A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge

A cold floating probe method was compared with the emissive floating probe method in terms of a low-pressure radio-frequency inductive discharge. The dependences of difference between the plasma potential and the floating potential on the electron temperature 1–8 eV, plasma density 10⁹ –10¹² cm⁻³ and magnetic field 100–650 G were obtained. It was demonstrated that the difference between the potentials that obtained by these two methods can differ significantly from the expected value of 5.2 kT_e/e for argon.     

Development of a helicon-wave excited plasma facility with high magnetic field for plasma-wall interactions studies

The high magnetic field helicon experiment system is a helicon wave plasma(HWP)source device in a high axial magnetic field(B_0)developed for plasma–wall interactions studies for fusion reactors.This HWP was realized at low pressure(5?×?10~(-3)?-?10 Pa)and a RF(radio frequency,13.56 MHz)power(maximum power of 2 k W)using an internal right helical antenna(5 cm in diameter by 18 cm long)with a maximum B_0of 6300 G.Ar HWP with electron density~10~(18)–10~(20)m~(-3)and electron temperature~4–7 e V was produced at high B_0 of 5100 G,with an RF power of 1500 W.Maximum Ar~+ion flux of 7.8?×?10~(23)m~(-2)s~(-1)with a bright blue core plasma was obtained at a high B_0 of 2700 G and an RF power of 1500 W without bias.Plasma energy and mass spectrometer studies indicate that Ar~+ion-beams of 40.1 eV are formed,which are supersonic(~3.1c_s).The effect of Ar HWP discharge cleaning on the wall conditioning are investigated by using the mass spectrometry.And the consequent plasma parameters will result in favorable wall conditioning with a removal rate of 1.1?×?10~(24)N_2/m~2 h.     

Plasma density measurement and downstream etching of silicon and silicon oxide in Ar/NF3 mixture remote plasma source

In this study, plasma density measurements were performed near the plume region of the remote plasma source (RPS) in Ar/ NF₃ gas mixtures using a microwave cutoff probe. The measured plasma density is in the range of 10 ¹⁰ –10 ¹¹ cm ⁻³ in the discharge conditions with RPS powers of 2–4 kW and gas pressures of 0.87–4 Torr. The plasma density decreased with increasing gas pressures and RPS powers under various Ar/ NF₃ mixing ratios. This decrease in the plasma density measured at the fixed measurement position (plume region) can be understood by the reduction of the electron energy relaxation length with increases in the gas pressures and mixing ratio of NF₃/(Ar / NF₃). We also performed downstream etching of silicon and silicon oxide films in this system. The etch rate of the silicon films significantly increases while the silicon oxide is slightly etched with the gas pressures and powers. It was also found that the etch rate strongly depends on the wafer position on the processing chamber electrode, and that the etch selectivity reached 96–131 in the discharge conditions of RF powers (3730–4180 W) and gas pressures (3.6–4 Torr).     

Diagnosing the Fine Structure of Electron Energy Within the ECRIT Ion Source

The ion source of the electron cyclotron resonance ion thruster(ECRIT) extracts ions from its ECR plasma to generate thrust, and has the property of low gas consumption(2 sccm,standard-state cubic centimeter per minute) and high durability. Due to the indispensable effects of the primary electron in gas discharge, it is important to experimentally clarify the electron energy structure within the ion source of the ECRIT through analyzing the electron energy distribution function(EEDF) of the plasma inside the thruster. In this article the Langmuir probe diagnosing method was used to diagnose the EEDF, from which the effective electron temperature, plasma density and the electron energy probability function(EEPF) were deduced. The experimental results show that the magnetic field influences the curves of EEDF and EEPF and make the effective plasma parameter nonuniform. The diagnosed electron temperature and density from sample points increased from 4 eV/2×10~(16)m~(-3) to 10 eV/4×10~(16)m(-3) with increasing distances from both the axis and the screen grid of the ion source. Electron temperature and density peaking near the wall coincided with the discharge process. However, a double Maxwellian electron distribution was unexpectedly observed at the position near the axis of the ion source and about 30 mm from the screen grid. Besides, the double Maxwellian electron distribution was more likely to emerge at high power and a low gas flow rate. These phenomena were believed to relate to the arrangements of the gas inlets and the magnetic field where the double Maxwellian electron distribution exits. The results of this research may enhance the understanding of the plasma generation process in the ion source of this type and help to improve its performance.     

