六氟化钨的合成与开发

介绍了国外六氟化钨的制备和精制工艺进展，重点描述了电子工业中应用的高纯度六氟化钨的制备工艺。同时介绍了六氟化钨的性质、产品规范、应用及经济等方面的状况，评述了六氟化钨在国内外的发展前景。     

六氟化钨的合成与开发

介绍了国外六氟化钨的制备和精制工艺进展，重点描述了电子工业中应用的高纯度六氟化钨的制备工艺。同时介绍了六氟化钨的性质、产品规范、应用及经济等方面的状况，评述了六氟化钨在国内外的发展前景。     

高纯六氟化钨去除氟化氢的工艺研究

对高纯六氟化钨制备过程中,采用综合措施抑制电解制氟时氟化氢的挥发、球状氟化钠吸收氟化氢、液氮冷冻固化氟化氢而提纯氟气、六氟化钨低温冷冻抽真空除去氟化氢等物理过程,以及利用六氯化钨与氟化氢发生反应而去除氟化氢的化学过程。结果表明,电解产生的氟气中质量分数4.5%的HF,经过多步聚去除氟化氢后,精馏产品六氟化钨达到HF的质量分数小于5×10-6的高纯要求。解决了氟化氢与六氟化钨2者难以分离的技术问题。     

几种含氟电子气体发展的思考

介绍了三氟化氮、六氟化钨、四氟化碳、电子级六氟化硫等几种含氟电子气体在半导体、平板显示等领域的应用。对相关行业发展的现状和前景进行了分析和预测,讨论了行业发展的潜在风险。     

六氟化钨制备工艺及产业前景分析

对六氟化钨制备方式,产品质量标准以及测定方式进行研究,并就该物质在工业中的应用前景进行简要分析。希     

含氟特种气体及电子化学品市场与竞争力分析(待续)

介绍了属于高端无机氟精细品的部分含氟特种气体及电子化学品氟气、六氟化硫、六氟化钨和五氟化碘等,这些产品大多用于电子、新材料、航空航天等高新领域,普遍具有技术含量、产品附加值较高的特点,在国民经济中占有重要地位。叙述了产品性能、生产方法、用途、国内外市场现状、生产厂家规模及分布等。     

炼钨新法

本法名为低温蒸汽沉积法。六氟化钨与氢气的混合物通过热至1100°F的铜管时,钨即自气流滴下(杂质仍留在气体中),附着于铜管的内壁。沉积达到一定厚度时,将铜管剥开,即可得纯度达99.99%的钨管。钨的熔点很高(6170°F),硬度很大,抗腐蚀性很强。应用     

中国无机氟化工五十年发展进程

回顾了中国无机氟化工近50 a的发展历程,包括氟资源储量、生产工艺技术水平,以及产品品种、产量和质量。介绍了目前中国生产无机氟化工产品现状,主要包括无水氟化氢、氟化铝、氟化钠等产品,以及六氟磷酸锂、四氟硼酸锂、高纯氟气、六氟化硫、三氟化氮、四氟化碳、六氟化钨、五氟化碘、五氟化磷、三氟化硼、四氟化硫等产品,阐述了这些产品的产量、生产工艺技术水平、供需情况。指出目前中国无机氟化工存在的问题和今后的发展方向。     

高纯六氟化钨中微量杂质的气相色谱分析

介绍了一种利用脉冲放电氦离子化检测器(PDHID)分析六氟化钨(WF6)中气相杂质的方法。该法利用阀切割技术对WF6主组分进行反吹,避免其进入分析柱及检测器,可准确分析出其中杂质的含量。     

半导体工业的新型氟化学产品

AEC公司经过深入的技术研究在南非比勒陀利亚附近的Pelindaba建立了２所独立的工厂，生产专用于半导体工业的六氟化钨（WF６）和三氟化氯（ClF３）。集成电路在现代电子设备中是关键的高精确度元件，这些元件的市场正迅速发展。除计算机外，高增长的领域有蜂窝电话和照相机等。在生产集成电路时半导体工业会使用大量的无机和有机氟化学品。其中包括金属层的沉积、硅材的蚀刻和装配车间的清洗。WF６是通过钨金属和氟气反应生产的。WF６可用于生产集成电路过程中沉积钨金属和钨化合物。ClF３是通过控制反应氯气和氟气生产的。中试研究始…     

