Photo-enhanced native oxidation process forHg0.8Cd0.2Te photoconductors

Proposes an easy and reproducible vapor-phase photo surface treatment method to improve the device performance of the Hg_0.8 Cd_0.2Te photoconductive detector. We explore the effect of surface passivation on the electrical and optical properties of the HgCdTe photoconductor. Experimental results, including surface mobility, surface carrier concentration, metal-insulator-semiconductor leakage current, 1/f noise voltage spectrum, the 1/f knee frequency, responsivity R_λ, and specific detectivity D* for stacked photo surface treatment and ZnS or CdTe passivation layers are presented. These data are all directly related to the quality of the interface between the passivation layer and the HgCdTe substrate. We found that, by inserting a photo native oxide layer, we can shift the 1/f knee frequency, reduce the noise power spectrum, and achieve a lower surface recombination velocity S. A higher D* can also be achieved. It was also found that HgCdTe photoconductors passivated with stacked layers show improved interface properties compared to the photoconductors passivated only with a single ZnS or CdTe layer     

A CdTe passivation process for long wavelength infrared HgCdTe photo-detectors

Passivant-Hg_1−xCd_xTe interface has been studied for the CdTe and anodic oxide (AO) passivants. The former passivation process yields five times lower surface recombination velocity than the latter process. Temperature dependence of surface recombination velocity of the CdTe/n-HgCdTe and AO/n-HgCdTe interface is analyzed. Activation energy of the surface traps for CdTe and AO-passivated wafers are estimated to be in the range of 7–10 meV. These levels are understood to be arising from Hg vacancies at the HgCdTe surface. Fixed charge density for CdTe/n-HgCdTe interface measured by CV technique is 5×10¹⁰ cm⁻², which is comparable to the epitaxially grown CdTe films. An order of magnitude improvement in responsivity and a factor of 4 increase in specific detectivity (D*) is achieved by CdTe passivation over AO passivation. This study has been conducted on photoconductive detectors to qualify the CdTe passivation process, with an ultimate aim to use it for the passivation of p-on-n and n-on-p HgCdTe photodiodes.     

Passivation effect on optical and electrical properties of molecular beam epitaxy-grown HgCdTe/CdTe/Si layers

The effects of passivation with two different passivants, ZnS and CdTe, and two different passivation techniques, physical vapor deposition (PVD) and molecular beam epitaxy (MBE), were quantified in terms of the minority carrier lifetime and extracted surface recombination velocity on both MBE-grown medium-wavelength ir (MWIR) and long-wavelength ir HgCdTe samples. A gradual increment of the minority carrier lifetime was reported as the passivation technique was changed from PVD ZnS to PVD CdTe, and finally to MBE CdTe, especially at low temperatures. A corresponding reduction in the extracted surface recombination velocity in the same order was also reported for the first time. Initial data on the 1/f noise values of as-grown MWIR samples showed a reduction of two orders of noise power after 1200-Å ZnS deposition.     

Compositionally graded interface for passivation of HgCdTe photodiodes

A compositionally graded CdTe-Hg_1−xCd_xTe interface was created by deposition of CdTe on p-HgCdTe and subsequent annealing. The compositionally graded layer between CdTe and HgCdTe was formed by an interdiffusion process and was used for passivation. The composition gradient (Δx) in the interfacial region and the width of the graded region were tailored by adopting a suitable annealing procedure. The effect of process conditions on the interfacial profile and photoelectric properties such as lifetime and surface recombination velocity was studied in detail. Surface recombination velocity of the p-HgCdTe could be reduced to the level of 3,000 cm/s at 77 K, which represents very good passivation characteristics. The passivation layer formed by this method can be used for the fabrication of high performance and stable modern infrared detectors. Thus, a passivation process is developed, which is simple, effective, reproducible, and compatible with the HgCdTe device fabrication and packaging processes.     

Surface-recombination-free InGaAs/InP HBTs and the base contact recombination

Surface-recombination-free InGaAs/InP HBTs with graded base have been demonstrated. The HBTs were passivated by ammonium sulfide. The current gain of the nonself-aligned HBTs was independent of the emitter periphery, indicating that the surface recombination was removed by the passivation. For the self-aligned HBTs, the current gain was still dependent on the emitter periphery after the passivation due to the base contact recombination. A surface leakage channel has been identified to result in a significant increase in the base contact recombination. The passivation has two effects: one is the surface recombination velocity reduction and the other is the surface leakage channel elimination.     

