基于MC34063控制的压电陶瓷泵电源研制

针对应用于输出电压较小(12～18 V)的燃料电池系统中压电陶瓷泵的驱动问题,在建立压电陶瓷泵的数学模型的基础上提出并研发了一种新的压电陶瓷泵驱动电源.该电源采用MC34063控制芯片控制Boost变换器升压和全桥变换器功率放大,给压电陶瓷泵提供±150 V方波电压,并使陶瓷泵工作在很宽的频率范围(10～100 Hz).对一压电陶瓷泵的特性实验的研究表明此新型驱动电源输出精度高,响应速度较快,驱动能力强.     

一种MEMS开关驱动电路的设计

静电驱动MEMS开关可靠工作需要较高的驱动电压,大多数射频前端系统很难直接提供,因此需要一种实现电压转换和控制的专用芯片,以满足MEMS开关的实用化需要。本文基于200V SOI CMOS工艺设计的高升压倍数MEMS开关驱动电路,采用低击穿电压的Cockcroft-Walton电荷泵结构,结合特有的Trench工艺使电路的性能大大提高。仿真结果显示驱动电路在5V电源电压、0.2pF电容和1GΩ电阻并联负载下,输出电压达到82.7V,满足大多数MEMS开关对高驱动电压的需要。     

一种高精度宽电源范围集成电压基准源设计

在SOC及智能功率集成电路中,对基准电压源的电源电压范围及输出驱动电流都提出了更高的要求.基于csmc 40VBCD工艺设计并实现了一种输出精度高、驱动能力强、电源电压范围宽的5V集成基准电压源电路.设计中通过HV_PMOS实现电源电压和基准核心电路工作电压的隔离,拓宽了电源电压范围,采用双重电流负反馈保证了基准电压的高精度输出.通过Cadence软件平台下的Spectre仿真器对电路的各项电参数进行仿真验证,得到电源电压范围9～30V,在-20～125℃范围内温度系数5.688×10-6/℃,启动时间6.369μs,负载电流0～40mA,输出为5V的集成电压基准源电路.     

压电陶瓷驱动器电源温度控制系统研究

性能良好的驱动电源是实现压电陶瓷驱动器高精度定位的关键.基于集成高压运算放大器的直流放大式压电陶瓷驱动电源,具有集成度高,体积小,可靠性好等突出优点;但运放的发热问题,是影响其应用和发展的一个重要因素.对一种基于PA93功率运算放大器的压电陶瓷驱动电源,进行了实验性的研究,采用半导体制冷片和ALT-PT100贴片式温度传感器构成温度闭环控制系统,通过改变制冷片外加电源的极性和电压大小,将集成高压运算放大器的工作温度控制在一定范围内,可有效降低压电陶瓷驱动电源输出电压的纹波到7.8 mV,提高了电源输出电压的精度.找到了温度对电源输出电压精度影响的规律,为如何进一步提高压电陶瓷驱动电源输出电压的精度,实现压电陶瓷驱动器高精度的定位控制,提供了科学的方法和依据.     

基于低电压驱动MEMS的可调光衰减器的设计与性能分析

研制了一种低成本、小体积的静电驱动微电机系统（MEMS）可调光衰减器（VOA）。该器件采用了静电驱动微反射镜和光纤光准直器，它具有良好的光学性能，克服了传统VOA的缺点。它的驱动电压范围是0～8V，工作范围是0～25dB。给出了器件的衰减量和驱动电压的关系、光学性能的分析和试验结果。     

基于STM32的多功能LED驱动电源

目前大功率LED照明灯具的驱动电源主要使用集成电路作为电源驱动芯片,其扩展性能差、功能少。针对这些问题,作者基于STM32开发了一种多功能LED驱动电源,通过编程可以实现无级调光与自动温控散热两个扩展功能。测试结果表明：在额定电压为30V、额定电流为3.3A的负载下,输入电压从90V~264V变化时,驱动电源输出电压的波动范围为±1.5V,而输出电流波动范围为±0.11A,恒流特性较好,驱动电源的功率因数均值在0.95以上。     