Spatial Evolution Study of EEDFs and Plasma Parameters in RF Stochastic Regime by Langmuir Probe

An RF compensated cylindrical Langmuir probe system has been developed and used to characterize an RF capacitive two temperature plasma discharge in a stochastic mode. The novelty of the work presented here is the use of the driven electrode （cathode） without ground shield. Measurements of the electron energy distribution function （EEDF） and plasma parameters were achieved under the following conditions： 50 W of RF power and 5× 10-2 mbar of argon pressure. The probe measurements are performed at 3 cm above the electrode and the probe was shifted radially （r direction） from the center （r = 0 cm） of the inter-electrodes region towards the chamber wall （R = 10.75 cm）. The results show that the EEDF is bi-Maxwellian and its shape remains the same through the scanned region. The farther the probe from the central region, the lower the EEDF maximum. The plasma density is observed to decrease according to a Gaussian profile along the radial direction and falls to 50% of its maximum when close to the cathode edge （r = 5.5 cm）. At the same time the effective electron temperature remains constant for r〈4 cm and increases for r≥4 cm. The high-temperature and low-temperature electrons＇ densities and temperatures are also discussed in the article.     

Numerical study on the modulation of THz wave propagation by collisional microplasma photonic crystal

In order to demonstrate the modulation of terahertz wave propagation in atmospheric pressure microplasmas, in this work, the band structure and the transmission characteristics of a onedimensional collisional microplasma photonic crystal are investigated, using the transfer matrix method. For a lattice constant of 150 μm and a plasma width of 100 μm, three stopbands of microplasma photonic crystal are observed, in a frequency range of 0.1–5 THz. Firstly, an increase in gas pressure leads to a decrease in the central frequency of the stopband. When the gas pressure increases from 50.5 kPa to 202 kPa, the transmission coefficient of the THz wave first increases and then decreases at high frequency, where the wave frequency is much greater than both the plasma frequency and the collision frequency. Secondly, it is interesting to find that the central frequency and the bandwidth of the first THz stopband remain almost unchanged for electron densities of less than 10¹⁵ cm^–3, increasing significantly when the electron density increases up to 10¹⁶ cm^–3. A central frequency shift of 110 GHz, and a bandgap broadening of 200 GHz in the first stopband are observed. In addition, an atmospheric pressure microplasma with the electron density of 1 × 10¹⁵–6 × 10¹⁵ cm^–3 is recommended for the modulation of THz wave propagation by plasma photonic crystals.     

Preliminary results of optical emission spectroscopy by line ratio method in the RF negative ion source at ASIPP

Optical emission spectroscopy (OES) using the trace rare gases of Ar and Xe have been carried out in a radio frequency (RF) driven negative ion source at Institute of Plasma Physics, Chinese Academy of Science (ASIPP), in order to determine the electron temperature and density of the hydrogen plasma. The line-ratio methods based on population models are applied to describe the radiation process of the excited state particles and establish their relations with the plasma parameters. The spectral lines from the argon and xenon excited state atoms with the wavelength of 750.4 and 828.0 nm are used to calculate the electron temperature based on the corona model. The argon ions emission lines with the wavelength of 480 and 488 nm are selected to calculate the electron density based on the collisional radiative model. OES has given the preliminary results of the electron temperature and density by varying the discharge gas pressure and RF power. According to the experimental results, the typical plasma parameters is T_e ≈ 2–4 eV and n_e ≈ 1×10 ¹⁷– 8×10¹⁷ m⁻³ in front of plasma grid.     

Comparative Study of Plasma Parameters in Magnetic Pole Enhanced Inductively Coupled Argon Plasmas

Langmuir probe measurements of radio frequency (RF) magnetic pole enhanced inductively coupled (MaPE-ICP) argon plasma were accomplished to obtain the electron number densities and electron temperatures. The measurements were carried out with a fixed RF frequency of 13.56 MHz in a pressure range of 7.5 mTorr to 75 mTorr at an applied RF power of 10 W and 100 W. These results are compared with a global (volume average) model. The results show good agreement between theoretical and experimental measurements. The electron number density shows an increasing trend with both RF power and pressure while the electron temperature shows decreasing trend as the pressure increases. The difference in the plasma potential and floating potential as a function of electron temperature measured from the electrical probe and that obtained theoretically shows a linear relation with a small difference in the coefficient of proportionality. The intensity of the emission line at 750.4 nm due to 2p 1 → 1s 2 (Paschen’s notation) transition closely follows the variation of n e with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation changes mostly in the high-energy tail, which highlights close similarity of 750.4 nm argon line to n e .     

