高精度智能三维轮廓测量仪

介绍了基于国产6JA干涉显微镜的智能三维轮廓测量仪。仪器的垂直测量范围达80μm,垂直分辨率达1nm;仪器可用于多种材料、多种形状的轮廓测量,只需几秒钟即可完成一个取样表面的二维和三维自动测量与评定。给出了对标准样板的测量结果,实验表明仪器总测量误差小于5％。     

一种新型非接触式三维弹头痕迹检测系统

本文介绍了一种新研制的非接触式三维弹头痕迹检测系统的原理、结构、控制以及实验结果。该系统垂直分辨率为0.01μm,测量范围±300μm,圆分辨率50″,轴向分辨率为1.25μm,可以完整地获取弹头发射痕迹的真实形貌。     

一种接触式大量程表面形貌测量仪

为了解工件加工表面的性能和监控表面形貌的形成工艺过程,需要对表面形貌进行精密的测量.用带有白光光源的Linnik干涉显微镜、一个杠杆机构、共基面x-y工作台和垂直扫描工作台共同组成一种接触式大量程表面形貌测量系统,该系统具有测量精度高、测量接触力小的特点,可对常用工件表面进行接触式大量程的测量.测量系统的垂直测量范围为5mm,分辨率小于1nm;x向和Y向的水平测量范围为±25mm,分辨率为1.25μm.     

金刚石砂轮表面形貌测量系统

为了实现对金刚石砂轮表面形貌的非接触精密测量,开发了基于干涉原理的金刚石砂轮表面形貌专用测量系统,研究了该系统的测量原理和关键技术。根据垂直扫描白光干涉显微测量原理以及被测对象的特征,提出了适用于砂轮测量的方法,研究了系统的自动扫描范围、垂直方向的扫描方法、单次测量三维表面的恢复算法和磨粒的识别算法。结合自行设计的夹具搭建了砂轮测量系统,并对多次测量拼接算法进行了实验分析。实验结果表明:基于区域重合大小(重合度为30%~50%)的拼接算法获得的拼接前后重合区域的相关系数均大于0.8,拼接后重合区域的高度差均小于0.4μm。得到的结果显示所搭建的系统可以恢复砂轮的形貌,其测量范围和精度满足砂轮磨粒评定和分析的要求。     

钢球表面粗糙度的白光干涉非接触测量法

介绍了一种利用垂直位移台来实现钢球表面粗糙度高精度测量的垂直扫描白光干涉仪。该仪器是在6JA型干涉显微镜基础上加以改造,采用白光干涉,通过检测干涉信号的光强峰值,实现高精度的钢球表面三维形貌测量。通过试验验证该系统可对精度等级为3级的钢球进行精确的表面形貌测量。     

一种新型三维表面形貌测量仪的研制及应用

介绍了一种新型的基于直线相位光栅干涉三维表面形貌测量仪,该测量仪具有高分辨率、大量程、低成本的特点.该三维表面形貌测量仪由基于直线相位衍射光栅干涉原理的微位移传感器、X-Y二维工作台、立柱、光电探测器以及信号处理电路、计算机及数据处理软件组成.该轮廓仪工作台的工作范围为50 mm×50 mm,最小步距为0.2μm,工作台计量系统的分辨率为0.05μm,微位移传感器理论垂直分辨率可达到0.12 nm,实际测量量程为2 mm,通过更换测杆可以达到6 mm的测量量程.     

高精度非接触式三维轮廓扫描仪设计

三维轮廓扫描仪是广泛应用于微纳表面三维形貌测量的高精度设备。基于白光共焦测量技术,提出了非接触式三维轮廓扫描仪设计方案和工作原理。扫描仪由精密扫描工作台、测量系统、光学辅助系统及控制系统组成。试制的扫描仪样机垂直测量范围为(20～400)μm,分辨率10nm,水平测量范围(100×100)mm,分辨率小于1μm。实验表明,该扫描仪可实现二维轮廓曲线和三维形貌测量,具有精度高、非接触、测量快速和测量范围宽等特点,对于实现高精度非接触式三维轮廓测量具有较高的实用价值。     

基于LVDT的台阶信号拾取方法研究

大规模集成电路检测设备之一台阶测量仪是采用LVDT传感器拾取信号的,其设计合理与否直接关系到仪器的测量精度。文中采用零点残余电压补偿,合理地选择LVDT特性曲线的不同区域,以及正确设计传感器的安装角度等措施,有效地减小了零点残余电压的影响,并消除测量机构本身固有的二次项误差,提高了仪器的测量精度。实验表明,该仪器垂直方向测量分辨率可达0．5μm,重复测量精度为±0．015μm．     

