A Low-Voltage Mobility-Based Frequency Reference for Crystal-Less ULP Radios

The design of a 100 kHz frequency reference based on the electron mobility in a MOS transistor is presented. The proposed low-voltage low-power circuit requires no off-chip components, making it suitable for application in wireless sensor networks (WSN). After a single-point calibration, the spread of its output frequency is less than 1.1% (3$sigma $) over the temperature range from $-{hbox{22}},^{circ}{hbox{C}}$ to 85$,^{circ}{hbox{C}}$ . Fabricated in a baseline 65$~$nm CMOS technology, the frequency reference circuit occupies 0.11$ hbox{mm}^{2}$ and draws 34 $ muhbox{A}$ from a 1.2 V supply at room temperature.      

A Fully Integrated 0.13- $mu$m CMOS 40-Gb/s Serial Link Transceiver

A fully integrated 40-Gb/s transceiver fabricated in a 0.13-$mu$m CMOS technology is presented. The receiver operates at a 20-GHz clock performing half-rate clock and data recovery. Despite the low ${rm f}_{rm T}$ of 70 GHz, the input sampler achieves 10-mV sensitivity using pulsed latches and inductive-peaking techniques. In order to minimize the feedback latency in the bang-bang controlled CDR loop, the proportional control is directly applied to the VCO, bypassing the charge pump and the loop filter. In addition, the phase detection logic operates at 20 GHz, eliminating the need for the deserializers for the early/late timing signals. The four clock phases for the half-rate CDR are generated by a quadrature LC-VCO with microstrip resonators. A linear equalizer that tunes the resistive loading of an inductively-peaked CML buffer can improve the eye opening by 20% while operating at 39 Gb/s. The prototype transceiver occupies 3.4$, times ,$2.9 mm$^{2}$ with power dissipation of 3.6 W from a 1.45-V supply. With the equalizer on, the transmit jitter of the 39-Gb/s 2$^{15}-1$ PRBS data is 1.85 ${rm ps}_{rm rms}$ over a WB-PBGA package, an 8-mm PCB trace, an on-board 2.4-mm connector, and a 1 m-long 2.4-mm coaxial cable. The recovered divided-by-16 clock jitter is 1.77 ${rm ps}_{rm rms}$ and the measured BER of the transceiver is less than $10^{- 14}$ .      

1580-V–40-$hbox{m}Omegacdot hbox{cm}^{2}$ Double-RESURF MOSFETs on 4H-SiC $(hbox{000}bar{hbox{1}})$

Double-reduced-surface-field (RESURF) MOSFETs with $hbox{N}_{2}hbox{O}$ -grown oxides have been fabricated on the 4H-SiC $(hbox{000} bar{hbox{1}})$ face. The double-RESURF structure is effective in reducing the drift resistance, as well as in increasing the breakdown voltage. In addition, by utilizing the 4H-SiC $(hbox{000}bar{hbox{1}})$ face, the channel mobility can be increased to over 30 $hbox{cm}^{2}/hbox{V}cdothbox{s}$, and hence, the channel resistance is decreased. As a result, the fabricated MOSFETs on 4H-SiC $( hbox{000}bar{hbox{1}})$ have demonstrated a high breakdown voltage $(V_{B})$ of 1580 V and a low on-resistance $(R_{rm ON})$ of 40 $hbox{m}Omega cdothbox{cm}^{2}$. The figure-of-merit $(V_{B}^{2}/R_{rm ON})$ of the fabricated device has reached 62 $hbox{MW/cm}^{2}$, which is the highest value among any lateral MOSFETs and is more than ten times higher than the “Si limit.”      

Schottky Barrier Height Modulation of Nickel–Dysprosium-Alloy Germanosilicide Contacts for Strained P-FinFETs

This letter reports on the fabrication and hole Schottky barrier $(Phi_{ rm B}^{rm p})$ modulation of a novel nickel (Ni)–dysprosium (Dy)-alloy germanosilicide (NiDySiGe) on silicon–germanium (SiGe). Aluminum (Al) implant is utilized to lower the $Phi_{rm B}^{rm p}$ of NiDySiGe from $sim$0.5 to $sim$ 0.12 eV, with a correspondingly increasing Al dose in the range of $ hbox{0}$–$hbox{2}timeshbox{10}^{15} hbox{atoms}/ hbox{cm}^{2}$. When integrated as the contact silicide in p-FinFETs (with SiGe source/drain), NiDySiGe with an Al implant dose of $hbox{2}timeshbox{10}^{14} hbox{atoms}/ hbox{cm}^{2}$ leads to 32% enhancement in $I_{rm DSAT}$ over p-FinFETs with conventional NiSiGe contacts. Ni–Dy-alloy silicide is a promising single silicide solution for series-resistance reduction in CMOS FinFETs.      

