Flexible optical waveguide film fabrications and optoelectronic devices integration for fully embedded board-level optical interconnects

This paper demonstrates a flexible optical waveguide film with integrated optoelectronic devices (vertical-cavity surface-emitting laser (VCSEL) and p-i-n photodiode arrays) for fully embedded board-level optical interconnects. The optical waveguide circuit with 45/spl deg/ micromirror couplers was fabricated on a thin flexible polymeric substrate by soft molding. The 45/spl deg/ couplers were fabricated by cutting the waveguide with a microtome blade. The waveguide core material was SU-8 photoresist, and the cladding was cycloolefin copolymer. A thin VCSEL and p-i-n photodiode array were directly integrated on the waveguide film. Measured propagation loss of a waveguide was 0.6 dB/cm at 850 nm.     

Propagation-mode-controlled fabrication of self-written waveguide in photosensitive polyimide for single-mode operation

We have developed a new fabrication method of single-mode self-written waveguide by controlling the propagation mode in an optical fiber. This method is very appropriate for repeatable fabrication of the single-mode self-written waveguide. Since a Gaussian-like near-field pattern is required for the fabrication of a tiny and uniform waveguide core, the propagation mode in a conventional optical communication fiber was controlled by coupling with an optical fiber having 3-/spl mu/m core, which shows a single-mode operation at visible wavelength region. Single-mode propagation at optical communication wavelength was confirmed for the fabricated self-written waveguide. The evaluated core diameter of the self-written waveguide was /spl sim/9.5 /spl mu/m.     

Coupling efficiencies in reflective self-organized lightwave network (R-SOLNET) simulated by the beam propagation method

The reflective self-organized lightwave network (R-SOLNET) enables the formation of self-aligned waveguides in the photorefractive (PR) material between misaligned optical devices by introducing a write beam. The incident write beam from one device and the reflected write beam from the second device induce self-focusing in the PR material and construct a coupling waveguide. A wavelength filter on the waveguide edge is used to facilitate the reflected beam. The beam propagation method reveals that R-SOLNET exhibits higher coupling efficiencies and better tolerances than the one-beam-writing SOLNET and the free-space coupling. The apparent usefulness of R-SOLNET is remarkable for gaps wider than 100 /spl mu/m in 8-/spl mu/m-wide waveguide circuits. For 240-/spl mu/m gap, coupling efficiency better than 50% can be achieved even when the lateral misalignment is as large as 4 /spl mu/m. The results indicate that R-SOLNET may be useful for vertical waveguide constructions of optical z-connections in three-dimensional intrachip optical interconnects and switching systems, as well as for self-aligned optical couplings with devices that cannot emit write beams such as vertical-cavity surface-emitting lasers, photodetectors, and electrooptic switches.     

High-efficiency 1.3 /spl mu/m InAsP-GaInP MQW electroabsorption waveguide modulators for microwave fiber-optic links

High-efficiency electroabsorption waveguide modulators have been designed and fabricated using strain-compensated InAsP-GaInP multiple quantum wells at 1.32-/spl mu/m wavelength. A typical 200-/spl mu/m-long modulator exhibits a fiber-to-fiber optical insertion loss of 9 dB and an optical saturation intensity larger than 10 mW. The 3-dB electrical bandwidth is in excess of 20 GHz with a 50-/spl Omega/ load termination. When used in an analog microwave fiber-optic link without amplification, a RF link efficiency as high as -38 dB is achieved at 10 mW input optical carrier power. These analog link characteristics are the first reported using MQW electroabsorption waveguide modulators at 1.32 /spl mu/m.     

Thermo-optical modulation at /spl lambda/=1.5 /spl mu/m in an /spl alpha/-SiC-/spl alpha/-Si-/spl alpha/-SiC planar guided-wave structure

A planar waveguide based on an amorphous silicon-amorphous silicon carbide heterostructure is proposed for the realization of passive and active optical components at the wavelengths /spl lambda/=1.3-1.5 /spl mu/m. The waveguide has been realized by low temperature plasma enhanced chemical vapor deposition and is compatible with the standard microelectronic technologies. Thermo-optical induced modulation at /spl lambda/=1.5 /spl mu/m is demonstrated in this waveguide. Numerical simulations predict that operation frequencies of about 3 MHz are possible. The measurements have also allowed the determination of the previously unknown thermo-optical coefficient of undoped amorphous silicon at this wavelength.     

