Study on CuO–BaTiO3 semiconductor CO2 sensor

The prototype of a CO₂ sensor made of CuO–BaTiO₃, which has capacitance sensitive effect, is designed based on the pn heterojunctions of CuO and BaTiO₃ semiconductors. The preparation of BaTiO₃ semiconductor powders is pointed out, using the coprecipitation and semiconducting techniques. The characteristic quantities relating to the capacitance sensitive effect of the sensor are studied systematically with the aid of a gas tester. A reasonable mechanism of the sensor is proposed.     

Doping behavior of CdO in BaTiO3-based PTCR ceramics

Impurities have great influence on the PTCR effect in BaTiO₃ ceramics, especially a donor and an acceptor. When Cd replaces Ba as equivalent impurity, neither donor nor acceptor does it act as. However, it was found that doping with either solid CdO or vapor one resulted in the enhancement of the PTCR effect of BaTiO₃-based semiconducting ceramics. The mechanism of the enhancement of the PTCR effect is also discussed.     

DC humidity sensing properties of BaTiO3 nanofiber sensors with different electrode materials

Barium titanate (BaTiO₃) nanofibers were synthesized by electrospinning and calcination techniques. Two direct current (DC) humidity sensors with different electrodes (Al and Ag) were fabricated by loading BaTiO₃ nanofibers as the sensing material. Compared with the Al electrode sensor, the Ag electrode sensor exhibits larger sensitivity and quicker response/recovery. The current of Al electrode sensor increases from 4.08 × 10⁻⁹ to 1.68 × 10⁻⁷ A when the sensor is switched from 11% to 95% relative humidity (RH), while the values are 2.19 × 10⁻⁹ and 3.29 × 10⁻⁷ A for the Ag electrode sensor, respectively. The corresponding response and recovery times are 30 and 9 s for Al electrode sensor, and 20 and 3 s for Ag electrode sensor, respectively. These results make BaTiO₃ nanofiber-based DC humidity sensors good candidates for practical application. Simultaneously, the comparison of sensors with different electrode materials may offer an effective route for designing and optimizing humidity sensors.     

Ceria-doped SnO2 sensor highly selective to ethanol in humid air

In our earlier study, we reported that at 300 °C, a 2.0 wt.% CeO₂-doped SnO₂ sensor is highly selective to ethanol in the presence of CO and CH₄ gases [F. Pourfayaz, A. Khodadadi, Y. Mortazavi, S.S. Mohajerzadeh, CeO₂ doped SnO₂ sensor selective to ethanol in presence of CO, LPG and CH₄, Sens. Actuators B 108 (2005) 172–176]. In the present investigation, we report the influence of ambient air humidity on the ethanol selective SnO₂ sensor doped with 2.0 wt.% CeO₂. Maximum response to ethanol occurs at 300 °C which decreases with the relative humidity. The relative humidity was changed from 0 to 80% for different ambient air temperatures of 30, 40 and 50 °C and the response of the sensor was monitored in a 250–450 °C temperature range. As the relative humidity in 50 °C air increased from 0 to 30%, a 15% reduction in the maximum response to ethanol was observed. A further increase in the relative humidity no longer reduced the response significantly. The presence of humidity improved the sensor response to both CO and CH₄ up to 350 °C after which the extent of improvement became smaller and at 450 °C was almost diminished. The sensor is shown to be quite selective to ethanol in the presence of humid air containing CO and CH₄. The selectivity passes a maximum at 300 °C; however it declines at higher operating temperatures.     

Influence of doping BiYO3 and Nb2O5 on PTCR characteristics of BaTiO3 thermistor ceramics

Nb₂O₅-doped (1 − x)Ba_0.96Ca_0.04TiO₃-xBiYO₃ (where x = 0.01, 0.02, 0.03 and 0.04) lead-free PTC thermistor ceramics were prepared by a conventional solid state reaction method. X-ray diffraction, scanning electron microscope, Agilent E4980A and resistivity-temperature measurement instrument, were used to characteristic the lattice distortion, microstructure, temperature dependence of permittivity and resitivity-temperature dependence. It was revealed that the tetragonality c/a of the perovskite lattice, the microstructure and the Curie temperature changed with the BiYO₃ content. In order to decrease the room temperature resistivity, the effect of Nb₂O₅ on the room temperature resistivity was also studied, and its optimal doping content was finally chosen as 0.2 mol%. The 0.97Ba_0.96Ca_0.04TiO₃-0.03BiYO₃-0.002Nb₂O₅ thermistor ceramic exhibited a low ρ_RT of 3.98 × 10³ Ω cm, a typical PTCR effect of ρ_max/ρ_min > 10³ and a T_c of 153 °C.     