一种高压压电陶瓷驱动电源的设计

为了满足压电陶瓷在振动平台微位移测试系统中输出更大范围的微位移及保持更高精度的条件,设计了一种高压大电流、带有直流偏置可连续调频调幅的正弦波输出压电陶瓷驱动电源。该文介绍了该驱动电源的设计方案、关键电路设计、控制系统软件设计及实验测试。该驱动电源以全桥逆变电路、隔离直流-直流抬压电路为核心,采用电压、电流双闭环比例-积分控制正弦脉宽调制(SPWM)波的基波来调节输出电压。通过搭建实验平台,验证了当压电陶瓷电容为5μF时,该驱动电源能实现在5 Hz～1 kHz频响内电压100倍增益放大,输出0～1 000 V的动态正弦电压,最大输出功率达到7 kW。结果表明,设计的压电陶瓷驱动电源具有输出电压高,输出功率大,频率响应快,且减小了电源整机体积和质量。     

宽输入共模范围电压比较器的设计

当输入信号的共模值超过或者接近电源电压时,传统的电压比较器就会出现不足,因此有必要设计新的比较器来实现对高共模信号的检测.采用了共栅差分输入级,极大地增加了输入共模信号的范围.基于此输入级设计了两个电压比较器,一个在锂电池充电电路中实现了对电池和电源电压的监控,另一个响应速度快.CSMC 0.6 μm CMOS工艺的仿真结果表明,前者能简便的实现输入失调和迟滞控制功能,静态电流仅为1.2 μA;后者在单电源5 V下输入共模范围是1.3～15 V,在10 mV的过驱动电压下,延时为11 ns,静态工作电流为91 μA.     

一种高稳定性压电驱动电源设计

作为电压控制型器件,压电陶瓷驱动电源的稳定性受负载电容量变化的影响严重。针对负载等效电容在驱动电压变化下的动态特性,首次提出了一种基于容性负载的压电驱动电源。该电源采用RC前置滤波与电容超前反馈相结合,提高了系统稳定性与驱动电源的鲁棒性。分析结果表明,额定负载为1.5μF的驱动电源优化后在0～3μF内具有良好的动态性能,且输出电压精度达0.7 mV。     

复合静电驱动结构致动的内旋转微镜

报道了以体硅表面硅混合微加工工艺制作在SOI衬底上的一种新型复合静电驱动结构致动内旋转微镜,其中复合静电驱动结构由一个平板驱动器和一个垂直梳齿驱动器构成.实验表明,该新型驱动结构不仅能使微镜实现大范围连续旋转,而且能使微镜实现吸合效应致自发性90°旋转.微镜的连续旋转范围扩大到约46°,同时引发吸合效应的拐点电压也增大.对于具有1和0.5μm厚扭转弹性梁的微镜,实测拐点电压分别为390～410V和140～160V.当该微镜用作光开关时,测得光插入损耗为～1.98dB.     

静电驱动微机电数模转换器的结构设计

由于静电驱动具有结构简单、响应时间短和功耗小等优点,在微执行器中得到了广泛的应用。随着应用范围的不断扩大,实际使用中对微执行器的精度和稳定性提出了越来越高的性能要求,使得传统的模拟电压驱动方式逐渐向数字电压驱动转移以满足这些要求。基于传统的静电驱动方式,提出了一种全新的纵向数字电压驱动方式,以期得到高精度、高稳定性的驱动源。根据这一思想,在传统的悬臂梁结构的基础上,采用条状电极,实现了微机电数模转换器(MEMDAC)的结构设计,并借助ANSYS软件完成了结构分析与模拟,证明了设计的可行性。     

Simulation of micromotor based on SOI structure

Problems of simulating an electrostatic micromotor based on the SOI structure with the use of application programs are discussed. Results of calculating the construction of the electrostatic micromotor over a wide frequency range are presented. It is shown that, when increasing the direct voltage applied to control electrodes, the useful capacity increases and the parasitic capacity decreases; at the same time, the front of the amplitude-frequency characteristic is transferred to the low-frequency region.     

Performance of a high-voltage DC amplifier for electrostatic levitation applications

High-voltage amplifiers as a means of amplifying the low-output voltage signals of the feedback controllers to the suspension voltages typically in the kilovolts range are often required for electrostatic force generation in electrostatic levitation. This paper proposes a high-voltage do amplifier including an amplitude modulator, a power amplifier, a step-up transformer, a pair of peak detectors, and a voltage feedback channel to stabilize the amplifier outputs in an effort to provide high suspension voltage and fast dynamic response. Since the various carrier frequencies have virtually no effect on the power consumption of the do amplifier by filtering out the high-frequency carrier components with peak detectors while keeping the input signal unaffected, satisfactory dynamic performance can be achieved by choosing a sufficiently high carrier frequency. The operating principle of the dc amplifier is analyzed, followed by an experimental performance evaluation and discussion for electrostatic levitation applications. The experimental results demonstrate the superiority of the high-voltage do amplifier over classical ac amplifiers in terms of dynamic response, force-voltage coefficient, voltage ripple, power consumption, and long-time stability using a carrier frequency of 30 kHz and the closed-loop control scheme.     

