基于双栅长GaN集成工艺的Ku波段收发芯片

研制了一款Ku波段GaN收发多功能芯片。芯片集成了接收通道的低噪声放大器和发射通道的功率放大器,使用单刀双掷开关实现通道间切换。该芯片采用两种不同栅长集成的GaN HEMT工艺。低噪声放大器使用0.10μm低压低噪声工艺,功率放大器和开关使用0.15μm高压高功率工艺。低噪声放大器采用电流复用结构以降低功耗,功率放大器采用三级电抗式匹配网络以提高芯片输出功率。测试结果表明,在14～18 GHz频带内,发射通道线性增益≥30 dB,饱和输出功率≥40.5 dBm,功率附加效率典型值为23%;接收通道线性增益为24 dB（±0.2 dB）,噪声系数典型值为2.3 dB,功耗仅为140 mW(5 V/28 mA)。芯片面积为4.0 mm×3.0 mm。     

基于GaAs PHEMT的5～12 GHz收发一体多功能芯片

基于GaAs赝高电子迁移率晶体管(PHEMT)工艺,研制了一种5～ 12 GHz的收发一体多功能芯片(T/R MFC),其具有噪声低、增益高和中等功率等特点.电路由低噪声放大器和多个单刀双掷(SPDT)开关构成.为了获得较低的噪声系数和较大的增益,低噪声放大器采用自偏置三级级联拓扑结构;为了获得较高的隔离度和较低的插入损耗,SPDT开关采用串并联结构.测试结果表明,在5～ 12 GHz频段内,收发一体多功能芯片的小信号增益大于26 dB,噪声系数小于4 dB,输入/输出电压驻波比小于2.0,1 dB压缩点输出功率大于15 dBm.其中,放大器为单电源5V供电,静态电流小于120 mA;开关控制电压为-5 V/0 V.芯片尺寸为2.65 mm×2.0 mm.     

一种用于5G 终端的毫米波收发器前端芯片的研制

用0.15 μm GaAs 增强型赝配高电子迁移率电子管(EPHEMT)工艺研制了一款集功率放大器、低噪声放大器、单刀双掷开关为一体的、可用于5G 宽带无线移动通信系统终端的毫米波收发器前端芯片。其中,功率放大器采用电抗匹配技术的两级放大拓扑结构,单刀双掷开关采用正电压控制的对称器件结构,低噪声放大器采用两级最佳噪声兼顾增益的拓扑结构。测试结果表明, 24.25 ~ 27.5 GHz频带内,芯片发射支路饱和输出功率>22 dBm,附加效率>28%;芯片接收支路噪声系数<3.0 dB, 线性增益>13 dB; 芯片收发隔离度优于-20 dB。该芯片面积为2.2 mm×1.8 mm。     

K波段收发多功能GaAs MMIC芯片

介绍了一种基于0.15μm GaAs pHEMT功率工艺的K波段收发一体多功能芯片。该多功能芯片包含了功率放大器和低噪声放大器及收发开关。接收支路19.6~23.0GHz内增益大于23dB,增益平坦度为±0.2dB,输入输出驻波均小于1.8,噪声低于3.5dB;发射支路21~23GHz内输出驻波小于2.2,输入驻波小于2,增益大于25.6dB。在22GHz时饱和输出功率为23.3dBm,饱和电流170mA,效率达到25.2%。该多功能芯片接收/发射由单刀双掷开关控制。芯片尺寸为:4.1mm×2.75mm×0.05mm。     

一种大功率高效率的Ku波段SiGe硅功率放大器设计

采用SiGe BiCMOS工艺设计了一款大功率高效率硅基功率放大器芯片,用于驱动现有大功率GaN功率放大器芯片,满足相控阵雷达的低成本需求。该硅基功率放大器通过和低噪声放大器、驱动放大器、数控移相器、数控衰减器、单刀双掷开关、电源管理以及数字逻辑单元等硅基电路进一步集成,实现了一片式高集成度硅基幅相多功能芯片,从而降低了前端收发组件的尺寸和成本。在硅基功率放大器设计中,结合Stack结构、变压器耦合结构和有源偏置结构,开展电路设计及优化,提高了放大器的输出功率和效率。测试结果表明:研制的硅基功率放大器在Ku波段f_1~f_2(3GHz带宽)频带内,实现了小信号增益31dB;在-3dBm输入功率条件下,实现发射功率21.5dBm、功率附加效率(PAE)25%等技术指标。集成功率放大器的幅相多功能芯片在f_1~f_2(3GHz带宽)频带内,实现了发射通道增益24dB;在5dBm输入功率条件下发射功率21.5dBm、功率附加效率(PAE)23%等技术指标。     