CMOS Avalanche Photodiode Embedded in a Phase-Shift Laser Rangefinder

This paper presents the design and the characterization of a CMOS avalanche photodiode (APD) working as an optoelectronic mixer. The $hbox{P}^{+}hbox{N}$ photodiode has been implemented in a commercial 0.35-$muhbox{m}$ CMOS technology after optimization with SILVACO. The surface of the active region is $ hbox{3.78} cdot hbox{10}^{-3} hbox{cm}^{2}$. An efficient guard-ring structure has been created using the lateral diffusion of two n-well regions separated by a gap of 1.2 $mu hbox{m}$. When biased at $-$2 V, the best responsitivity $S_{lambda ,{rm APD}} = hbox{0.11} hbox{A/W}$ is obtained at $lambda = hbox{500} hbox{nm}$. This value can easily be improved by using an antireflection coating. At $lambda = hbox{472} hbox{nm}$, the internal gain is about 75 at $-$6 V and 157 at $-$7 V. When biased at $-$6 V, the APD achieves a dark current of 128 $muhbox{A} cdot hbox{mm}^{-2}$ and an excess noise factor $F = hbox{20}$ . Then, the APD is successfully used as an optoelectronic mixer to improve the signal-to-noise ratio of a low-voltage embedded phase-shift laser rangefinder.      

Performance Improvement of N-Type $hbox{TiO}_{x}$ Active-Channel TFTs Grown by Low-Temperature Plasma-Enhanced ALD

We report on performance improvement of $n$-type oxide–semiconductor thin-film transistors (TFTs) based on $hbox{TiO}_{x}$ active channels grown at 250 $^{circ}hbox{C}$ by plasma-enhanced atomic layer deposition. TFTs with as-grown $hbox{TiO}_{x}$ films exhibited the saturation mobility $(mu_{rm sat})$ as high as 3.2 $hbox{cm}^{2}/hbox{V}cdothbox{s}$ but suffered from the low on–off ratio $(I_{rm ON}/I_{rm OFF})$ of $hbox{2.0} times hbox{10}^{2}$. $hbox{N}_{2}hbox{O}$ plasma treatment was then attempted to improve $I_{rm ON}/I_{rm OFF}$. Upon treatment, the $hbox{TiO}_{x}$ TFTs exhibited $I_{rm ON}/I_{rm OFF}$ of $hbox{4.7} times hbox{10}^{5}$ and $mu_{rm sat}$ of 1.64 $hbox{cm}^{2}/hbox{V}cdothbox{s}$, showing a much improved performance balance and, thus, demonstrating their potentials for a wide variety of applications such as backplane technology in active-matrix displays and radio-frequency identification tags.      

Compact $S$ -/$Ka$-Band CMOS Quadrature Hybrids With High Phase Balance Based on Multilayer Transformer Over-Coupling Technique

This paper presents compact CMOS quadrature hybrids by using the transformer over-coupling technique to eliminate significant phase error in the presence of low-$Q$ CMOS components. The technique includes the inductive and capacitive couplings, where the former is realized by employing a tightly inductive-coupled transformer and the latter by an additional capacitor across the transformer winding. Their phase balance effects are investigated and the design methodology is presented. The measurement results show that the designed 24-GHz CMOS quadrature hybrid has excellent phase balance within ${pm}{hbox{0.6}}^{circ}$ and amplitude balance less than ${pm} {hbox{0.3}}$ dB over a 16% fractional bandwidth with extremely compact size of 0.05 mm$^{2}$. For the 2.4-GHz hybrid monolithic microwave integrated circuit, it has measured phase balance of ${pm}{hbox{0.8}}^{circ}$ and amplitude balance of ${pm} {hbox{0.3}}$ dB over a 10% fractional bandwidth with a chip area of 0.1 mm$^{2}$ .      