Mathematical modeling for chemical vapor deposition in a single-wafer reactor: Application to low-pressure deposition of Tungsten

A mathematical model for low pressure chemical vapor deposition in a single-wafer reactor in stagnation point flow has been developed to investigate the reactor performance. The transient transport equations for a simulated reactor include continuity, momentum, energy, and gaseous species balances. The model equations are simultaneously solved by using a numerical technique of orthogonal collocation on finite element method. Simulation studies have been performed to gain an understanding of tungsten low pressure chemical vapor deposition process. The model is then used to optimize the deposition rate and uniformity on a wafer, and the effects of operating conditions on deposition rate are studied to examine how system responses are affected by changes in process parameters. Deposition rate and uniformity calculated at the steady state are observed to be very sensitive to both temperature and total pressure. In addition, the model predictions for tungsten deposition from hydrogen reduction of tungsten hexafluoride have been compared with available experimental data in order to demonstrate the validity of the model.     

六氟化硫分解气及处理方法

六氟化硫是一种绝缘性能和灭弧性能良好的气体 ,也是一种具有累积效应的温室气体。回收含六氟化硫分解气的六氟化硫气体 ,既有经济效益 ,又有环境效益。介绍六氟化硫分解气的种类、性质及湿式、干式 2种回收处理方法     

我国六氟化硫行业发展分析

对国内六氟化硫的市场需求、生产现状及竞争态势进行简要分析,并对六氟化硫行业未来发展趋势进行了预测。     

Intensification of evaporation of uranium hexafluoride

The theoretical mechanism of the sublimation of uranium hexafluoride are considered. The most contribution to the rate of evaporation of UF₆ is introduced by the conductive mode of heat exchange. Various modes of the intensification of the evaporation of uranium hexafluoride during the nitrogen supply in pulse mode to the product mass are investigated. The nitrogen supply results in the turbulization of gas flow within a vessel (Re = 2500–4000) and significantly increases the rate of evaporation of uranium hexafluoride with the substantial decrease in a weight of the nonevaporable residue of 5.6–1.0 kg. The complex application of the pulse nitrogen supply in combination with heating the bottom of the vessel is the most effective method for evaporating uranium hexafluoride. The rate of evaporation of UF6 increases by a factor of almost four in comparison with the design mode. The developed methods are applied in industry and provide the stable operation of Saturn reactors during the conversion of uranium hexafluoride into its dioxide.     

A Method to Convert Isotopically Modified Sulfur Hexafluoride to Elemental Sulfur in a High-Frequency Discharge

Theoretical Foundations of Chemical Engineering - A method has been proposed to convert isotopically modified sulfur hexafluoride to elemental sulfur by the reaction of sulfur hexafluoride with...     

六氟化硫生产过程中含氟废水的处理

叙述了用生石灰处理生产六氟化硫过程中排放的含氟废水的方法原理、工艺条件试验及工业生产考核情况。试验结果表明,采用加热升温、延长反应时间的方法,用生石灰处理一次,可使废水中的F-由原来的30～50g／L降至1g／L以下,碱液(KOH)质量浓度由原来的25～50g／L增加至100～170g／L;经2次过滤后的滤液完全可以满足六氟化硫工艺循环使用要求,而每吨六氟化硫产品可节约KOH0．3t,经济效益和环境效益显著。     

High-voltage arc erosion behavior and mechanism of Ti3AlC2 under different ambient atmospheres

The arc erosion behavior of Ti₃AlC₂ in oxygen, air, nitrogen, carbon dioxide, argon, and sulfur hexafluoride atmospheres at 9 kV voltage was studied. The breakdown strength increased in the order of oxygen, air, carbon dioxide, nitrogen, argon, and sulfur hexafluoride, whereas the arc energy decreased. Cracks, pits, and bulges on the eroded surface were investigated using scanning electron microscopy and three-dimensional (3D) laser confocal scanning microscopy. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) were used to determine the composition of the eroded surface. The arc energy and electromagnetic force lead to the formation of erosion characteristics. The mechanism of erosion under the different atmospheres is discussed systematically, and is called the “decomposition-oxidation” process in oxygen, air, and carbon dioxide and the “decomposition-rereaction” process in nitrogen and sulfur hexafluoride. This study provides a reference for the application of MAX phase materials in high-voltage electrical appliances.