基于薄膜体声波谐振器的高灵敏度质量传感器

提出了一种针对于生物传感应用的薄膜体声波谐振(Thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(GHz数量级),同时具有很高的品质因数,因此基于这种器件的质量传感器具有非常高的质量灵敏度。提出了三对全金属Al-W层作为布拉格声学反射层的FBAR,采用AlN作为压电层,制备出了固态装配型FBAR传感器。通过淀积不同厚度Al层顶电极,对器件的质量灵敏度进行了分析,得到质量传感器串联谐振频率在2.8GHz附近,质量响应度达到5×10-4ng/Hz/cm2,可以实现分子量级的质量传感。     

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Acoustic devices play an increasingly important role in modern society for information technology and intelligent systems, and recently significant progress has been made in the development of communication, sensing, and energy transduction applications. However, conventional material systems, such as polymers, metals and silicon, show limitations to fulfill the evolving requirements for high-performance acoustic devices of small size, low power consumption, and multifunctional capabilities. 2D materials hold the promise in overcoming the development bottleneck of acoustic devices aforementioned, given their atomic-thin thickness, extensive surface area, superior physical properties, and remarkable layer-stacking tunability. By suspending the 2D materials, mechanical and thermal disruption from substrate will be eliminated, which will enable the development of new classes of acoustic devices with unprecedented sensitivity and accuracy. In this review, the recent progress of acoustic devices based on suspended 2D materials and their composites, especially applications in the audio frequency, static pressure, and ultrasonic frequency range, is briefly summarized, emphasizing the advantageous properties of suspended 2D materials and related outstanding device performance. Together with the development of 2D membrane synthesis, transfer, as well as microelectromechanical fabrication process, suspended 2D materials will shed light on the next-generation high-performance acoustic devices.     

Multistage Coloring Electrochromic Device Based on TiO2 Nanotube Arrays Modified with WO3 Nanoparticles

WO₃ nanoparticles loaded in TiO₂ nanotube arrays, fabricated by a chemical bath deposition (CBD) technique in combination with a pyrolysis process, is uniform and the diameter can be easily adjusted by the deposition times. The resultant hybrid nanotubes array shows a multistage coloring electrochromic response at different potential bias. The formation of a 3‐dimensional WO₃/TiO₂ junction promotes unidirectional charge transport due to the one‐dimensional features of the tubes, which leads to the significant positive‐shift onset potential of the cathodic reaction (ion insertion) and the highly increased proton storage capacity. Compared to non‐decorated nanotube arrays, the enhanced electrochromic properties of longer lifetime, higher contrast ratio (bleaching time/coloration time), and improved tailored electrochromic behavior could be achieved using the composite films.     

All-Electrical Detection of the Spin-Charge Conversion in Nanodevices Based on SrTiO3 2-D Electron Gases

The Magnetoelectric Spin-Orbit (MESO) technology aims to bring logic into memory by combining a ferromagnet with a magnetoelectric (ME) element for information writing, and a spin-orbit (SO) element for information read-out through spin-charge conversion. Among candidate SO materials to achieve a large MESO output signal, oxide Rashba two-dimensional electron gases (2DEGs) have shown very large spin-charge conversion efficiencies, albeit mostly in spin-pumping experiments. Here, all-electrical spin-injection and spin-charge conversion experiments in nanoscale devices harnessing the inverse Edelstein effect of SrTiO₃ 2DEGs are reported. Nanodevices aredesigned, patterned, and fabricated in which a spin current injected from a cobalt layer into the 2DEG is converted into a charge current. The spin-charge conversion signal is optimized by applying back-gate voltages and studied its temperature evolution. It further disentangles the inverse Edelstein contribution from spurious effects such as the planar Hall effect, the anomalous Hall effect, or the anisotropic magnetoresistance. The combination of non-volatility and high energy efficiency of these devices can potentially lead to new technology paradigms for beyond-CMOS computing architectures.     

Stretchable Supercapacitor with Adjustable Volumetric Capacitance Based on 3D Interdigital Electrodes

Reduced graphene oxide (rGO)‐based materials have shown good performance as electrodes in flexible energy storage devices owing to their physical properties, high specific surface area, and excellent electrical conductivity. Here, a novel road is reported for fabricating high‐performance supercapacitors based on 3D rGO electrodes and solid electrolyte multilayers via pressure spray printing and machine coating. These supercapacitors demonstrate high and adjustable volumetric capacitance, excellent flexibility, and stretchability. The results show that this commercial strategy has its essential merits such as low‐cost, inexpensive, and simple fabrication for large area production. These properties are in the favor of fabricating high‐performance supercapacitor to meet the practical energy demands in devices, especially flexible electronic devices. Furthermore, this novel 3D interdigital electrode concept can be widely applied to other energy devices for enhancing performances and to other micro devices for reducing cost.     

