基于激光共焦扫描显微镜方法的磨损表面三维数字化描述

表面形貌的精确描述在许多领域诸如材料、生物医学、摩擦学和机器状态监测等领域变得越来越重要。开发了一种基于激光共焦显微镜和图像处理技术的研究磨损表面及表面参数的新方法。首先用B io-rad Rad iance 2000激光共焦显微镜方法获得精确的三维表面形貌,然后用计算机辅助图像分析技术自动计算出表面特征参数。应用示例表明本文所研究的方法是可靠的,能对工程表面的表面粗糙度特征进行精确描述。     

Fast three-dimensional nanoscale metrology in dual-beam FIB–SEM instrumentation

A quantitative surface reconstruction technique has been developed for the geometric characterization of three-dimensional structures by using a combined focused ion beam—scanning electron microscopy (FIB–SEM) instrument. A regular pattern of lines is milled at normal incidence on the sample to be characterized and an image is acquired at a large tilt angle. By analyzing the pattern under the tilted view, a quantitative estimation of surface heights is obtained. The technique has been applied to a test sample and nanoscale resolution has been achieved. The reported results are validated by a comparison with atomic force microscopy measurements.     

Electron backscattered diffraction characterization technique for analysis of a Ti2AlNb intermetallic alloy

This investigation was conducted to ascertain the benefits of electropolishing after mechanical polishing for electron backscattered diffraction of a Ti₂AlNb intermetallic Ti−21Al−29Nb (at.%) alloy containing the orthorhombic (O) and body-centered-cubic (BCC) phases. Electropolishing was performed at −40 °C in 6% H₂SO₄ methanol solution. Atomic force microscopy was used to measure the surface topography in attempt to correlate nano-scale surface roughness with electron backscatter diffraction pattern quality. The results suggest that mechanically polishing with colloidal silica (SiO₂) or alumina followed by electropolishing is a sufficient surface preparatory technique for producing quality electron backscattered diffraction patterns for O + BCC microstructures. However, poor pattern quality results after mechanically polishing without electropolishing. High-quality orientation maps for O-dominated O + BCC microstructures were only possible through mechanical polishing followed by electropolishing. The data also suggest that surface roughness, on the order of 50 nm, has less effect on pattern quality than subsurface deformation. Overall, removing the near-surface damage was more critical than reduction of topography.     

Apertureless scanning near-field optical microscopy for ion exchange channel waveguide characterization

We report the characterization of an integrated Ag⁺/Na⁺ ion exchange waveguide realized in a silicate glass substrate using apertureless scanning near‐field optical microscopy. Our experimental set‐up is based on the combination of a commercial atomic force microscope with an optical confocal detection system. Thanks to this system, the topography and evanescent optical field at the waveguide top surface are mapped simultaneously. Also, the process of apertureless scanning near‐field optical microscopy image formation is analysed. In particular, fringe patterns appearing in the image reveal the intrinsic interferometric nature of the collected signal, due to interference between the field scattered by the tip end and background fields related to guide losses. We give a quantitative interpretation of these fringes. Evanescent intensity mapping on the sample surface allowed us to extract physical waveguide parameters. In particular, it shows an unambiguous multimode beat along the waveguide propagation axis. Furthermore, we show that analysis of this intensity profile reveals back‐reflection effects from the waveguide exit facet. The resulting standing waves pattern allows us to evaluate the eigenmode propagation constants.     

Surface roughness and texture analysis in microscale

The capacity of various instruments in roughness measurements and analysis is compared. Review of various models of roughness is made and the models of contact mechanics are presented, when taking account the nanometer scale roughness and relating phenomena of adhesion and surface forces. The concept of multi-level models of roughness and contact area is presented. Analysis of surface topography as a spatial pattern is given, when using the approaches of image recognition theory operating with the 3D digital images processing. Qualitatively the spatial structure is often characterized in terms of texture features such as random, linear, wavy etc., and some national standards introduce spatial structure of machined surfaces. However, texture characteristics are not adequately investigated. AFM images of different surfaces were used as initial data and multi-dimensional scaling technique was used for the data analysis. The study has shown that there are at least four types surface textures on nanoscale level. The correlation was found between texture types and reasons of their formation.     

