rGO-AuNPs/n-Si的肖特基接触特性研究

通过水热法制备了还原氧化石墨烯负载Au纳米复合材料(rGO-AuNPs),结合旋涂法,将其涂覆在单晶硅表面,制备出rGO-AuNPs/n-Si肖特基接触。结果表明,rGO-AuNPs的衍射峰以单质Au为主,存在较弱的石墨烯衍射峰,同时纳米Au粒子(Au nanoparticles, AuNPs)较均匀分布在石墨烯表面,表明成功合成了负载Au的还原氧化石墨烯。从电流-电压(Current-voltage,I-V)曲线可以看出rGO-AuNPs/n-Si肖特基接触具有整流特性。在负载量下,随着Au含量的递增,肖特基势垒高度增加,理想因子减小,但漏电流增大,可能是由于氧化石墨烯在还原过程中缺陷的存在,产生了隧道电流和镜像力,降低了肖特基势垒的横向均匀性。     

金属/多晶锗硅肖特基接触特性的影响因素研究

用射频磁控溅射在单晶硅上沉积Si1-xGex薄膜.溅射的SiGe薄膜样品,用俄歇电子谱(AES)测定其Ge含量,约为17％,即Si0.83Ge0.17.样品分别做高温磷、硼扩散,经XRD测试为多晶态,制得n,p-poly-Si0.83Gge0.17.在n-poly-Si0.83Ge0.17上分别溅射Ni、V、W、Cu、Pt、Ti、Al、Co膜,做成金属/n-poly-Si0.83Ge0.17肖特基结.利用Ⅰ-Ⅴ测试数据进行接触参数的提取,从而定量研究金属的功函数、金属膜厚以及快热退火温度对肖特基接触特性的影响.结果发现,肖特基势垒高度(SBH)与金属的功函数有微弱的正相关,Al/n,p-poly-Si0.83Ge0.17接触存在Shannon效应,金属膜厚对Co/n,p-poly-Si0.83Ge0.17接触特性有不同的影响,随快热退火温度的升高,Ni、V、W、Co、Cu、Pt、Ti、Al八种金属在n-poly-Si0.83Ge0.17上的肖特基势垒高度和理想因子未见有一致的变化规律,但存在不均匀性.     

高温Ti/4H-SiC肖特基势垒二极管的特性

在研究高温下串联电阻Ron对肖特基势垒二极管正向特性的影响，以及各种反向电流密度分量对其反向特性的影响基础上，测量并理论计算了300－528K范围内Ti/4H-SiC肖特基势垒二极管的伏安特性。分别得到了理想因子、肖特基势垒高度和串联电阻在395K和528K温度下的数值。理论和实验的比较说明，高温下，热电子发射是正向电流的主要输运机理，反向电流除了以隧道效应为主外，热电子发射电流和耗尽层中复合中心产生电流都随温度的升高而大大增加，必须加以考虑。     

ZnO/P-Si接触及其温度特性

用射频磁控溅射在硅衬底上淀积ZnO薄膜,随后进行I-V-T测量.实验结果显示硅基氧化锌接触具有异质结特性,异质结的电流输运机制为热发射和电流隧穿.用I-V-T测量的结果拟合计算了势垒高度和理想因子,结果发现ZnO/P-Si势垒高度随温度降低而减小理想因子则升高.异质结的这种反常的随温度变化的关系可以用肖特基势垒不均匀性理论解释.样品经Air～800℃热退火后势垒高度与未退火相比上升,说明热退火改善了氧化锌薄膜的结晶质量,减少了界面态影响.     