Usage of porous Al2O3 layers for RH sensing

Capacitive sensors prepared by microelectronic technology are based on dielectric property changes of thin films upon water vapor uptake, which depends on the surrounding media’s relative humidity content. One of the dielectrics to be used is porous Al₂O₃, obtained by electrochemical oxidation of aluminum under anodic bias. In this paper a sensitive, fast and cheap capacitive sensor has been described and investigated. The work was presented at Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007, Stresa, Lago Maggiore, Italy, 25–27 April 2007.     

Humidity sensing properties of Nation and sol-gel derived SiO2/Nafion composite thin films

Nafion, sol-gel derived SiO₂ and SiO₂/Nafion composite films were prepared through casting and dip-coating methods. Impedance response of the films to relative humidity and the stability of the response against different aging environments were examined. The response to relative humidity of each film was analyzed with their complex impedance spectra at different humidities.     

Electrical response of Sm2O3-doped SnO2 to C2H2 and effect of humidity interference

Pure and Sm₂O₃-doped SnO₂ are prepared through a sol–gel method and characterized by X-ray diffraction (XRD) and transmission electron microscopy (TEM). The sensor based on 6 wt% Sm₂O₃-doped SnO₂ displays superior response at an operating temperature of 180 °C, and the response magnitude to 1000 ppm C₂H₂ can reach 63.8, which is 16.8 times larger than that of pure SnO₂. This sensor also shows high sensitivity under various humidity conditions. These results make our product be a good candidate in fabricating C₂H₂ sensors.     

Selective detection of HCHO gas using mixed oxides of ZnO/ZnSnO3

Mixed oxides of ZnO/ZnSnO₃ doped with Au element were prepared by a hydrothermal process. The crystal structure, composition and ceramic microstructure of the powders obtained were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM) and scanning electron microscopy (SEM). The results show that the product is the mixture of ZnO/ZnSnO₃; its particle size is about 500 nm with good dispersivity in shape. The sensitivity, selectivity, response and recovery properties of the ZnO/ZnSnO₃-based sensors were investigated by mixing a target gas in air. It is found that the sensors have remarkable sensitivity to HCHO vapor and satisfactory selectivity to other gases.     

Impedancemetric gas sensor based on Pt and WO3 co-loaded TiO2 and ZrO2 as total NOx sensing materials

Pt-loaded metal oxides [WO₃/ZrO₂, MO_x/TiO₂ (MO_x = WO₃, MoO₃, V₂O₅), WO₃ and TiO₂] equipped with interdigital Au electrodes have been tested as a NO_x (NO and NO₂) gas sensor at 500 °C. The impedance value at 4 Hz was used as a sensing signal. Among the samples tested, Pt-WO₃/TiO₂ showed the highest sensor response magnitude to NO. The sensor was found to respond consistently and rapidly to change in concentration of NO and NO₂ in the oxygen rich and moist gas mixture at 500 °C. The 90% response and 90% recovery times were as short as less than 5–10 s. The impedance at 4 Hz of the present device was found to vary almost linearly with the logarithm of NO_x (NO or NO₂) concentration from 10 to 570 ppm. Pt-WO₃/TiO₂ showed responses to NO and NO₂ of the same algebraic sign and nearly the same magnitude, while Pt/WO₃ and WO₃/TiO₂ showed higher response to NO than NO₂. The impedance at 4 Hz in the presence of NO for Pt-WO₃/TiO₂ was almost equal at any O₂ concentration examined (1–99%), while in the case of Pt/WO₃ and WO₃/TiO₂ the impedance increased with the oxygen concentration. The features of Pt-WO₃/TiO₂ are favorable as a NO_x sensor that can monitor and control the NO_x concentration in automotive exhaust. The effect of WO₃ loading of Pt-WO₃/ZrO₂-based sensor is studied to discuss the role of surface W-OH sites on the NO_x sensing.     

Characterization and humidity sensing properties of Bi0.5Na0.5TiO3-Bi0.5K0.5TiO3 powder synthesized by metal-organic decomposition

Bi_0.5Na_0.5TiO₃-Bi_0.5K_0.5TiO₃ (BNT-BKT) powder is synthesized by a metal-organic decomposition method and characterized by field-emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), and X-ray diffraction (XRD). A humidity sensor, which is consisted of five pairs of Ag-Pd interdigitated electrodes and an Al₂O₃ ceramic substrate, is fabricated by spin-coating the BNT-BKT powder on the substrate. Good humidity sensing properties such as high response value, short response and recovery times, and small hysteresis are observed in the sensing measurement. The impedance changes more than four orders of magnitude within the whole humidity range from 11% to 95% relative humidity (RH) at 100 Hz. The response time and recovery time are about 20 and 60 s, respectively. The maximum hysteresis is around 4% RH. The results indicate that BNT-BKT powder is of potential applications for fabricating high performance humidity sensors.     

