纸基PVA无芯片RFID湿度传感器

传统湿度传感器制造工艺复杂、需有线连接信号,对此,文中提出一种纸基无芯片射频识别(Radio Frequency Identification, RFID)湿度传感器。为提升传感器谐振特性,选择非对称开口环内部分布式加载金属碎片作为传感器结构,聚乙烯醇(PVA)作为湿敏材料,使用遗传算法和HFSS射频仿真软件来设计并优化传感器结构。以喷墨打印技术制作传感器样品,采用滴涂法在传感器表面分别制备了5%、10%、15%三种质量浓度比的PVA薄膜。湿敏特性仿真及测试结果一致表明：PVA与纸基底协同作用可显著提高传感器灵敏度。随PVA浓度增加灵敏度增加,15%PVA传感器灵敏度最高,高湿灵敏度达到12.22 MHz/%RH,但随PVA浓度增加恢复特性变差,5%PVA湿度传感器具有良好的恢复特性,恢复度达83.87%。通过长期多次实验验证了PVA纸基湿度传感器具有良好的温度稳定性与中长期稳定性。与同类研究成果对比,文中设计在感湿范围及灵敏度方面有优势且制造工艺更简单,为低成本湿度传感器的大规模使用提供了可能。     

基于氧化石墨烯-聚乙烯醇薄膜的光纤光栅湿度传感器

为提高光纤布拉格光栅(fiber Bragg grating,FBG)对环境湿度的敏感性,本文提出将氧化石墨烯-聚乙烯醇溶液涂覆在FBG上进行湿度增敏。首先对传感器的湿度响应进行了理论研究,然后使用提拉镀膜法制作了传感器样品,实验讨论了湿敏溶液的混合比例和薄膜厚度对湿度灵敏度的影响。进一步的实验研究结果表明:当氧化石墨烯和聚乙烯醇溶液的混合比例为9∶1,涂覆 厚度为89 μm时,在相对湿度 50%—60%RH(relative humidity)的 湿度范围内,传感器的湿度灵敏度为2.3 pm/%RH;在60%—70%RH的 湿度范围内,传感器的湿度灵敏度为7.7 pm/%RH;在70%—80% RH的湿度范围内,湿度灵敏度为47.2 pm/%RH。传感器的温度灵敏度为13.2 pm/℃,湿度测量的不稳定性为0.064 7% RH,响应和 恢复时间分别为0.84 s和11.46 s。该传感器制作简便、湿度灵敏度高、稳定性好,具有较大的应用潜力。     

SBA-15薄膜修饰QCM湿度传感器的三维有限元建模与仿真

本文对基于SBA-15的QCM湿度传感器进行了三维有限元精确建模与数值仿真,分析了SBA-15湿敏薄膜材料对传感器的振动模态、中心频率、电学阻抗及Q值等性能参数的影响,为纳米湿敏薄膜的成膜工艺及新型QCM湿度传感器的优化设计与制造提供了重要的理论参考依据。     

湿度传感器封装的研究进展

湿敏芯片的关键元件是湿度传感器，为了延长湿敏元件的使用寿命，提高湿度传感器的性能，必须对湿敏芯片进行封装。本文主要介绍了湿度传感器封装的研究现状和发展趋势，详细描述了TO、SIP、SOP、LCC等几种湿度传感器封装形式的结构、工艺以及特点，指出了各种封装形式的优缺点。并且对湿度传感器封装的发展趋势作了一定的探讨，指出了SOP，LCC等封装方法将是未来湿度传感器的主流封装方法。     

