An experimental study of edge radius effect on cutting single crystal silicon

According to the hypothesis of ductile machining, brittle materials undergo a transition from brittle to ductile mode once a critical undeformed chip thickness is reached. Below this threshold, the energy required to propagate cracks is believed to be larger than the energy required for plastic deformation, so that plastic deformation is the predominant mechanism of material removal in machining these materials in this mode. An experimental study is conducted using diamond cutting for machining single crystal silicon. Analysis of the machined surfaces under a scanning electron microscope (SEM) and an atomic force microscope (AFM) identifies the brittle region and the ductile region. The study shows that the effect of the cutting edge radius possesses a critical importance in the cutting operation. Experimental results of taper cutting show a substantial difference in surface topography with diamond cutting tools of 0° rake angle and an extreme negative rake angle. Cutting with a diamond cutting tool of 0° rake angle could be in a ductile mode if the undeformed chip thickness is less than a critical value, while a ductile mode cutting using the latter tool could not be found in various undeformed chip thicknesses.     

Influence of anisotropy of nickel-based single crystal superalloy in atomic and close-to-atomic scale cutting

Nickel-based single crystal superalloy is widely used in the field of aerospace and nuclear reaction equipment due to its good properties. Ultra-precision machining technology is an important means to ensure the surface quality of parts. However, the anisotropy of materials has great influence on the evolution of surface and subsurface defects and the removal of materials in the process of machining. In this paper, The MD (molecular dynamics) modeling and simulation verification of cutting anisotropic nickel-based single crystal superalloy workpiece with silicon nitride tool is carried out by using the mixed potential function simulation. Through cutting simulation and visualization, the types, number, deformation area and dislocation evolution of the machined surface defects and inside of the workpiece defect of nickel-based single crystal superalloy with different crystal orientations are analyzed. The evolutionary mechanism of the machined surface defects and the law of material removal are discussed. The research content provides a theoretical basis for parameter optimization and improvement of machining quality in the atomic and close-to-atomic scale (ACS) cutting process, and technical support for efficient and precise machining process of the nickel-based superalloy.     

Damaged layer characteristics in micro-endmilling of copper using an ultrahigh-speed air spindle

This paper presents an investigation on the characteristics of damaged layer in micro-machining by using the ultrahigh-speed air spindle. The damaged layer in metal cutting is derived from plastic deformation and transformation of metal structure. In this study, micro-cutting force, surface roughness, and plastic deformation layer according to the variation of machining conditions were investigated by experiments. The damaged layer was measured using optical microscope for the samples prepared by metallographic techniques. Its scale was dependent on cutting process parameters, especially feed per tooth. According to experimental results, it was verified that the thickness of damaged layer was increased with increasing of feed per tooth and cutting depth, also thickness of damaged layer was reduced in down-milling compared to upmilling during micro-endmilling operation.     

Numerical study the flow stress in the machining process

In the machining process, the workpiece is under severe plastic deformation with large strain, high strain rate, and temperature. It is necessary to know the flow stress of workpiece material in such condition to better understand the mechanism of chip formation, tool wear and damage, etc. In this study, a Split Hopkinson Pressure Bar (SHPB) with synchronically assembled heating system was employed to study the flow stress similar to the deformation condition in the machining process. A phenomenological constitutive model was proposed by the regression analysis of the experimental results. Furthermore, orthogonal metal cutting processes were carried out by the finite element method (FEM). The cutting force predicted by the FEM showed good agreement with the experimental results, which confirmed that the proposed constitutive model can give an accurate estimate of the flow stress in the machining process.     