基于GaAs pHEMT的1.0～2.4 GHz放大衰减多功能芯片

基于0.25 μm GaAs赝高电子迁移晶体管(pHEMT)工艺,研制了一种1.0～2.4 GHz的放大衰减多功能芯片,该芯片具有低噪声、高线性度和增益可数控调节等特点。电路由第一级低噪声放大器、4位数控衰减器、第二级低噪声放大器依次级联构成,同时在片上集成了TTL驱动电路。为获得较大的增益和良好的线性度,两级低噪声放大器均采用共源共栅结构(Cascode)。测试结果表明,在1.0～2.4 GHz频带范围内,该芯片基态小信号增益约为36 dB,噪声系数小于1.8 dB,输出1 dB压缩点功率大于16 dBm,增益调节范围为15 dB,调节步进1 dB,衰减RMS误差小于0.3 dB,输入输出电压驻波比小于1.5。其中放大器采用单电源+5 V供电,静态电流小于110 mA,TTL驱动电路采用-5 V供电,静态功耗小于3 mA。整个芯片的尺寸为3.5 mm×1.5 mm×0.1 mm。     

毫米波高性能收发多功能芯片

利用0.15μm GaAs PHEMT工艺,研制了一款集成功率放大器和低噪声放大器的毫米波多功能单片。发射支路功率放大器采用三级放大拓扑结构,在32~36GHz内,在6V工作电压下,线性增益23dB,增益平坦度优于±0.75dB,输入/输出驻波小于1.3,饱和输出功率30dBm,功率附加效率约30%。接收支路低噪声放大器采用三级放大拓扑结构,在5V、30mA工作电压下,在32~37GHz内,线性增益23.5dB,增益平坦度优于±1dB,噪声系数小于2.5dB,1dB压缩输出功率大于6dBm。该芯片面积为3.67mm×3.13mm。     

基于GaN HEMT的13～17 GHz收发多功能芯片

基于GaN高电子迁移率晶体管(HEMT)工艺设计制作了一款收发(T/R)多功能芯片(MFC),主要用于射频前端收发系统.该芯片集成了单刀双掷(SPDT)开关用于选择接收通道或发射通道工作,芯片具有低噪声性能、高饱和输出功率和高功率附加效率等特点.芯片接收通道的LNA采用四级放大、单电源供电、电流复用结构,发射通道的功率放大器采用三级放大、末级四胞功率合成结构,选通SPDT开关采用两个并联器件完成.采用微波在片测试系统完成该芯片测试,测试结果表明,在13～ 17 GHz频段内,发射通道功率增益大于17.5 dB,输出功率大于12W,功率附加效率大于27％.接收通道小信号增益大于24 dB,噪声系数小于2.7 dB,1 dB压缩点输出功率大于9 dBm,输入/输出电压驻波比小于1.8∶1,芯片尺寸为3.70 mm×3.55 mm.     

Ku波段SiGe幅相多功能芯片设计

幅相多功能芯片是相控阵雷达的关键部件。为了降低前端收发组件的尺寸和成本,本文采用0.13μm SiGe BiCMOS工艺设计了一款Ku波段幅相多功能芯片,单片集成了接收通道和发射通道,芯片面积2.5 mm×4.5mm。研制的多功能芯片的接收通道含前端低噪声放大器、六位数控衰减器、驱动放大器、单刀双掷开关、六位数控移相器;发射通道含六位数控移相器、单刀双掷开关、驱动放大器、中功率放大器。此外,为了进一步提高芯片的集成度,采用片上集成的电源管理单元和数字逻辑单元实现电源电压变换、衰减器和移相器的逻辑控制以及收发通道切换等功能。实测结果表明:在f1~f2(1GHz带宽)频带内,实现了发射增益17dB,发射功率(Psat)21.7dBm;接收增益-3dB,接收输入功率(P-1)-8.5dBm,接收噪声系数6.5dB;5.625°移相步进,移相精度(RMS)4.5°;0.5dB衰减步进,衰减精度(0.3dB+7%AS)。     

E/D GaAs PHEMT多功能MMIC设计

基于E/D GaAs赝配高电子迁移率晶体管(PHEMT)工艺研制了Ku波段多功能MMIC芯片。该MMIC集成了数字驱动器和微波电路,内含6bit数控移相器、6bit数控衰减器、3个低噪声放大器、4个数控单刀双掷开关、多个TTL数字驱动器。其中两个低噪声放大器采用了电流复用技术,总直流功耗小于275mW,实现了节能。测试结果表明:发射支路增益大于2dB,输出P1dB大于9dBm;接收支路增益大于10dB,输出P1dB大于7dBm,噪声系数小于8dB。相对移相误差均方根值(RMS)在发射和接收模式下均小于6°,附加调幅小于1.5dB;衰减误差RMS小于0.7dB,附加调相小于4°。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.