Thermodynamic assessment of the ternary AgNO3-LiNO3-NaNO3 system

Based on the available experimental information, the AgNO₃-LiNO₃-NaNO₃ ternary system and its low order AgNO₃-LiNO₃, AgNO₃-NaNO₃ and LiNO₃-NaNO₃ binary systems are thermodynamically assessed using the Calphad method. A set of parameters describing the Gibbs energies of the different phases is presented. Ternary parameters are necessary to describe the liquid phase in a neutral species model where each nitrate is treated as a constituent. Calculated phase diagrams and thermodynamical functions for the three limiting binary systems show good agreement with experimental data. In the ternary AgNO₃-LiNO₃-NaNO₃ system we have calculated two vertical sections which are in reasonable agreement with the reported experimental data. Also, several isothermal sections are calculated.     

Humidity sensing and electrical properties of a composite material of nano-sized SiO2 and poly(2-acrylamido-2-methylpropane sulfonate)

A composite material of nano-sized SiO₂ and poly(2-acrylamido-2-methylpropane sulfonate) (poly(AMPS)) was used to make a humidity sensor. The infrared (IR) spectra and microstructure of the material were analyzed, and the humidity sensing and electrical properties of the sensor were measured. The sensor well responded to humidity with a relative good linearity, though it depended on the applied frequency. The temperature influence between 15 and 35 °C was −0.71 and −0.15% RH/°C at 30 and 90% RH, respectively. The sensor showed a negligible hysteresis and fast response time upon humidification and desiccation. The stability of the sensor in a highly humid and alcoholic environment increased with increasing the SiO₂ content. The activation energy for conduction reduced with water adsorption. The different impedance plots observed at low and high relative humidity suggested different sensing mechanisms of the SiO₂/poly(AMPS) composite material.     

Preparation and characterization of nanocrystalline α-Fe2O3 by a sol-gel process

α-Fe₂O₃ ultra-fine powder with an average particle size of 6–26nm has been prepared by a sol-gel process. Thermal analysis, X-ray diffraction and transmission electron microscope were used to study its formation process and micro-structure. The temperature dependence of the electric conductance of the elements made of nanocrystalline α-Fe₂O₃ shows that the gas-sensing properties are strongly related to its surface. The elements exhibited good sensitivity and selectivity to ethyl alcohol, indicating it is a promising alcohol-sensing material.     

Structural and properties of nanocrystalline WO3/TiO2-based humidity sensors elements prepared by high energy activation

Nanocrystalline WO₃/TiO₂-based powders have been prepared by the high energy activation method with WO₃ concentration ranging from 1 to 10 mol%. The samples were thermal treated in a microwave oven at 600 °C for 20 min and their structural and micro-structural characteristics were evaluated by X-ray diffraction, Raman spectroscopy, EXAFS measurements at the Ti K-edge, and transmission electron microscopy. Nitrogen adsorption isotherms and H₂ Temperature Programmed Reduction were also carried out for physical characterization. The crystallite and particle mean sizes ranged from 30 to 40 nm and from 100 to 190 nm, respectively. Good sensor response was obtained for samples with at least 5 mol% WO₃ activated for at least 80 min. Ceramics heat-treated in microwave oven for 20 min have shown similar sensor response as those prepared in conventional oven for 120 min, which is highly cost effective. These results indicate that WO₃/TiO₂ ceramics can be used as a humidity sensor element.     

Preparation and gas-sensing performance of In2O3 porous nanoplatelets

In₂O₃ porous nanoplatelets were successfully synthesized by solvothermal treatment of indium acetylacetonate, followed by calcination in air. X-ray diffraction and Raman spectrum measurements demonstrate that the products are pure cubic phase In₂O₃. Scanning electron microscopy and transmission electron microscopy analyses reveal that the In₂O₃ nanoplatelets bounded by {1 1 0} planes with thickness less than 6 nm and length about 20-50 nm are single crystalline but with porous structure. The optical absorption property of the In₂O₃ nanoplatelets was investigated by UV-vis spectroscopy, which indicates that the In₂O₃ nanoplatelets are semiconducting with a direct band gap of 3.1 eV. The gas sensing performance of the as-prepared In₂O₃ porous nanoplatelets was investigated towards a series of typical organic solvents and fuels. It was found that the In₂O₃ porous nanoplatelets show structure-induced enhancement of gas sensing performance, and especially possess high sensitivity and rapid response towards ethanol vapor.     

Room-temperature CO2 sensing using metal-insulator-semiconductor capacitors comprising atomic-layer-deposited La2O3 thin films

Room temperature detection of CO₂ using metal-insulator-silicon (MIS) devices is reported. These devices comprise atomic layer deposited La₂O₃ thin films as the gas-sensitive dielectric layer and Pt, Pt/Ta and Al as the electrodes. Physical mechanisms that lead to the detection of CO₂ at room temperature are discussed.     