A study of the effect of tool cutting edge radius on ductile cutting of silicon wafers

Ductile mode cutting of silicon wafers can be achieved under certain cutting conditions and tool geometry. An experimental investigation of the critical undeformed chip thickness in relation to the tool cutting edge radius for the brittle-ductile transition of chip formation in cutting of silicon wafers is presented in this paper. Experimental tests for cutting of silicon wafers using diamond tools of different cutting edge radii for a range of undeformed chip thickness are conducted on an ultra-precision lathe. Both ductile and brittle mode of chip formation processes are observed in the cutting tests. The results indicate that ductile cutting of silicon can be achieved at certain values of the undeformed chip thickness, which depends on the tool cutting edge radius. It is found that in cutting of silicon wafers with a certain tool cutting edge radius there is a critical value of undeformed chip thickness beyond which the chip formation changes from ductile mode to brittle mode. The ductile-brittle transition of chip formation varies with the tool cutting edge radius. Within the range of cutting conditions in the present study, it has also been found that the larger the cutting edge radius, the larger the critical undeformed chip thickness for the ductile-brittle transition in the chip formation.     

基于Bauschinger效应的逆向精切削变形机理

基于工件材料Bauschinger效应,从已加工表面变质层的形成入手,建立了逆向精切削法的切削变形模型。利用金相显微试验技术对比研究了正、逆向精车削条件下工件材料晶粒流动情况,用位错理论对可逆向精切削的变形机理进行了论述。研究表明,可逆向切削时,可以采用首切时正向切削,复切(半精加工或精加工)时逆向切削的工艺路线,这样既可提高加工效率和加工精度,又可减小工件表面变质层。     

KDP晶体超精密切削各向异性的理论研究

KDP晶体作为优质的非线性光学材料被广泛应用于“惯性约束核聚变”固体激光器中,且被赋予相当严格的制造精度。本文利用剪切变形比能最大及单晶材料不同晶面晶向剪切弹性模量不同的原理,结合超精密切削模型,从理论上计算出不同晶面、不同晶向及不同刀具前角超精密切削条件下的剪切角,得到其在不同切削条件下的变化规律,并由此解释了切削加工中由KDP晶体各向异性所导致的工件表面粗糙度的各向异性。     

Mesoplasticity approach to studies of the cutting mechanism in ultra-precision machining

There have been various theoretical attempts by researchers worldwide to link up different scales of plasticity studies from the nano-, micro- and macro-scale of observation, based on molecular dynamics, crystal plasticity and continuum mechanics. Very few attempts, however, have been reported in ultra-precision machining studies. A mesoplasticity approach advocated by Lee and Yang is adopted by the authors and is successfully applied to studies of the micro-cutting mechanisms in ultra-precision machining. Traditionally, the shear angle in metal cutting, as well as the cutting force variation, can only be determined from cutting tests. In the pioneering work of the authors, the use of mesoplasticity theory enables prediction of the fluctuation of the shear angle and micro-cutting force, shear band formation, chip morphology in diamond turning and size effect in nano-indentation. These findings are verified by experiments. The mesoplasticity formulation opens up a new direction of studies to enable how the plastic behaviour of materials and their constitutive representations in deformation processing, such as machining can be predicted, assessed and deduced from the basic properties of the materials measurable at the microscale.     

脆性晶体的超精密加工

用单刃金刚石车削试验研究超精密加工脆性晶体材料的机理。通过讨论加工参数和材料特性来研究脆塑性转换机理。重点研究了加工单晶材料时晶向对临界切深、微切削力和表面粗糙度的影响；还探讨了加工多晶材料时晶界台阶的形成。超精密加工各种脆性晶体都可得到各向同性的纳米级表面粗糙度的光学表面。     

金刚石飞切单晶硅的切削力模型及试验研究

首先对金刚石飞切单晶硅的加工特点进行分析,建立了未变形切屑厚度模型及材料去除类型的理论判定条件;然后推导出了适合金刚石飞切加工特点和单晶硅材料特性的数学预测模型;最后进行了切削力正交试验,并通过切削力试验值与模型计算值对比验证了切削力模型的合理性。同时根据试验结果总结了各主要加工参数（切深ap、进给量f、主轴转速n）及其产生的最大未变形切屑厚度hmax对切削力的影响规律。     

A study on the effect of tool-edge radius on critical machining characteristics in ultra-precision milling of tungsten carbide