Metal-defined polymeric variable optical attenuator

A variable optical attenuator (VOA) based on a metal-defined polymeric optical waveguide has been demonstrated for the first time. The metal film stressor deposited on top of the upper cladding layer not only produces the refractive index change within the core layer, but also acts as a thin-film heater allowing thermal tuning of the optical power within a metal-defined optical waveguide. Fabricated devices exhibit greater than 25 dB of optical attenuation with an applied electrical current of /spl sim/40 mA at 1550-nm wavelength. The switching speed of the VOA exhibits 800 /spl mu/s of rising and 720 /spl mu/s of falling time.     

High-speed silicon electrooptic Modulator design

An electrically driven Mach-Zehnder waveguide modulator based on high-index contrast silicon split-ridge waveguide technology and electronic carrier injection is proposed. The excellent optical and carrier confinement possible in high-index contrast waveguide devices, together with good thermal heat sinking and forward biased operation, enables high-speed modulation with small signal modulation bandwidths beyond 20 GHz, a V/sub /spl pi// times length figure of merit of V/sub /spl pi//L=0.5 V/spl middot/cm and an insertion loss of about 4 dB. The modulator can be fabricated in a complementary metal-oxide-semiconductor compatible way.     

5/spl times/9 integrated optical star coupler in silicon-on-insulator technology

We describe fabrication of the first optical star coupler in silicon-on-insulator (SOI) technology. The 5/spl times/9 coupler consists of two silicon rib waveguide arrays with a radiative slab waveguide region. The star geometry was analyzed and designed using the beam propagation method. The coupler exhibits low loss (average excess insertion loss /spl alpha//spl sim/1.3 dB) and good coupling uniformity (standard deviation /spl sigma//spl sim/1.4 dB) at /spl lambda/=1.55 /spl mu/m. It represents a key component for realization of photonic circuits in a silicon integrated circuit technology.     

III-nitride-based planar lightwave circuits for long wavelength optical communications

Planar lightwave circuits based on III-nitride wide-bandgap semiconductors are proposed and the feasibility of developing III-nitride-based novel photonic integrated circuits for applications in fiber-optical communications is discussed. III-nitrides have low attenuation in the near-infrared wavelength region because of their wide bandgaps, while as semiconductors their refractive indexes can be modulated by carrier injection. III-nitrides are also well known for their ability to operate at high temperatures, high power levels and in harsh environments. These characteristics make III-nitrides ideal candidates for tunable optical phased-array (PHASAR) devices for optical communications. We have characterized the optical properties of Al/sub x/Ga/sub 1-x/N epilayers in the 1550-nm wavelength region, including the refractive indexes and the impact of Al concentrations. Single-mode ridged optical waveguide devices using GaN-AlGaN heterostructures have been designed, fabricated and characterized for operation in the 1550-nm wavelength window. The birefringence of wurtzite GaN grown on sapphire substrate has been observed. Refractive indexes were found to be different for signal optical field perpendicular and parallel to the crystal c axis (n/sub /spl perp// /spl ne/ n/sub ///). More importantly, we found an approximately 10% change in the index difference /spl Delta/n=n/sub ///-n/sub /spl perp// with varying the waveguide orientation within the c plane, and a 60/spl deg/ periodicity was clearly observed. This is attributed to the hexagonal structure of the nitride materials. Various functional waveguide devices have been realized, including 2/spl times/2 directional couplers and eight-wavelength array-waveguide gratings. Theoretical predictions of temperature sensitivity and the efficiency of carrier-induced refractive change are provided.     

