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介绍了一种可用于风速风向测量的光点位置检测传感器的结构、特点、工作原理,给出了传感器的理论模型,分析了传感器测量分辨率和灵敏度.该传感器在用于大风速测量有较高的测试灵敏度.在0~20 m/s测试量程内,测得风向的灵敏度为7 mV/度,风速的灵敏度为2.5 mv//μm..该传感器结构简单,工艺制作方便,能与CMOS工艺兼容,无温度漂移. 相似文献
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介绍了国内外风速风向传感器的发展现状,列举出几种风速风向传感器应用场合。为了提高低风速的测量精度,降低现有传感器的成本,提出了基于互相关原理的风速风向传感器的原理和实现。设计了恒流源供电的风速风向传感器、信号调理电路和电压转换电路;通过dsPIC30F4011芯片的A/D模块实现数据的采集处理;通过CAN模块实现系统的远程监控。软件实现上,采用高效实时互相关算法,节省了存储空间,提高了计算效率。实验结果表明,基于互相关原理的风速风向传感器可以实时准确地测得风速风向,对小于10 m/s风速的测量有较高的测量精度。 相似文献
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介绍了一种利用软件实现热式风速风向传感器恒温差模式(CTD)控制的方案。传感器系统采用单片机作为主控单元,对芯片温度和环境温度进行采样,并以此为依据调节输出功率,从而实现恒温差状态的控制。实验表明,采用这种软件控制方案,在无风状态下,在-20℃到40℃的环境温度变化范围内,热式风速风向传感器能够基本维持输出信号恒定不变。除此之外,该风速风向传感器系统还可以实现对0~20 m/s风速范围内的风速测量,最大测量误差不超过8%,并且具有低于15 s的响应速度。 相似文献
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超声波在顺逆风中传播速度不同,在距离一定的条件下,风在顺逆向传播存在时差,将超声波传感器按一定阵列布置,基于空间向量分析算法可以设计一种超声波三维风速风向测量装置。详细介绍了风速风向三维测量装置正三棱锥体传感器布置方案,阐述了硬件电路的总体框架图和各外围接口电路的设计,说明了超声波风速风向测量装置算法软件编程实现和计算控制流程。通过对装置主要功能模块的测试和实际风洞试验证明,超声波三维风速风向测量装置能够实时测量风速的大小和方向,满足风洞试验测试要求。 相似文献
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<正> 一、前言多通道风速风向智能化自动测量仪(以下简称“多风仪”),由于采用了单片机,仪器可靠性高,抗干扰性强,结构简单,体积小,成本低,智能强。该仪器可自动并行测量1~5个通道的风速和1个通道的风向。凡是输出频率量电压信号的风速传感器都可接入本仪器接口,经软件变换后进行风速测量。由于野外自然风的阵性变化较大,如对较多的测风点,用1个CTC计数器进行切换串行计数测量,这样测得的风场结构将会有一定的失真误差或使数据处理复杂。为消除该误差,获得各测点风的同时变化信息,我们应用单片机的PIO口,采用了多测点(多通道)并行同步测量方式。并且,为提高测量的可靠性和简化硬件,采用软件方法进行风的测量。就是说,用软件方法同时判读PIO各并行口(各通道)电平高低,进行逻辑分析运算,对各通道的风速(风向)同时 相似文献
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给出一种能在低流速范围有较高灵敏度的液体流量传感器。在测量水的情形下,当流速为1cm/s时传感器的输出可达30mV,该灵敏度比类似条件下氮气敏感的灵敏度高约一个数量级。该传感器利用维持芯片温度恒定所需的加热功率的变化作为流速的量度。它由标准的铝栅CMOS工艺制成。 相似文献
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Guang-Ping Shen Ming Qin Qing-An Huang Hua Zhang Jian Wu 《Microsystem Technologies》2010,16(4):511-518
A two dimensional wind sensor was designed, fabricated and packaged on ceramic substrate instead of silicon substrate. The
Ti/Pt heater and thermistors were fabricated using single lift-off process. The gold bumps were then sputtered and patterned
on the chip using lift-off process again. Correspondingly, the Pb/Sn bumps were fabricated on the FR4 substrate using stencil
printing method after metallization. The sensor chip was flip-chip packaged on the FR4 substrate, and the gap was filled with
epoxy-based underfill to improve the structure strength. The packaged sensor was tested in wind tunnel in constant power mode.