A crack-free surface can be finished on brittle materials by a specialized but traditional machining technique known as ductile-mode machining. In ductile-mode machining of brittle material, crack propagation is suppressed by selecting a suitable combination of tool and machining parameters leading to the removal of material through plastic deformation enabled by dislocation motion. In ductile-mode machining, the tool–workpiece interaction is of critical significance for the capability of the cutting process to finish a crack-free surface on a brittle material. This interaction is largely dictated by the cutting-edge radius of the tool when the undeformed chip thickness is comparable to the edge radius as is the case of ductile-mode machining. This paper presents the experimental results of ductile-mode milling of tungsten carbide to investigate the effect of cutting-edge radius on certain critical machining characteristics associated with the ductile–brittle transition specific to milling process of brittle material. The experimental results have established that an increase in the cutting-edge radius within a certain range increases the critical feed per edge leading to the improvement of material removal rate in ductile-mode milling. An increasingly negative effective rake angle is desired during milling with larger edge-radiused tool to suppress the crack propagation in the cutting zone to achieve ductile-mode machining. The results also identify the effect of the edge radius on certain other parameters such as critical specific cutting energy, plowing effect and subsurface damage depth to comprehend the ductile–brittle transition phenomenon in ductile-mode milling.     

An experimental study on the machining characteristics in ductile-mode milling of BK-7 glass

Glass is considered as one of the most challenging materials to machine because of its high hardness coupled with high brittleness. The challenge, in machining such a brittle material, lies in achieving the material removal through plastic deformation rather than characteristic brittle fracture. It has already been established that every brittle material, no matter how brittle it is, can be machined in ductile mode under certain critical conditions. The critical conditions are material specific, and hence, every material tends to show unique behavior in terms of critical conditions during machining process. This paper outlines the results of an experimental study to determine the critical chip thickness for ductile–brittle transition, chip morphology, and the effect of cutting speed on the critical conditions in peripheral milling process of BK-7 glass. It is established experimentally that the cutting speed affects the chip morphology, machined surface quality, and critical conditions due to possible thermal effects in such a way that ductile–brittle transition phenomenon is facilitated at high cutting speeds.     

纳米切削加工模型的研究

本文从分析建立传统切削加工模型的理论基础和分析方法入手,指出该模型应用于纳米切削加工的不合理性,应用分子动力学仿真建立了纳米切削的加工模型。研究表明,在纳米切削过程中,当切削深度小于最小切削深度时,工件材料只发生了弹塑性变形,没有形成切屑。     

Micromechanical machining of soda lime glass

Micromechanical machining, which is the mechanical removal of materials using miniature cutting tools, is one of the fabrication methods in the microrealm that has recently attracted a great deal of attention because it has the advantage of being able to machine complex shapes from brittle materials. The most challenging problem in the mechanical machining of brittle material is the fabrication of fracture-free surfaces. To avoid brittle fractures, a thorough investigation is required to find the machining parameters in the ductile cutting regime, which is characterized by plastic deformation of the material when the chip thickness is smaller than the critical value. In this study, cutting forces and surface characteristics of soda lime glass are examined in detail. Conical scratch tests are performed to identify the critical chip thickness, and the cutting forces in the ductile regime are modeled. In addition, coated ball end mill cutters were used to perform machining on inclined soda lime glass to investigate the feed rate effects, up and down milling, and depth of cuts on the surface finish and to examine tool wear.     

超精密加工误差补偿技术研究综述

超精密加工技术是高端制造领域的一项关键技术,当前超精密加工已进入纳米尺度,掌握超精密加工误差控制关键技术、保障并提高数控机床的加工精度,已经成为提高加工制造水平的研究热点。系统总结了超精密加工误差补偿技术研究现状及发展趋势,重点介绍了对超精密加工影响最大的几何误差、力诱导误差、热诱导误差及其补偿方法。在此基础上,深入探讨了超精密加工在几何误差分离,切削力、热诱导误差测量与补偿等方面存在的一系列问题,进一步指出超精密加工误差补偿技术还应关注其向高效、高精,通用化,模块化,智能化及柔性化的发展方向。     