PCB-compatible optical interconnection using 45/spl deg/-ended connection rods and via-holed waveguides

In this paper, a new architecture for a chip-to-chip optical interconnection system is demonstrated that can be applied in a waveguide-embedded optical printed circuit board (PCB). The experiment used 45/spl deg/-ended optical connection rods as a medium to guide light paths perpendicularly between vertical-cavity surface-emitting lasers (VCSELs), or photodiodes (PDs) and a waveguide. A polymer film of multimode waveguides with cores of 100/spl times/65 /spl mu/m was sandwiched between conventional PCBs. Via holes were made with a diameter of about 140 /spl mu/m by CO/sub 2/-laser drilling through the PCB and the waveguide. Optical connection rods were made of a multimode silica fiber ribbon segment with a core diameter of 62.5 and 100 /spl mu/m. One end of the fiber segment was cut 45/spl deg/ and the other end 90/spl deg/ by a mechanical polishing method. These fiber rods were inserted into the via holes formed in the PCB, adjusting the insertion depth to locate the 45/spl deg/ end of rods near the waveguide cores. From this interconnection system, a total coupling efficiency of about -8 dB was achieved between VCSELs and PDs through connection rods and a 2.5 Gb/s /spl times/ 12-ch data link demonstrated through waveguides with a channel pitch of 250 /spl mu/m in the optical PCB.     

16 W continuous-wave output power from 100 /spl mu/m-aperture laser with quantum well asymmetric heterostructure

16 W continuous-wave room temperature front facet output optical power and 74% wallplug efficiency were attained in 100 /spl mu/m-aperture 1.06 /spl mu/m-emitting laser diodes with 2-3 mm cavity length. The lasers are based on AlGaAs/GaAs/InGaAs quantum well asymmetric heterostructures with 1.7 /spl mu/m-thick waveguide having 0.34 cm/sup -1/ internal optical loss.     

High efficiency 90/spl deg/ silica waveguide bend using an air hole photonic crystal region

We propose the hybrid integration of an air hole photonic crystal (PhC) structure with a high /spl Delta/ (0.75%) single-mode silica waveguide to achieve an ultracompact high efficiency 90/spl deg/ bend for transverse-magnetic polarized light. Diffraction from the periodic boundary between the PhC and silica waveguide regions is shown to seriously degrade the optical efficiency of the bend. A microgenetic algorithm (/spl mu/GA) combined with a two-dimensional finite-difference time-domain method is used to modify the PhC and its boundary layer to suppress this diffraction which in turn maximizes bend efficiency. The final optimized structure has a 99.4% bend efficiency at a wavelength of 1.55 /spl mu/m and occupies an area of only 27 /spl times/ 27 /spl mu/m.     

Fabrication and characteristics of GaP-AlGaP tapered waveguide semiconductor Raman amplifiers

We have fabricated GaP-AlGaP tapered waveguide semiconductor Raman amplifiers, and analyzed the effect of tapering in pulse-pumped high-gain operation. The finesse measurement and 80-ps pulse pumped Raman amplification experiment were performed. Although the tapering has caused additional optical loss, the highest gain of 23 dB has been obtained for a tapered waveguide with input facet of 6.0 /spl mu/m/sup 2/ and back facet of 2.9 /spl mu/m/sup 2/ at averaged input power of 170 mW (peak power 26 W). It is shown that the optical loss of the pump light is more severe than the linear optical loss of the signal light when the gain is higher than 20 dB.     

Design and performance of an erbium-doped silicon waveguide detector operating at 1.5 /spl mu/m

A new concept for an infrared waveguide detector based on silicon is introduced. It is fabricated using silicon-on-insulator material, and consists of an erbium-doped p-n junction located in the core of a silicon ridge waveguide. The detection scheme relies on the optical absorption of 1.5-/spl mu/m light by Er/sup 3+/ ions in the waveguide core, followed by electron-hole pair generation by the excited Er and subsequent carrier separation by the electric field of the p-n junction. By performing optical mode calculations and including realistic doping profiles, we show that an external quantum efficiency of 10/sup -3/ can be achieved in a 4-cm-long waveguide detector fabricated using standard silicon processing. It is found that the quantum efficiency of the detector is mainly limited by free carrier absorption in the waveguide core, and may be further enhanced by optimizing the electrical doping profiles. Preliminary photocurrent measurements on an erbium-doped Si waveguide detector at room temperature show a clear erbium related photocurrent at 1.5 /spl mu/m.     