Machine Vision Based on an Ultra-Wide Bandgap 2D Semiconductor AsSbO3

Facing the future development trend of miniaturization and intelligence of electronic devices, solar-blind photodetectors based on ultrawide-bandgap 2D semiconductors have the advantages of low dark current, and high signal-to-noise ratio, as well as the features of micro-nanometer miniaturization and multi-functionalization of 2D material devices, which have potential applications in the photoelectric sensor part of high-performance machine vision systems. This study reports a 2D oxide semiconductor, AsSbO₃, with an ultrawide bandgap (4.997 eV for monolayer and 4.4 eV for multilayer) to be used to fabricate highly selective solar-blind UV photodetectors, of which the dark current as low as 100 fA and rejection ratio of UV-C and UV-A reaches 7.6 × 10³. Under 239 nm incident light, the responsivity is 105 mA W⁻¹ and the detectivity is 7.58 × 10¹² Jones. Owing to the remarkable anisotropic crystal structure, AsSbO₃ also shows significant linear dichroism and nonlinear optical properties. Finally, a simple machine vision system is simulated by combining the real-time imaging function in solar-blind UV with a convolutional neural network. This study enriches the material system of ultrawide-bandgap 2D semiconductors and provides insight into the future development of high-performance solar-blind UV optoelectronic devices.     

High‐Performance Ultraviolet Photodetector Based on a Few‐Layered 2D NiPS3 Nanosheet

2D materials, represented by transition metal dichalcogenides (TMDs), have attracted tremendous research interests in photoelectronic and electronic devices. However, for their relatively small bandgap (<2 eV), the application of traditional TMDs into solar‐blind ultraviolet (UV) photodetection is restricted. Here, for the first time, NiPS₃ nanosheets are grown via chemical vapor deposition method. The nanosheets thinning to 3.2 nm with the lateral size of dozens of micrometers are acquired. Based on the various nanosheets, a linearity is found between the Raman intensity of specific A_g modes and the thickness, providing a convenient method to determine their layer numbers. Furthermore, a UV photodetector is fabricated using few‐layered 2D NiPS₃ nanosheets. It shows an ultrafast rise time shorter than 5 ms with an ultralow dark current less than 10 fA. Notably, this UV photodetector demonstrates a high detectivity of 1.22 × 10¹² Jones, outperforming some traditional wide‐bandgap UV detectors. The wavelength‐dependent photoresponsivity measurement allows the direct observation of an admirable cut‐off wavelength at 360 nm, which indicates a superior spectral selectivity. The promising photodetector performance, accompanied with the controllable fabrication and transfer process of nanosheet, lays the foundation of applying 2D semiconductors for ultrafast UV light detection.     

一种基于2D和3DSIFT特征级融合的一般物体识别算法

如何选择合适的特征表示一般物体类间差异和类内共性至关重要,因此,本文在2D SIFT(Scale Invariant Feature Transform,SIFT)的基础上,提出了基于点云模型的3D SIFT特征描述子,进而提出一种基于2D和3D SIFT特征级融合的一般物体识别算法.分别提取物体2维图像和3维点云的2D和3D SIFT特征描述子,利用"词袋"(Bag of Words,BoW)模型得到物体特征向量,根据特征级融合将两个特征向量进行融合实现物体描述,运用有监督分类器支持向量机(Support Vector Machine,SVM)实现分类识别,给出最终识别结果.最后,实验验证了本文提出算法的好处.     

Na-Ni掺杂Bi2O3-ZnO-Nb2O5基陶瓷的介电弛豫研究

采用传统固相反应法制备Bi2O3-ZnO-Nb2O5基陶瓷.研究Na+、Ni2+分别替代Bi3+、Nb5+对Bi2(Zn1/3Nb2/3)2O7陶瓷烧结特性和介电性能的影响.替代后样品的烧结温度从960℃降低到870℃左右.在-30～+130℃,陶瓷样品的温谱中出现明显的介电弛豫现象,弛豫峰所在温区较宽,当Ni2+替代量增加到0.2时出现双弛豫峰;随着Ni2+替代量的增加,弛豫峰值温度向低频移动,弛豫激活能增加,两弛豫峰的间距增加.用缺陷偶极子和晶格畸变对Na-Ni掺杂Bi2(Zn1/3Nb2/3)2O7的介电弛豫现象作出简要解释.     