Experimental study of density pump-out on EAST

In the experimental advanced superconducting tokamak,density pump-out phenomena were observed by using a multi-channel polarimeter-interferometer system under different heating schemes of ion cyclotron resonant heating,electron cyclotron resonance heating,and neutral beam injection.The density pump-out was also induced with application of resonant magnetic perturbation,accompanied with a degradation of particle confinement.For the comparison analysis in all heating schemes,the typical plasma parameters are plasma current 400 k A,toroidal field 2 T,and line average density 2?×?10~(19)m~(-3).The experimental results show that the degree of pump-out is concerned with electron density and heating power.Low density deuterium low confinement(L-mode) plasmas(3.5?×?10~(19)m~(-3)) show strong pump-out effects.The density pump-out correlated with a significant drop of particle confinement.     

Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

It is recognized that standing wave effects appearing in large-area,very-high-frequency capacitively coupled plasma(CCP)reactors cause center-high plasma non-uniformity.Using a high-frequency magnetic probe,we present a direct experimental diagnostic of the nonlinear standing waves and bulk ohmic electron power absorption dynamics in low pressure CCP discharges for different driving frequencies of 13.56,30,and 60 MHz.The design,principle,calibration,and validation of the probe are described in detail.Spatial structures of the harmonics of the magnetic field,determined by the magnetic probe,were used to calculate the distributions of the harmonic current and the corresponding ohmic electron power deposition,providing insights into the behavior of nonlinear harmonics.At a low driving frequency,i.e.13.56 MHz,no remarkable nonlinear standing waves were identified and the bulk ohmic electron power absorption was observed to be negligible.The harmonic magnetic field/current was found to increase dramatically with the driving frequency,due to decreased sheath reactance and more remarkable nonlinear standing waves at a higher driving frequency,leading to the enhancements of the ohmic heating and the plasma density in the bulk,specifically at the electrode center.At a high driving frequency,i.e.60 MHz,the high-order harmonic current density and the corresponding ohmic electron power absorption exhibited a similar node structure,with the main peak on axis,and one or more minor peaks between the electrode center and the edge,contributing to the center-high profile of the plasma density.     

Study of the Deburring Process for Low Carbon Steel by Plasma Electrolytic Oxidation

In an appropriate electrochemical environment, the discrete thermal electron emission could be induced in the micro area due to the uneven distribution of electron flux on the anode surface. Thus an oxygen molecule could be ionized at the liquid-solid interface after collision, and then oxygen plasma with distribution characteristics would be formed. The plasma electrolytic oxidation(PEO) could happen at the liquid-solid interface. In this work, the low carbon steel was used to study the deburring process by PEO at a high frequency(70000 Hz)pulse DC mode. Its burr height H from 3.23 mm to 0.04 mm was removed to form a smooth surface within 6 min. The values of corrosion potential and current density for the untreated sample were -0.667 V and 6.735×10~(-5)A/cm~2, respectively. But for the treated sample, the corrosion potential and current density were relatively lower,-0.354 V and 1.19×10~(-7)A/cm~2.Therefore, PEO was expected to be a new deburring method of carbon steel for the material processing field.     

圆柱形与圆锥形放电腔室中氢等离子体组分与状态研究

采用圆柱形和圆锥形的放电腔室,使用氢气作为放电气体在不同的射频功率下进行了放电。使用质谱诊断和Langmuir探针诊断相结合的方法对两种放电腔室中的氢等离子体的离子组分、离子能量分布（IED）、等离子体电势、电子密度和有效电子温度进行了对比研究。根据等离子体的诊断结果,讨论了圆锥形与圆柱形两种放电腔室中的放电特性。结果表明：圆柱形放电腔室中含有更多的亚稳态氢原子H ^*,而圆锥形放电腔室中含有更多的H⁺离子。圆锥形放电腔室中等离子体具有更高的电子密度和离子密度及更低的等离子体电势。     

