30°C CW operation of 1.52 μm InGaAsP/AlGaAs vertical cavitylasers with in situ built-in lateral current confinement by localisedfusion

1.52 μm double fused InGaAsP/AlGaAs vertical cavity surface emitting lasers with in situ built-in lateral current confinement were fabricated using a localised wafer fusion process. A threshold current of 2.5 mA at 4 V was obtained for devices with a 10×10 μm² current aperture. These devices operate CW up to 30°C. The width of the dominant mode is less than 0.1 nm and the sidemode suppression ratio is 30 dB     

Stable single-mode operation of an 850-nm VCSEL with a higher ordermode absorber formed by shallow Zn diffusion

We report that an 850-nm vertical-cavity surface-emitting laser with a planar higher order mode absorber, formed by shallow Zn diffusion (<0.3 μm), operated at stable single-mode over the entire drive current range. A device with a 5×5 μm² absorber aperture and a 5×5 μm² oxide confined active region showed a ~0.8 mA threshold and a mode suppression ratio of 40 dB. The modeling indicates that the higher order modes will be suppressed strongly due to the much larger threshold gain, compared to that of the fundamental mode as long as the Zn diffusion depth outside the 5×5 μm² absorber aperture is over ~0.2 μm, which agrees well with the experimental results     

Beam magnification and the efficiency of optical trapping with790-nm AlGaAs laser diodes

The efficiency of dielectric particle confinement with 790 nm AlGaAs laser diode optical traps is investigated as a function of beam magnification and polarization state. When an anamorphic prism pair is used to correct for diode beam ellipticity, trapping efficiencies of nearly 0.37 are achieved with a magnification factor of 3×, laser powers of 4-18 mW, and an overfilled microscope objective entrance aperture. Results are compared for diodes having small (8 μm) and large (57 μm) astigmatisms, but comparable far-field divergence angles     

A study of epitaxially stacked tunnel-junction semiconductor lasers grown by MOCVD

Design parameters of epitaxially stacked tunnel-junction asymmetric separate-confinement laser heterostructures are chosen. Technological modes for fabrication of heterostructures of this kind by metal-organic chemical vapor deposition in the system of AlGaAs/GaAs/InGaAs solid solutions are found. It is demonstrated that high-efficiency GaAs:Si/GaAs:C tunnel stru ctures and asymmetric AlGaAs/GaAs/InGaAs laser heterostructures with low internal optical loss can be fabricated in a single technological process. Conditions are chosen in which a deep mesa can be formed for fabrication of mesa-stripe diode lasers based on epitaxially stacked tunnel-junction laser heterostructures. Mesa-stripe diode lasers with a 150 × 12-μm aperture have been manufactured on the basis of these structures. These samples have a threshold current density J _th of 96 A cm^-2, internal optical loss α_i of 0.82 cm^-1, and differential resistance R = 280 mΩ. Samples containing three laser structures have a slope efficiency of 3 W A^-1 and a maximum peak output power of 250 W in the pulsed operation mode (100 ns, 1 kHz).     

单片集成式反应离子刻蚀沟槽耦合腔AlGaAs/GaAs激光器

利用反应离子刻蚀(RIE)技术刻蚀激光器腔面,获得集成式沟槽耦合腔AlGaAs/GaAs激光器,在室温下实现CW稳定单模运转。单模半宽约为0.23nm,边模抑制比达19dB,模间距约2.5nm,单模运转双腔阈值电流为52mA。     

单量子阱GaAs/AlGaAs半导体激光器

本文介绍了用分子束外延法制作的梯度折射率分别限制式单量子阱GaAs/AlGaAs半导体激光器。该器件具有较低的阈值电流密度和单模运转特性,连续输出功率可达55mw。     

Optimum design conditions for AlGaAs window stripe lasers

The maximum available CW optical power from the AlGaAs window stripe laser was investigated both theoretically and experimentally. It is found that a thin third AlGaAs layer thickness and high-quality pulsed lasing characteristics, such as low threshold current density and high external differential quantum efficiency, which are obtained from refractive index guiding and short window-region length, are necessary to increase CW optical power. Stable fundamental lateral transverse mode CW operation was achieved at 55 mW (∼4.7 MW/cm²) in a window stripe (WS) laser with 3 μm stripewidth, which is about five times higher than the typical catastrophic optical damage (COD) threshold in conventional structure lasers. It was also found that a high-quality window stripe laser with 3 μm stripewidth operated at 30 mW (∼2.6 MW/cm²) for more than 3500 h.     