双极化无芯片RFID金属裂纹传感器

为检测金属结构中裂纹的宽度及方向,提高检测的灵敏度和可靠性,设计了一种基于频率信号的双极化无芯片RFID传感器。在2.2~6.2 GHz频率范围内进行四频带分段设计,传感器为圆盘及双模圆盘多微带谐振器结构,利用HFSS软件对传感器进行结构优化与性能仿真。结果表明,传感器在x极化和y极化方向激励下,分别产生两组四位谐振。金属裂纹的方向根据谐振频率偏移方向判断,两种极化方式共产生八位谐振偏移信息供判定,可实现对0°、45°、90°、135°方向裂纹的准确识别;对各方向上裂纹宽度与传感器谐振频率偏移量进行拟合,两者间呈现良好的线性关系,且通过极化复用大幅提高了传感器的灵敏度,分辨率可达亚毫米级,在各个方向上灵敏度分别为40.71 MHz/0.1 mm、11.28 MHz/0.1 mm、26.04 MHz/0.1 mm、15.19 MHz/0.1 mm。制作了传感器实物并进行实验测试。设计的RFID传感器具有无源、低成本、灵敏度高的特点,在结构健康监测中具有应用潜力。     

新型声表面波湿度传感器

为解决目前常用电容式湿度传感器存在的误差较大和一致性较差的问题,提出了采用常压化学气相淀积(APCVD)法制备的多孔SiO2膜作为吸湿材料的乐甫波声表面波(SAW)传感器感知湿度。基片采用42.75°旋转Y轴切割石英材料,乐甫波传播方向为[0°,132.75°,90°],SiO2湿敏膜厚度为0.5μm。实验结果表明:此湿度传感器灵敏度约为62 kHz/RH%,在相对湿度为50%时,最大湿滞约3%。测得的湿敏特性和迟滞特性表明,乐甫波声表面波湿度传感器线性度较好,实验证实该湿度传感器具有很好的应用前景。     

基于RGO-PEO复合薄膜的QCM湿度传感器研究

通过气喷工艺在石英晶体微天平(QCM)上制备了基于还原氧化石墨烯(RGO)与聚氧化乙烯(PEO)两种材料的复合湿敏薄膜,对环境湿度进行检测。所得纯PEO薄膜及RGO-PEO复合薄膜的表面形貌以及化学特性分别通过扫描电子显微镜(SEM)以及紫外-可见光谱进行表征。与基于纯PEO薄膜的湿度传感器相比,基于RGO-PEO复合湿敏薄膜的湿度传感器的动态响应大大提高,其灵敏度从16.3Hz/%RH提升到34.7Hz/%RH。此外,基于复合薄膜的湿度传感器拥有更快的响应/恢复时间,达到传感器吸附/脱附时总频移的63.2%所用时间分别为3s和4 s,而纯PEO薄膜为10 s和12 s;湿滞为1.21%RH,且有较好的长期稳定性。这项研究揭示了基于RGO-PEO复合薄膜的QCM湿度传感器在常温下检测环境湿度的发展潜力。     

基于聚酰亚胺材料的FBG湿度传感特性研究

提出了一种基于光纤布拉格光栅(FBG)侧面镀膜感湿的新型全光纤湿度计,选取具有高湿敏特性和线膨胀系数(9.432×10-5%RH)的改性聚酰亚胺(PI)作为湿敏材料。通过在FBG侧面涂覆5种不同厚度的PI薄膜,检测厚度对传感器灵敏度和响应时间的影响,实验结果与理论计算符合很好,通过测试,PI薄膜厚为21μm时,传感器的湿度灵敏度为2.67×10-6/%RH,响应时间小于8s,有很好的实际应用前景。     

基于并联法布里-珀罗干涉仪游标效应的增敏光纤湿度传感器

为了提高光纤湿度传感器的灵敏度,提出了一种基于并联光纤法布里-珀罗干涉仪(Fabry-Perot interferometers, FPIs)游标效应的增敏型湿度传感器,并进行了实验验证。该传感器由两个基于内径4μm石英毛细管的光纤FPI通过2×2耦合器并联组成,其中一个FPI作为传感FPI,其末端镀有湿敏特性的琼脂糖薄膜,另一个作为参考FPI。论文分析了器件的湿度传感工作原理,实验结果论证了该理论分析的正确性。实验显示,并联FPI游标效应器件在40%RH—60%RH范围内其灵敏度高达0.843 9 nm/%RH,较之单一FPI的灵敏度提高了9倍,是并联FPI反射谱直接波谷追踪波长解调灵敏度的44倍。增加FPI末端湿敏膜厚度,其灵敏度进一步提高至1.12 nm/%RH。该传感器制备简单、尺寸小、灵敏度高,在湿度测试方面具有潜在的应用价值。     

