提高霍尔传感器测量精度的方法研究

为了解决霍尔传感器精确测量问题,必须克服温度漂移和零位误差,而这些误差是半导体材料自身特性决定的。针对霍尔传感器固有特性,对误差产生的原因、机理及影响进行了系统分类和逐一分析,表明这些误差是其自身所不能克服的,只有对其影响实施有效遏制才能保证测试的精度。通过对各类误差特点的全面剖析,依据各自的成因和影响,制定了相应的应对措施,针对不同类型的误差类型,提出了具体的电路补偿方案。各种补偿手段简单实用,易于实施,有效控制了温度漂移和零位误差对测试结果的影响,保证了霍尔传感器在较高测试精度要求下仍然能够正常工作,提高了霍尔传感器的环境适应能力。     

一种硅微陀螺的动态校零方法

针对ADRXS150硅微陀螺的零位漂移特性,提出了一种硅微陀螺的校零方法,分析了校零原理及误差主要来源,并论述了采用FPGA实现校零和误差补偿的技术方案,给出了试验结果数据。该校零技术有效地补偿了ADRX150型硅微陀螺的零位重复性和稳定性,推广了ADRX150硅微陀螺的应用范围。     

红外零位走动量测量中的相机姿态自适应补偿

为提高红外零位走动量测量精度,针对测量过程中相机姿态变化误差引起的图像定位精度不高问题,提出了一种CCD相机姿态小角度变化自适应补偿方法。通过理论分析,推导出相机姿态解算公式,建立了CCD相机姿态解算数学模型,然后基于某型红外瞄具零位走动量测量系统,分别针对三种相机姿态,对瞄具分划线在参考坐标系中的坐标进行了对比实验。结果表明,测量精度优于0.01 mil,能减小相机倾斜对红外瞄具零位走动量测量带来的误差,为提高零位走动量测量精度提供了一种相机姿态自适应补偿的新方法。     

压力传感器零点温漂的两种补偿方法比较

压阻式压力传感器在实际应用中普遍存在零位偏离和零位温度漂移现象,这就降低了传感器的测量精度,因此需采取适当的补偿方法对这两种现象产生的误差进行修正,从而提高测量精度。文中分别通过电桥臂一串一并的硬件补偿方法及基于规范化多项式拟合算法的软件补偿方法同时实现平衡零位与补偿零位漂移。由模型推导分析及实验最终得出,通过规范化多项式计算方法拟合出的数据精度较高,补偿效果好于一串一并的硬件补偿方法。     

非球面非零位拼接测量的对准误差模型

为消除非零位拼接检测非球面中对准误差对拼接结果的影响,建立了基于对准误差修正的优化拼接模型;在非零位检测非球面对准误差模型的基础上,分析对准误差各误差分量的表现形式及影响规律,并建立了基于对准误差补偿的拼接检测非球面的数学模型,实现子孔径的高精度拼接合成。实验表明,该方法可以有效地提高拼接测量精度,经过对准误差校正的拼接测量结果的PV值精度可达0.03λ。     

磁环的磁场分布测试研究

探讨了环型结构磁器件的磁场分布与器件的结构形状的关系,分析了理想霍尔传感器探头和有位置误差的实际霍尔传感器探头在环型结构磁器件磁场分布测试中对测试精度的影响。     

基于反电势观测器和锁相环的无刷直流电机霍尔位置误差补偿方法研究

针对无刷直流电机采用低分辨率霍尔传感器进行转子位置估计存在角度误差问题,提出基于反电势观测器和锁相环的误差补偿方法。根据霍尔传感器测量电角度原理,分析电角度固有安装误差和算法估算误差的原因,提出了结合反电势观测器重构角度误差,采用锁相环进行相位计算,实现对电角度误差进行补偿。在48V无刷直流电机上进行实验,通过对补偿后电角度和相电流响应比较,证明新方法能够有效的改善霍尔传感器角度误差问题,改善电流响应,实现对转矩脉动的抑制,能获得高效控制性能。     

提高倾斜传感器精度方法的研究

介绍了石英挠性加速度计及倾斜传感器、水平仪的基本工作原理,分析了传统提高倾斜传感器精度的方法和措施及各自的局限性.根据倾斜传感器在0°和180°两个位置的输出特性提出了零位自标校技术,它可有效地减小零位误差,使倾斜传感器的精度在全温范围内达到20″.     

飞秒激光跟踪仪跟踪脱靶量零位标定方法

飞秒激光跟踪仪通过PSD探测脱靶量实现目标跟踪,脱靶量零位是跟踪激光指向反射靶球的中心时反射激光在PSD上输出的光斑位置,跟踪时以脱靶量零位作为基准计算目标脱靶量,因此如何准确标定脱靶量零位是仪器实现精确测量的前提。文中在分析角反射器特性的基础上,结合仪器自身特点提出了一种基于角反射器的飞秒激光跟踪仪跟踪脱靶量零位标定方法。分析了脱靶量零位误差对仪器指向精度的影响;建立了跟踪脱靶量标定误差模型;根据仪器结构设计和轴系几何误差对脱靶量零位标定方法进行了仿真,结果显示,其误差小于17.8 m,当目标距离仪器10 m时,仪器的指向误差小于1.1,该结果对系统误差补偿模型建立奠定了基础。最后,基于实际装置对仪器的脱靶量零位进行了标定,为后续仪器的动态测量提供了跟踪基准。     

侵彻引信压阻传感器的信号调理技术

侵彻过程产生的高频振动信号会引起压阻传感器测量机构的谐振效应,从而导致传感器信号的零位偏移,造成传感器信号失真,严重影响了侵彻引信计层起爆控制功能的炸点精确度。为了消除侵彻过程中传感器信号的零位漂移问题,本文针对压阻传感器的侵彻环境,设计了一种接口信号调理电路,该电路可以在实现传感器信号调理功能的同时,实时校正传感器的零位偏移,确保了后端电路的信号完整性与实时性。通过建模仿真与打靶数据半实物仿真的测试,该信号调理电路可以有效解决传感器信号的零位漂移问题。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.