柱面场景无畸变的折反射全景成像系统

提出了一种基于透视成像模型的柱面场景无畸变的折反射全景成像系统设计方法,该方法 利用系统柱面场景无畸变成像要求和视场角确定反射镜面形。根据这一方法设计制作了高次旋转对称非球面反射镜,并用该反射镜和CCD摄像头建立了全景成像系统,实现了对360°柱面场景的无畸变成像。     

别汉棱镜

在某些光学系统中(潜望镜光学系统或跟踪仪装中的瞄准镜光学系统),通常采用一个反射镜或棱镜来完成系统予定光路转折或进行空间目标扫描。在这种情况下,当棱镜绕机械轴转动时,影像在目镜焦平面上绕系统光轴旋转。     

大口径离轴非球面加工中能动磨盘面形分析

利用齐次坐标变换理论分析了计算机数控能动磨盘加工大口径离轴非球面反射镜时磨盘底面需要形成的实时面形,给出了通用的盘面实时轮廓的计算方法.以NST(新太阳望远镜)的离轴抛物面主镜参数为例.给出了用现有能动磨盘加工时盘面形状及磨盘变形量的计算结果,并将该方法用于两块轴对称非球面(Φ1 030 F/1.6椭球面和Φ1 250...     

基于摄影测量的基准尺长度测量系统的调节与误差分析

基准尺作为摄影测量长度基准,其精度直接影响测量结果的准确性,为了保证基准尺长度的测量精度,设计了由气体静压导轨、激光干涉仪、CCD成像系统组成的测量系统。分析了影响测量精度的因素,并对组成基准尺的标志圆成像位置、CCD相机光轴、激光干涉仪、基准尺和CCD成像系统绕自身光轴旋转的调节误差进行了计算分析,用于指导CCD成像系统、激光干涉仪和基准尺的调节。最后应用该系统对基准尺进行多次测量,结果表明基准尺长度测量的标准差可达到1 μm,满足工业摄影测量的要求。     

倾斜镜面成像的自动调焦方法

倾斜镜面成像系统的像面与光轴倾斜,仅利用轴向自动调焦无法实现像面整体清晰。为此提出一种基于图像清晰度判断的自动调焦方法。该方法将轴向调焦与角度调焦相结合,通过步进方式平移和旋转像接收面,利用离焦函数判断聚焦情况,采用数据拟合回归的方法实现了像面整体清晰。该方法在椭偏成像系统的应用结果验证了其有效性,调焦精度达到微米量级。     

激光单目视觉焊缝起始点导引技术

针对弧焊机器人自动化焊接过程中初始焊接位置定位问题,本文提出了一种十字激光单目视觉的两步导引法.首先,找到成像平面上焊缝起始点坐标,以光轴中心为原点,光轴中心与该点的连线为z轴建立新的坐标系,通过求解新旧坐标系之间的旋转矩阵,控制机器人调整摄像机的姿态,使目标点位于摄像机光轴;然后,结合十字激光发生器,控制机器人沿摄像机z轴逐渐向焊缝起始点靠近,直至十字激光交叉点与焊缝起始点重合,即获得焊缝起始点的三维坐标,将该坐标反馈给机器人,控制焊枪运动至焊缝起始点.试验结果表明,该方法能够在保证焊接精确度的情况下实现对焊缝起始点导引.     

超大数值孔径浸没式物镜的研发设计

该文提出一种超大数值孔径光刻投影物镜。该光刻投影物镜作为光刻机曝光系统的核心模块,将掩模版上的图案以4倍缩小倍率成像于硅片面,该物镜以193 nm的准分子激光器为曝光光源,视场范围为26mm×5.5mm,光学结构不同于传统的全透射系统,引入反射镜及镜片反射面,采用折反射式光学系统结构,有利于平衡像差。浸没情况下最大数值孔径可达到1.35,可应用于前道制造45 nm关键层和非关键层的光刻工艺需求。     

平行度测试仪原理及其测量精度分析

平行度测试仪是检测大型光电经纬仪多光轴系统平行度的设备,要求平行度测试仪的精度要达到0.5".方法是利用一块反射镜和两块五棱镜将一束准直光束分光成两束平行光束,大型经纬仪的两个光学系统分别接收这两束平行光,两束平行光所成像的脱靶量差值即为两光学系统的光轴平行度.利用两个精度为0.1"的自准直平行光管和一块平面反射镜检测平行度测试仪精度.经检测标定后平行度测试仪的精度可达到0.5",能够很好的满足检测平行度为2"的光学系统的检测.     