Comparative study on TeO2 and TeO3 thin film for γ-ray sensor application

Tellurium trioxide (TeO₃) and tellurium dioxide (TeO₂) thin film has been deposited by rf sputtering. The influence of γ-radiation doses (in the range 10–50 Gy) on the optical and electrical properties of as-deposited films were studied. Optical band gap values were found to decrease with increasing radiation dose whereas electrical conductivity was increased by about five orders in magnitude. Monotonic decrease in the values of dielectric constant for the deposited TeO₃ films with increase in radiation dose was observed. The γ-ray response behavior of TeO₃ and TeO₂ thin films are compared, and TeO₃ thin film is found to be more suitable in amorphous form for γ-ray detection.     

Pulsed laser deposited Y-doped BaZrO3 thin films for high temperature humidity sensors

Pulsed laser deposited (PLD) Y-doped BaZrO₃ thin films (BaZr_1-xY_xO_3-y/2, x = 0.2, y > 0), were investigated as to their viability for reliable humidity microsensors with long-term stability at high operating temperatures (T > 500 °C) as required for in situ point of source emissions control as used in power plant combustion processes. Defect chemistry based models and initial experimental results in recent humidity sensor literature [1] and [2]. indicate that bulk Y-doped BaZrO₃ could be suitable for use in highly selective, high temperature compatible humidity sensors. In order to accomplish faster response and leverage low cost batch microfabrication technologies we have developed thin film deposition processes, characterized layer properties, fabricated and tested high temperature humidity micro sensors using these thin films. Previously published results on sputtering Y-doped BaZrO₃ thin films have confirmed the principle validity of our approach [3]. However, the difficulty in controlling the stoichiometry of the films and their electrical properties as well as mud flat cracking of the films occurring either at films thicker than 400 nm or at annealing temperature above 800 °C have rendered sputtering a difficult process for the fabrication of reproducible and reliable thin film high temperature humidity microsensors, leading to the evaluation of PLD as alternative deposition method for these films.X-ray Photoelectron Spectroscopy (XPS) data was collected from as deposited samples at the sample surface as well as after 4 min of Ar⁺ etching. PLD samples were close to the desired stoichiometry. X-ray diffraction (XRD) spectra from all as deposited BaZrO₃:Y films show that the material is polycrystalline when deposited at substrate temperatures of 800 °C. AFM results revealed that PLD samples have a particle size between 32 nm and 72 nm and root mean square (RMS) roughness between 0.2 nm and 1.2 nm. The film conductivity increases as a function of temperature (from 200 °C to 650 °C) and upon exposure to a humid atmosphere, supporting our hypothesis of a proton conduction based conduction and sensing mechanism. Humidity measurements are presented for 200–500 nm thick films from 500 °C to 650 °C at vapor pressures of between 0.05 and 0.5 atm, with 0.03–2% error in repeatability and 1.2–15.7% error in hysteresis during cycling for over 2 h. Sensitivities of up to 7.5 atm⁻¹ for 200 nm thick PLD samples at 0.058 atm partial pressure of water were measured.     

Preparation and characterization of unimorph actuators based on piezoelectric Pb(Zr0.52Ti0.48)O3 materials

This paper describes the preparation and characterization of unimorph actuators for deformable mirrors, based on Pb(Zr_0.52Ti_0.48)O₃ (PZT52) thin film. As comparison, two different designs, where the PZT layer in the unimorph actuators was driven by either interdigitated electrodes (IDT-mode) or parallel plate electrodes (d₃₁-mode), were investigated. The actuators utilize a unimorph membrane (diaphragm) structure consisting of an active PZT piezoelectric layer and a passive SiO₂/Si composite layer. To fabricate the diaphragm structures, n-type (1 0 0) silicon-on-insulator (SOI) wafers with 1 μm thermal SiO₂ were used as substrates (for d₃₁-mode actuators, the upper Si part of SOI need to be heavily doped and used as bottom electrodes simultaneously). Sol-gel derived PZT piezoelectric layers with PbTiO₃ (PT) bufferlayer in total of 0.86 μm were then fabricated on them, and 0.15 μm Al reflective layers were deposited and patterned into top electrode geometries, subsequently. The diaphragms were released using orientation-dependent wet etching (ODE) with 5-10 μm residual silicon layers. The complete unimorph actuators comprise 4 × 4 discrete units (4 mm² in size) with patterned PZT films for parallel plate configuration or 3 × 3 individual pixels (2 mm in IDT diameter) with continuous PZT films in graphic region for IDT configuration. The measurement results indicated that both of the two configurations can generate considerable deflections at low voltage. The measured maximum central deflections at 15 V were approximately 2.5 μm and 2.8 μm, respectively. The intrinsic strain conditions shaping the deflection profiles for the diaphragm actuators were also analyzed. In this paper, the behaviors of clamped parallel plate configuration without a diaphragm were also evaluated.