Continuous-wave operation up to 36/spl deg/C of 1.3-/spl mu/m GaInAsP-InP vertical-cavity surface-emitting lasers

We introduced ion-beam assisted deposition in order to improve the quality of Al/sub 2/O/sub 3/ and SiO/sub 2/, which were used as part of the mirrors of 1.3-/spl mu/m GaInAsP-InP vertical-cavity surface-emitting lasers (VCSELs). The refractive index of Al/sub 2/O/sub 3/ was improved to 1.63 from 1.56 and the one of SiO/sub 2/ increased to 1.47 from 1.45. Low-threshold room-temperature continuous-wave (CW) operation of 1.3-/spl mu/m VCSEL with the improved mirrors was demonstrated. The threshold current was 2.4 mA at 20/spl deg/C. The CW operating temperature was raised to 36/spl deg/C, which is a record high temperature for 1.3-/spl mu/m VCSEL.     

1.3-/spl mu/m Vertical-cavity surface-emitting lasers with double-bonded GaAs-AlAs Bragg mirrors

We demonstrate, for the first time, double-bonded AlGaInAs strain-compensated quantum-well 1.3-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs). GaAs-AlAs Bragg mirrors were wafer-bonded on both sides of a cavity containing the AlGaInAs strain-compensated multiple-quantum-well active layers sandwiched by two InP layers. The lasers have operated under pulsed conditions at room temperature. A record low pulsed threshold current density of 4.2 kA/cm/sup 2/ and a highest maximum light output power greater than 4.6 mW have been achieved. The maximum threshold current characteristic temperature T/sub 0/ of 132 K is the best for any long wavelength VCSELs. The laser operated in a single-longitudinal mode, with a side-mode suppression ratio of more than 40 dB, which is the best results for 1.3-/spl mu/m VCSELs.     

High-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers with InGaAs-GaAsP strain-compensated quantum wells

We present the first room-temperature continuous-wave operation of high-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers (VCSEL's). The lasers contain strain-compensated InGaAs-GaAsP quantum wells (QW's) in the active region grown by metalorganic vapor phase epitaxy. The threshold current is 190 /spl mu/A for a 2.5/spl times/2.5 /spl mu/m/sup 2/ device, and the threshold voltage is as low as 1.255 V for a 6/spl times/6 /spl mu/m/sup 2/ device. Lasing at a wavelength as long as 1.1 /spl mu/m was also achieved. We discuss the wavelength limit for lasers using the strain-compensated QW's on GaAs substrates.     

Room-temperature 2.81-/spl mu/m continuous-wave operation of GaInAsSb-AlGaAsSb laser

GaInAsSb-AlGaAsSb multiple quantum-well (QW) lasers with an emission wavelength of 2.81 /spl mu/m are reported. The ridge waveguide lasers with highly strained QWs show continuous-wave laser emission up to 25/spl deg/C; in pulsed mode, the lasers operate up to 60/spl deg/C. For pulsed operation, a threshold current density of 360 A/cm/sup 2/ is found for devices with 30-/spl mu/m stripe width and 2-mm cavity length at room temperature. A low threshold current density at infinite length of 248 A/cm/sup 2/ is derived.     

High-T/sub 0/ strain-compensated InGaAsSb-AlGaAsSb quantum-well lasers emitting at 2.43 /spl mu/m

Strain-compensated InGaAsSb-AlGaAsSb quantum-well (QW) lasers emitting near 2.5 /spl mu/m have been grown by solid-source molecular beam epitaxy. The relatively high arsenic composition causing a tensile strain in the Al/sub 0.25/GaAs/sub 0.08/Sb barriers lowers the valence band edge and the hole energy level, leading to an increased hole confinement and improved laser performance. A 60% external differential efficiency in pulsed mode was achieved for 1000-/spl mu/m-long lasers emitting at 2.43 /spl mu/m. A characteristic temperature T/sub 0/ as high as 163 K and a lasing-wavelength temperature dependence of 1.02 nm//spl deg/C were obtained at room temperature. For 2000 /spl times/ 200 /spl mu/m/sup 2/ broad-area three-QW lasers without lateral current confinement, a low pulsed threshold of 275 A/cm/sup 2/ was measured.     

Low-threshold operation of 1.34-/spl mu/m GaInNAs VCSEL grown by MOVPE

Low-threshold operation was demonstrated for a 1.34-/spl mu/m vertical-cavity surface-emitting laser (VCSEL) with GaInNAs quantum wells (QWs) grown by metal-organic vapor-phase epitaxy. Optimizing the growth conditions and QW structure of the GaInNAs active layers resulted in edge-emitting lasers that oscillated with low threshold current densities of 0.87 kA/cm/sup 2/ at 1.34 /spl mu/m and 1.1 kA/cm/sup 2/ at 1.38 /spl mu/m, respectively. The VCSEL had a low threshold current of 2.8 mA and a lasing wavelength of 1.342 /spl mu/m at room temperature and operated up to 60/spl deg/C.     

