Pt-W03薄膜气敏传感器的气敏性能研究

用直流反应磁控溅射法制备了Pt-WO3气敏薄膜,进行了薄膜晶体结构和表面形貌的分析,研究了添加Pt对WO3电学和气敏特性的影响.实验证明:当Pt膜厚为4 nm时,WO3薄膜对气体的敏感特性得到改善,对(∮)(NO2)=5和(∮)(NH3)=10×10-6的工作温度均降低了50℃,灵敏度分别达到11.5和900,是纯WO3薄膜的2～3倍,且响应时间缩短.     

双层结构TiO2-WO3气敏薄膜特性的研究

用直流反应磁控溅射法制备了TiO2-WO3双层结构的气敏薄膜,进行了薄膜微结构和化学成分分析,研究了TiO2表面层对WO3气敏特性的影响。实验证明:当TiO2膜厚为30 nm时,WO3薄膜对NO2敏感特性得到改善,TiO2-WO3结构的薄膜对空气中较低浓度的NO2(体积分数为(1~3)×10-5)具有优异的敏感特性和响应特性。最适宜的工作温度为120℃,在一些气体(如CO、H2S、C2H5OH、H2)中对NO2的选择性也大大提高。     

新型NO2薄膜气敏元件的研究

采用射频反应磁控溅射方法制备了氧化钨/多壁碳纳米管(WO3/MWCNTs)薄膜材料,并在此基础上研制NO2气敏元件.采用X射线衍射仪(XRD)、X光电子能谱仪(XPS)、扫描电子显微镜(SEM)来研究WO3/MWCNTs材料的表面形貌、表面化学状态、表面化学元素等材料特性.研究结果表明,MWCNTs已经掺杂进WO3材料,合成的WO3/MWCNTs气敏元件表现出对NO2气体有较高的灵敏度和较好的响应-恢复特性,并解释了该元件的工作机理.     

聚噻吩/WO_3复合纳米材料的制备及气敏性能

采用水合肼法制备WO3粉体,再以无水FeCl3作氧化剂,通过原位化学氧化聚合制备了不同聚噻吩(PTh)掺杂量的PTh/WO3复合纳米材料。并研究了用其制备的气敏元件的气敏性能。结果表明:气敏元件对H2S和NOx有较高的灵敏度和较好的选择性。用质量分数w(PTh)为5%的PTh/WO3复合纳米材料制备的气敏元件,在加热电压为2.25V时,对体积分数φ(NOx)为5×10–6的灵敏度可达77.14;用w(PTh)为20%的PTh/WO3复合纳米材料所制之气敏元件,在加热电压为2.43V时,对φ(H2S)为20×10–6的灵敏度达63.27。     

脉冲电泳沉积制备电致变色WO3薄膜

采用正交设计法优化了脉冲电泳沉积制备WO3薄膜的工艺参数,并通过分析薄膜的微观结构、透射光谱和循环伏安曲线等研究了最佳工艺条件下制备的WO3薄膜的电致变色性能.结果表明,脉冲电泳沉积制备WO3薄膜的最佳工艺参数为平均电流密度0.2×10-3A/cm2,沉积时间6 min,占空比75%,脉冲周期10 ms.最佳工艺条件下...     

正交氧化钼传感器的制备和硫化氢气敏性能研究

利用水热法制备了α-MoO_3纳米棒传感器材料,进而制备了α-MoO_3纳米棒粉末的平面型气体传感器,并基于CGS-1TP智能气体检测分析系统研究了其对H_2S气体的气敏特性。结果表明:制备的α-MoO_3材料结构呈现棒状形态,平均长度和宽度分别约为300 nm和100 nm。制备的α-MoO_3纳米棒传感器对体积分数为20×10~(-6)的H_2S进行气体响应测试的最佳操作温度为180℃,对应的气体响应值为14.92,响应和恢复时间分别为7 s和11 s,同时对体积分数为10×10~(-6)～100×10~(-6)的H2S表现出较高的线性度和优异的稳定性。     

磁控溅射法制备WO_3薄膜及其氢敏特性研究

采用直流反应磁控溅射法,在未抛光的Al2O3基片上制备WO3薄膜,在干燥空气中经过热处理;利用SEM观察薄膜表面形貌;通过XRD测量,对薄膜的晶体结构进行分析;薄膜氢敏特性测试采用静态配气法。经过400℃热处理,当工作温度在270℃时,对体积分数为3×10-4%H2的灵敏度达到了77,稳定性较高、选择性好、响应时间在15s以内。WO3薄膜是一种较理想的氢敏材料,在氢敏传感器的设计中必定会得到足够的重视和广泛应用。     

柔性PANI-SnO_2复合薄膜的制备及其对NH_3的气敏特性

以苯胺与二氧化锡(SnO_2)为前体,通过将原位化学氧化聚合法与静电吸附相结合,在柔性衬底聚酰亚胺(PI)上制备了聚苯胺-二氧化锡(PANI-SnO_2)复合薄膜。通过傅里叶红外光谱(FTIR)、扫描电子显微镜(SEM)与X射线衍射(XRD)对复合薄膜的结构与形貌进行表征,证实了PANI-SnO_2的成功合成与复合。对其在室温条件下进行了一系列气敏性能测试,结果表明SnO_2的添加有效提升了PANI对氨气(NH_3)的响应能力;该PANI-SnO_2复合薄膜对体积分数为1×10~(-5)～6×10~(-5)的NH_3具有良好的灵敏度,此外,该复合薄膜具有良好的重复性与选择性;而且在进行弯折处理后,PANI-SnO_2对NH_3的响应值并无明显变化。上述结果都表明PANI-SnO_2复合薄膜对NH_3的检测具有实际应用价值。     

nc-Si:H薄膜的三阶非线性光学性质

用简并四波混频技术(DFWM)研究了nc-Si:H薄膜的三阶非线性光学性质,观察到了这种纳米薄膜材料的位相共轭信号,测得晶态比为XC1=15%和XC2=30%的二个样品在光波波长为589nm处的三阶非线性极化率分别为χ1(3)=3.8×10-6esu和χ2(3)=4.3×10-7esu,并对其光学非线性产生机理作了探讨。     

Na+对WO3气敏性能的影响

分别用钨酸钠或钨酸铵溶液及浓盐酸作原料,用直接沉淀法制备了含Na+和不含Na+的WO3粉体,并用XRD及粒度分布测试仪对其进行了表征。结果表明:产物分别是WO3/Na2W4O13混合氧化物及纯WO3,前者的平均粒径为4.459μm,后者为1.366μm。气敏测试结果表明:含Na+的WO3/Na2W4O13气敏元件对体积分数为50×10–6的H2S的灵敏度是164,恢复时间为35s。纯WO3气敏元件对体积分数为50×10–6的NO2及Cl2的气敏性能较好,其灵敏度分别为468与1635。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks