Al/Zr多层膜生长模型和数值计算

在17～19nm波段,利用直流磁控溅射技术将Al(1%wtSi)/Zr多层膜镀制在掺氟的二氧化硅基底上,基于原子力显微镜对不同膜对数(N=10,40,60,80)表面粗糙度的测量结果,将多层膜的生长模型应用于实际结果中,对表面均方根粗糙度随着膜对数的变化进行了深入的分析,并对Stearns粗糙度动态生长理论的适用条件作了补充性讨论。     

AlN/w-BN纳米多层膜的制备及其显微结构

用射频磁控溅射法在硅基片上制备了AIN、BN单层膜及AIN/BN纳米多层膜,采用X射线衍射仪、傅立叶变换红外光谱仪、小角度X射线反射仪、高分辨率透射电子显微镜和原子力显微镜等对其进行了表征.结果表明:AIN/BN多层膜具有(103)择优取向,并且当AIN层厚固定时,随着BN层厚的增加,(103)择优取向得到强化;AIN单层膜及AIN/BN纳米多层膜均呈岛状生长,多层膜界面粗糙度及表面粗糙度均随着BN层厚的增加而减小;多层膜中BN的结构与BN的层厚有关,当AIN层厚保持在4.0 nm且BN层厚为0.32～0.55 nm时,可获得晶态w-BN,当BN层厚增至0.74 nm时,BN呈非晶态.     

刀具表面超晶格TiN/AlN纳米多层膜的制备和研究

采用脉冲多弧离子镀技术制备TiN/AlN纳米多层膜,随着调制周期的减小,稳定态六方AlN相逐渐转变成亚稳态立方AlN相,形成以TiN/AlN超晶格结构为主的超硬薄膜。与标准图谱的对比可知,TiN/AlN超晶格是AlN在模板立方TiN材料的影响下,在TiN层上以亚稳态相立方结构外延生长所形成。试验表明TiN/AlN薄膜具有良好的耐腐蚀性能以及使用寿命。     

TiO2/Ag/TiO2纳米多层膜的研究

设计和制备了用于平面显示器透明电极的纳米多层薄膜TiO2/Ag/TiO2,它的明视透光率Tlum约为89.3%,在2 500nm波长处的反射率R2 500>95%,方块电阻为3.0Ω/cm2,在550nm波长处的电气性能评价指标FTC=137×10-3Ω-1.发现顶层介质折射率的变化将会引起膜系透射峰的水平移动,而底层介质折射率的变化将仅仅影响膜系透射峰的高低.     

刀具表面超晶格TiN／AIN纳米多层膜的制备和研究

采用脉冲多弧离子镀技术制备TiN／AIN纳米多层膜，随着调制周期的减小，稳定态六方AIN相逐渐转变成亚稳态立方AIN相，形成以TiN／AIN超晶格结构为主的超硬薄膜。与标准图谱的对比可知，TiN／AIN超晶格是AIN在模板立方TiN材料的影响下，在TiN层上以亚稳态相立方结构外延生长所形成。试验表明TiN／AIN薄膜具有良好的耐腐蚀性能以及使用寿命。     

13.9nm和19.6nm正入射Mo/Si多层膜反射镜反射率的测量

根据理论模拟计算并设计了分别工作在13.9nm类镍银和19.6nm类氖锗两种X射线激光的Mo/Si多层膜,将自行设计的小型反射率计安装在Mcpherson247单色仪出射狭缝附近,组成以铜靶激光等离子体辐射源作为极紫外光源的反射率测量装置,对研制的Mo/Si多层膜反射镜的反射率进行了测量。实验结果显示,中心波长分别是13.91nm和19.60nm,相应反射率分别是41.9%和22.6%,半宽度分别是0.56nm和1.70nm,中心波长和半宽度与理论值基本一致。为了全面了解多层膜的性能,用WYKO测量多层膜的表面粗糙度,13.9nm和19.6nmMo/Si多层膜的表面粗糙度分别是0.52nm和0.55nm。     

Si含量对TaN/TiSiN纳米多层膜结构和性能的影响

采用磁控溅射技术在304不锈钢和硬质合金刀片上交替沉积TaN、TiSiN层,制备不同Si含量的TaN/TiSiN纳米多层膜.通过X射线衍射仪、扫描电子显微镜、纳米压痕仪、原子力显微镜和摩擦磨损试验机等仪器的测试结果来表征其微观结构、硬度、表面粗糙度及摩擦学等性能.不同Si含量的TaN/TiSiN纳米多层膜均在(200)晶面呈现择优取向,并且衍射峰随着Si含量的增加向右偏移,当Si含量为10％时,衍射峰的偏移量最大.随着Si含量的增加,TaN/TiSiN纳米多层膜的硬度先升高后降低,当Si含量为10％时,硬度最大,达到25.8 GPa.表面粗糙度值随着Si含量的增加先减小后增大,随后又减小,当Si含量为15％时,TaN/TiSiN纳米多层膜的表面最光滑,表面粗糙度值最小,为Ra 2.34 nm.摩擦系数和主切削力均随着Si含量的增加先减小后增大,当Si含量为15％时,摩擦系数最小,耐磨性能最好,主切削力最小;研究结果表明,掺入适量的Si元素可以有效地提高TaN/TiSiN纳米多层膜的硬度、耐磨性能和切削性能.     

Si含量对TaN/TiSiN纳米多层膜结构和性能的影响

采用磁控溅射技术在304不锈钢和硬质合金刀片上交替沉积TaN、TiSiN层,制备不同Si含量的TaN/TiSiN纳米多层膜.通过X射线衍射仪、扫描电子显微镜、纳米压痕仪、原子力显微镜和摩擦磨损试验机等仪器的测试结果来表征其微观结构、硬度、表面粗糙度及摩擦学等性能.不同Si含量的TaN/TiSiN纳米多层膜均在(200)晶面呈现择优取向,并且衍射峰随着Si含量的增加向右偏移,当Si含量为10％时,衍射峰的偏移量最大.随着Si含量的增加,TaN/TiSiN纳米多层膜的硬度先升高后降低,当Si含量为10％时,硬度最大,达到25.8 GPa.表面粗糙度值随着Si含量的增加先减小后增大,随后又减小,当Si含量为15％时,TaN/TiSiN纳米多层膜的表面最光滑,表面粗糙度值最小,为Ra 2.34 nm.摩擦系数和主切削力均随着Si含量的增加先减小后增大,当Si含量为15％时,摩擦系数最小,耐磨性能最好,主切削力最小;研究结果表明,掺入适量的Si元素可以有效地提高TaN/TiSiN纳米多层膜的硬度、耐磨性能和切削性能.     

磁控溅射沉积TiB_2/DLC纳米多层膜的结构及其机械性能研究

采用非平衡磁控溅射系统在P(100)硅片和304不锈钢基底上制备TiB_2/DLC纳米多层膜。利用FESEM、TEM、XRD和AFM观察多层膜的微观结构和表面形貌;利用纳米压痕仪、维氏硬度计和CSM球-盘摩擦磨损试验机考察TiB_2靶电流对多层膜的机械性能和摩擦学性能的影响。结果表明:TiB_2/DLC多层膜具有良好的多层调制结构,多层膜沿TiB_2(101)晶向择优生长;多层膜的表面粗糙度随着TiB_2靶电流增加而增加;多层膜中的大量异质界面能显著提高薄膜的硬度及韧性,而且当TiB_2靶电流为2.0 A时,多层膜的硬度约为单层DLC薄膜的两倍;多层膜中具有硬质TiB_2层和软质DLC层的交替结构,在摩擦过程中,硬层TiB_2起到良好的承载作用,软层DLC起到良好的润滑作用,使多层膜具有比单层DLC薄膜更低的摩擦因数。     

氮气反应溅射制备Co/Sb多层膜研究

针对"水窗"波段(280~540eV)对多层膜反射镜的应用需求,在Sb的M5吸收边(525.5eV)附近,选择Co和Sb作为该能点的多层膜材料组合,优化设计膜系结构。采用直流磁控溅射方法制备了Co/Sb多层膜,通过在溅射气体氩气中引入氮气作为反应气体,多层膜界面粗糙度明显减小。利用X射线掠入射反射(GIXRR)测试多层膜结构,并在北京BSRF同步辐射3W1B实验站测量了反应溅射前后的多层膜反射率(SXR),结果表明:氮气含量为25%时的界面粗糙度最小,反射率从无反应溅射的7.2%提高到11.7%。     

Tribology and oxidation behavior of TiN/AlN nano-multilayer films

In this study, a series of TiN/AlN nano-multilayer films were prepared using a new sputtering setup, which features a medium frequency (MF) twin unbalanced magnetron sputtering system (UBMS) and a DC balanced magnetron sputtering system (BMS). The MF (6.78 MHz) twin UBMS, which is a modification of single RF power source system, is a special design of this deposition machine. The UBMS was employed to deposit the AlN film, and the BMS the TiN film. The aim of this study was to obtain, through controlling the deposition conditions, a group of TiN/AlN nano-multilayer films with various periods (λ). Then a series of experiments were conducted to understand their wear and oxidation properties.The results revealed that through controlling of the deposition parameters, the TiN/AlN nano-multilayer films with λ ranging from 2.4 to 67.6 nm were obtained. At λ3.6 nm, the nano-multilayers had extremely high hardness and excellent adhesion. The oxidation tests found that the multilayers had obviously better anti-oxidation property, as compared with the single-layer TiN film. The high hardness and good oxidation resistance contributed to very good wear performance of the TiN/AlN nano-multilayer films.     

Experimental and numerical study of O/W emulsion lubricated strip rolling in mixed film regime

An experimental and numerical study of cold rolling lubricated by O/W emulsion has been carried out. The strip rolling experiment was carried out on a Hille experimental rolling mill with a view to study the performance of emulsion lubrication in terms of practical rolling parameters. Accordingly, rolling parameters such as rolling force and torque were measured. The experimental measurements compare favourably with the computed results from a numerical scheme developed by the authors. The scheme, based on a two-phase lubricant model, is capable of calculating the oil concentration at any point within the inlet zone and work zone, rolling pressure, film thickness, and fractional contact area ratio associated with strip rolling under mixed film lubrication at different rolling speeds. Using this scheme, the intertwined effects of an emulsion’s parameters such as: oil concentration, mean oil droplet size, and rolling speed on strip rolling were investigated. The numerical study encompassed the mixed film regime for speed, S ranges from 10⁻⁴ to 10⁻², supply oil concentration level λ_ds from 1 to 10%, and oil droplet size D _S from 5 to 10. Experimentally, the differences between water, oil and emulsion-lubricated rolling are not discernible except for film thickness. At a low speed of 10 RPM, force and torque of water-lubricated rolling are marginally higher than oil- or emulsion-lubricated ones. However, the difference between emulsion and neat oil is not apparent. The numerical results show the occurrence of a moderate oil concentration increase in the inlet zone followed by a sharp one at the beginning of the work zone. The effect of the concentration process is predominantly seen in the film thickness and the lubricant pressure whilst its effect on the total pressure is less pronounced. The analysis of the results suggests that it is possible to lower the emulsion oil concentration without any adverse effect on the rolling process. This principle can be used to control the outlet lubricant film thickness and hence the surface quality of the rolled strip.     

Substrate surface energy effects on a liquid lubricant film at nanometre scalesubstrate surface energy effects on a liquid lubricant film at nanometre scale

In this paper is discussed the effect of the physical characteristics of substrate surfaces on the lubrication properties of thin films at nanometre scale. Different coatings with different surface energies have been formed on the surface of a steel ball by means of plasma assisted sedimentation (PAS). The ball was put in a pure rolling system in point contact, where the lubricant film is measured by relative optical interference intensity (ROII). Experimental results show that the film thickness is closely related to the substrate surface energy when the film is in the nanometre scale, and that the combined surface roughness in the contact region is closely related to the liquid lubricant film thickness and the contact pressure. The thinner the film and the higher the contact pressure, the smaller will be the combined surface roughness. Lastly, the relationship between critical film thickness and its influencing factors is discussed.     