三轴转台轴线垂直度的测试方法

为了测量中环轴、内环轴不能全回转的三轴转台回转轴线的垂直度误差,设计了利用自准直仪和平面反射镜将有限回转轴系轴线引出的方法。根据自准直仪读数与平面反射镜对回转轴线的垂直度误差、自准直仪的光轴与回转轴线的平行度误差之间的关系,利用最小二乘法引出外环轴处于不同位置时的中环轴轴线、内环轴轴线,实现了三轴转台轴线垂直度的测量。     

某车载抬头显示光学系统设计研究

该文主要描述AR型车载抬头显示系统的光学系统设计,系统采用离轴设计方式,投影视场角达到了10°×3°,投影距离实现3 m～10 m连续可调。风挡式抬头显示系统设计原理为图像源上的图像信息经过平面或曲面反射镜,第一次反射至另一自由曲面反射镜上,接着经过自由曲面反射镜,第二次反射投射至挡风玻璃,挡风玻璃作为成像组件进行第三次反射,最终将光线入射至驾驶员眼睛。该设计将投影图像源入射的第一反射镜设置为可调反射镜,以此来实现虚像成像平面的连续可调,系统设计优化完成后,对系统多重结构组态进行成像质量分析。     

刀具对中误差对离轴抛物面镜慢刀伺服车削加工的影响

离轴抛物面镜单件高效加工是离轴三反消像散(TMA)结构光学系统的技术难点之一.单点金刚石慢刀伺服车削加工技术可用于离轴非球面加工,加工尺寸范围较大,加工精度较高.此工艺制造的离轴抛物面面型精度可达到亚微米级,粗糙度达到纳米级.因此,可直接用于红外光学应用,若经后续抛光则可用于空间望远镜等更高精度需求的场合.介绍了慢刀伺服车削加工离轴抛物面镜的在轴加工方法,理论推导了刀具对中误差所带来的面形误差的极值分布规律.仿真研究进一步揭示了工件中心区域面形误差的详细分布.实验数据与理论结果和仿真计算结果均吻合.     

Parabolic liquid mirrors in optical shop testing

A parabolic liquid mirror obtained by the rotation of a mercury bath around a vertical axis has been built and its optical surface characteristics measured to demonstrate that it can be used in optical shop testing as a reference surface. A linear Hartmann test allowed us to check that the focal length is well related to the rotation velocity, following the theory, and that no spherical aberration is present, as assumed by previous authors. The spherical aberration has been found to be smaller than λ/50 at 633 nm. An interferometric test of the mirror compared with a null lens gave information about the quality of the optical surface for which the rms wave-front error, when the random errors are averaged, is ~λ/25. Because modifying the mirror diameter is cheap and fast and adjusting its focal length within a large range is straightforward, the parabolic liquid mirror can become a highly adaptable tool in optical metrology. In particular, it can be used in optical shop testing as a reference surface to test null correctors, to check any system developed to control the shape of large parabolic or quasiparabolic top-quality solid-state mirrors, or to make holographic references of such surfaces.     

Corrector design with active vase mirrors that allows a fixed telescope to access a large region of the sky

We investigate a family of two-mirror correctors to compensate for the aberrations of a parabolic mirror observing at a large angle from the zenith. We constrain our designs to optical elements that can be built with currently available technology. The secondary and the tertiary mirrors are warped by Zernike polynomials, which we know can be generated with active vase mirrors. The performances of these corrector designs are usable for imagery.     

Focal shifts in diffracted converging electromagnetic waves. I. Kirchhoff theory

Starting with the vector formulation of the Kirchhoff diffraction theory, expressions for the total energy density distribution along the axis are presented without using any of the usual assumptions except the assumption made by Kirchhoff for the boundary conditions of a black screen. To make the Kirchhoff integral compatible with Maxwell's equations, a line integral around the edge of the aperture is added in the analysis. The consequence of ignoring the contribution of this line integral to the axial field distribution is examined numerically. The focal shift effect is investigated for both aplanatic systems and parabolic mirrors having an arbitrary numerical aperture (NA) and finite value of the Fresnel number. The combined effects of the Fresnel number and NA on the focal shift are evaluated, and the validity of the results is carefully checked by comparing the wavelength with the system dimensions.     

