几种微光学陀螺的研究进展

除了以硅为基的微光学陀螺外,国内外提出了研究新型微光学陀螺的多种方案,文中介绍了利用耦合共振慢光波导的微光学陀螺,以ZBLAN氟锆酸盐波导为基的微光学陀螺,重点介绍了基于光子晶体波导的微光学陀螺,并且指出了微光学陀螺的发展趋势。     

A modular fabrication concept for microoptical systems

A modular fabrication concept is used to build microoptical systems for commercial application. The concept is based on the fact that microoptical systems can be divided into two functional units, the optical and the electrooptical base plate, which covers active optical elements. In the case of defined interfaces, highly specialized manufacturers can fabricate both components separately. A third company will use these components to build the electrooptical subsystem, which is sold as an OEM system to the system manufacturer. Especially for the component fabrication, the equipment costs can be shared among different applications, which makes the component for each application cheaper. A microoptical distance sensor and a microspectrometer for the near-infrared have demonstrated the concept.     

飞秒激光加工微光学元件的研究

利用低功率飞秒激光振荡器进行材料表面加工的研究并将其应用于微光学元件的加工制作领域;对飞秒激光倍频光以及飞秒激光与光刻胶材料相互作用进行了实验;以光刻胶作为牺牲层进行表面加工获得了各种玻璃光栅及光掩模板;利用光学显微镜和原子力显微镜(AFM)对实验结果进行检测,得到微米量级的特征线宽;所得光栅的光学性能通过He-Ne激光器进行检测,实验结果与理论值一致。该研究为微光学元件的加工制作提供了新的方法。     

Micromachining for optical and optoelectronic systems

Micromachining technology opens up many new opportunities for optical and optoelectronic systems. It offers unprecedented capabilities in extending the functionality of optical devices and the miniaturization of optical systems. Movable structures, microactuators, and microoptical elements can be monolithically integrated on the same substrate using batch processing technologies. In this paper, we review the recent advances in this fast-emerging field. The basic bulk- and surface-micromachining technologies applicable to optical systems are reviewed. The free-space microoptical bench and the concept of optical prealignment are introduced. Examples of micromachined optical devices are described, including optical switches with low loss and high contract ratio, low-cost modulators, micromechanical scanners, and the XYZ micropositioners with large travel distance and fine positioning accuracy. Monolithically integrated systems such as single-chip optical disk pickup heads and a femtosecond autocorrelator have also been demonstrated     

Smart-pixel array technology for free-space optical interconnects

This paper describes a smart-pixel array technology that is being developed at Honeywell for use in chip-to-chip optical interconnections based on free-space optics. The technology combines large-scale, two-dimensional arrays of optoelectronic and microoptical elements with VLSI electronics to enable high-density, high-speed interchip input/output capability in the optical domain. We have demonstrated prototype modules with 16×16 and 32×32 emitter and interleaved detector arrays     

Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

Design, fabrication, and experimental testing of an integrated microoptical module for interconnection are reported. The systems integration is based on the concept of planar-integrated free-space optics. The module combines diffractive-reflective and refractive microoptics. The diffractive elements were fabricated by binary lithography and reactive ion etching. The refractive elements were made by analog lithography using a high-energy beam sensitive mask and replication in Ormocer. The fabricated module implemented a simple one-dimensional optical interconnect. Two versions were implemented for which insertion losses of approximately 8 and 4.5 dB were measured, respectively.      

MOEMS气体传感技术研究进展

微光电子机械系统(MOEMS)气体传感技术是光学式气体传感器技术与MOEMS技术、新材料技术相结合的创新型技术方案。MOEMS气体传感器具有更低的价格、更高的集成度、更强的抗干扰能力,以及更高的测试精度。文章首先阐述了主要的光学气体传感系统的工作原理及系统结构,随后介绍了MOEMS气体传感技术中最新的微光学器件及微光学系统。通过对MOEMS气体传感器的主要研究成果和进展的综述,对未来MOEMS气体传感器的研究重点和研究挑战等进行了展望。     

Polarization-insensitive integrated-optical switches: A new approach

Coupled waveguide structures with sections of alternating phase mismatch are proposed as a method to vary the coupling coefficient between the two coupled waveguides by an electrical adjustment. We consider the design of polarization-insensitive microoptical switches/ modulators based on this principle.     

用DMD灰度曝光法产生连续面形微结构

利用空间光调制器光强的精确调制作用,把数字微反射镜阵列(DMD)作为灰度图形发生器,经一次曝光及优化显影等后处理过程,可制作出具有连续面形的微光学元件。用上述方法在实验上获得了微透镜阵列,并有较好的连续面形,符合预期效果。研究表明,该方法不仅可快速地实现连续面形微结构的加工,而且大大简化了制作工艺,有助于降低微光学元件的加工成本,适合于微结构的研究性制作或小批量生产,有广泛应用潜力。     

Self-organized lightwave network based on waveguide films for three-dimensional optical wiring within boxes

This paper presents core technologies for a self-organized microoptical system (SELMOS) within optoelectronic computers; mass-productive fabrication processes of waveguide films and new types of self-organized lightwave networks (SOLNETs) for three-dimensional (3-D) optical wiring with optical Z-connections. Waveguide films are fabricated by the built-in mask method, which is reusable and can construct surface-normal mirrors/filters at one time within photolithographic accuracy. Beveled core edge walls are made by the tilted ultraviolet (UV) exposure through the built-in mask using a photodefinable material. Near- and far-field patterns reveal that the walls act as micromirrors for optical Z-connections. SOLNET is a network consisting of self-organized coupling waveguides between misaligned optical devices. The self-organization is generated in a photorefractive material by self-focusing of the two write beams from the two devices. Direct SOLNET, where wavelengths of the write beam and the signal beam are the same, is demonstrated using a laser diode. Reflective SOLNET, where one of the two write beams is replaced with a reflected write beam from the edge of the coupled device, realizes two-beam-writing SOLNET in a one-beam-writing configuration. It is especially effective when the coupled device cannot transmit write beams. The proof-of-concept is demonstrated both theoretically and experimentally. These results indicate a possibility to form 3-D optical wiring simply in SELMOS.     

