共查询到17条相似文献,搜索用时 78 毫秒
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由于市场对差压变送器测量准确度的要求不断提高,导致差压变送器的静压影响误差越来越突出.从金属电容式的结构特点分析出发,并结合一定的试验,得出结论是金属电容式差压传感器由于其本身的结构特点决定,其静压影响误差不可消除或明显减小,只有通过静压补偿或采用硅差压传感器原理,才可实现较小的静压影响误差. 相似文献
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设计制备出三明治结构的电容式柔性压力传感器,并对其性能进行研究.该传感器以银纳米线为电极材料,聚二甲基硅氧烷(PDMS)为柔性衬底,同时采用毛面玻璃和光面玻璃分别作为柔性衬底的制备模板,制备出微纳结构和平面结构的PDMS薄膜.然后采用喷涂法制备AgNWs/PDMS复合电极,以另外一层PDMS为介电层,将两电极面对面封装,得到电容式柔性压力传感器,最后系统研究了传感器的电极微纳结构对器件性能的影响.本文研究表明,具有微纳结构的AgNWs/PDMS复合薄膜传感器的灵敏度为1.0 kPa-1,而平面结构的AgNWs/PDMS复合薄膜传感器的灵敏度为0.6 kPa-1,由此可知具有微纳结构的柔性衬底能够显著提高器件的灵敏度. 相似文献
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Bu-Sang ChaSeung-Mok Lee Takeshi KanashimaMasanori Okuyama Tsunehisa Tanaka 《Sensors and actuators. A, Physical》2011,171(2):191-198
Capacitive micromachined ultrasonic transducers (CMUTs) with a perforated membrane have been fabricated and characterized in air. Two types of CMUT device have been fabricated having perforation ratio (area ratio of holes = AR) of 10% and 20%, and analyzed about electrical and mechanical characteristics. The perforation ratio (AR) of membrane substantially influences on the electrostatic force and mechanical restoring force of the device since it leads to the area variation of electrode and membrane, it subsequently influences on the sensitivity and frequency response of the CMUT device. The electrostatic force and mechanical restoring force were improved by decreasing the AR and increasing the DC bias voltage. The open-circuit sensitivity of a CMUT having AR 10% membrane, 8.45 μV/Pa, is larger than that of AR 20%, 4.07 μV/Pa at DC 15 V. Furthermore, the resonance behaviors were observed in the range of 60-80 kHz, and the resonance frequency could be changed by varying the applied DC voltage and AR. 相似文献
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研究液体负载对换能器共振频率的影响。在等效电路理论的基础上,对大功率夹心式压电超声换能器的负载特性进行研究,探讨两种不同液体负载(水和油)、水负载体积变化和温度变化对换能器共振频率的影响,进一步研究带负载换能器阻抗匹配的调节。结果表明:不同液体负载换能器共振频率不一样;水作为液体负载时,其体积或温度变化时,换能器共振频率也会变化。因此,当负载变化时,要不断调节匹配元件,才能完全达到谐振。 相似文献
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Zhang Rui Xue Chenyang He Changde Zhang Yongmei Song Jinlong Zhang Wendong 《Microsystem Technologies》2016,22(12):2939-2947
Microsystem Technologies - In this paper, a Receipt & Transmission CMUT array has been developed for underwater imaging purposes. To guide the array design more intuitively, directivity... 相似文献
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Wang Hongliang Tong Yifei Wang Xiangjun He Changde Xue Chenyang 《Microsystem Technologies》2018,24(12):5055-5063
Microsystem Technologies - CMUT based on micro-electro-mechanical systems (MEMS) technology has a broad application prospects and has become the mainstream transducer for the new generation of... 相似文献