金属辅助化学刻蚀法制备硅纳米线的研究进展

硅纳米线(Si NWs)由于具有独特的一维结构、热电导率、光电性质、电化学性能等特点,被广泛应用于热电与传感器件、光电子元器件、太阳能电池、锂离子电池等领域。金属辅助化学刻蚀法(MACE)是制备Si NWs的常用方法之一,具有操作简便、设备简单、成本低廉和高效等优点,可大规模商业化应用,因而近年来被广泛研究。金属辅助化学刻蚀制备硅纳米线的过程可以分为两步:首先在洁净的硅衬底表面沉积一层金属(Ag、Au、Pt等)纳米颗粒,以催化、氧化它附近的硅原子;然后利用HF溶解氧化层,从而对硅晶片进行刻蚀,形成纳米线阵列。然而,这种简单高效的制备硅纳米线的方法存在一些难以控制的缺点:(1)金属纳米颗粒聚集、相连后造成Si NWs之间的缝隙比较大,从而导致Si NWs密度较低;(2)由于金属纳米颗粒沉积的随机性,在硅晶片表面分布不均匀,不仅导致刻蚀出的纳米线直径范围(50～200 nm)较宽,而且使制得的纳米线阵列排列无序且间距不易调控;(3)当刻蚀出的硅纳米线太长时,范德华力等作用会造成纳米线顶端出现严重的团簇现象。针对常规法存在的一些问题以及不同的器件对硅纳米线的形貌、类型和直径等的要求,近年来的研究主要集中在如何减少纳米线顶端团簇、调控纳米表面粗糙度和直径、低成本制备有序硅纳米线等方面。目前一些改进常规金属辅助化学刻蚀的方法取得了进展,比如:(1)用酸溶液或UV/Ozone对硅晶片预处理,在表面形成氧化层,可以使纳米线的均匀性得到改善并增大其密度(从18%提高到38%);(2)使用物理气相沉积法在硅晶片表面沉积一层金属纳米薄膜,然后再刻蚀,这种方法能够减少纳米线顶端团簇和有效调控纳米线直径;(3)利用模板法(聚苯乙烯小球模板、氧化铝模板、二氧化硅模板和光刻胶模板等)可以制备出有序的硅纳米线阵列。本课题组用离子束刻蚀的方法制备了直径范围可以控制在30～90 nm的聚苯乙烯小球模板,为小尺寸有序硅纳米线的制备打下了坚实的基础。本文简要介绍了常规MACE的原理和制备流程,总结了硅晶片的类型、刻蚀溶液的浓度、温度和刻蚀时间等因素对Si NWs形貌、尺度、表面粗糙度、刻蚀方向以及刻蚀速率的影响,用相关的机制解释了H2O2过量时刻蚀路径偏离垂直方向的机理以及刻蚀速率随溶液浓度变化的原因,重点综述了氧化层预处理、物理法沉积贵金属纳米薄膜、退火处理和模板法等改进方法在减少纳米线顶部团簇、改善均匀性、制备有序且直径和间距可控纳米线中的研究进展。     

在GaAs上用电子束蒸发淀积LaB_6薄膜及其界面的电学特性

用自制的简便电子束蒸发炉,在GaAs(100)表面上蒸发淀积了良好的LaB_6薄膜,由AES分析表明膜成分的化学配比正确,并制成LaB_6/GaAs肖特基二极管,基势垒高度为0.75eU(Ⅰ-Ⅴ法),理想因子为1.1,反向击穿电压达16V,表明LaB_6作为GaAs MESFET的栅材料是合适的。     

Ti/La_(0.7)Ca_(0.3)MnO_3/Pt结构器件中“负”电阻开关特性研究

以Pt/Ti/SiO2/Si为衬底,制备了具有电阻转变特性的Ti/La0.7Ca0.3MnO3(LCMO)/Pt结构器件.X射线衍射分析表明LCMO薄膜呈纳米晶或非晶态,扫描电子显微镜及原子力显微镜分析表明LCMO薄膜表面平整、光滑致密.电学测试结果表明Ti/LCMO/Pt结构具有明显的双极型"负"电阻转变特性,低电阻态的导电过程为空间电荷限制电流机制,高电阻态的导电过程为Poole-Frenkel发射机制.利用氧化还原反应的随机性和TiOx中间层空间分布的不均匀性,定性地解释了高电阻态的不稳定性以及电流-电压曲线上的电流突变现象.     

Pt/（Ba0．65Sr0．35）TiO3/Pt漏电流特性研究

利用射频(RF)溅射在Pt/Ti/SiO2/Si衬底上沉积(Ba0.65Sr0.35)TiO3(BST)薄膜,制成Pt/BST/Pt平板电容,研究在正反偏压下BST薄膜漏电流的J-V和J-T特性.反偏压时,上电极Pt和BST薄膜形成肖特基接触,漏电流遵循肖特基发射机制.正偏压时,BST薄膜和下电极Pt界面存在大量的界面态,使得漏电流遵循空间电荷限制电流(SCLC)机制,漏电流密度随偏压的增加而急剧增加,随测试温度的增加而减小产生了PTCR效应.利用深陷阱空间电荷限制电流模型,解释了BST薄膜的PTCR效应受εr(T)和V(Tc/T) 1的共同作用,其中εr(T)的作用占优.     