Low-Threshold Strained Quantum-Well GaSb-Based Lasers Emitting in the 2.5- to 2.7-$mu$ m Wavelength Range

GaInAsSb–GaSb strained quantum-well (QW) ridge waveguide diode lasers emitting in the wavelength range from 2.51 to 2.72 $ mu{hbox {m}}$ have been grown by molecular beam epitaxy. The devices show ultralow threshold current densities of 44 $hbox{A}/{hbox {cm}}^{2}$ (${L}rightarrow infty $) for a single QW device at 2.51 $ mu{hbox {m}}$, which is the lowest reported value in continuous-wave operation near room temperature (15 $^{circ}hbox{C}$) at this wavelength. The devices have an internal loss of 3 ${hbox {cm}}^{-1}$ and a characteristic temperature of 42 K. By using broader QWs, wavelengths up to 2.72 $mu{hbox {m}}$ could be achieved.      

A 108 dB SNR, 1.1 mW Oversampling Audio DAC With A Three-level DEM Technique

A low power audio oversampling $Sigma Delta $ digital-to-analog converter (DAC) with a three-level $(+1,~0,-1)$ dynamic-element-matching (DEM) technique and an inter-symbol interference-free (ISI) output stage is presented. Solutions for design challenges such as ISI, clock jitter sensitivity, and out-of-band noise are presented. The converter is fabricated in a 0.18 $mu{hbox {m}}$ CMOS process, occupies 0.55 ${hbox {mm}}^{2}$, achieves 108 dB dynamic range, $-98~{rm dB ~THD}+{rm N}$ while consumes a total of 1.1 mW per channel at 1.8 V supply.      

Impacts of $hbox{N}_{2}$ and $hbox{NH}_{3}$ Plasma Surface Treatments on High-Performance LTPS-TFT With High-$kappa$ Gate Dielectric

Low-temperature polycrystalline-silicon thin-film transistors (LTPS-TFTs) with high- $kappa$ gate dielectrics and plasma surface treatments are demonstrated for the first time. Significant field-effect mobility $mu_{rm FE}$ improvements of $sim$86.0% and 112.5% are observed for LTPS-TFTs with $hbox{HfO}_{2}$ gate dielectric after $hbox{N}_{2}$ and $ hbox{NH}_{3}$ plasma surface treatments, respectively. In addition, the $hbox{N}_{2}$ and $ hbox{NH}_{3}$ plasma surface treatments can also reduce surface roughness scattering to enhance the field-effect mobility $mu_{rm FE}$ at high gate bias voltage $V_{G}$, resulting in 217.0% and 219.6% improvements in driving current, respectively. As a result, high-performance LTPS-TFT with low threshold voltage $V_{rm TH} sim hbox{0.33} hbox{V}$, excellent subthreshold swing S.S. $sim$0.156 V/decade, and high field-effect mobility $mu_{rm FE} sim hbox{62.02} hbox{cm}^{2}/hbox{V} cdot hbox{s}$ would be suitable for the application of system-on-panel.      

A 5-Gbit/s Clock- and Data-Recovery Circuit With 1/8-Rate Linear Phase Detector in 0.18- ${rm mu}hbox{m}$ CMOS Technology

With a new 1/8-rate linear phase detector (PD), a 5-Gbit/s clock and data recovery (CDR) circuit is implemented in a digital 0.18- ${rm mu}hbox{m}$ CMOS technology. The outputs of the PD have much wider pulse than those of the conventional linear PDs. Thus, the design of circuits such as the PD and charge becomes much easier, and the maximum data rate is no longer limited by the speed of phase detection. The CDR shows 6.8-ps rms and 57.4-ps peak-to-peak jitter in the recovered clock and $10^{-12}$ bit error rate for $2^{31}-1$ pseudorandom binary-sequence input while consuming 144 mW from a 1.8-V supply.      

Investigation of Al-Doped Emitter on N-Type Rear Junction Solar Cells

This brief models the junction discontinuities of a rear Al-doped $ hbox{p}^{+}$ emitter $(hbox{np}^{+})$ formed by screen printing and firing. Theoretical fitting of the suns–$V_{rm oc}$ data to the circuit model shows that not only do the junction discontinuities deteriorate cell $V_{rm oc}$, for the case of p-type cells, but they also reduce cell fill factor on n-type cells through increased junction recombination and nonlinear shunts.      