Full characterization of packaged Er-Yb-codoped phosphate glass waveguides

We present a procedure for the characterization of packaged Er-Yb-codoped phosphate glass waveguides. The procedure is based on precise measurements of the output optical powers when the waveguide is diode-laser pumped at 980 nm. The dependence of these optical powers on the input pump power is then fitted to the results from a numerical model that describes in detail the propagation of the optical powers inside the waveguide. The best fit is obtained for the following parameters: the signal wavelength scattering losses are /spl alpha/(1534)=8.3/spl times/10/sup -2/ dB/cm, the Yb/sup 3+/ absorption and emission cross sections (/spl ap/980 nm) are 5.4/spl times/10/sup -25/ m/sup 2/ and 7.0/spl times/10/sup -25/ m/sup 2/, the Er/sup 3+/ absorption and emission cross sections (/spl ap/980 nm) are 1.6/spl times/10/sup -25/ m/sup 2/ and 1.2/spl times/10/sup -25/ m/sup 2/, the Yb/sup 3+/--Er/sup 3+/ energy-transfer coefficient is 1.8/spl times/10/sup -23/ m/sup 3//s and the cooperative-upconversion coefficient is 8/spl times/10/sup -25/ m/sup 3//s. An approximate method is introduced that allows the determination of the absorption and emission cross section distributions for the erbium /sup 4/I/sub 13/2//spl hArr//sup 4/I/sub 15/2/ transition from the amplified spontaneous emission power spectrum.     

An optimized InGaAsP/InP polarization converter employing asymmetric rib waveguides

In this paper, we report on the design of a compact (/spl ap/ 226 /spl mu/m) on-chip InGaAsP/InP polarization converter based on an asymmetric rib waveguide. Our theoretical analysis demonstrates that the device displays a conversion efficiency of < -25 dB (> 99.68% power conversion between orthogonal polarization) at 1550-nm wavelength with a nearly flat response over the optical C band. Regarding fabrication tolerances, we predict that the most sensitive design parameter is the waveguide width as the conversion efficiency drops to 10 dB for a deviation of /spl plusmn/ 0.1 /spl mu/m from the optimized value.     

Low-voltage high-speed travelling wave InGaAsP-InP phase modulator

A high-speed low-drive-voltage travelling wave electrodes InGaAsP-InP phase modulator operated at 1.55 /spl mu/m is demonstrated. The modulator is fabricated using a multiple quantum-well optical waveguide with an on chip integrated termination resistor. A small signal bandwidth of 35 GHz and a V/spl pi/ of 1.8 V has been demonstrated.     

Gain distribution measurement of an erbium-doped silica-based waveguide amplifier using a complex OLCR

We have measured the gain distributions of a 38-cm-long erbium-doped silica-based waveguide amplifier with different pump powers by using a complex optical low coherence reflectometer. The spatial resolution is /spl sim/5 mm and the noise level is /spl plusmn/1 dB. The measured distributions agree well with those derived from rate equations. We can estimate such amplifier parameters as the stimulated emission coefficient and the optimum waveguide length enabling us to achieve the maximum gain for any pump power.     

1.5-/spl mu/m InGaAsP-InP slab-coupled optical waveguide lasers

We report the demonstration of high-power semiconductor slab-coupled optical waveguide lasers (SCOWLs) operating at a wavelength of 1.5 /spl mu/m. The lasers operate with large (4/spl times/8 /spl mu/m diameter) fundamental mode and produce output power in excess of 800 mW. These structures have very low loss (/spl sim/0.5 cm/sup -1/) enabling centimeter-long devices for efficient heat removal. The large fundamental mode allows 55% butt-coupling efficiency to standard optical fiber (SMF-28). Comparisons are made between SCOWL structures having nominal 4- and 5-/spl mu/m-thick waveguides.     

Peripheral-coupled-waveguide MQW electroabsorption modulator for near transparency and high spurious free dynamic range RF fiber-optic link

Peripheral coupled waveguide (PCW) design has been deployed in InGaAsP multiple quantum-well (MQW) electroabsorption modulator (EAM) at 1.55-/spl mu/m wavelength. PCW enhances the optical saturation power and reduces the optical insertion loss and the equivalent V/sub /spl pi// simultaneously. A radio-frequency link using a 1.3-mm-long lumped-element PCW EAM has achieved experimentally a link gain of -3 dB, at 500 MHz and at input optical power of 80 mW. The corresponding two-tone multioctave spurious-free dynamic range (SFDR) at the same bias is measured at 118 dB/spl middot/Hz/sup 2/3/. The single-octave SFDR at the third-order null bias is 132 dB/spl middot/Hz/sup 4/5/.