Mg_2Si/Si异质结的制备及I-V特性研究

采用磁控溅射和热处理系统制备Mg_2Si/Si异质结。首先在n-Si(111)衬底上沉积Mg膜,经热处理后得到Mg_2Si/Si异质结。利用XRD、SEM、表面轮廓仪、伏安特性测试仪和霍尔效应测试仪,研究了Mg_2Si/Si异质结的晶体结构、表面形貌、Mg_2Si薄膜厚度、I-V特性及导电类型。结果表明,成功制备了Mg_2Si/Si异质结,并得到其平均载流子浓度(-9.30×1012 cm-3)、导通电压(0.31V)、导通电流(0.6mA)、工作电压(0.53V)等,测得该异质结为n-n型。     

ITO/PZT-Ag2O/Pt铁电薄膜的光伏特性

研究了在透明导电ITO玻璃衬底上制备PZT-Ag2O铁电薄膜的工艺条件,并测量和表征了在不同衬底温度下生长的薄膜的相结构、表面形貌、铁电性能和光电特性。结果表明:在ITO玻璃衬底上可制备出铁电性能较好的PZT-Ag2O铁电薄膜;ITO/PZT-Ag2O/Pt铁电器件实现了可见光响应,其短路光电流和开路电压随极化电压的变化呈回线关系;产生这一现象的物理机制为:光生短路电流和开路电压的大小取决于退极化场和界面肖特基势垒的综合作用,不同的外加极化电压在PZT薄膜诱导出强度不同的退极化场,从而使光生短路电流和开路电压与外加极化电压呈回线型关系。     

Electrical properties of Schottky diode Pt/SiC and Pt/porous SiC performed on highly resistif p-type 6H-SiC

We investigated the electrical characteristics of two different Schottky diode as Pt/SiC and Pt/porous SiC, elaborated on highly resistif hot-pressed p-type 6H-SiC supplied by Goodfellow. The Schottky diode was characterized in air ambient and in vacuum, this latter could be used for exhaust gas monitoring as gas sensors for different gas (O₂, H₂, CO, CO₂ and hydrocarbure). The result shows an ideality factor in range 1.1-1.5 with a barrier height varying between 0.780 and 0.950 eV function of the ambient characterization. The result indicated clearly the dependence of electrical parameters on the surface whose Schottky contact was realized (Pt) and on the ambient where the electrical tests were performed.     

Analysis of current-voltage and capacitance-voltage-frequency characteristics in Al/p-Si Schottky diode with the polythiophene-SiO2 nanocomposite interfacial layer

The current-voltage characteristic of the prepared Al/Polythiophene-SiO₂/p-Si Schottky diode was analyzed by using different methods at room temperature. The barrier height and ideality factor of the diode were determined by using the conventional current-voltage method as 0.729 eV and 2.12, respectively. The barrier height values calculated by means of the modified Norde functions have showed good agreement with the barrier height value obtained by using the current-voltage method. The series resistance which causes the electrical characteristics to be non-ideal was calculated from Cheung functions and the modified Norde functions. The energy distribution of the interface states has been determined from the forward-bias current-voltage data. The frequency dependence of the Schottky diode parameters obtained from capacitance-voltage characteristics has been analyzed.     

Growth and temperature dependent characterization of pulsed laser deposited Ag/n-ZnO/p-Si/Al heterojunction