Integrated Biomonitoring Sensing with Wearable Asymmetric Supercapacitors Based on Ti3C2 MXene and 1T‐Phase WS2 Nanosheets

Research on wearable sensing technologies has been gaining considerable attention in the development of portable bio‐monitoring devices for personal health. However, traditional energy storage systems with defined size and shape have inherent limitations in satisfying the performance requirements for flexible electronics. To overcome this constraint, three different configurations of flexible asymmetric supercapacitor (FASC) are fabricated on polyester/cellulose blend (PCB) cloth substrate using Ti₃C₂ nanosheet (NS) and 1T WS₂ NS as electrodes, and aqueous pluronic gel as an electrolyte. Benefiting from the 2D material electrodes, the interdigitated FASC configuration exhibits excellent performance, flexibility, cyclic stability, wearability and can be configured into multiple units and shapes, which far exceed that exhibited by the textile‐based FASC. Furthermore, the arbitrary (“AFN”) and sandwich (“FLOWER”) configurations Ti₃C₂ NS/1T WS₂ NS FASC can be assembled directly on a PCB cloth substrate, thereby offering good structural integrity coupled with ease of assembly into integrated circuits of different shapes. More specifically, a lightweight, flexible, and wearable bio‐monitoring system is developed by integrating force sensing device with interdigitated FASC, which can be used to monitor the physical status of human body during various activities. A potential application of this system in healthcare is successfully demonstrated and discussed.     

3D Structural Strengthening Urchin‐Like Cu(OH)2‐Based Symmetric Supercapacitors with Adjustable Capacitance

Developing advanced three‐dimensional (3D) structural supercapacitors with both high capacity and good mechanical strength remains challenging. Herein, a novel road is reported for fabricating 3D structural strengthening supercapacitors with adjustable capacitance based on urchin‐like Cu(OH)₂ lattice electrodes by bridging 3D printing technology with a facile electroless plating and electro‐oxidation method. As revealed by the results, the 3D‐printed octet‐truss lattice electrode features a high volumetric capacitance of 8.46 F cm^?3 at 5 mA cm^?3 and superior retention capacity of 68% at 1 A cm^?3. The assembled symmetric supercapacitor with a 70.2% capacitance retention after 5000 cycles possesses a 12.8 Wh kg^?1 energy density at a power density of 2110.2 W kg^?1. Additionally, the resulting 3D structural strengthening electrodes can achieve both high compressive strength and toughness of 30 MPa and 264.7 kJ m^?3, respectively, demonstrating high mechanical strength and excellent antideformation capacity. With the proposed strategy, the electrochemical and mechanical properties of these novel 3D structural strengthened supercapacitors can be easily tuned by a simple spatial framework design, fulfilling the increasing demand of highly customized power sources in the space‐constrained microelectronics and astronautic electronics industries.     

Strain Sensors with a High Sensitivity and a Wide Sensing Range Based on a Ti3C2Tx (MXene) Nanoparticle–Nanosheet Hybrid Network

A high sensitivity and large stretchability are desirable for strain sensors in wearable applications. However, these two performance indicators are contradictory, since the former requires a conspicuous structural change under a tiny strain, whereas the latter demands morphological integrity upon a large deformation. Developing strain sensors with both a high sensitivity (gauge factor (GF) > 100) and a broad strain range (>50%) is a considerable challenge. Herein, a unique Ti₃C₂T_x MXene nanoparticle–nanosheet hybrid network is constructed. The migration of nanoparticles leads to a large resistance variation while the wrapping of nanosheet bridges the detached nanoparticles to maintain the connectivity of the conductive pathways in a large strain region. The synergetic motion of nanoparticles and nanosheets endows the hybrid network with splendid electrical–mechanical performance, which is reflected in its high sensitivity (GF > 178.4) over the entire broad range (53%), the super low detection limit (0.025%), and a good cycling durability (over 5000 cycles). Such high performance endows the strain sensor with the capability for full‐range human motion detection.