Room temperature continuous wave operation of 671 nm wavelengthGaInAsP/AlGaAs VSIS lasers

Room-temperature continuous-wave (CW) operation of a liquid-phase epitaxy (LPE)-grown GaInAsP/AlGaAs laser that uses a V-channel substrate inner stripe (VSIS) structure to obtain current confinement and transverse mode control is discussed. The threshold current and lasing wavelength were 77 mA and 671 nm, respectively, and the temperature dependence of the threshold current was such that the characteristic temperature was 75 K     

2W reliable operation of λ=735 nm GaAsP/AlGaAs laser diodes

Reliable operation of 735 nm laser diodes based on a tensile-strained GaAsP quantum well embedded in an AlGaAs large optical cavity structure is reported. The 100 μm stripe width laser diodes were aged at a record high output power of 2W for 2000 hours. The degradation rates were 3.6×10^-5 h^-1     

2W reliable operation in 50 μm-wide InGaAsP/InGaP/AlGaAs(λ=810 nm) SQW diode lasers with tensile-strained InGaP barriers

A new InGaAsP/InGaP/AlGaAs (λ=810 nm) laser with tensile-strained InGaP barriers, broad waveguide structure and current blocking region near the facet is reported. 2W continuous wave operation over 2000 h from a 50 μm aperture was achieved     

Semiconductor laser with tapered-rib adiabatic-following fiber coupler for expanded output-mode diameter

A new expanded-mode AlGaAs diode laser with reduced far-field divergence and 0.9 dB single-mode optical fiber coupling loss is demonstrated. This new laser achieves a two-dimensional (2-D) expansion of the fundamental output mode with a rib waveguide tapered in only one dimension. Stable fundamental-mode operation with a narrow, 5.7/spl deg/ by 7.40 full-width-at-half-maximum far-field divergence is observed well above lasing threshold. Tapered waveguide dimensions are compatible with conventional optical lithographic techniques, making this device suitable for mass production.     

Optical FM Signal Amplification by Injection Locked and Resonant Type Semiconductor Laser Amplifiers

Optical FM signal amplification by semiconductor lasers is studied by emphasizing their bandwidth characteristics. The laser is operated either in an injection-locked mode or in a resonant amplification mode by keeping the drive current above or just below its threshold. The bandwidths of both amplifiers are evaluated by the reduction in modulation sidebands and are compared with the bandwidths measured statically by scanning the frequency of incident CW wave. The radic G = 25 GHz gain bandwidth product is obtained for both operation modes using a double heterostructure AlGaAs semiconductor laser. The bandwidth obtained in the above procedure is in good agreement with theoretical results.     

Grating-coupled surface-emitting laser with a hyperbolic unstableresonator producing a stable focused output beam

A grating-coupled surface-emitting semiconductor laser has been integrated with a focusing diffractive beamforming element. A hyperbolic unstable resonator is used to introduce mode discrimination and suppress filamentation in a broad geometry, resulting in a 200-μm-wide coherent output. The light is focused 500 μm above the laser surface to a spot size of 5×7 μm. A remarkable beam stability is observed with very small spot size variation and beam-steering up to three times the threshold current under continuous operation     

Uniform wafer-bonded oxide-confined bottom-emitting 850-nm VCSELarrays on sapphire substrates

Uniform bottom-emitting 850-nm vertical-cavity surface-emitting laser (VCSEL) arrays on sapphire substrates have been demonstrated using wafer bonding technology to transfer the epitaxially-grown VCSEL structures from GaAs substrates onto sapphire substrates. The uniformity of the VCSEL arrays were improved by placing thin oxide aperture at the standing wave node to reduce scattering loss for small aperture devices. The averaged threshold current of a 5×5 VCSEL array is as low as 346 μA, while the averaged external quantum efficiency approaches 57%. The maximum wall-plug efficiency is 25% and the single-mode output power is more than 2 mW under continuous-wave current excitation at room temperature. We have also demonstrated a large (10×20) VCSEL array with variations of threshold current and external quantum efficiency less than 4% and 2%, respectively     

