流化床-化学气相沉积技术的应用及研究进展

流化床-化学气相沉积(FB-CVD)技术是一种多学科交叉的材料制备技术,兼有流化床传热传质性能良好以及化学气相沉积均匀、产物单一等优点,在工业生产中有着广泛的应用,但因其属于交叉学科,散见于各种研究,没有进行专门的进展评述。本文拟对FB-CVD的工业应用进行专题综述,分析其发展和研究趋势。首先探讨了FB-CVD的基本原理,分别综述了其在颗粒包覆、一维纳米材料、多晶硅制备、颗粒表面改性及粉体制备等方面的应用,介绍了FB-CVD的过程模拟及反应器结构优化方面的研究进展。通过以上讨论,梳理了FB-CVD研究的科学内涵。可以看出,该过程具有明显的多尺度特征,即材料制备的微观层次、颗粒流化均匀性的介观层次以及反应器结构设计的宏观尺度。总结得出:FB-CVD技术的未来发展取决于3个尺度的耦合分析,其研究重点也应关注尺度间的相互影响效应,如材料制备的均相成核、非均相成核和颗粒流化及运动规律的相互耦合等。     

流化床中包覆燃料颗粒的制备及应用

包覆燃料颗粒由燃料核芯、疏松热解炭层、内致密热解炭层、碳化硅层和外致密热解炭层组成.本工作设计建造了不同直径和结构的流化床沉积炉系统,探讨了流化床的结构、气体流量对颗粒流化状态的影响采用化学气相沉积方法生产出的包覆燃料颗粒不仅应用于我国10 MW高温气冷堆燃料元件的制备,而且探讨了包覆燃料颗粒的其它应用.     

流化床化学气相沉积法制备近化学计量比的Ti N粉体

传统气-固反应工艺制备Ti N粉体存在难以逾越的内扩散控制过程,导致制备高纯、正化学计量比的Ti N粉体至今存在巨大困难。提出了流态化化学气相沉积工艺(FBCVD)制备高质量TiN粉体,即基于TiCl₄-N₂-H₂体系,在往复运动的TiN种子粉体上沉积新生高质量TiN粉体的新方法。实验发现,当TiN种子粉体粒径大于52.95μm时,即使在1000℃沉积2 h也不会失流,同时在TiN种子粉体上获得了亚微米级的结节状新生TiN颗粒。通过氧氮分析仪和XRD分析发现,新方法显著提升了粉体的氮含量,获得了近化学计量比的TiN0.96,且氧含量下降了约40%。此外,流化床中气相沉积TiN的生长模式为岛状生长模式,为工业中制备高质量TiN粉体提供了一种新的方法。     

基于流化床化学气相沉积的碳化硅材料制备、性能及其在核领域的应用（英文）

采用流化床化学气相沉积法(FB-CVD)制备了碳化硅包覆层,利用多尺度耦合模型对包覆过程进行了模拟,以提高包覆层的均匀性。开发了可应用在核能领域的碳化硅材料,如致密碳化硅层、细晶粒碳化硅包覆层、碳化硅/碳/硅混合包覆层、多孔碳化硅包覆层、碳化硅纳米线、碳化硅纳米粒子等。为了评估碳化硅包覆层的可靠性,进行了极端条件下的模拟事故氧化考验。对于以碳化硅为主要包覆层的燃料元件,在高通量核反应堆中进行了辐照试验,结果表明:该碳化硅包覆层材料在核应用中的表现优异。     

化学气相沉积法制备碳纳米管的研究进展

从催化剂、碳源气体及反应器的选择等方面综述了化学气相沉积法制备碳纳米管的研究进展 ,讨论了碳纳米管的合成机理。指出催化合成碳纳米管的研究难点在于管径的有效调控和大批量生产 ,今后的研究方向应为单层碳纳米管的有效合成     

气相法合成纳米颗粒的制备技术进展

本文综述了气相法合成纳米颗粒材料的主要制备技术，并介绍了制备方法的最新进展－化学气相冷凝技术制备纳米颗粒材料，提出了制备纳米颗粒技术研究中面临的问题及今后的发展方向。     

化学气相沉积氮化钛薄膜的研究

氮化钛薄膜材料具有优良的性能,应用广阔,总结了化学气相沉积制备氮化钛薄膜的方法和原理,介绍了化学气相沉积在制备氮化钛方面的应用现状和研究成果,分析了各种化学气相沉积方法的优势。     

化学气相沉积工艺制备绳状纳米碳管的研究

用硝酸铁作催化剂,乙炔作碳源气体,高纯氮气作稀释气体,在750℃下化学气相沉积生长了绳状纳米碳管,用高分辨扫描电镜观察了所得绳状纳米碳管的形貌.纳米碳管的直径为100～200nm,长度为10～20 μm.文中还提出了绳状纳米碳管的生长机理.     

流化床化学气相沉积多晶硅的技术进步与挑战

Various methods for production of polysilicon have been proposed for lowering the production cost and energy consumption, and enhancing productivity, which are critical for industrial applications. The fluidized bed chemical vapor deposition (FBCVD) method is a most promising alternative to conventional ones, but the homogeneous reaction of silane in FBCVD results in unwanted formation of fines, which will affect the product quality and output. There are some other problems, such as heating degeneration due to undesired polysilicon deposition on the walls of the reactor and the heater. This article mainly reviews the technological develop-ment on FBCVD of polycrystalline silicon and the research status for solving the above problems. It also identifies a number of chal-lenges to tackle and principles should be followed in the design of a FBCVD reactor.     

