高精度电子塞规仪的设计与测试

提出了用平行片簧机构来实现位移传感器与测量头的位移传递原理，介绍了利用此原理研制的用于高精度内径测量的电子塞规仪，并对该仪器进行了误差分析和精度测试。     

JW型激光测微仪在动态测量应用中的研究

本文介绍了JW系列新型激光测微仪的结构、原理、特点,还介绍了利用该仪器在音箱质量检测、记忆合金伸缩特性等科研中对微振动及动态位移进行非接触测量的研究情况,并对测量结果进行了分析.     

JW型激光测微仪的动态测量应用中的研究

本文介绍ＪＷ系列新型激光激光测微仪的结构，原理，特点，还介绍了利用该仪器在音箱质量检测，记忆合金伸缩特性等科研中对微振动及动态位移进行非接触测量的研究情况并对测量结果进行了分析。     

激光干涉接触式轴承表面轮廓综合测量

介绍了一种可用于测量滚动轴承曲面形貌的表面轮廓综合测量仪，在测量中应使杠杆处于平衡位置，以减小测量力；用衍射光栅干涉位移传感器作为位移测量系统代替传统的电感位移传感器；z向工作台采用粗、细两级驱动定位，利用步进电机驱动斜面导轨进行粗级定位以扩大量程，压电陶瓷做微位移驱动实现精密定位以提高测量精度。论述了该仪器的整体结构、测量原理、工作台的定位控制以及衍射光栅干涉信号的处理。     

激光多普勒技术离面位移测量的研究

本文介绍了利用多普勒效应进行离面位移检测的技术,提出测量光路,利用光栅差拍实现多普勒信号的有效分离,具有信号强、信噪比高的特点。实验表明该方法能可靠地用于物体离面位移的测量。     

钢球表面粗糙度的白光干涉非接触测量法

介绍了一种利用垂直位移台来实现钢球表面粗糙度高精度测量的垂直扫描白光干涉仪。该仪器是在6JA型干涉显微镜基础上加以改造,采用白光干涉,通过检测干涉信号的光强峰值,实现高精度的钢球表面三维形貌测量。通过试验验证该系统可对精度等级为3级的钢球进行精确的表面形貌测量。     

超声振动切削加工振幅的简易测量

超声变幅杆振幅位移是超声振动加工中表征功率超声系统输出声功率大小的重要性能指标,常用测量方法或者测量精度差,或者仪器昂贵、不易操作。本文介绍了超声振动数控加工振幅的两种简易测量方法,该方法具有仪器简单、操作简便和便于在加工现场测量、结果相对准确等优点,对于超声变幅杆的振幅测量具有实用性和可行性。     

基于模板匹配算法的压电微位移器位移量原位测量技术

针对压电微位移器的位移量高精度测量需要,基于模板匹配算法提出了一种新颖的位移量原位测量方法。利用改进型的Twyman-Green干涉系统对压电微位移器的电压——位移特性曲线进行原位测量,根据模板匹配算法实时计算干涉条纹的移动量,进而得到对应的压电微位移量,并对相关实验测量结果进行了分析与验证。结果表明,该测量技术具有较高的测量效率以及较好的随机噪声抑制能力,其测量精度和分辨率均可达到纳米量级。该方法属于非接触式测量,具有较高的可靠性,在微位移的高精度原位自动测量中具有较好的实用性。     

6通道后向散射仪

6通道后向散射仪是用于海洋光学调查的仪器,可用于测量海水的后向散射系数.本文详细介绍了该仪器的配置、技术参数和使用方法.初步分析了利用该仪器于2005-06在渤海海域进行调查获得的数据,结果显示该仪器可适用于我国近海二类水体的测量.这对于我国近岸水体的光学调查及研究具有极其重要的意义.     

光栅横向位移遥测传感器

介绍了一种光栅横向位移遥测传感器,被测位移和光束方向垂直。该系统利用激光光栅的多普勒效应进行测量,采用差路结构。理论计算和实验表明,此系统测量范围大、信号质量好、分辨率和测量精度高,并具有很大的景深范围,可应用于具体生产环境中的位移遥测。     

基于单频激光干涉仪的精密工件台定位系统设计

激光干涉仪是以稳频氦氖激光波长为已知长度,利用迈克耳逊干涉系统测量位移的工具。近年来,激光干涉仪一直作为精密测量工具为精密加工机和工件台进行定位校准工作。本文介绍了一种基于单频激光干涉仪的精密工件台测量定位系统。本定位系统采用单频激光干涉仪作为精密测量工具,采用高档8位单片机作为数据处理微控单元,并基于VC＋＋语言编写相关控制软件。实际应用证明本系统定位速度快,精度高,理论上最小分辨率为58．6pm。     

一种基于迈克尔逊干涉仪测量透明液体折射率的方法

提出了一种基于迈克尔逊干涉仪测量透明液体折射率的方法,以拓展迈克尔逊干涉仪在教学及研究中的用途,即利用比色皿承载待测液体,将其置于迈克尔逊干涉仪光路中,通过空比色皿与承载待测液体比色皿引起干涉条纹变化的对比,巧妙地测定液体的折射率。该方法操作简单、实用、低成本,在旋转角度不大的情况下对几种透明液体的测量都有较高的精度,具有一定实用价值。     

数字式球面干涉仪的设计与功能

本文介绍在SPG-Ⅰ和SPG-Ⅱ型数字干涉仪的基础上最近又研制成功CQG-Ⅰ数字式车间球面干涉仪的情况。菲索型的球面共心干涉系统,用立式承座支撑样板与工件,可以快速在监视器上显示光圈数;也可以在微机上显示局部误差的PV值与Rms值,测量精度为λ/20。仪器口径为φ60mm,F数为10～0.74,仪器的标准镜头引用了非球面及仪器采用双工作台,从而,使仪器的质量及功能均有提高与扩大。     

