NiCr高温薄膜电阻应变计制备及耐高温性能研究

针对高温环境下应力应变测试的技术难题,提出了一种以NiCr薄膜为敏感材料的高温薄膜应变计的制备方法,并对薄膜应变计敏感层的耐高温性能进行研究。研究发现,NiCr薄膜在高温下微观结构、成分发生明显转变,电学性能急剧下降。对添加SiN_xO_y和ITO薄膜后的NiCr薄膜分别进行高温测试发现,NiCr薄膜结构、性能没有明显改变,表明SiN_xO_y和ITO薄膜保护下的NiCr薄膜高温下性能稳定。所制的高温薄膜应变计在50~350℃内电阻温度系数为(80~787)×10-6/K,常温下应变灵敏系数为1.19,机械滞后为5.02,高温下的应变测试性能有待进一步研究。     

高温应变式称重传感器技术与关键工艺(接上期)

高温应变电测和高温称重计量是工业生产过程中设备处于高温和载荷同时作用时,研究强度条件和高温称重计量的关键技术。本文结合国内外高温称重计量的核心部件高温电阻应变计、称重传感器的发展状况,重点介绍了高温温度自补偿电阻应变计的原理、技术性能,高温称重传感器弹性元件的金属材料、高温电阻应变计、电路补偿元器件的选择,并简要的介绍了高温称重传感器的关键制造工艺和性能检测与评定。     

高温应变式称重传感器技术与关键工艺

高温应变电测和高温称重计量是工业生产过程中设备处于高温和载荷同时作用时，研究强度条件和高温称重计量的关键技术。本文结合国内外高温称重计量的核心部件高温电阻应变计、称重传感器的发展状况，重点介绍了高温温度自补偿电阻应变计的原理、技术性能，高温称重传感器弹性元件的金属材料、高温电阻应变计、电路补偿元器件的选择，并简要的介绍了高温称重传感器的关键制造工艺和性能检测与评定。     

基于薄膜技术的微型六维力／力矩传感器

介绍了利用薄膜技术制作的微型六维力/力矩传感器.提出了在传感器弹性体铝合金基体上磁控溅射80Ni20Cr薄膜电阻应变计的加工工艺,说明了工艺的实现步骤.实验研究了几种常用的绝缘层材料,并采用Al2O3作为绝缘层材料.通过改进薄膜制作掩模纠正了绝缘层失效的问题.说明了引线键合实现传感器微型化及系统集成.并给出六维力传感器的主要静态精度指标.     

用沉积锰薄膜作为应变计的压力传感器

本文介绍了用沉积锰薄膜作应变计的压力传感器的特性、膜片组件的结构、膜片上的绝缘层、锰敏感应变计、焊接点、应变计上保护层的沉积方法、膜片稳定性处理以及压力传感器的输出特性曲线等。     

电阻应变片的温度自补偿及其他

电阻应变片也称电阻应变计,简称应变片或应变计。本文从普及的角度。试从应变片热输出的物理概念、应变片温度自补偿的原理、箔材电阻温度系数的选择原则、不同弹性体材料上应变片热输出的估算以及用应变片测定弹性体材料线膨胀系数的方法等相关方面的知识加以简要介绍,以供从事应变片及传感器技术的同仁参考。     

铁电薄膜热释电非致冷红外传感器研究

阐述了铁电薄膜热释电非致冷红外传感器的工作原理,对铁电薄膜材料的要求及sol-gel铁电薄膜电性能。研究了BST铁电薄膜红外传感器的制备工艺与测试方法。研制出单元和8元、9元、10元线列铁电薄膜热释电非致冷红外传感器。     

国外过程传感器的动态

本文介绍了国外过程传感器温度计,流量计、压力计及Level计的现状和发展动向。     

当今传感器用应变计的四大关键工艺技术

应变计是传感器的关键部件。随着现代工业技术的发展和材料科学的进步，应变计算技术也有了长足的进步，无论在品种，性能等方面更趋完善，使传感器小型化，集成化，智能化以及标准化和低成本已成为可能。为获得性能优良的各种应变计，本文将对应变计四个相关领域（箔式应变计，薄膜，厚膜，半导体）技术动太以论述。     

高温薄膜快响应传感器的设计及其仿真优化

高温薄膜传感器在测温过程中,传感器的进气口面积和出气口位置是影响传感器的响应时间和测量误差的重要因素,传统的经验估计法难以对高温薄膜传感器的结构尺寸进行准确的求解,进而产生响应时间较慢、测量误差较大等问题,针对上述问题,采用流热耦合多物理场分析方法对高温薄膜传感器进行了流体热力学仿真。采用粒子群算法对仿真结果进行拟合,获得传感器在不同结构尺寸条件下的响应时间和测量误差的计算方程,以提高仿真结果的普适性,最终通过求解方程获得传感器的最佳结构尺寸,进而改善了传统经验设计的不足,提高传感器的测量精度。     

光纤光栅传感技术在分岔隧道模型中的实验研究

基于光纤光栅测量应变的诸多优势,将自制的光纤光栅传感器模块埋到分岔隧道三维地质力学模型中,在隧道开挖过程中,测量各埋入点的应变,将其与埋入相应点的应变片的测量结果以及数值分析结果进行了比较.结果表明,光纤光栅、应变片测得的结果与数值分析所得的结果趋势基本一致,但光纤光栅实测数据相比应变片测得数据更接近于仿真数据,并且可靠性高,在大型工程的长期监测中有较好的应用前景.     