The Ag/n-ZnO/p-Si(100)/Al heterojunction diodes were fabricated by pulsed laser deposition of zinc oxide (ZnO) thin films on p-type silicon. The X-ray diffraction analysis shows the formation of ZnO thin film with hexagonal structure having strong (002) plane as preferred orientation. The energy band gap of ZnO films simultaneously deposited on quartz substrate was calculated from the measured UV–Visible transmittance spectra. High purity vacuum evaporated silver and aluminum thin films were used to make contacts to the n-ZnO and p-silicon, respectively. The current–voltage and capacitance–voltage characteristics of Ag/n-ZnO/p-Si(100)/Al heterostructures were measured over the temperature range of 80–300 K. The Schottky barrier height and ideality factor were determined by fitting of the measured current–voltage data into thermionic emission diffusion equation. It is observed that the barrier height decreases and the ideality factor increases with decrease of temperature and the activation energy plot exhibit non-linear behavior. This decrease in barrier height and increase in ideality factor at low temperature are attributed to the occurrence Gaussian distribution of barrier heights. The capacitance–voltage characteristics of Ag/n-ZnO/p-Si(100)/Al heterojunction diode were also studied over the wide temperature range. Capacitance–voltage data are used to estimate the barrier height and impurity concentration in n-type ZnO.     

Determination of the laterally homogeneous barrier height of metal/p-InP Schottky barrier diodes

We have reported a study of a number of metal/p-type InP (Cu, Au, Al, Sn, Pb, Ti, Zn) Schottky barrier diodes (SBDs). Each one diode has been identically prepared on p-InP under vacuum conditions with metal deposition. In Schottky diodes, the current transport occurs by thermionic emission over the Schottky barrier. The current–voltage characteristics of Schottky contacts are described by two fitting parameters such as effective barrier height and the ideality factor. Due to lateral inhomogeneities of the barrier height, both characteristic diode parameters differ from one diode to another. We have determined the lateral homogeneous barrier height of the SBDs from the linear relationship between experimental barrier heights and ideality factors that can be explained by lateral inhomogeneity of the barrier height. Furthermore, the barrier heights of metal–semiconductor contacts have been explained by the continuum of metal-induced gap states (MIGS). It has been seen that the laterally homogeneous barrier heights obtained from the experimental data of the metal/p-type InP Schottky contacts quantitatively confirm the predictions of the combination of the physical MIGS and the chemical electronegativity.     

Determination of the laterally homogeneous barrier height of metal/p-InP Schottky barrier diodes

We have reported a study of a number of metal/p-type InP (Cu, Au, Al, Sn, Pb, Ti, Zn) Schottky barrier diodes (SBDs). Each one diode has been identically prepared on p-InP under vacuum conditions with metal deposition. In Schottky diodes, the current transport occurs by thermionic emission over the Schottky barrier. The current–voltage characteristics of Schottky contacts are described by two fitting parameters such as effective barrier height and the ideality factor. Due to lateral inhomogeneities of the barrier height, both characteristic diode parameters differ from one diode to another. We have determined the lateral homogeneous barrier height of the SBDs from the linear relationship between experimental barrier heights and ideality factors that can be explained by lateral inhomogeneity of the barrier height. Furthermore, the barrier heights of metal–semiconductor contacts have been explained by the continuum of metal-induced gap states (MIGS). It has been seen that the laterally homogeneous barrier heights obtained from the experimental data of the metal/p-type InP Schottky contacts quantitatively confirm the predictions of the combination of the physical MIGS and the chemical electronegativity.     

Carrier transport mechanisms and photovoltaic characteristics of Au/toluidine blue/n-Si/Al heterojunction solar cell

Toluidine blue (TB)/n-silicon heterojunction solar cell was fabricated by depositing TB film on n-silicon wafer using thermal deposition technique. X-ray diffraction patterns of the TB film show presence of crystals with size 30 nm dispersed in amorphous matrix. The current–voltage–temperature performance of Au/TB/n-Si/Al device was studied in dark and under illumination conditions. The device showed diode behavior. The diode parameters such as ideality factor, barrier height, series and shunt resistance were determined using a conventional I–V–T characteristics. The analysis of the diode characteristics in forward bias direction confirmed that the transport mechanisms of the Au/TB/n-Si/Al solar cell at applied potential?<?0.1 V is thermionic emission and at high electric field?>?0.1 V is Ohmic conduction. The operating conduction mechanisms in reverse bias direction are Pool–Frenkel effect followed by Schootky field lowering mechanism. The small value of activation energy in reverse bias direction indicates that the conduction process is expected to be by tunneling of electrons between nearest-neighbor sites and it is temperature independent. The photo conduction characteristics of the diode suggests its application as a solar cell.     