GYJ-300型高压静电分选设备的研究

GYJ-300型高压静电分选设备是电子废弃物回收处理过程中的关键设备之一。主要是根据混合物料带静电能力的不同,将一定粒度的混合物料分离为导体、非导体和中间产品。该设备主要有辊筒及加热部分、高压电源及电极部分、粒子轨道调节装置等组成。     

Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor

Large electrostatic forces on a micromechanical capacitor plate can be obtained if the capacitor is tuned by using an inductor. Such an LC circuit can be used to control the position of a micromechanical capacitor plate over a large dynamic range. The pull-in phenomenon of capacitor plates does not occur because the LC drive is intrinsically stable. The LC drive can be implemented either by sweeping the frequency or the amplitude of the driving AC voltage. In both cases relatively good linearity can be obtained. It is found that the LC drive can tolerate large parasitic capacitances. Measurements done on a dual capacitive acceleration sensor verify the calculated results. A drive AC voltage rms amplitude of 10% of the DC pull-in voltage deflected the moving plate by about 60% of the nominal gap, limited only by a mechanical stopper.     

基于DSP的静电除尘三相电源调压系统研制

研制了一种基于DSP的静电除尘电源调压控制系统。该控制系统以TMS320F2812为控制核心,能够自动跟踪电场的变化,有效调节中间环节交流电压。实验结果表明,该控制系统能够较好地控制静电除尘电源,大幅度提高除尘效率。     

微机械可调谐滤波器的研制

利用 Ga As/Al Ga As分布反馈 Bragg反射镜在 Ga As衬底上制作了一个微机械的调谐滤波器 .该器件在 7V调谐电压下调谐范围达28nm     

微机械可调谐滤波器的研制

利用GaAs/AlGaAs分布反馈Bragg反射镜在GaAs衬底上制作了一个微机械的调谐滤波器.该器件在7V调谐电压下调谐范围达28nm.     

Electrostatic linear actuator with a long stroke rolling spring guide

In contrast with diverse design concepts of actuators, we have developed an electrostatic linear actuator integrated with a long stroke rolling spring guide. The rolling spring guide realizes guiding function through rolling movements of two parallel preloaded belt-shaped springs. The electrostatic actuating force is generated by applying electrical fields to the structure of spring guide. Besides the driving voltage, the geometric size and the preloaded span of the spring guide are the main influential parameters of electrostatic actuating force and actuating displacement. With adequate adjustment of the preloaded span, this electrostatic actuator can generate not only a large actuating displacement in /spl mu/m range, but also a fine positioning displacement in /spl mu/m range. The finite element analysis (FEA) and the geometric analysis are applied to analyze spring stress and to derive the shape equation of the spring guide. Furthermore, a theoretical model for our electrostatic actuating principle is deduced on the basis of the shape equation. In addition to the theoretical analyses, the performance of the electrostatic actuator is experimentally tested and studied.     

System integration of high voltage electrostatic MEMS actuators

A system integration for High Voltage (HV) electrostatic MicroElectroMechanical Systems (MEMS) actuators is introduced on a micro-Printed Circuit Board. The system includes a programmable microcontroller, a programmable DC/DC converter, a multi output HV interface and electrostatic MEMS actuators. The system produces high output voltages (10–300 V) and can control a large variety of MEMS capacitive loads (1 to 50 pF) by combining diverse semiconductor technologies. This system proves that technologies, such as low voltage CMOS of different processes, high voltage DMOS and MEMS, can interact, communicate and even be integrated as a System In Package (SIP), providing significant size and cost reductions. The system was programmed to control electrostatic MEMS actuator. The DC/DC converter was made from components of different technologies and two addressable high voltage CMOS interfaces were fabricated with DALSA's 0.8 μm High Voltage process. A prototype of the global system has been built and tested.