数字全息术用于光学元件表面缺陷形貌测量

利用像面数字全息显微术对光学元件表面缺陷的三维形貌测量进行了理论及实验研究。设计并搭建了相应光路系统记录全息图,采用角谱算法数值重建物光场,通过相位修正消除了系统误差引入的波前畸变,获得了经过待测光学元件表面缺陷调制的物光相位分布,并根据建立的相位分布与表面缺陷面形的关系模型计算得到缺陷三维形貌。实验以多个划痕和麻点等常见表面缺陷作为测量对象,分别获得了它们的三维形貌,以其中一条实际宽度为35μm、深度为270nm的划痕为例,测量得到该划痕的宽度为35.21μm,平均深度为267.6nm,与真实值相比,横向测量误差为0.6%,纵向测量误差为0.9%。实验结果证实该测量方法是有效、可靠的,能够准确测量光学元件表面缺陷的三维形貌,因而有助于判断光学元件损伤程度以及分析缺陷对系统波前的影响,对保障高功率激光装置的安全正常运行有重要意义。     

圆弧金刚石砂轮三维几何形貌的在位检测和误差评价

针对非球面光学元件加工对圆弧金刚石砂轮形状误差测量的需求,提出了砂轮三维几何形貌在位检测与误差评价方法。建立了砂轮外圆面螺旋扫描轨迹测量数学模型,利用位移传感器获取了砂轮表面轮廓数据;对得到的数据匀滑滤波后沿圆周展开并进行插值处理,得到砂轮三维几何形貌。然后,根据非球面平行磨削加工特点,提出评价圆弧砂轮形状精度的指标。通过提取三维几何形貌轴截面轮廓,进行最小二乘圆弧拟合得到不同相位处的圆弧半径与圆心坐标,并由误差分离获得砂轮表面圆弧的圆度误差、圆周跳动误差及轮廓圆心轴向偏差。最后,对非球面加工圆弧金刚石砂轮进行检测,获得了砂轮的三维几何形貌以及多个关键尺寸及其误差数据:即圆弧金刚石砂轮的平均圆弧半径为55.442 3mm,半径波动极差为0.16mm,中央±8mm环带内圆弧的圆度误差约为5μm,圆周跳动误差约为2μm,截面轮廓圆心轴向位置相对偏差为0.008mm。根据检测结果,进行了大口径复杂非球面磨削实验,得到的元件面形P-V值为4.62μm,RMS值优于0.7μm,满足工程的实际需求。     

Microfluidic channel depth determination with Tywman–Green interferometer

A microfluidic channel is fabricated on a silica wafer using reactive ion etching (RIE). The depth of the microfluidic channel has been measured using a surface profilometer and a Twyman–Green interferometer (TGI) setup. The TGI setup which mainly consists of a 660-nm wavelength He-Ne laser source, glass cube beam splitter and two prisms produced interference fringes based on the optical path difference between two interfering beams when the microfluidic channel is inserted into one of the beams. The TGI setup that was developed has shown high repeatability when measuring microfluidic channel depth and also eliminates back injection into the laser source and alignment criticality. The TGI setup applied a single photodiode to detect the shifting of the bright and dark fringe produced from the interference of the TGI. The depth of microfluidic channel obtained from the TGI is 1.79?±?0.31 μm using fringe shifting and intensity measurements, while according to the surface profilometer the depth of microfluidic channel obtained is 1.67?±?0.07 μm. The resolution of the TGI is 0.25 μm and can still go well below that depending on the wavelength of the laser source. This research describes the capability of the TGI to perform depth measurements on a microfluidic channel of a silica substrate which can also be improvised for other microscale devices and applications.     

激光干涉微轮廓测量仪

基于Michelson干涉仪测量原理研制的微轮廓测量仪,载物平台采用步进电机和压电陶瓷(PZT)两级闭环驱动与定位,步进电机用于快速粗定位和扩大测量范围,压电陶瓷用于精密定位,重复定位精度为10 nm;测量光路采用共干涉系统,对机械振动,温度漂移不敏感;测量范围20 mm×20 mm×0.4 mm,纵向分辨率为0.32 μm,横向分辨率为0.5μm.     