Study on high-temperature performances of 1.3-/spl mu/m InGaAsP-InP strained multiquantum-well buried-heterostructure lasers

Stripe-width and cavity length dependencies of high-temperature performances of 1.3-/spl mu/m InGaAsP-InP well-designed buried-heterostructure strained multiquantum-well (MQW) lasers were investigated. The threshold currents as low as 4.5/10.5 mA and slope efficiencies as high as 0.48/0.42 mW/mA at 25/spl deg/C/85/spl deg/C were obtained in the MQW lasers with 1.5-/spl mu/m width, 250-/spl mu/m length, and 0.3/0.85 facet reflectivity. With temperature increasing from 25/spl deg/C to 85/spl deg/C, the MQW lasers exhibited lower output power degradation, the minimum value was 1.78 dB at an operation current of 45 mA. The MQW lasers were suitable for application in optical access networks.     

Low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by MOVPE

The structure of the conventional contact 1.3-/spl mu/m GaInNAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) was optimized and low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by metal-organic vapor-phase epitaxy were reported. The idea is to optimize the active region, the doping profiles, and the pairs of p-distributed Bragg reflectors, and the detuning between the emission wavelength and the photoluminescence gain peak wavelength. The continuous-wave 1.0-mA threshold current was achieved for the single-mode VCSEL. For the multiple-mode VCSELs, the below 2-mA threshold currents at 5/spl deg/C-85/spl deg/C , the 1.13-mA threshold current at 55/spl deg/C, and 1.52-mA threshold current at 85/spl deg/C are the best results for 1.3-/spl mu/m GaInNAs VCSELs.     

Lasing characteristics of GaInAsP-InP strained quantum-well microdisk injection lasers with diameter of 2-10 /spl mu/m

We have obtained pulsed lasing operation in 2-5-/spl mu/m diameter microdisk injection lasers using GaInAsP-InP compressively-strained multiple-quantum-well (MQW) wafers around room temperature. The effective cavity volume of the 2-/spl mu/m-diameter device is the smallest among those for any type of electrically-pumped lasers. The threshold current of this device was as low as 0.2 mA. Cavity modes in emission spectra observed under CW conditions coincide well with theoretically predicted whispering gallery modes. Further reduction of diameter to less than 1.5 /spl mu/m will realize the condition for spontaneous emission almost coupling into a single mode, which results in thresholdless lasing operation.     

Room-temperature photo-pumped operation of 1.58-/spl mu/m vertical-cavity lasers fabricated on Si substrates using wafer bonding

Long-wavelength vertical cavity lasers have been successfully fabricated on Si substrates using direct wafer bonding. InGaAs-InGaAsP multiquantum-well active layers with 40.5-pair InGaAsP-InP stacked mirrors have been directly bonded on 3.5-pair Al/sub 2/O/sub 3//a-Si mirrors deposited on Si substrates. The sample has been optically pumped at room temperature and lasing operation at 1.58-/spl mu/m has been achieved.     

Edge-emitting lasers with short-period semiconductor/air distributed Bragg reflector mirrors

We demonstrate a short-cavity edge-emitting 0.98-/spl mu/m GaAs-based laser with semiconductor/air distributed Bragg reflector (DBR) mirrors made by reactive ion etching (RIE). The dc and small-signal modulation properties of 100-/spl mu/m-long lasers have been measured and are characterized by I/sub th/=4.5 mA and f/sub -3dB/=30 GHz under pulsed conditions, respectively. The far-field pattern of light emanating from the DBR is also measured.     

2.0-/spl mu/m single-mode operation of InGaAs-InGaAsP distributed-feedback buried-heterostructure quantum-well lasers

Distributed-feedback (DFB) buried-heterostructure (BH) lasers with quantum-well active region emitting at 2.0 /spl mu/m have been fabricated and characterized. The lasers with four wells showed performance of practical use: threshold current as low as 15 mA for 600-/spl mu/m-long devices and CW single-mode output up to 5 mW at 2.03 /spl mu/m under operation current of 100 mA were observed. The current- and temperature-tuning rates of DFB mode wavelength are 0.004 nm/mA and 0.125 nm/K, respectively.     

Type-II interband cascade lasers in the 4.3-4.7-/spl mu/m wavelength region

Operation of type-II interband cascade lasers in the 4.3-4.7-/spl mu/m wavelength region has been demonstrated at temperatures up to 240 K in pulsed mode. These lasers fabricated with 150-/spl mu/m-wide mesa stripes operated in continuous-wave (CW) mode up to a maximum temperature of 110 K, with an output power exceeding 30 mW/f and a threshold current density of about 41 A/cm/sup 2/ at 90 K. The maximum CW operation temperature of 110 K is largely limited by the high specific thermal resistance of the 150-/spl mu/m-wide broad area lasers. A 20-/spl mu/m-wide mesa stripe laser was able to operate in CW mode at higher temperatures up to 125 K as a result of the reduced specific thermal resistance of a smaller device.     