Electronic passivation of silicon surfaces by halogens

We report the electronic passivation of a silicon surface by iodine termination. The resulting surface recombination velocity on Si(100) is less than 1 cm/s which is better than that obtained in concentrated hydrofluoric acid (HF). We have produced a surface recombination velocity of 20 cm/s using bromine. We present a simple model for these phenomena of a surface coverage of Si-X where X is a monovalently bonded halogen atom. The effectiveness of the passivation by halogens is shown to be limited by the oxidation of halogens by dissolved oxygen in solution. We demonstrate the use of halogen:methanol solutions as an alternative to HF for the control of silicon surface chemistry.     

Emitter size effect on current gain in fully self-alignedAlGaAs/GaAs HBT's with AlGaAs surface passivation layer

The emitter size effect for fully self-aligned AlGaAs-GaAs heterojunction bipolar transistors (HBTs) with depleted AlGaAs passivation layers, in which the partially thinned AlGaAs emitter is self-aligned by using the dual sidewall process, is investigated. It is demonstrated that drastic improvement in the emitter size effect can be achieved with an AlGaAs passivation layer as small as 0.2 μm in width, due to the surface recombination current reduction by a factor of 1/40 in the extrinsic base region. It has also been found that the base current is dominated by excess leakage current in the proton-implanted isolation region     

不同介质层钝化的碲镉汞光导型探测器的氢化研究

利用氢等离子体对阳极氧化层和ZnS钝化的碲镉汞光导型探测器进行了氢化处理,发现对于阳极氧化层钝化的器件,氢化处理后性能衰退,表现在信号的降低和噪声的增加,从表面形貌的观察,发现原来呈蓝色的阳极氧化层在氢化处理后几乎完全消失,从光谱响应上表现为短波方向的响应下降,认为由于氢化过程中介质层的消失使得氢离子直接轰击碲镉汞表面,造成少子表面复合速度增加.对ZnS钝化的器件氢化处理后性能改善,表现为信号的提高和噪声的下降,从光谱响应上表现为短波方向的响应抬高,从表面形貌观察发现ZnS的颜色略有变化,台阶仪测试表明氢化后ZnS的厚度减薄了约70nm,通过SIMS测试分析发现氢化过程中H离子可以穿过ZnS层到达ZnS与碲镉汞的界面处,认为氢离子对界面态起到了钝化作用,降低了界面态密度从而提高了器件的性能.     

Heterojunction blocking contacts in MOCVD grown Hg1-xCdxTe long wavelength infrared photoconductors

The theoretical and experimental performance of Hg_1-xCd _xTe long wavelength infrared (LWIR) photoconductors fabricated on two-layer heterostructures grown by in situ MOCVD has been studied. It is shown that heterojunction blocking contact (HBC) photoconductors, consisting of wider bandgap Hg_1-xCd_x Te on an LWIR absorbing layer, give improved responsivity, particularly at higher applied bias, when compared with two-layer photoconductors incorporating n⁺/n contacts. An extension to existing device models is presented, which takes into account the recombination rate at the heterointerface and separates it from that occurring at both the contact-metal/semiconductor and passivant/semiconductor interfaces. The model requires a numerical solution to the continuity equation, and allows the device responsivity to be calculated as a function of applied electric field. Model predictions indicate that a change in bandgap across the heterointerface corresponding to a compositional change of Δx⩾0.04 essentially eliminates the onset of responsivity saturation due to minority carrier sweepout at high applied bias. Experimental results are presented for frontside-illuminated n-type Hg_1-xCd_xTe photoconductive detectors with either n⁺/n contacts or heterojunction blocking contacts. The devices are fabricated on a two-layer in situ grown MOCVD Hg_1-xCd_xTe wafer with a capping layer of x=0.31 and an LWIR absorbing layer of x=0.22. The experimental data clearly demonstrates the difficulty of forming n ⁺/n blocking contacts on LWIR material, and indicates that heterojunctions are the only viable technology for forming effective blocking contacts to narrow bandgap semiconductors     

A novel technology to form self-aligned emitter ledge for heterojunction bipolar transistors

We have proposed and successfully demonstrated a novel and simple process to fabricate self-aligned emitter passivation ledges for heterojunction bipolar transistors (HBTs) without using additional dielectric etch masks or dual etch-stop layers in the emitter. In this new ledge formation process, the emitter ledges are fabricated by the formation of photoresist sidewall spacers followed by a wet-chemical etch process. The effectiveness of this new ledge formation technology has been confirmed in AlGaAs/GaAs HBTs. Since the proposed ledge technology is very simple and without using any etch-stop layers (thus independent of material systems), it appears to be very promising for HBT fabrication.     