降低电感接触式测量仪系统误差的方法研究

本文分析了传统电感接触式测量仪的系统误差,提出了一种基于垂直位移扫描工作的表面轮廓综合测量仪的整体设计方案,克服了接触式测量仪的大量程和高精度之间的矛盾,给出了实际测量结果。     

工程表面粗糙度两用测量系统

介绍了一种新型工程表面粗糙度两用测量系统的设计原理、仪器结构及测试结果。该系统可采用接触法和非接触法两种测量方式,接触法测量范围达±１００μｍ,最小分辨率为０．００５μｍ;非接触法测量范围达±２５０μｍ,最小分辨率为０．０１μｍ。     

摆臂式非球面轮廓仪的原理与试验

介绍了一种新颖的非球面轮廓仪的测量原理和测量试验,它通过测量非球面与某一参考球面之间的偏离量来唯一确定非球面的面形误差,通过调整测量臂长以及回转轴线与光轴之间的夹角实现对不同非球面的测量。系统主要由高精度两维转台,高刚度测量臂,四自由度微调系统和高精度扫描测量传感器组成,并分别在VC++6.0与MATLAB平台上开发了测控软件以及数据处理软件。该测量方法的优点是测量所需传感器量程小,测量运动为一个简单的回转运动;缺点是测量调整自由度多,校准困难。建立了测量系统的数学模型,通过测量数据与名义面形之间的非线性优化,在获得面形误差的同时获得了非球面面形参数误差。通过测量多条截线实现了对非球面面形的全口径检测。最后对直径200 mm,顶点曲率半径1 400 mm的凹形抛物面镜进行了测量,结果表明,系统重复精度优于0.8 μm,精度优于1 μm。     

Measurement of the surface roughness of wood based materials used in furniture manufacture

The objective of this work was to evaluate surface quality of wood based materials used to manufacture furniture units in Singapore. Various type commercially produced composite panels including particleboard, medium density fibreboard (MDF), plywood in addition to ten different solid wood species which are commonly used in furniture production were considered for the experiments. A stylus type profilometer and 3D image analyzer were employed to determine surface roughness of the samples. Medium density fibreboard (MDF) samples resulted in the smoothest surface with an across the sandmark average roughness (R_a) value of 5.07 μm, while corresponding value for plywood specimens was 8.09 μm among the composite panel samples. In the case of solid wood samples, measurements taken along and across the sandmark from the surface of the specimens measured by the stylus type profilometer, balau had the roughest surface with an R_a value of 9.85 μm across the sandmark followed by beech and walnut. Pine specimens along with ash, cherry and nyatoh resulted in relatively smooth surface values. Correlation between measurements taken by two different methods, namely stylus and 3D scanning showed a good agreement with each other. Based on the findings in this work it appears that both methods can be successfully used to evaluate and to get objective numerical values on surface quality of these samples so that such initial data can be used as quality control tool to have more effective further manufacturing steps in furniture production.     

Approach to accuracy improvement and uncertainty determination of radius of curvature measurement on standard spheres

In high accuracy radius of curvature (ROC) measurement, significant discrepancy may exist in results on the same optical surface obtained by different techniques. Metrological standard sphere is a potential solution to this problem. Mathematical models are built up to characterize the relationship between the ROC of standard spheres and the roundness error as well as the aperture angle. Equations for calculating the uncertainty of ROC are derived and tested on several ROC measuring methods. The reason for the inconsistency between results of different techniques is analyzed and solutions are proposed. A method is developed which can remarkably reduce the uncertainty of ROC. Experiments are carried out on a set of high quality spheres whose diameters are from 11 mm to 93 mm and roundness below 0.1 μm, measured by instruments with relative accuracy of 10⁻⁵–10⁻⁶, which are a length measuring machine, a profilometer and a homemade differential confocal system. Relative uncertainties of ROC are calculated and analyzed against several factors. Experimental results show good consistency with theoretical analysis. Approaches to trace the ROC to the metrological length standard area discussed.     

SiC反射镜表面改性对TMC光学系统信噪比的影响

SiC（Silicon Carbide）反射镜由于固有的缺陷,在使用时会影响反射式光学系统的信噪比。采用表面改性技术后,Wyko轮廓仪测试表明SiC反射镜的粗糙度由10.42nm（Ra）降低到了0.95nm（Ra）,镀制了银反射膜和增强膜后,主镜、次镜、三镜及折叠镜在0.5μm-0.8μm的可见光波段反射率＞98%。计算的结果表明应用了表面改性技术后TMC反射式光学系统的信噪比提高了5%以上。     

轮廓光电自动调焦系统

本文叙述我所研制的轮廓光电自动调焦的原理。实验证明:移动范围在±10μm时,重复精度为±0.5μm;大于±10μm 时,重复精度为±1μm。     

直线位移微机自动测量系统

为了在空间遥感详查相机研制工作中准确、有效地评价像移补偿系统的像移补偿效果,提出了采用分辨率为0.4μm的光栅尺作为像移补偿片台直线位移的检测元件,采用微机实现直线位移自动测量的检测方法并给出了详细设计思路,包括系统的硬件设计和软件设计。系统具有手动采样、定时采样、外同步采样等多种位移数据读取方式,并可以实时计算出像移补偿片台的位移、速度和速度误差。在实际工程检测应用中实现了极限误差优于0.5μm的检测精度。