Room-temperature continuous-wave 1.55 /spl mu/m GaInNAsSb laser on GaAs

The first low-threshold 1.55 /spl mu/m lasers grown on GaAs are reported. Lasing at 1.55 /spl mu/m was observed from a 20/spl times/2400 /spl mu/m as-cleaved device with a room-temperature continuous-wave threshold current density of 579 A/cm/sup 2/, external efficiency of 41%, and 130 mW peak output power. The pulsed threshold current density was 550 A/cm/sup 2/ with >600 mW peak output power.     

GaAs-based four-channel photonic crystal quantum dot laser module operating at 1.3 /spl mu/m

A GaAs-based laser module, which combines the output of four singlemode lasers operating at 1.3 /spl mu/m by using photonic crystal mirrors and combiners, has been developed. The complete device size is around 0.2 mm/sup 2/. The lasers can be operated individually or in parallel with sidemode suppression ratios better than 20 dB.     

High-performance 1.5 /spl mu/m GaInNAsSb lasers grown on GaAs

Substantially reduced threshold current density and improved efficiency in long-wavelength (>1.4 /spl mu/m) GaAs-based lasers are reported. A 20/spl times/1220 /spl mu/m as-cleaved device showed a room temperature continuous-wave threshold current density of 580 A/cm/sup 2/, external efficiency of 53%, and 200 mW peak output power at 1.5 /spl mu/m. The pulsed threshold current density was 450 A/cm/sup 2/ with 1145 mW peak output power.     

Sub-40 /spl mu/A continuous-wave lasing in an oxidized vertical-cavity surface-emitting laser with dielectric mirrors

Due to two improvements in cavity design, low-threshold lasing is achieved in oxidized vertical-cavity surface-emitting lasers incorporating upper dielectric distributed Bragg reflectors. Intracavity absorption is reduced by removal of a heavily p-type contact layer and the use of a low-loss MgF-ZnSe upper mirror. We report sub-100 /spl mu/A lasing for a 7-/spl mu/m diameter device, and sub-40 /spl mu/A lasing for a 3-/spl mu/m diameter device. The low-loss cavity design also allows for highly multimode operation at a low-bias current of 600 /spl mu/A in a detuned cavity.     

Continuous-wave operation of quantum cascade laser emitting near 5.6 /spl mu/m

Buried heterostructure quantum cascade lasers emitting at 5.64 /spl mu/m are presented. Continuous-wave (CW) operation has been achieved at -30/spl deg/C for junction down mounted devices with both facets coated. A 750 /spl mu/m-long laser exhibited 3 mW of CW power with a threshold current density of 5.4 kA/cm/sup 2/.     

Low-threshold continuous-wave 1.5-/spl mu/m GaInNAsSb lasers grown on GaAs

We present the first continuous-wave (CW) edge-emitting lasers at 1.5 /spl mu/m grown on GaAs by molecular beam epitaxy (MBE). These single quantum well (QW) devices show dramatic improvement in all areas of device performance as compared to previous reports. CW output powers as high as 140 mW (both facets) were obtained from 20 /spl mu/m /spl times/ 2450 /spl mu/m ridge-waveguide lasers possessing a threshold current density of 1.06 kA/cm/sup 2/, external quantum efficiency of 31%, and characteristic temperature T/sub 0/ of 139 K from 10/spl deg/C-60/spl deg/C. The lasing wavelength shifted 0.58 nm/K, resulting in CW laser action at 1.52 /spl mu/m at 70/spl deg/C. This is the first report of CW GaAs-based laser operation beyond 1.5 /spl mu/m. Evidence of Auger recombination and intervalence band absorption was found over the range of operation and prevented CW operation above 70/spl deg/C. Maximum CW output power was limited by insufficient thermal heatsinking; however, devices with a highly reflective (HR) coating applied to one facet produced 707 mW of pulsed output power limited by the laser driver. Similar CW output powers are expected with more sophisticated packaging and further optimization of the gain region. It is expected that such lasers will find application in next-generation optical networks as pump lasers for Raman amplifiers or doped fiber amplifiers, and could displace InP-based lasers for applications from 1.2 to 1.6 /spl mu/m.     

80/spl deg/C continuous-wave operation of 2.01-/spl mu/m wavelength InGaAlAs-InP vertical-cavity surface-emitting lasers

Electrically pumped buried tunnel junction InGaAlAs-InP vertical-cavity surface-emitting lasers (VCSELs) with self-adjusted lateral current and optical confinement and record emission wavelengths beyond 2 /spl mu/m are presented. Front and back side mirrors are realized using 31.5 epitaxial layer pairs of alternating InGaAs-InAlAs and a dielectric 2.5 pair CaF/sub 2/-a-Si layer stack. The devices show single-mode continuous-wave operation up to heat sink temperatures over 80/spl deg/C. The maximum output power at 20/spl deg/C reaches 0.43 mW, threshold current and voltage are as low as 0.66 mA and 0.73 V, respectively. To reach the long emission wavelength, we use an optimized active region comprising heavily strained quantum wells. High-resolution X-ray diffraction and photoluminescence measurements reveal excellent material quality without relaxation in the quantum wells.