Oxide Coated Cathode Plasma Source of Linear Magnetized Plasma Device

Plasma source is the most important part of the laboratory plasma platform for fundamental plasma experimental research. Barium oxide coated cathode plasma source is well recognized as an effective technique due to its high electron emission current. An indirectly heated oxide coated cathode plasma source has been constructed on a linear magnetized plasma device. The electron emission current density can reach 2 A/cm 2 to 6 A/cm ² in pulsed mode within pulse length 5–20 ms. A 10 cm diameter, 2 m long plasma column with density 10 ¹⁸ m ⁻³ to 10 ¹⁹ m ³ and electron temperature T_e ≈ 3–7 eV is produced. The spatial uniformity of the emission ability is less than 4% and the discharge reproducibility is better than 97%. With a wide range of the plasma parameters, this kind of plasma source provides great flexibility for many basic plasma investigations. The detail of construction and initial characterization of oxide coated cathode are described in this paper.     

Fast radial scanning probe system on KTX

A fast radial scanning probe system was constructed for the Keda Torus eXperiment(KTX) to measure the profiles of boundary plasma parameters such as floating potential, electron density,temperature, transport fluxes, etc. The scanning probe system is driven by slow and fast motion mechanisms, corresponding to the stand-by movement of a stepping motor and the fast scanning movement of a high-torque servo-motor, respectively. In fast scanning, the scanner drives the probe radially up to 20 cm at a maximum velocity of 4.0 m s~(-1). A noncontact magnetic grating ruler with a high spatial resolution of 5 μm is used for the displacement measurement. New scanning probe can reach the center of plasmas rapidly. The comparison of plasma floating potential profiles obtained by a fixed radial rake probe and the single scanning probe suggests that the high-speed scanning probe system is reliable for measuring edge plasma parameter profiles on the KTX device.     

Measurement of Ion Parameters by Ion Sensitive Probe in ECR Plasma

Ion parameters in electron cyclotron resonance (ECR) microwave plasma were measured by ion sensitive probe and were compared with the electron parameters obtained by double Langmuir probe. The effects of gas pressure and microwave power on the ion temperature and density were analyzed. The spatial distribution of the ion parameters was also investigated by the ion sensitive probes with a tunable radial depth installed on different probe windows along the chamber axis. Results showed that the ion density measured by the ion sensitive probe was in good agreement with the electron density measured by the double Langmuir probe. The influence of gas pressure on the ion parameters was stronger than that of microwave power. With the increase in working pressure, the ion temperature decreased monotonously with a decreasing rate larger than that at higher pressure. The ion density first increased to a peak (42.3?1010cm-3) at 1 Pa and then decreased. The ion temperature and density increased little with the increase in the microwave power from 400 W to 800 W. The plasma far away from the resonant point is found to be radially uniform.     

Outgassing measurement of the waveguide module for a steady state LHCD antenna

An outgassing rate is measured using a waveguide module during a long pulse r.f. injection at 3.7 GHz in order to operate a lower hybrid current drive (LHCD) antenna in steady state. The waveguide module consists of four sub-waveguides which are made of dispersion-strengthened copper and copper-plated stainless steel with cooling channels to control its working temperature between 100 and 500 °C. The waveguide module shows the high power capability of power density up to 200 MW m⁻² after short term conditioning. A low outgassing rate of about 2 × 10⁻⁷ Pa m³ s⁻² m⁻² is obtained during r.f. injection up to 150 MW m⁻² at a working temperature of T=300 °C after 450 °C baking. Long pulse r.f. injection is effective for reduction of the outgassing by about 1/100. Outgassing during r.f. injection depends on the working temperature but is independent of the r.f. power density after sufficient conditioning. The calculation code taking desorption, adsorption and diffusion processes into account can show time behavior of outgassing in the waveguide module. A quasi-constant outgassing of about 10⁻⁷ Pa m³ s⁻¹ m⁻² is observed at a power density of 150 MW m⁻² in 1800 s injection while keeping a saturated temperature at the center of the module below 120 °C by using water cooling. The outgassing properties obtained indicate that steady state operation of an LHCD antenna is feasible without a large pumping system.     

