1996,17(2):72-74
Position profiling the interface trap density along the channel length of metal-oxide-silicon transistors by the Direct-Current Current-Voltage method is illustrated for five density variations: zero, peaked in drain junction space-charge layer, constant in channel, nonconstant in channel, and peaked in drain junction space-charge layer and nonconstant in channel. The interface trap densities were monitored by MOS transistor's d.c. body current and the density profiles were obtained from the body-drain and body-source differential conductance versus drain or source bias voltage. An experimental demonstration is given for a 1.6 μm n-channel Si MOS transistor with about 1011 traps/cm2 generated by channel hot electron stress 相似文献
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The spatial distribution of interface traps in a p-type drain extended MOS transistor is experimentally determined by the analysis of variable base-level charge pumping spectra. The evolution of the interface trap distribution can be monitored as a function of the hot-carrier stress time. A double peaked interface trap density distribution, located in the spacer oxide, is extracted. The interface trap density in the poly overlapped drift region is constant as a function of stress time. No channel degradation is observed. 相似文献
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Analysis of the DCIV peaks in electrically stressed pMOSFETs 总被引:5,自引:0,他引:5
This paper presents the effects of Fowler-Nordheim (FN) and hot-carrier (HC) stress in the direct-current current voltage (DCIV) measurements. The effect of interface trapped charge on DCIV curves is reported. Stress-induced oxide charge shifts the DCIV peaks, while stress-induced interface trapped charge causes a spread in the DCIV peaks. It is found that under HC stress, when the absolute value of stress gate voltage changes from low to high, the interface trap spatial location moves from the drain region to the channel region. It is inferred that the generation of oxide charge in the drain region is a two-step process. For short stress times, electrons mainly fill the process-induced neutral oxide traps, while for long stress times, electrons fill the stress created electron traps 相似文献
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An experimental study of the low-frequency noise in GaAs MESFET's grown on InP substrates is reported. The influence of the biases applied to the gate, backgate, and drain in the ohmic region is investigated in order to identify and characterize the 1/f noise origin. We find that this noise can be explained by carrier number fluctuations in the channel and related to trapping phenomena. The traps responsible for this noise are located near the channel-buffer interface. Moreover, the noise behavior exhibits for a well-defined gate voltage, corresponding to the case where the drain current flows near the channel-buffer interface, a GR-type (Lorentzian) noise spectrum emerging from a quite general 1/f noise. This last spectrum corresponds to a single trap level with a density of NT=1016 cm-3 and a time constant τ=1.8 ms which may be attributed to crystal defects present in the GaAs layers 相似文献
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Angelis C.T. Dimitriadis C.A. Brini J. Kamarinos G. Gueorguiev V.K. Ivanov T.E. 《Electron Devices, IEEE Transactions on》1999,46(5):968-974
Polycrystalline silicon thin-film transistor (polysilicon TFT's) characteristics are evaluated by using a low-frequency noise technique. The drain current fluctuation caused by trapping and detrapping processes at the grain boundary traps is measured as the current spectral density. Therefore, the properties of the grain boundary traps can be directly evaluated by this technique. The experimental data show a transition from 1/f behavior to a Lorentzian noise. The 1/f noise is explained with an existing model developed for monocrystalline silicon based on fluctuations of the inversion charge near the silicon-oxide interface. The Lorentzian spectrum is explained by fluctuations of the grain boundary interface charge with a model based on a Gaussian distribution of the potential barriers over the grain boundary plane. Quantitative analysis of the 1/f noise and the Lorentzian noise yield the oxide trap density and the energy distribution of the grain boundary traps within the forbidden gap 相似文献
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Two-dimensional device simulations that confirm that the side-gating effect in GaAs MESFETs occurs on semi-insulating substrates containing hole traps are discussed. A negative voltage applied on a side gate, a separate n-type doped region, causes an increase in the thickness of the negatively charged layer at the FET channel interface in the substrate, through hole emission from hole traps. The FET channel current is modulated by the electron depletion of the n-type channel, which results from the compensation for the extension of the negatively charged layer at the n-i interface into the i-substrate containing hole traps. The magnitude of the drain current reduction is determined by the total acceptor concentration in the substrate and the donor concentration of the channel. However, the magnitude is independent of the side-gate distances 相似文献