Photosensitive Inverter and Ring Oscillator With Pseudodepletion Mode Load for LCD Applications

Photosensitive inverters and ring oscillators (ROs) with pseudodepletion mode loads (PDMLs) were integrated in LCD panels using conventional mass production processes. The delay time $(t_{rm pd})$ of five-stage ROs with PDML reduced from 204.3 $mu hbox{s}$ under dark to 16.3 $muhbox{s}$ under backlight illumination of 20 000 lx. The oscillation frequency exhibited a power-law dependence $(f_{rm osc} infty hbox{IL}^{gamma})$ on the backlight illuminance with the extracted fitting parameter $gamma = hbox{0.447}$ at room temperature.      

Improved Stress Reliability of Analog Metal–Insulator–Metal Capacitors Using $hbox{TiO}_{2}/hbox{ZrO}_{2}$ Dielectrics

We have studied the stress reliability of high-$kappa$ $hbox{Ni/TiO}_{2}/hbox{ZrO}_{2}/hbox{TiN}$ metal–insulator–metal capacitors under constant-voltage stress. The increasing $hbox{TiO}_{2}$ thickness on $hbox{ZrO}_{2}$ improves the 125-$^{circ}hbox{C}$ leakage current, capacitance variation $(Delta C/C)$, and long-term reliability. For a high density of 26 $hbox{fF}/mu hbox{m}^{2}$ , good extrapolated ten-year reliability of small $Delta C/ break C sim hbox{0.71}%$ is obtained for the $ hbox{Ni/10-nm-}hbox{TiO}_{2}/hbox{6.5-nm-} hbox{ZrO}_{2}/break hbox{TiN}$ device at 2.5-V operation.      

A Low-Power Low-Cost Fully-Integrated 60-GHz Transceiver System With OOK Modulation and On-Board Antenna Assembly

A fully-integrated 60-GHz transceiver system with on-board antenna assembly is presented. Incorporating on-off keying (OOK) and low-cost antenna designs, this prototype demonstrates a low-power solution for multi-Gb/s wireless communication. The enhanced OOK modulator/demodulator obviates baseband and interface circuitry, revealing a compact solution. Two antenna structures, folded dipole and patch array, are employed to fully examine the performance. Designed and fabricated in 90-nm CMOS technology, the transmitter and the receiver consume 183 and 103 mW and occupy 0.43 and 0.68 ${hbox {mm}}^{2}$, respectively. With 4 $times$ 3 patch antenna array, the transceiver achieves error-free operation $({hbox{BER}}<10^{-12})$ for $2^{31}-1$ PRBS of 1 Gb/s over a distance of 60 cm.      

A $Q$ -Band Four-Element Phased-Array Front-End Receiver With Integrated Wilkinson Power Combiners in 0.18-$mu{{hbox{m}}}$ SiGe BiCMOS Technology

A four-element phased-array front-end receiver based on 4-bit RF phase shifters is demonstrated in a standard 0.18- $mu{{hbox{m}}}$ SiGe BiCMOS technology for $Q$-band (30–50 GHz) satellite communications and radar applications. The phased-array receiver uses a corporate-feed approach with on-chip Wilkinson power combiners, and shows a power gain of 10.4 dB with an ${rm IIP}_{3}$ of $-$13.8 dBm per element at 38.5 GHz and a 3-dB gain bandwidth of 32.8–44 GHz. The rms gain and phase errors are $leq$1.2 dB and $leq {hbox{8.7}}^{circ}$ for all 4-bit phase states at 30–50 GHz. The beamformer also results in $leq$ 0.4 dB of rms gain mismatch and $leq {hbox{2}}^{circ}$ of rms phase mismatch between the four channels. The channel-to-channel isolation is better than $-$35 dB at 30–50 GHz. The chip consumes 118 mA from a 5-V supply voltage and overall chip size is ${hbox{1.4}}times {hbox{1.7}} {{hbox{mm}}}^{2}$ including all pads and CMOS control electronics.      