微/纳米CVD金刚石涂层的制备

使用热丝化学气相沉积(HFCVD)装置,在以WC - CO硬质合金为衬底,采用调节涂层生长参数,制备出性能优良的微/纳米金刚石涂层.用SEM,AFM,Raman表征微观结构和表面品质.采用压痕法评估涂层的结合性能,并与微米金刚石涂层、纳米金刚石涂层进行比较.结果显示,当生长气压由3.3 kPa降为1.0 kPa时,底层的微米级晶粒逐渐被上层纳米级晶粒覆盖,并且涂层表面显露出纳米金刚石涂层特性.在结合性能实验中也指出,微/纳米金刚石涂层的结合性能比纳米金刚石涂层要优异.     

Effects of surface forces and surface roughness on squeeze thin film of elastohydrodynamic lubricated spherical conjunction

The pure squeeze thin film elastohydrodynamic lubrication motion of circular contacts with effects of surface forces and surface roughness taken into account is explored under constant load conditions. The coupled transient stochastic Reynolds, elasticity deformation, the load balance, surface forces (hydrodynamic, solvation and van der Waals pressure) and lubricant rheology equations were solved simultaneously by using the finite difference method and the Gauss–Seidel iteration method. The simulation results reveal that the differences between radial type roughness and circular type roughness problems are apparent as the film thickness is thinner than 5 nm. The oscillation phenomena in pressure and film thickness come mainly from the action of solvation forces. The effects of surface forces become significant as the film thickness becomes thinner. The film thickness with circular type roughness is thicker than that with radial type roughness. Copyright © 2012 John Wiley & Sons, Ltd.     

Ferrofluid-based annular squeeze film bearing with the effects of roughness and micromodel patterns of porous structures

ABSTRACT

Based on the ferrohydrodynamic theory by R.E. Rosensweig and roughness effects by Christensen’s stochastic theory, a mathematical model of ferrofluid lubricated flat (parallel) annular disks (plates or surfaces) squeeze film bearing, is developed with the effects of porosity at the upper disk, circumferential or radial roughness at the lower disk and radially variable magnetic field. The validity of the Darcy’s law is assumed for the porous matrix. The resultant modified Reynolds-Darcy equation is solved in terms of Bessel function. Expressions for dimensionless load-carrying capacity are obtained and computed. The results for circumferential roughness pattern show that dimensionless load-carrying capacity increases when thickness & permeability of the porous matrix decreases, and effect of surface roughness & width of the annular part increases. The effects of micromodel patterns of two different porous structures are also discussed. Slightly better performances of the bearing are observed for globular sphere permeability model. A comparative study is also made when lower disk is circumferentially rough or radially rough or smooth for globular sphere model.     

载荷、速度对碳/铜复合材料摩擦表面自润滑固体膜性能的影响

用扫描电子显微镜、电子探针X射线显微分析仪和表面轮廓测试仪等，对固体膜的显微形貌、组分含量及表观轮廓粗糙度等进行了系统的观察、测试和分析。结果表明：在一定的工况参数范围内，自润滑固体膜主要由C和CU两种元素组成．其减摩性能保持在某一相对良好的状态；当工况参数超出这一范围时，自润滑固体膜中的金属含量增多，其减摩性能随之恶化。同时，摩擦表面的形貌和粗糙度亦随工况参数的不同而变化。     

Squeeze film characteristics between a sphere and a rough porous flat plate with micropolar fluids

The effects of surface roughness on the squeeze film characteristics between a sphere and flat plate covered with a thin porous layer are investigated in this paper. The sphere and the plate are separated with a non‐Newtonian lubricant of a micropolar fluid. The well‐established Christensen stochastic theory of hydrodynamic lubrication of rough surfaces is used to incorporate the effects of surface roughness into the Reynolds equation. The film pressure distribution is solved and other squeeze film characteristics, such as the load‐carrying capacity,and time–height relationship, are obtained. The results indicate that lubrication by a micropolar fluid will increase the load‐carrying capacity and lengthen the squeeze film time, regardless to the surface rough and porosity of the flat plate. It is also found that excessive permeability of the porous layer causes a significant drop in the squeeze film characteristics and minimises the effect of surface roughness. For the case of limited or no permeability, the azimuthal roughness is found to increase the load‐carrying capacity and squeeze time, whereas the reverse results are obtained for the case of radial roughness.