Passivation of HgCdTe p-n diode junction by compositionally graded HgCdTe formed by annealing in a Cd/Hg atmosphere

Cadmium telluride (CdTe) is being widely used for passivating the HgCdTe p-n diode junction. Instead of CdTe, we tried a compositionally graded HgCdTe as a passivation layer that was formed by annealing an HgCdTe p-n junction in a Cd/Hg atmosphere. During annealing, Cd diffuses into HgCdTe from the Cd vapor, while Hg diffuses out from HgCdTe, forming compositionally graded HgCdTe at the surface. The Cd mole fraction at the surface was constant regardless of the annealing temperature in the range of 250–350°C. Capacitance versus voltage (C-V) curves for p-type HgCdTe that were passivated with compositionally graded HgCdTe formed by Cd/Hg annealing at 260°C showed a smaller flat-band voltage than the one passivated by thermally deposited CdTe, indicative of the better quality of the passivation. A long-wave infrared (LWIR) HgCdTe p-n junction diode passivated by compositionally graded HgCdTe showed about a one order of magnitude smaller R_dA value than the one passivated by thermally deposited CdTe, confirming the effectiveness of the compositionally graded HgCdTe as a passivant.     

Metalorganic chemical vapor deposition CdTe passivation of HgCdTe

CdTe epilayers are grown by metalorganic chemical vapor deposition (MOCVD) on bulk HgCdTe crystals with x ~ 0.22 grown by the traveling heater method (THM). The THM HgCdTe substrates are (111) oriented and the CdTe is grown on the Te face. The metalorganic sources are DMCd and DETe, and the growth is performed at subatmospheric pressure. Ultraviolet (UV) photon-assisted hydrogen radicals pretreatment plays a dominant role in the electrical properties of the resulting heterostructures. The requirements of a good passivation for HgCdTe photodiodes vis-a-vis the passivation features of CdTe/HgCdTe heterostructures are discussed. The effect of valence band offset and interface charges on the band diagrams of p-isotype CdTe/HgCdTe heterostructures, for typical doping levels of the bulk HgCdTe substrates and the MOCVD grown CdTe, is presented. Electrical properties of the CdTe/HgCdTe passivation are determined by capacitance-voltage and current-voltage characteristics of metal-insulator-semiconductor test devices, where the MOCVD CdTe is the insulator. It is found that the HgCdTe surface is strongly inverted and the interface charge density is of the order of 10¹²cm² when the CdTe epilayer is grown without the UV pretreatment. With the in-situ UV photon-assisted hydrogen radicals pretreatment, the HgCdTe surface is accumulated and the interface charge density is -4. 10¹¹ cm^-2.     

Cadmium sulfide passivation of InGaAs/InP mesa p-i-n photodiodes

A cadmium sulfide (CdS) passivation process was demonstrated for the first time on InGaAs/InP p-i-n mesa photodetectors. The passivated devices produced lower reverse bias leakage currents in comparison to devices that received only a thermally deposited SiO₂ film. The subsequent deposition of SiO₂ on the passivated devices produced virtually no change to the aforementioned leakage currents even after undergoing a 3-h, 300°C thermal treatment. In contrast, similar SiO₂ capped devices, fabricated without the CdS passivating layer, show a large increase in leakage current when subjected to the same thermal cycle. Leakage current versus mesa diameter measurements suggest these results are due to reduce surface recombination at the exposed mesa sidewall. X-ray photoelectron spectroscopy (XPS) results indicate the S:Cd ratio of these films to be 0.77.     

Engineering Interface Composition for Passivation of HgCdTe Photodiodes

A compositionally graded surface layer has been created for the passivation of Hg_1-xCd_xTe photodiodes. The graded CdTe-Hg_1-xCd_xTe interface was created by deposition of CdTe and subsequent annealing. It was found that the composition gradient and width of the graded region could be tailored by adopting a suitable annealing procedure. The effect of grading on the interface electrical properties and photoelectrical properties was studied by X-ray photoelectron spectroscopy (XPS), photoconductive decay, and C-V measurements. Insulator fixed-charge density and interface-trap density could be reduced to 3times10¹⁰ cm ^-2 and 2times10¹⁰ cm^-2middoteV^-1, respectively, by creating a graded interfacial composition. The interface conditions so engineered led to a low surface recombination velocity ~3000 cm/s. A direct correlation has been established between the process conditions, interfacial composition, and the electrical/photoelectrical properties of the CdTe-Hg_1-xCd_xTe heterostructures. The passivation layer formed by this method is shown to be suitable for the fabrication of high-performance infrared detectors     

On surface recombination velocity and output intensity limit of pulsed semiconductor lasers