CO2激光器虚共焦腔凸面镜失调的实验研究

高功率激光器工作时，由于谐振腔反射镜上的光强分布不均匀，会导致镜面温度不均匀，从而造成镜面的角向偏转，致使激光器光轴发生偏转，严重影响输出光束质量，甚至造成不出光。文中主要从实验研究了CO2激光器虚共焦腔凸面镜失调对激光器输出光束质量的影响，实验结果表明，当凸面镜失调角接近于由理论计算而得的失调临界角时，输出光斑约为半个圆环，与理论分析非常符合，当凸面镜失调角达到约为失调临界角的4．5倍时，完全停止振荡。     

Hydrodynamics of rotating liquid mirrors. I. Synchronous disturbances

The effects of axis alignment errors, planetary rotation, and tidal forces on rotating liquid mirrors are analyzed. These produce a surface distortion that decreases exponentially with distance inward from the rim with a characteristic length l= square root of 3hf/2, where h is the thickness of the fluid and f is the focal length. Even a small tilt of the rotation axis can produce a significant deformation of the optical surface. The maximum surface height error is 3epsilonl, where epsilon is the tilt angle and is typically of the order of 1.5 microm for a 1 arc sec tilt. The main optical effect of the wave is to produce a ring, with angular diameter 6epsilon, offset by half of the diameter in the direction opposite the tilt. This diamond ring aberration can be avoided by accurate alignment of the rotation axis or by masking the outer few centimeters of the mirror. Planetary rotation produces a small deformation of the order of 100 nm for a 10 m telescope at low latitude on Earth. This deformation can be canceled by a small tilt of the rotation axis. Tidal forces produced by the Moon, or by the Earth in the case of a lunar telescope, produce an inconsequential, subnanometer, surface deformation.     

计量型激光椭偏仪初始入射角校准方法的研究

为保证计量型激光椭偏仪测量结果的准确性,研究了一种初始入射角校准方法,通过线性位移台带动CCD相机进行一维运动,其运动轴作为空间线性辅助参考量,实现了椭偏仪的入射激光光轴与自准直仪光轴的90°校准。结果表明:采用该方法校准计量型激光椭偏仪的初始入射角,光轴俯仰角偏差＜0.05°,偏摆角偏差＜0.09°;校准后,对标称值为102.10nm的Si上SiO₂膜厚标准片进行测量,示值误差＜0.4nm,提升了计量型激光椭偏仪测量校准服务的准确性。     

双光楔光轴指向调整技术

由于双光楔系统可以精确调整光轴的指向,而且具有结构简单紧凑、调整速度快、偏转角度大的优点。为了满足某产品的需要,实现同心圆和Z字型的光轴调整轨迹。本文根据现有理论,通过建立光轴偏转角度与双光楔转动角度关系模型,推导出对应公式,并结合Matlab仿真、拟合和实际的产品测试,设计出了利用ARM与计算机控制双光楔来调整光轴指向的方案。结果表明,该方案光轴指向调整的误差小于0.5°,能够实现预期的轨迹,满足实际产品的需求。     

High dynamic range measurement of linear birefringence with an electro-optic modulated circular polariscope

This paper presents a common-path electro-optic modulated circular polariscope capable of performing the sequential measurements of the principal axis and retardance of the linearly birefringent media with high accuracy by means of two phase-locked extractions, and with a high dynamic range obtained by the design of optical configuration and the derivation of an easy algorithm. There exist an absolute error of 0.10° on average in the principal axis measurement of 36 times within the range of 0°–180°, and a relative error of 1.10% in the retardance measurement of a λ/2-wave plate by this method. Consequently, the standard deviations for the principal axis angle and retardance measurements are determined to be 0.0033° and 0.086°, respectively, triple standard deviations to the average values of principal axis angle and retardance are just 0.10% and 0.14% with high repeatability, respectively, and corresponding dynamic ranges of 0°–180°.     

Controlling the contribution of the electric field components to the focus of a high-aperture lens using binary phase structures

We show that the contribution of the electric field components into the focal region can be controlled using binary phase structures. We discuss differently polarized incident waves, for each case suggesting easily implemented binary phase distributions that ensure a maximum contribution of a definite electric field component on the optical axis. A decrease in the size of the central focal spot produced by a high numerical aperture (NA) focusing system comes as the result of the spatial redistribution of the contribution of different electric field components into the focal region. Using a polarization conversion matrix of a high NA lens and the numerical simulation of the focusing system in Debye's approximation, we demonstrate benefits of using asymmetric to polar angle ? binary phase distributions (such as arg[cos ?] or arg[sin 2?]) for generating a subwavelength focal spot in separate electric field components. Additional binary structure variations with respect to the azimuthal angle also make possible controlling the longitudinal distribution of light. In particular, the contribution of the transverse components in the focal plane can be reduced by the use of a simple axicon-like structure that serves to enhance the NA of the lens central part, redirecting the energy from focal plane. As compared with the superimposition of a narrow annular aperture, this approach is more energy efficient, and as compared with the Toraldo filters, it is easier to control when applied to three-dimensional focal shaping.