A Merged CMOS Digital Near-End Crosstalk Canceller and Analog Equalizer for Multi-Lane Serial-Link Receivers

A digital near-end crosstalk (NEXT) canceller merged with an analog equalizer for multi-lane serial-link receivers has been realized in 0.13 $mu{hbox {m}}$ CMOS technology. By applying the proposed sign-sign block least-mean-square (SSB-LMS) circuit, a 5 Gb/s pseudorandom binary sequence (PRBS) of 2 $^{31}-$1 suffered from both the channel loss and NEXT over 10- and 20-inch FR4 traces with the width of 5-mil and the spacing of 7-mil is successfully equalized. The measured bit error rate (BER) is 10$^{-12}$ and the measured maximum peak-to-peak jitter is 49.7 ps. This chip occupies 0.56 $,times,$0.76 $ {hbox {mm}}^{2}$ and the whole circuit including buffers consumes 177 mW from a 1.2 V supply.      

A 10-kV Monolithic Darlington Transistor With $beta_{ rm forced}$ of 336 in 4H-SiC

4H-SiC bipolar Darlington transistors with a record-high current gain have been demonstrated. The dc forced current gain was measured up to 336 at 200 $hbox{W/cm}^{2}$ ( $J_{C} = hbox{35} hbox{A/cm}^{2}$ at $V_{rm CE} = hbox{5.7} hbox{V}$) at room temperature. The current gain exhibits a negative temperature coefficient and remains as high as 135 at 200 $^{circ}hbox{C}$. The specific on-resistance is 140 $hbox{m}Omegacdothbox{cm}^{2}$ at room temperature and increases at elevated temperatures. An open-emitter breakdown voltage $(BV_{rm CBO})$ of 10 kV was achieved at a leakage current density of $≪hbox{1} hbox{mA/cm}^{2}$. The device exhibits an open-base breakdown voltage $(BV_{rm CEO})$ of 9.5 kV. The high current gain of SiC Darlington transistors can significantly reduce the gate-drive power consumption with the same forward-voltage drop as that of 10-kV SiC bipolar junction transistors, thus making the device attractive for high-power high-temperature applications.      

Electrical Properties of $hbox{Ga}_{2}hbox{O}_{3}/ hbox{GaAs}$ Interfaces and GdGaO Dielectrics in GaAs-Based MOSFETs

Electrical properties of $hbox{Ga}_{2}hbox{O}_{3}/hbox{GaAs}$ interfaces with GdGaO cap dielectrics used in recent enhancement-mode GaAs-based NMOSFETs which perform in line with theoretical model predictions are presented. Capacitors with GdGaO thickness ranging from 3.0 to 18 nm ($hbox{0.9} leq hbox{EOT} leq hbox{3.9} hbox{nm}$) have been characterized by capacitance–voltage measurements. Midgap interface state density $D_{rm it}$, effective workfunction $phi_{m}$, fixed charge $Q_{f}$, dielectric constant $kappa$, and low field leakage current density are $hbox{2} times hbox{10}^{11} hbox{cm}^{-2} cdot hbox{eV}^{-1}$, 4.93 eV, $-hbox{8.9} times hbox{10}^{11} hbox{cm}^{-2}$, 19.5, and $hbox{10}^{-9}{-} hbox{10}^{-8} hbox{A/cm}^{2}$, respectively. The presence of interfacial Gd was confirmed to dramatically degrade electrical interface properties. The data illuminate the intimate interplay between heterostructure and interface engineering to achieve optimum MOSFET operation.      

A 40 Gb/s CMOS Serial-Link Receiver With Adaptive Equalization and Clock/Data Recovery

This paper presents a 40 Gb/s serial-link receiver including an adaptive equalizer and a CDR circuit. A parallel-path equalizing filter is used to compensate the high-frequency loss in copper cables. The adaptation is performed by only varying the gain in the high-pass path, which allows a single loop for proper control and completely removes the RC filters used for separately extracting the high- and low-frequency contents of the signal. A full-rate bang-bang phase detector with only five latches is proposed in the following CDR circuit. Minimizing the number of latches saves the power consumption and the area occupied by inductors. The performance is also improved by avoiding complicated routing of high-frequency signals. The receiver is able to recover 40 Gb/s data passing through a 4 m cable with 10 dB loss at 20 GHz. For an input PRBS of 2 $^{7}-$1, the recovered clock jitter is 0.3 ps$_{rm rms}$ and 4.3 ps$_{rm pp}$. The retimed data exhibits 500 mV $_{rm pp}$ output swing and 9.6 ps$_{rm pp}$ jitter with ${hbox{BER}}≪ 10^{-12}$ . Fabricated in 90 nm CMOS technology, the receiver consumes 115 mW , of which 58 mW is dissipated in the equalizer and 57 mW in the CDR.