Chemical aspects of nuclear fuel fabrication processes

Processes used by British Nuclear Fuels plc for the conversion of uranium ore concentrates to uranium metal and uranium hexafluoride, are reviewed. Means of converting the latter compound, after enrichment, to sintered UO₂ fuel bodies are also described. An overview is given of the associated chemical engineering technology.     

石墨烯的制备及其应用研究进展

石墨烯具有独特的二维原子晶体结构以及众多优异性能,如高机械强度、高载流子迁移率、高光学透明性等,这些优异的力学、电学和光学等特性使得石墨烯成为化学、物理学和材料学等领域的研究热点。结合近几年国内外研究现状,综述了机械剥离法、化学剥离法和化学气相沉积法等3种制备石墨烯的方法,并分析了各种方法的优点和不足之处。介绍了石墨烯的应用研究进展,并对其未来的发展进行了展望。     

微乳液技术制备纳米微粒及其在涂料中的应用

对微乳液的制备、结构、特点和微乳液技术制备纳米微粒的作用原理进行了较为详细地概括，并着重介绍了油包水型微乳液技术制备涂料用纳米微粒的研究现状、纳米微粒对涂料性能的影响以及在涂料中的具体应用。最后简要地指出了纳米微粒在涂料应用方面亟待解决的几个研究课题。     

化工废水深度处理技术研究进展

化工废水经二级生化处理后,往往很难达到排放或回用要求,须进行深度处理。综述了化工废水深度处理的技术及特点,并介绍了其最新研究进展。提出了不同处理方法的联合应用将是化工废水深度处理工艺的发展趋势。     

氧化铝陶瓷表面化学气相沉积钛涂层的制备及性能

利用卤化物还原原理,以Ti粉和I2粉为反应原料,通过化学气相沉积的方法在Al2O3陶瓷基体上制备了金属Ti涂层。考察了原料配比、加热温度及保温时间等工艺参数对涂层沉积的影响。通过X射线衍射仪分析了涂层的物相组成。利用扫描电子显微镜及能谱仪对涂层的微观组织形貌及成分进行了分析。采用座滴法考察铜与沉积了涂层的氧化铝陶瓷间的润湿性。研究结果表明,化学气相沉积法在氧化铝陶瓷表面制备Ti涂层的适宜工艺参数为:Ti与I2的质量比=1∶3,沉积温度为1 100℃,沉积时间为60min。所获得的Ti涂层纯度较高,具有明显的(110)晶面择优取向性,涂层与陶瓷结合良好。铜与涂层间的润湿角在1 113℃时为57°。     

Formation and growth mechanism of porous,amorphous, and fine particles prepared by chemical vapor deposition. Titania from titanium tetraisopropoxide

The formation and growth mechanism of porous, amorphous, and fine particles were investigated. TiO₂ particles were produced in a tubular flow reactor by a chemical vapor deposition technique using titanium tetraisopropoxide as a starting material at low temperatures (573-973 K) and atmospheric pressure. Prepared particles were of submicron size and had large surface area (as large as 270 × 10³ m²/kg). According to the proposed mechanism, reactions begin on the reactor wall and then the primary particles form in the gas phase by chemical reactions. The primary particles collide, coalesce with each other and grow. However, significant experimental deviations from the Brownian collision and coalescence theory imply that other processes, such as the surface reactions on the particle, play an important role in the growth, in addition to coalescence. Intraparticle reactions decreased the surface area by filling the pores.     

切削刀具用立方氮化硼涂层的研究进展

立方氮化硼( cubic boron nitride,cBN)具有优异的物理力学性能和极高的化学稳定性,可以胜任铁系金属的加工,在高性能切削刀具等领域有着广泛的应用前景.cBN涂层在复杂刀具应用中有着不可替代的作用,由于气相生长高纯度和结合性能的cBN刀具涂层仍存在着较多的技术难题,因此仍然难以得到广泛的应用.本文综述了近20年来气相沉积cBN涂层的研究进展,阐述了物理气相沉积与化学气相沉积cBN涂层的方法与机理,分析了cBN刀具涂层制备与应用的关键问题,结合研究现状指出了cBN刀具涂层研究的发展方向.     

Evaluation techniques and improvements of adhesion strength for TiN coating in tool applications: a review

The adhesion between coating-substrate systems is an important factor in determining the performance and durability of coated engineering components. This paper reviews the microstructures and adhesion strength of titanium nitride (TiN) coating produced using two different processing methods: chemical vapor deposition and physical vapor deposition. Three methods to evaluate the adhesion strength of the coatings, namely the indentation test, laser spallation technique, and scratch test are presented and discussed in terms of their working principles, their advantages and disadvantages. The extrinsic and intrinsic factors influencing the adhesion strength of coating-substrate system, particularly for TiN coating, are also elaborated. The mechanisms and modes of coating failures in adhesion evaluation techniques are discussed with respect to the variation of coating-substrate system combination such as brittle, ductile, soft, and hard. Possible improvements on the adhesion strength of coating-substrate systems, focusing on the processing methods, compositions, and structures of coatings, are also reported.