A New Method of Non-Contact Measurement for Microtopography in Semiconductor Wafer Implementing a New Optical Probe Based on the Precision Defocus Measurement

In this paper, a new method of non-contact measurement has been developed for 3D topography for a semiconductor wafer, implementing a new optical probe based on precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. A distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. A precision calibration technique has been applied, giving about 10 nm resolution and 72 nm four-sigma uncertainty. In order to quantitise the micro pattern on the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and the excellent 3D measurement capability.     

Three-dimensional surface characterization for orthopaedic joint prostheses

This study attempts to investigate a range of 'better' methods for the characterization of the three-dimensional (3D) surface topography of orthopaedic joint prostheses. In this paper, a new characterization tool for the comprehensive identification and evaluation of functional features of these surface topographies is presented. For identification, the surface topography is investigated in a space-scale space, by employing wavelet analysis. The roughness, waviness and form involved in surface topography are consequently separated and recovered respectively. The multiscalar topographical features are identified and captured. The errors caused as a consequence of three-dimensional measurement methods can be reduced. After identification, the three-dimensional surface assessment techniques previously reported by Stout and co-workers are used for the quantitative evaluation of various surface roughness features of the orthopaedic joint prostheses. Moreover, the functional properties, such as bearing area, material volume and void volume which are significantly effected by large peaks, pits and scratches are studied and the location of isolated peaks, pits and scratches in the different scales is also clearly characterized. In this work, measurement of the femoral heads and acetabular cups is carried out to demonstrate the applicability of the characterization technique for the three-dimensional surface topography of orthopaedic joint prostheses.     

三维表面微观形貌的表征趋势

近几年计算能力,计算速度、图像分析、数据处理技术的不断提高,极大地推进了三维表面微观形貌测量仪的实用化和商品化。对最近文献中出现的三维分析方法和表征参数,如基准表面、图形（像）表征、等进行了综述,提出了三维表征技术的任务和发展方向。     

Scale-invariant analysis of wear particle morphology—a preliminary study

The importance of wear particle characterization is continuously growing, as the need for prediction and monitoring of wear increases. Accurate analysis of wear particles can, however, be limited by problems associated with particle characterization, especially of the wear particles' surface morphology. Since the shape and surface topography of wear particles often exhibit a fractal nature, fractal (scale-invariant) methods are, therefore, used in their characterization. However, the methods used to date ignore the fact that all fractal objects can be described by a small set of mathematical rules; although finding those rules which describe a particular fractal image is a difficult problem. No general solution exists to date and this paper attempts to redress this problem. A new analysis method, ‘scale-invariant analysis’, which is based on a partitioned iterated function system (PIFS), is proposed for the characterization of wear particle morphology. PIFS is a collection of contractive affine transformations. Each affine transformation transforms one part of a wear particle image onto another part of the same image. PIFSs were constructed for both computer generated and SEM images of wear particles. Results obtained in this study clearly demonstrate that the morphology of wear particles can effectively be characterized using the PIFS method.     

蓝宝石单晶精密磨削表面形貌的分形行为研究

如何合理有效地评价光学晶体微结构表面质量,是目前光学元件精密制造与应用领域面临的重要问题。基于分形理论,采用三维和二维盒计数方法对蓝宝石单晶磨削表面形貌进行了分析,结果表明磨削表面的三维分形维数Ds与表面粗糙度呈反比关系,而且三维分形维数越高表面纹理越精细,三维分形维数越低表面缺陷越多。磨削表面截面轮廓的二维分形维数DL分布规律可以反映材料去除方式的变化。当二维分形维数DL沿磨削方向呈强对称分布时,该磨削表面为延性域去除;若呈弱对称性或不规则分布,则该磨削表面为脆性域去除。研究证实了分形方法不仅可用于综合表征蓝宝石磨削表面形貌,还可用于揭示蓝宝石磨削表面的材料去除机理。     

Three-dimensional surface topography segmentation through clustering

In digital image analysis, segmentation is the partitioning of the image into multiple regions according to a given criterion. This work investigates the adaptation of segmentation techniques originally developed for digital images to the partitioning of the three-dimensional micro and nano topography of engineered surfaces. In particular, a segmentation technique is introduced for partitioning a surface into regions characterized by homogeneous local texture properties. Local surface texture properties are captured through roughness parameters evaluated over surface patches centered about each surface point. Roughness parameters are chosen depending on texture properties to be highlighted, and collected into feature vectors that are then subjected to clustering. Several issues are addressed, ranging from the choice of appropriate clustering techniques to the design of proper feature vectors and similarity metrics for capturing relevant aspects of three-dimensional surface topography and achieving a meaningful partitioning. The advantages in terms of improved morphologic, structural and tribologic analysis capabilities are highlighted and discussed through the application of the proposed technique to example real-life industrial applications, mainly concerned with the discrimination of localized surface modifications either generated on purpose and in controlled conditions (such as indentations and scratches produced during surface testing) or generated by random interaction of the surface with the environment (scratches, bumps and other types of marking due to accidental damage or use-related wear phenomena).     