Inactivation of Staphylococcus aureus by the synergistic action of charged and reactive plasma particles

In this paper, a low-pressure capacitively coupled plasma discharge sustained in an argonoxygen mixture was studied in order to evaluate its properties in terms of inactivation of Staphylococcus aureus. The plasma parameters as electron temperature and plasma density were measured by the Langmuir probe (N_e ≈ 10¹⁵ m⁻³, T_e ≈ 1.5 eV), while the neutral atom density was in the range of 10²¹ m⁻³. In the plasma phase, oxygen radicals were taken as reference of the reactive species with antimicrobial activity, and oxygen spectral lines, over a range of plasma process parameters, were investigated by the optical emission spectroscopy. Optimal plasma conditions were found, and a count reduction of 4 log in a few minutes of the bacterium proves the potentiality of an industrial grade plasma reactor as a sterilization agent.     

Spectral Characteristics of Laser-Induced Graphite Plasma in Ambient Air

An experimental setup of laser-induced graphite plasma was built and the spectral characteristics and properties of graphite plasma were studied. From the temporal behavior of graphite plasma, the duration of CN partials(B~2∑~+→X~2∑~+) emission was two times longer than that of atomic carbon, and all intensities reached the maximum during the early stage from0.2 μs to 0.8 μs. The electron temperature decreased from 11807 K to 8755 K, the vibration temperature decreased from 8973 K to 6472 K, and the rotational temperature decreased from7288 K to 4491 K with the delay time, respectively. The effect of the laser energy was also studied, and it was found that the thresholds and spectral characteristics of CN molecular and C atomic spectroscopy presented great differences. At lower laser energies, the electron excited temperature, the electron density, the vibrational temperature and rotational temperature of CN partials increased rapidly. At higher laser energies, the increasing of electron excited temperature and electron density slow down, and the vibrational temperature and rotational temperature even trend to saturation due to plasma shielding and dissociation of CN molecules. The relationship among the three kinds of temperatures was T_(elec)T_(vib)T_(rot) at the same time. The electron density of the graphite plasma was in the order of 10~(17)cm~(-3) and 10~(18)cm~(-3).     

Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

A high growth rate fabrication of diamond-like carbon(DLC)films at room temperature was achieved by helicon wave plasma chemical vapor deposition(HWP-CVD)using Ar/CH_4gas mixtures.The microstructure and morphology of the films were characterized by Raman spectroscopy and scanning electron microscopy.The diagnosis of plasma excited by a helicon wave was measured by optical emission spectroscopy and a Langmuir probe.The mechanism of high growth rate fabrication for DLC films by HWP-CVD has been discussed.The growth rate of the DLC films reaches a maximum value of 54μm h~(-1)at the CH_4flow rate of 85 sccm,which is attributed to the higher plasma density during the helicon wave plasma discharge.The CH and H_αradicals play an important role in the growth of DLC films.The results show that the H_αradicals are beneficial to the formation and stabilization of C=C bond from sp~2to sp~3.     

Characteristics of plasma in a novel laser-assisted pulsed plasma thruster

A novel laser-assisted pulsed plasma thruster (LA-PPT) is proposed as an electric propulsion thruster, which separates laser ablation and electromagnetic acceleration. It aims for a higher specific impulse than that achieved with conventional LA-PPTs. Owing to the short-time discharge and the novel configuration, the physical mechanism of the discharge is unclear. Time and spatial-resolved optical emission spectroscopy was applied to investigate the variation in the plasma properties in the thruster discharge channel. The plasma species, electron temperature, and electron density were obtained and discussed. Our investigation revealed that there were H_α, H_β, H_γ, H_ε atoms, C I, C II, C III, C IV, Cl I, Cl II particles, and a small amount of CH, C₃, C₂, H₂ neutral molecular groups in the plasma. The electron temperature of the discharge channel of the thruster was within 0.6–4.9 eV, and the electron density was within (1.1–3.0) $\times $ 10¹⁸ cm⁻³, which shows that the optical emission spectroscopy method is to measure the electron excitation temperature and electron density in heavy particles. But the Langmuir probe method is to measure the temperature and density of free electrons. The use of laser instead of spark plug as the ignition mode significantly changed the plasma distribution in the discharge channel. Unlike the conventional PPT, which has high electron density near the thruster surface, LA-PPT showed relatively large electron density at the thruster outlet, which increased the thruster specific impulse. In addition, the change in the ignition mode enabled the electron density in the LA-PPT discharge channel to be higher than that in the conventional PPT. This proves that the ignition mode with laser replacing the spark plug effectively optimised the PPT performance.