石英谐振器不同谐振频率的力敏特性研究

圆形晶片厚度切变石英谐振器是常用的力敏谐振器。它有固定的设计谐波次数和谐振频率。文章介绍了以设计频率为三次谐波、５ＭＨｚ的ＡＴ－切型谐振器为力敏元件的力传感器在不同电路中分别振动在基频、３次谐波、５次谐波和７次谐波四个谐振频率，并对其力敏特性进行了实验研究。分析了用提高谐振频率的方法提高力灵敏度的可行性和局限性。根据石英谐振器振动在不同谐振频率时力灵敏度的温度特性，找到了温度变化时由力灵敏度温度系数造成的测量误差的消除方法，分析比较了这种方法和选取特定施力方位角消除上述误差的方法之间的差别和适用范围，并找到了在一定温度范围内可同时测量力（压力）和温度的石英传感器的设计原理。     

Metamaterial-inspired passive chipless radio-frequency identification and wireless sensing

The presented paper demonstrates how metamaterials with their unique properties and structures derived from metamaterials can offer solutions to overcome technical limitations of passive and chipless wireless sensor and RFID concepts. Basically, the metamaterial approach allows for miniaturization, higher sensitivity, and an extreme geometric flexibility. Miniaturization is certainly important for both, sensing and identification, while higher sensitivity is primarily applicable to sensors. The geometric flexibility is at first important for sensing since it allows for novel sensor concepts. But at least concerning buildup technology, also RFID concepts can benefit from this advantage. The presented examples of metamaterial-inspired passive chipless RFID and wireless sensing can be assigned to the following three categories: metamaterial resonator approaches, composite right/left-handed lines, and frequency-selective surfaces. In this paper, these different concepts are evaluated and discussed with regard to the metamaterial properties. Furthermore, criteria and figures of merit are given, which allow for a fair comparison of passive, chipless concepts and beyond. Finally, these criteria are applied to the presented sensor and identification concepts.     

高分子电容型湿度传感器研制

随着工业的快速发展,对温度检测和控制日益严格,温度传感器已无法跟上人们的需求,通过优化湿度传感器的表面结构和对感湿材料微孔设计提高了感湿特性,增强感湿材料的感湿特性,并对湿度传感器测量电路进行改进,提高微小电容测量,设计湿度测试系统。通过实验验证了改进后的湿度传感器测量效果更优越。     

复合钒钛酸干凝胶薄膜的湿敏特性研究

采用sol-gel法制备了复合钒钛酸干凝胶(H2V10Ti2O30-y·nH2O)薄膜,并对其湿敏特性进行了研究。结果表明:该薄膜为层状结构。用此薄膜制备的湿敏元件,在RH为11%～95%的范围内,感湿特性曲线线性好,其响应、恢复时间分别为5s和20s,湿滞为RH2%,感湿温度系数为RH0.45%/℃,并具有良好的稳定性。H2V10Ti2O30-y·nH2O干凝胶薄膜湿敏元件的灵敏度和湿滞均优于复合钒酸(H2V12O31-y·nH2O)干凝胶薄膜湿敏元件。     

单芯光子晶体光纤边孔SPR折射率传感特性研究

为了实现高灵敏的表面等离子体共振（SPR）折射率传感,提出一种基于大纤芯的单芯光子晶体光纤SPR传感结构,采用全矢量有限元方法对其传感特性进行了数值仿真和分析。结果表明,该结构具有比较宽的折射率传感范围（1.36~1.55）,同时具有较高的传感灵敏度,平均传感灵敏度达12139nm/RIU;在折射率1.36~1.42区域,线性传感灵敏度为5646.4nm/RIU,线性度为0.9317;而在折射率1.42~1.57区域,传感灵敏度达到15326.8nm/RIU,线性度为0.98738,传感特性出现明显的线性分段情况。该研究结果为实现高灵敏的光子晶体光纤SPR传感器提供了重要的理论依据。     

酞菁钴微纳米线的制备及其湿敏特性研究

在预处理衬底上采用物理气相输运法制备了长度100μm以上的CoPc微纳米线,并采用滴注法构筑了基于CoPc微纳米线的电阻式湿度传感器.研究了传感器的湿敏特性及其响应机理.结果显示基于CoPc微纳米线的电阻式湿度传感器具有良好的重复稳定性、低检测下限(33％RH)和快速响应-恢复时间(分别为5 s和2 s).研究表明有机...     