High resolution SEM characterization of nano‐precipitates in ODS steels

The performance of the present‐day scanning electron microscopy (SEM) extends far beyond delivering electronic images of the surface topography. Oxide dispersion strengthened (ODS) steel is on of the most promising materials for the future nuclear fusion reactor because of its good radiation resistance, and higher operation temperature up to 750°C. The microstructure of ODS should not exceed tens of nm, therefore there is a strong need in a fast and reliable technique for their characterization. In this work, the results of low‐kV SEM characterization of nanoprecipitates formed in the ODS matrix are presented. Application of highly sensitive photo‐diode BSE detector in SEM imaging allowed for the registration of single nm‐sized precipitates in the vicinity of the ODS alloys. The composition of the precipitates has been confirmed by TEM‐EDS.     

Modeling and simulation of grinding surface topography considering wheel vibration

Grinding is an important means of realizing precision and ultra-precision machining. Vibration caused by an unbalanced grinding wheel in grinding process has a significant impact on the quality of workpiece surface. However, the effect of wheel surface topography and/or the relative vibration between grinding wheel and workpiece are not considered in most researches. Taking the relative vibration between grinding wheel and workpiece into account, alongside the abrasive grain trajectory equation, a new analysis and simulation model for surface topography of the grinding process is established. The model for the topography of the grinding wheel surface is first studied, and subsequently, a new simulation model for surface topography of the grinding process is proposed. Case studies are performed at the end, and the influence of grinding wheel vibration amplitude, wheel grit number, as well as grinding parameters on the surface waviness and roughness is discussed. The simulation results could be used to optimize the actual grinding process to improve the ground surface quality or predict the surface topography by given grinding parameters.     

Caustic imaging of gallium droplets using mirror electron microscopy

We discuss a new interpretation of mirror electron microscopy (MEM) images, whereby electric field distortions caused by surface topography and/or potential variations are sufficiently large to create caustics in the image contrast. Using a ray-based trajectory method, we consider how a family of rays overlaps to create caustics in the vicinity of the imaging plane of the magnetic objective lens. Such image caustics contain useful information on the surface topography and/or potential, and can be directly related to surface features. Specifically we show how a through-focus series of MEM images can be used to extract the contact angle of a Ga droplet on a GaAs (001) surface.     

Magnetic domain imaging with a scanning near-field optical microscope using a modified Sagnac interferometer

We report on the combination of a scanning near-field optical microscope and a modified Sagnac interferometer for magnetic-domain imaging in the reflection mode. The Sagnac interferometer is used for detection of the magneto-optical Kerr effect. Since the interferometer is inherently insensitive to polarization changes caused by topography effects, magnetic-domain imaging is not limited to samples with flat surfaces. In this way, it is possible to image magnetic bits written on the tracks of a magneto-optical disc that has a rather pronounced surface profile.     

Simulation of textured surface topography during a low wear process

Wear experiments were conducted on a block-on ring tester. The stationary block made from cast iron of 50 HRC hardness was ground. The rotated ground ring was made from 42CrMo4 steel of 32 HRC hardness. The rings were modified by a burnishing technique in order to obtain surfaces with oil pockets. Oil pockets of spherical and of drop shape were tested. The correlation and regression analysis of parameters of textured surface topography was carried out. Two sets of surfaces were analysed: after machining and after “zero-wear”. As the result of analysis, minimum number of parameters describing this surface kind was obtained. A simple truncation model of the ring surface change was used. Worn surface topographies, after a low wear, were also modeled in a different way. An idea of the proposed method of surface topography modeling is imposition of random surface of Gaussian ordinate distribution on the base surface (after burnishing). The modeled surfaces were correctly matched to the measured surfaces in 90% of all analysed cases. Basing on the simulation, the local wear values during a low wear process were calculated and compared with experimental ones.