Method for measuring thermal contact resistance of graphite thin film materials

Thermal contact resistance (TCR) is an important parameter in thermal analysis of materials. Because of many influential factors, it is difficult to find a general model or computational formula to calculate the TCR of a solid interface. In many engineering applications, TCR values are usually obtained through experiments. Unlike extensive research focusing on ordinary columnar materials, this paper aims at measuring the TCR values of graphite thin film materials. The technical challenge is that it is not convenient to embed thermocouples into such materials. To overcome this challenge, a steady-state method using a copper heat flux meter is developed, which provides a useful tool for indirect TCR measurement. In our experiments, the TCR values of the graphite thin film materials are successfully measured under different temperature and pressure levels. The results provide a valuable guideline for the use of this type of material in high-temperature, high-pressure applications.     

Enhancing life cycles of total pressure vacuum gauges in deposition applications (enhancing life cycles of vacuum gauges)

The application of hot cathode ionisation gauges in vacuum deposition processes (PVD, CVD) is critical regarding durability of the sensors, due to the inherent risk of contamination and discharges. Unstable calibration after relatively short periods of operation is an often reported problem, which arises from contamination with film forming substances contained in the residual gas. Furthermore, contamination often lead to early gauge drop outs and consequently to unsatisfyingly short life cycles of the gauges. Research was conducted to obtain improved solutions for prevention of gauge contamination on the one side, as well as optimised sensor designs for improved robustness and insensitivity against contaminants on the other side. This contribution discusses approaches for the desired improvements by evaluating the effectiveness of system-based methods to reduce the exposure of the sensor to contaminations, by indicating interactions between those system-based means and gauges, and by indicating options for improving gauge durability.     

再谈制作高温电阻应变式称重传感器的若干问题(2)

高温箔式应变片是高温称重传感器的重要组成元件,其各项性能将直接影响称重传感器的特性,为了便于观察了解两者之间关系,本文将介绍一种典型的高温箔式应变片的主要特点,供制作高温称重传感器时参考。     

基于薄板变形的机器人柔顺触觉传感器研究

针对机器人抓握处于重力场中的等截面均质杆件，设计了一种基于薄板变形的柔顺触觉传感器。在传感器中，利用金属弹性薄板做弹性元件，应变片做触觉敏感单元，实现对物体的长度和质量的感知。在传感器的表面封装电流变流体实现了软／硬抓握。采用合理结构，使被抓物体横截面尺寸不受金属弹性薄板尺寸的限制，并保证金属薄板不被破坏．另外，着重给出了金属薄板的边界条件为一对边固定支撑，另一对边简单支撑的情况下传感器的测量原理。最后将传感器安装在机器人平行抓握手爪上，进行了抓握试验。实验表明，这种触觉传感器测量精度比较高，范围广，耐用性好。     

Full-field dynamic strain reconstruction of an aero-engine blade from limited displacement responses

Blade strain distribution and its change with time are crucial for reliability analysis and residual life evaluation in blade vibration tests. Traditional strain measurements are achieved by strain gauges (SGs) in a contact manner at discrete positions on the blades. This study proposes a method of full-field and real-time strain reconstruction of an aero-engine blade based on limited displacement responses. Limited optical measured displacement responses are utilized to reconstruct the full-field strain. The full-field strain distribution is in-time visualized. A displacement-to-strain transformation matrix is derived on the basis of the blade mode shapes in the modal coordinate. The proposed method is validated on an aero-engine blade in numerical and experimental cases. Three discrete vibrational displacement responses measured by laser triangulation sensors are used to reconstruct the full-field strain over the whole operating time. The reconstructed strain responses are compared with the results measured by SGs and numerical simulation. The high consistency between the reconstructed and measured results demonstrates the accurate strain reconstructed by the method. This paper provides a low-cost, real-time, and visualized measurement of blade full-field dynamic strain using displacement response, where the traditional SGs would fail.     

基于非晶态合金的逆磁致伸缩效应应变计的研究

非晶态合金材料具有良好的软磁特性，被广泛用作各类传感器的敏感材料。对基于非晶态合金应变计的工作机理、磁输出特性进行了理论分析，设计了相应的磁测系统，并利用TM-M型的Fe基非晶合金薄带，采用贴片的方法进行了实测试验。试验结果显示，这种应变计具有测试准确性高和灵敏度高、测试系统简单等特点，是一种很有发展前景的应力测试方法。     

Study of the field around magnetic force microscopy probes using electron holography

We have used electron holography to perform quantitative investigations of the leakage flux of thin film tips used as probes in magnetic force microscopy. A method to deduce an arrangement of magnetic domains in a thin magnetic whisker from the knowledge of the stray flux is also described. A simple analytical model of the magnetic properties of the probes allows the extraction of computer images, which simulate the experimental results satisfactory. The reliability of the recorded experimental maps of the magnetic flux arising from these kinds of sensors allows an evaluation of the total flux affecting the sample and the calculation of the magnetic field profile along the tip axis.