Temperature dependence of current—voltage characteristics of Au/n-GaAs epitaxial Schottky diode

The influence of temperature on current-voltage (I-V) characteristics of Au/n-GaAs Schottky diode formed on n-GaAs epitaxial layer grown by metal organic chemical vapour deposition technique has been investigated. The dopant concentration in the epitaxial layer is 1 X 10¹⁶ cm^-3. The change in various parameters of the diode like Schottky barrier height (SBH), ideality factor and reverse breakdown voltage as a function of temperature in the range 80–300 K is presented. The variation of apparent Schottky barrier height and ideality factor with temperature has been explained considering lateral inhomogeneities in the Schottky barrier height in nanometer scale lengths at the metal-semiconductor interface     

Effect of annealing temperature on electrical properties of Au/polyvinyl alcohol/n-InP Schottky barrier structure

In the present work, thin film of polyvinyl alcohol (PVA) is fabricated on n-type InP substrate as an interfacial layer for electronic modification of Au/n-InP Schottky contact. The electrical characteristics of Au/PVA/n-InP Schottky diode are determined at annealing temperature in the range of 100-300 °C by current-voltage (I-V) and capacitance-voltage (C-V) methods. The Schottky barrier height and ideality factor (n) values of the as-deposited Au/PVA/n-InP diode are obtained at room temperature as 0.66 eV (I-V), 0.82 eV (C-V) and 1.32, respectively. Upon annealing at 200 °C in nitrogen atmosphere for 1 min, the barrier height value increases to 0.81 eV (I-V), 0.99 eV (C-V) and ideality factor decreases to 1.18. When the contact is annealed at 300 °C, the barrier height value decreases to 0.77 eV (I-V), 0.96 eV (C-V) and ideality factor increases to 1.22. It is observed that the interfacial layer of PVA increases the barrier height by the influence of the space charge region of the Au/n-InP Schottky junction. The discrepancy between Schottky barrier heights calculated from I-V and C-V measurements is also explained. Further, Cheung's functions are used to extract the series resistance of Au/PVA/n-InP Schottky diode. The interface state density as determined by Terman's method is found to be 1.04 × 10¹² and 0.59 × 10¹² cm^− 2 eV^− 1 for the as-deposited and 200 °C annealed Au/PVA/n-InP Schottky diodes. Finally, it is seen that the Schottky diode parameters changed with increase in the annealing temperature.     

Electrical properties of Poly(ethylene glycol dimethacrylate-n-vinyl imidazole)/Single Walled Carbon Nanotubes/n-Si Schottky diodes formed by surface polymerization of Single Walled Carbon Nanotubes

In this paper we report the electrical characteristics of the Schottky diodes formed by surface polymerization of the Poly(ethylene glycol dimethacrylate-n-vinyl imidazole)/Single Walled Carbon Nanotubes on n-Si. The Single Walled Carbon Nanotubes were synthesized by CVD method. The main electrical properties of the Poly(ethylene glycol dimethacrylate-n-vinyl imidazole)/Single Walled Carbon Nanotubes/n-Si have been investigated through the barrier heights, the ideality factors and the impurity density distribution, by using current-voltage and reverse bias capacitance voltage characteristics. Electrical measurements were carried out at room temperature. Poly(ethylene glycol dimethacrylate-n-vinyl imidazole)/Single Walled Carbon Nanotubes/n-Si Schottky diode current-voltage characteristics display low reverse-bias leakage currents and average barrier heights of 0.61 ± 0.02 eV and 0.72 ± 0.02 eV obtained from both current-voltage and capacitance-voltage measurements at room temperature, respectively.     

Formation and rupture of Schottky nanocontacts on ZnO nanocolumns

In this paper, the electrical transport and mechanical properties of Pt/ZnO Schottky nanocontacts have been studied simultaneously during the formation and rupture of the nanocontacts. By combining multidimensional conducting scanning force spectroscopy with appropriated data processing, the physical relevant parameters (the ideality factor, the Schottky barrier height, and the rupture voltage) are obtained. It has been found that the transport curves strongly depend on the loading force. For loading forces higher than a threshold value, the transport characteristics are similar to those of large-area Schottky contact, while below this threshold deviations from strictly thermionic emission are detected. Above the threshold, stable and reproducible Pt/ZnO nanocontacts with ideality factors of about 2 and Schottky barrier heights of around 0.45 eV have been obtained.