Shape measurements of mirror surfaces with a lateral-shearing interferometer during machine running

A common path lateral-shearing interferometer with a minimum number of optical components has been developed. Because the interferometer is little affected by mechanical vibrations and air turbulence, it can be mounted on an ultraprecision lathe and can be used to measure the shapes of workpieces. A plane parallel glass plate is used to shear the wavefront under test in the interferometer. To analyze the interference fringes obtained by the interferometer precisely, a fringe-scanning method using a slight tilt of the glass plate is used. Zone plates that are computer-generated holograms are used to measure spherical and aspherical surfaces with the interferometer. A spherical and a parabolic concave mirror were measured with the interferometer. The spherical mirror was also measured by a Fizeau interferometer to compare the error with that measured by the lateral-shearing interferometer. The experimental results agreed well with those measured by the lateral-shearing interferometer.     

Investigation and compensation of the nonlinearity of heterodyne interferometers

The nonlinearity of heterodyne interferometers is mainly influenced by the nonorthogonality and ellipticity of the linearly polarized partial beams of the laser and by the limited extinction capability of the polarizing beam splitters. The phase errors at the interferometer output can be detected by measuring the phase difference between the two orthogonal directions in the output beam. This arrangement can be used to check an interferometer setup for causes of nonlinearity and to eliminate them by adjustment, replacement, etc. The arithmetical mean value of the phases of the two orthogonal output signals is linear, except for a residual error. These detection and compensation capabilities of the proposed phase measurement arrangement are demonstrated by experimental investigations.     

Quasi-quadrature interferometer for plasma density radial profile measurements

A cw Mach Zehnder multichannel interferometer has been developed to measure time-dependent fractional fringe shifts with an accuracy of one-fortieth fringe. The design is quasi-quadrature in that known phase shifts, introduced in the reference beam, are time multiplexed with the normal reference beam. This technique requires only one detector per interferometer channel as compared to two detectors for most quadrature designs. The quadrature information makes the sense of density changes unambiguous, it automatically calibrates the instrument during the plasma event, and it makes fringe shift measurements virtually independent of fringe contrast fluctuations caused by plasma refractive and/or absorptive effects. The interferometer optical design is novel in that the electro-optic crystal used to introduce the 90 degrees phase shifts is located in the common 2-mm-diam HeNe entrance beam to the interferometer, by exploiting polarization techniques, rather than in the expanded 1-2-cm reference beam itself. This arrangement greatly reduces the size, cost, and high-voltage requirements for the phase modulating crystal.     

Influence of intensity loss in the cavity of a folded Fabry-Perot interferometer on interferometric signals

Fabry-Perot interferometer is often used for the micro-displacement, because of its common optical path structure being insensitive to the environmental disturbances. Recently, the folded Fabry-Perot interferometer has been investigated for displacement measurements in large ranges. The advantages of a folded Fabry-Perot interferometer are insensitive to the tilt angle and higher optical resolution. But the design of the optical cavity has become more and more complicated. For this reason, the intensity loss in the cavity will be an important parameter for the distribution of the interferometric intensity. To obtain a more accurate result of such interferometer utilized for displacement measurements, the intensity loss of the cavity in the fabricated folded Fabry-Perot interferometer and the modified equation of the folded Fabry-Perot interferometer will be described. According to the theoretical and experimental results, the presented model is available for the analysis of displacement measurements by a folded Fabry-Perot interferometer.     

线性位移台直线度高精密外差干涉测量装置

直线度测量中往往存在有限的测量范围、精度低和阿贝误差等问题。本文提出了一种高精密直线度外差干涉测量装置,该装置由Koester棱镜、角锥棱镜、1/4波片、楔面棱镜和楔面反射镜构成。楔面棱镜为直线度传感元件,角隅棱镜和楔面反射镜是测量信号的回光元件。双频激光信号进入直线度干涉仪后组成几何空间对称四光路测量信号。四路测量光走过几乎完全相同的路径有效地提高了干涉仪的稳定性,并且使空程误差最小化。使用楔角为1°的楔角棱镜和2π/512细分的相位计,直线度测量分辨力为17.71nm。该方法不需要与行程同长的大反射参考镜,但同样能实现高分辨率,理论和实验证明空间对称测量结构避免了由俯仰,偏转和滚转角引起的阿贝误差的串扰,而且光学元件少,结构简单,方便易用,结果可以直接溯源到米的定义。     

用全息透镜作分束器的莫尔全息球面干涉仪

本文提出一种用全息透镜作光束分束器,以莫尔条纹技术消除仪器综合误差的泰曼型全息球面干涉仪。     

半导体双波长透射式红外干涉仪的研制及应用

采用635nm波长半导体可见光激光和10.5μm波长半导体红外激光作为干涉光源,设计了635nm和10.5μm双波段共光路透射式红外干涉仪,实现了可见光波段干涉测试与红外光波段干涉测试共光路,且双光路共用可见光对准。双波段共用机械式相移系统,并采用635nm测试光分段驻点标定10.5μm测试时相移器的长行程误差。研制的双波长红外干涉仪系统的红外测试精度达到PV优于0.05λ,RMS优于0.02λ,系统重复性RMS优于0.001λ。采用该干涉仪测试口径为400mm×400mm,离轴量为800mm的离轴非球面,得到边缘最大偏差值为21.9μm,能够实现大口径离轴非球面从粗磨到精磨高精度加工面形的全过程干涉测试。