Microoptical elements for single mode fibre arrays free-space interconnections

The purpose of this paper is to investigate the performance of microoptics for telecommunication systems using free-space interconnects. This concerns mainly distribution or switching and routing tasks. In order to evaluate the interconnection capability of free-space microoptics, we impose severe conditions on the interconnects. These conditions correspond to the use of single mode fibre arrays at both the input and the output systems. This point is shown to become very critical when dealing with optical switches involving reconfigu-rable links. These points are illustrated by two examples : one with fixed and the other with reconfigurable interconnects but both using arrays of microoptical elements.     

Surface-micromachined micro-XYZ stages for free-space microoptical bench

Micro-XYZ stages have been monolithically integrated with microactuators and out-of-plane microoptical elements, all fabricated by the same surface-micromachined process, on Si free-space microoptical bench. Optical beam adjustment with three degrees of freedom has been realized without angular squinting. A positioning accuracy of 11 nm has been achieved by the integrated scratch drive actuators, with the travel distance larger than 30 /spl mu/m in each direction.     

Optimal design of a low-loss 2-bit electrooptic analog-to-digital converter

The structure of the optical waveguide of 2-bit electrooptic A/D converter with proton-exchange micro prisms is optimized by the finite-difference beam propagation method （FD-BPM） The electrode parameters of the converter are optimized by conformal mapping. The optimal parameters are a half- wave voltage of Vπ = 4.5 V and a bandwidth of △f = 1.4 GHz. A normalized transmitted power of 69.75% is obtained by FD-BMP and the output waveguide gap is 300 μm.     

Toward the development of miniaturized imaging systems fordetection of pre-cancer

In this paper, we describe the progress toward the development of miniaturized imaging systems with applications in medical imaging, and specifically, detection of pre-cancer. The focus of the article is a miniature, optical-sectioning, fluorescence microscope. The miniature microscope is constructed from lithographically printed optics and assembled using a bulk micro-machined silicon microoptical table. Optical elements have been printed in a negative tone hybrid glass to a maximum depth of 59 μm and an rms surface roughness between 10-45 nm, fulfilling the requirements of the miniature microscope. Test optical elements have been assembled using silicon-spring equipped mounting slots. The design of silicon springs is presented in this paper. Optical elements can be assembled within the tolerances of an NA=0.4 miniature microscope objective, confirming the concept of simple, zero-alignment assembly     

光学和光电子系统用的微机械加工技术

回顾了微机械加工技术的最新进展, 介绍了自由空间微型光学试验平台和光预对准的概念以及微机械加工的光学器件实例。     

Optical scanner on a three-dimensional microoptical bench

A three-dimensional (3-D) microoptical bench prepared using bulk micromachining is constructed demonstrating a compact optical setup. Prealigned microstructures with space for mounting bulk elements are prepared. A 3-D photolithographic technique is applied with good repeatability using an originally developed resist spray-coating system. Films grown by low-pressure chemical-vapor deposition (LPCVD) are used as construction layers combining with 3-D bulk structures. A skew micromirror at the free end of a thermally actuated cantilever is fabricated facing to a laser diode chip. An optical-scan angle of more than 30/spl deg/ and a cutoff frequency of 100 Hz are obtained.     

深刻蚀连续浮雕微光学元件的衍射分析

讨论了深蚀刻连续浮雕位相微光学元件的衍射特性．给出了槽形与衍射效率关系的初步研究结果．对实际制作具有指导意义．     

深刻蚀高密度熔融石英光栅

深刻蚀高密度熔融石英光栅是一种新型高效的衍射光学元件,具有衍射效率高、成本低、抗损伤,能在高强度激光条件下工作等优点。给出了利用感应耦合等离子体(ICP)技术制作熔融石英深刻蚀光栅的详细过程,并在一定的优化条件下制作了一系列不同周期、开口比和深度的高质量深刻蚀石英光栅。实验得到的最大刻蚀深度为4μm,并且在600 l/mm的高密度条件下得到了刻蚀深度为1.9μm的高深宽比石英光栅。光栅侧壁陡直,表面平整,没有聚合物沉积。所制作的熔融石英光栅元件在高强激光环境、光谱仪、高效滤波器和波分复用系统等领域中有非常广泛的用途。     

Design and simulation of waveguide electrooptic beam deflectors

Numerical simulation based on the scalar beam propagation method, was used to investigate the performance of waveguide electrooptic beam deflectors. The deflectors under investigation consist of a stack of electrooptically controlled prisms in a waveguide. The results were compared to earlier simplified analysis. It was found that for given overall device dimensions, the number of interfaces between prisms in a prism-type electrooptic deflector has significant influence on the device performance when it is small. To avoid wavefront distortion, unwanted reflection from the interfaces, and asymmetry in the deflection angles caused by small number of interfaces, one should use more than about ten interfaces in a typical deflector. Additional insights of device operation and design issues are discussed     

Analysis of abrupt waveguide bend with low-index microprism

A low-loss large-angle waveguide bend structure utilizing a low-index microprism is proposed. Using the principle of phase front compensation, a simple and efficient rule for the low-index prism is derived. Field distortion due to the prism is discussed and an optimized prism design is also proposed. Simulated normalized transmission efficiency of the proposed waveguide bend is as large as 99.1% for a bend angle of 10°. Moreover, waveguide bends with high- and low-index prisms are compared for reference