Modeling of flow stress in orthogonal micro-cutting process based on strain gradient plasticity theory

The rapidly increasing demand for miniature components machining processes has drawn more attention to micro-machining research. Flow stress has always been a significant base for analyzing plastic deformation in machining processes. However, few studies have been conducted to predict accurately the material flow stress in the micro-cutting processes. In order to describe size effect in micro-cutting, this paper discusses the development of a circular primary deformation zone model, calculates the strain gradient in the primary zone, and presents a new flow stress model based on the theory of strain gradient plasticity. First, a series of orthogonal cutting experiments are performed and flow stress is calculated from the experiment data. Results from the proposed model have been successfully validated with experimentally determined results. It shows that the flow stress in micro-cutting is influenced greatly by the feed rate and the cutting edge radius.     

考虑应变梯度效应的低碳钢试样单向拉伸尺寸效应理论研究

采用二阶应变梯度塑性理论，得出伸长率、峰值应力后工程应力应变曲线和真应力应变曲线的解析解，结果表明三者均具有尺寸效应。将低碳钢试样的单轴拉伸简化为轴向的一维问题。采用拉伸过程中体积不变假设及平衡条件，将应变梯度引入屈服函数，得到伸长率、平均应变及真应变的解析式。理论结果完全反映伸长率与标定长度呈反比的客观事实。工程应力应变曲线尺寸效应可以在数值结果中找到佐证。拉应变局部化是三者尺寸效应的本质原因。     

NUMERICAL AND EXPERIMENTAL INVESTIGATION OF LASER-ASSISTED MACHINING OF INCONEL 718

A numerical investigation of laser-assisted machining for Inconel 718 is presented. This study is based on a three-dimensional finite element model, which takes into account a new constitutive law of Inconel 718 as well as friction and heat transfer models at the tool-chip interface that are developed at the Aerospace Manufacturing Technology Centre (AMTC), of the National Research Council of Canada (NRC), Canada. The material flow stress is described as a function of the strain, the strain rate, and the temperature. The friction model accounts for the sticking and the sliding regions observed experimentally. The formulation of the heat transfer model is based on combining contact mechanics analysis with the solution of the thermal contact problem. The laser beam is modeled as a moving heat source, which is experimentally calibrated. To validate the three-dimensional finite element model, laser-assisted machining experiments were designed and carried out under different cutting conditions. The predicted cutting force and chip thickness are compared with the experimental results. The temperature, stress, strain, and strain rate fields in the primary deformation zone are investigated in order to reveal the plastic deformation process under laser-assisted machining operations.     

易解理氧化镓晶体微尺度力学行为试验研究

为了探寻单晶氧化镓晶体超精密加工的易切削方向以及临界切削深度,将单晶氧化镓晶体(100)晶面和(010)晶面等角度划分成24等份,对每个方向上用Berkovich金刚石压头进行纳米压痕试验、用Cube金刚石压头进行纳米压痕和划痕试验。试验结果表明,在(100)晶面120°方向上脆塑转变临界切深最大,为623 nm左右,此时脆塑转变临界载荷为29.4 mN;在(010)晶面105°方向上脆塑转变临界切深最大,为686 nm左右,此时脆塑转变临界载荷为20.0 mN。氧化镓晶体存在强烈的各向异性,其中(010)面各向异性较为强烈。对比硬度、弹性模量、断裂韧度和相对脆塑转变临界切深随方向的变化趋势,结合各方向的划痕试验结果可以看出,氧化镓晶体(010)面为易加工晶面,105°方向为易加工方向。     

超精密车削切屑形成过程的试验研究

超精密车削中的各种物理现象，如切削力、刀具磨损以及加工表面质量等问题，都是以切屑形成为基础的。而生产实践中出现的许多问题，如振动、卷屑和断屑等，又都与超精密切削过程密切相关。选用的材料种类和切削条件不同，可生成不同形态的切屑。文章提出了一种研究切屑形成过程新的试验方法，利用该方法能够得到金刚石车削时高清晰的金属材料塑性流动图像。