Relationships obtained by F. Kappeler et al. (1982) are utilized to assess the effect of facet passivation on the output intensity limit in terms of surface recombination velocity. The results show a trend that the output intensity limit increases in an exponential manner with decreasing recombination velocity once the velocity is reduced by a factor of 2 from that for an unpassivated laser. They also indicate that the output intensity is not likely to be limited by nonradiative recombination at the facet when the recombination velocity is reduced by a factor of 4.<>     

1/f noise and material defects in HgCdTe diodes

1/f noise is measured on long wavelength diodes as a function of device geometry, band gap, temperature, diode bias, and anneal temperature for a Te-rich CdTe passivation layer. The results show that for these diodes the 1/f noise is a bulk phenomena due to the modulation of generation recombination current associated with defects formed by the interdiffusion of Te-rich CdTe, and that these defects are located in the junction region. No 1/f noise is observed for the lowest interdiffusion anneal temperature.     

Improvement of metal-semiconductor-metal GaN photoconductors

Metal-semiconductor-metal photoconductors made on GaN usually exhibit a slow response time and a low responsivity. We have carried out a systematic study on the performance of the photoconductors made from GaN grown by metalorganic chemical vapor deposition using different growth conditions and have found that both response time and responsivity of the GaN detector are improved when the material is grown using increased ammonia flow rates. The best GaN ultraviolet photoconductive detector shows a response time of 0.3 ms and a responsivity of 3200 A/W at 365 nm under an operation bias of 10 V. We attribute this improvement to the reduction of the point defects in GaN.     

The interface of metalorganic chemical vapor deposition-CdTe/HgCdTe

The metalorganic chemical vapor deposition (MOCVD) growth of CdTe on bulk n-type HgCdTe is reported and the resulting interfaces are investigated. Metalinsulator-semiconductor test structures are processed and their electrical properties are measured by capacitance-voltage and current-voltage characteristics. The MOCVD CdTe which was developed in this study, exhibits excellent dielectric, insulating, and mechano-chemical properties as well as interface properties, as exhibited by MIS devices where the MOCVD CdTe is the single insulator. Interfaces characterized by slight accumulation and a small or negligible hysteresis, are demonstrated. The passivation properties of CdTe/ HgCdTe heterostructures are predicted by modeling the band diagram of abrupt and graded P-CdTe/n-HgCdTe heterostructures. The analysis includes the effect of valence band offset and interface charges on the surface potentials at abrupt hetero-interface, for typical doping levels of the n-type layers and the MOCVD grown CdTe. In the case of graded heterojunctions, the effect of grading on the band diagram for various doping levels is studied, while taking into consideration a generally accepted valence band offset. The MOCVD CdTe with additional pre and post treatments and anneal form the basis of a photodiode with a new design. The new device architecture is based on a combination of a p-on-n homojunction in a single layer of n-type HgCdTe and the CdTe/HgCdTe heterostructure for passivation.     

CdTe/ZnS复合钝化层对长波碲镉汞器件性能的影响研究

采用CdTe/ZnS复合钝化技术对长波HgCdTe薄膜进行表面钝化,并对钝化膜生长工艺进行了改进。采用不同钝化工艺分别制备了MIS器件和二极管器件,并进行了SEM、C-V和I-V表征分析,研究了HgCdTe/钝化层之间的界面特性及其对器件性能的影响。结果表明,钝化工艺改进后所生长的CdTe薄膜更为致密且无大的孔洞,CdTe/HgCdTe界面晶格结构有序度获得改善;采用改进的钝化工艺制备的MIS器件C-V测试曲线呈现高频特性,界面固定电荷面密度从改进前的1.671011 cm-2下降至5.691010 cm-2;采用常规钝化工艺制备的二极管器件在较高反向偏压下出现较大的表面沟道漏电流,新工艺制备的器件表面漏电现象获得了有效抑制。     

Dependence of the efficiency of a CdS/CdTe solar cell on the absorbing layer’s thickness

On the basis of the continuity equation, the spatial distribution of photogenerated excess electrons in the neutral region of the CdTe layer in a CdS/CdTe heterostructure is analyzed taking into account recombination at the rear surface of the layer. It is demonstrated that, owing to diffusion, excess electrons penetrate deep into the CdTe layer at distances far exceeding the effective penetration length for solar radiation. Calculations of the short-circuit current indicate that, for electron lifetimes of 10^?10–10^?9 s, typical of thin-film CdS/CdTe solar cells, recombination losses are insignificant if the CdTe layer’s thickness amounts to 3–4 μm but increase dramatically if the thickness is below 1–1.5 μm. In order to eliminate recombination losses in more efficient solar cells where the electron lifetime is ≥10^?8 s the absorbing CdTe layer needs to be much thicker.