MOCVD-grown InGaAs/GaAs/AlGaAs laser structures with a broad-area contact

A metal-organic chemical vapor deposition (MOCVD) technique is developed for a diode laser heterostructure in a system of InGaAs/GaAs/AlGaAs solid solutions; the optimal sizes and the doping profile of the structure are determined to minimize the internal optical losses. Mesa-strip diode lasers with a threshold density of current J _th=150–200 A/cm², internal optical loss factor α_i=1.6–1.9 cm^?1, and an internal quantum yield η_i=85–95% were fabricated. In the continuous lasing mode of a diode laser with a 100-µm-wide aperture and a wavelength of 0.98 µm, the optical power output was as high as 6.5 W and was limited by the catastrophic optical degradation of mirrors. The radiation divergence in the plane normal to the p-n junction amounts to θ_⊥. The use of wide-gap waveguide layers, which deepens the potential electron well in the active region, is shown to reduce the temperature sensitivity of the InGaAs/GaAs/AlGaAs laser heterostructures in the temperature range from 0 to 70°C.     

16×16 optical-fiber crossbar switch operating at 0.85 μm

An optical-fiber crossbar switch has been constructed using fully integrated GaAs optoelectronic receivers, custom monolithic GaAs laser drivers, and an electrical 32×32 silicon crossbar switch. 470 Mb/s operation has been achieved with a bit error rate of less than 10^-12. The approach uses a monolithic GaAs optoelectronic integrated receiver to convert optical signals into electrical signals that are fed into an Si 32×32 electronic crossbar switch. The switch outputs are used to drive laser transmitters consisting of a custom monolithic GaAs IC laser driver and a 0.85 μm GaAs/AlGaAs laser. The system could be reconfigured in 1 μm, limited by the control logic, with the switch chip capable of reconfiguration in 35 ns. No errors are induced by reconfiguration     

Multi-oxide layer structure for single-mode operation invertical-cavity surface-emitting lasers

We propose a novel vertical-cavity surface emitting laser (VCSEL) with Al(Ga)As multi-oxide layer (MOX) structure for the purpose of enlarging window aperture maintaining single transverse mode operation. We have fabricated an InGaAs-GaAs VCSEL with the proposed MOX structure formed on GaAs (311)B substrate. We have performed a numerical simulation to investigate single-mode behavior of the proposed structure and showed a possibility of single-mode VCSEL's with a large active area. We have fabricated an 11-μm current aperture 960-nm wavelength VCSEL with this MOX structure. The threshold current and voltage were 1.0 mA and 2.0 V, respectively, which are comparable to those of conventional oxide VCSELs. In 8-μm aperture, single-mode operation was maintained with a driving current up to four times the threshold     

An AlGaAs/GaAs short-cavity laser and its monolithic integration using microcleaved facets (MCF) process

This paper describes the microcleaved facets (MCF) process developed for AlGaAs/GaAs laser fabrication which can avoid the previous substrate cleavage and therefore be applicable to preparing both discrete short-cavity lasers and optoelectronic integrated circuits (OEIC's). An AlGaAs/GaAs double heterostructure ridge-waveguide laser with an extremely short cavity length, namely 20 μm, was first realized by this process. A threshold current as low as 20 mA and a single longitudinal mode lasing were achieved. The usefulness of this process for integrating a laser and a monitoring photodiode on a GaAs substrate is also demonstrated.     

780 nm band TM-mode laser operation of GaAsP/AlGaAs tensile-strained quantum-well lasers

Tensile-strained active layer GaAs/AlGaAs separate-confinement-heterostructure quantum-well lasers are reported. These lasers oscillate in the 780 nm band in the TM mode by TM mode gain enhancement in the tensile-strained active layer. The threshold current density of single-quantum-well laser diodes increases rapidly with heatsink temperature. However, triple-quantum-well laser diodes with a cavity length of 485-110 mu m oscillated with a threshold current density of 1.4 and 3.0 kA/cm/sup 2/.<>     

InGaAs/GaAs/AlGaAs lasers emitting at a wavelength of 1190 nm grown by MOCVD epitaxy on GaAs substrate

InGaAs/GaAs/AlGaAs laser heterostructures are grown by MOCVD epitaxy on GaAs substrates. Mesastripe laser diodes with an aperture of 100 μm emitting at a wavelength of 1190 nm are fabricated. It is shown that, in these lasers, the active region is relaxed, which manifests itself in the spread of attainable maximal power for various lasers obtained from the same heterostructure. The maximal emission power in a CW mode of lasing for such lasers was 5.5 W per mirror.