MXene Functionalized,Highly Breathable and Sensitive Pressure Sensors with Multi-Layered Porous Structure

Breathable, flexible, and highly sensitive pressure sensors have drawn increasing attention due to their potential in wearable electronics for body-motion monitoring, human-machine interfaces, etc. However, current pressure sensors are usually assembled with polymer substrates or encapsulation layers, thus causing discomfort during wearing (i.e., low air/vapor permeability, mechanical mismatch) and restricting their applications. A breathable and flexible pressure sensor is reported with nonwoven fabrics as both the electrode (printed with MXene interdigitated electrode) and sensing (coated with MXene/silver nanowires) layers via a scalable screen-printing approach. Benefiting from the multi-layered porous structure, the sensor demonstrates good air permeability with high sensitivity (770.86–1434.89 kPa⁻¹), a wide sensing range (0–100 kPa), fast response/recovery time (70/81 ms), and low detection limit (≈1 Pa). Particularly, this sensor can detect full-scale human motion (i.e., small-scale pulse beating and large-scale walking/running) with high sensitivity, excellent cycling stability, and puncture resistance. Additionally, the sensing layer of the pressure sensor also displays superior sensitivity to humidity changes, which is verified by successfully monitoring human breathing and spoken words while wearing a sensor-embedded mask. Given the outstanding features, this breathable sensor shows promise in the wearable electronic field for body health monitoring, sports activity detection, and disease diagnosis.     

Perovskite‐Induced Ultrasensitive and Highly Stable Humidity Sensor Systems Prepared by Aerosol Deposition at Room Temperature

A new capacitive‐type humidity sensor is proposed using novel materials and fabrication process for practical applications in sensitive environments and cost‐effective functional devices that require ultrasensing performances. Metal halide perovskites (CsPbBr₃ and CsPb₂Br₅) combined with diverse ceramics (Al₂O₃, TiO₂, and BaTiO₃) are selected as sensing materials for the first time, and nanocomposite powders are deposited by aerosol deposition (AD) process. A state‐of‐the‐art CsPb₂Br₅/BaTiO₃ nanocomposite humidity sensor prepared by AD process exhibits a significant increase in humidity sensing compared with CsPbBr₃/Al₂O₃ and CsPbBr₃/TiO₂ sensors. An outstanding humidity sensitivity (21426 pF RH%^?1) with superior linearity (0.991), fast response/recovery time (5 s), low hysteresis of 1.7%, and excellent stability in a wide range of relative humidity is obtained owing to a highly porous structure, effective charge separation, and water‐resistant characteristics of CsPb₂Br₅. Notably, this unprecedented result is obtained via a simple one‐step AD process within a few minutes at room temperature without any auxiliary treatment. The synergetic combination of AD technique and perovskite‐based nanocomposite can be potentially applied toward the development of multifunctional sensing devices.     

Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films

A novel capacitance-type relative humidity (RH) sensor based on multi-wall carbon nanotubc/SiO2 (MWCNTs/SiO2) composite film is reported.Details of the fabrication process,possible sensing mechanism and sensing characteristics,such as linearity and sensitivity,are described.The capacitance of the MWCNTs/SiO2 composite film shows typical concentration percolation behavior with increasing MWCNT loading.At loadings below the percolation threshold (1.842wt％),the sensor capacitance increases obviously with increasing MWCNTs.The water condensed in the MWCNTs/SiO2 layer can lower the percolation threshold and increase the sensor capacitance.The sensor with MWCNT concentration of 1 wt％ has the best properties.The sensor has a humidity sensitivity of about 673 pF/％ RH and a linearity correlation of 0.98428.The response time of the sensor to RH is about 40 s and the recovery time is about 2 s.