The wind velocity and direction offsets of the sensor were compensated using software and hardware calibration. Both the simulation
and test results show that the thermal wind sensor can measure wind speeds up to 8 m/s with an accuracy of 0.3 m/s, and wind
direction in a full range of 360° with a resolution within 5°. 相似文献
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Yan-qing Zhu Bei Chen Di Gao Ming Qin Qing-an Huang Jian-qiu Huang 《Microsystem Technologies》2016,22(1):151-162
In this paper, the design, fabrication, and characterization of a robust and low-power micro-machined two-dimensional (2-D) wind sensor based on a glass-in-silicon reflow process are presented for the first time. The four thermistors, which act simultaneously as heat sources and as temperature sensors, are placed on a low thermal conductivity glass substrate, and arranged in a Wheatstone bridge configuration supplied with constant voltage. In this self-heated mode, the total power consumption of the sensor could be reduced into the sub-milliwatt range, offering high initial sensitivity and wide measurement range, respectively. The embedded vertical silicon vias in the glass substrate are used to realize the electrical connections between the sensing elements and the electrode-pads, which are respectively placed on the front and the back surface of the chip. Then, the sensor and the external circuit are connected using the wire-bonding process through the electrode-pads on the back surface. The bonding wires at the backside is encapsulated by polyester paint, protecting the electrical connections of the sensor from the effect of the external environment. In addition, a passivation layer of nitride is deposited on the surface of the wind sensor to prevent direct exposure of the sensing elements to harsh media. The sensor was tested in a wind tunnel in constant voltage mode. Measurement results show that the thermal wind sensor can measure wind speeds up to 17.5 m/s, and the measured sensitivities of the sensor with different applied voltages (0.5, 1, 1.5 V) are, respectively 24.9, 148.3 and 440.61 mV/(m/s) at zero-flow point. The corresponding power consumption of the sensor with different voltages are respectively 4.81, 19.23 and 43.27 mW. Measurement results also show that wind direction in a full range of 360° with an err within 6° could be obtained. The proposed sensor can be used for many applications with a low power consumption and high reliability. 相似文献
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风向测量值是控制风力发电机偏航的依据。风向测量值和原始风向值之间通常会存在偏差,这是影响风力发电机风能捕捉效率的主要因素之一。受风力发电机结构限制,机舱上的风向标难以准确测量风向。分析了风向测量误差产生原因,叙述了风向测量值和原始风向值之间的数学关系。风向软测量技术是降低风向测量偏差的有效方法。简述了风向软测量技术的传统方法。传统风向软测量方法可以显著减小测量误差,但计算量大,风力发电机翼型参数精度要求高,不适合工程使用。针对传统风向软测量技术的不足,提出了小脑神经网络(CMAC)软测量方法。该方法降低了风向测量的计算量,进一步提高了风向测量精度。实践证明了该方法的可行性。 相似文献
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一种集成式多参数硅微传感器 总被引:1,自引:1,他引:0
为了实现小体积多参数的测量,提出一种单片集成多功能传感器.该传感器包括压力、温度和湿度传感器.各部分分别基于半导体压阻效应、电阻迁移率变化、极板间电容变化为原理制作而成.该传感器采用n型(100)基底,利用体硅和面硅工艺加工而成.测量电阻通过离子注入B 形成扩散电阻.为减小各参数间的相互影响,压力传感器的测量电阻布置于[110]晶向,测温电阻沿[100]晶向布置.温度输出信号可以实现对传感器中压力输出时温度漂移的精确补偿.芯片大小为5mm× 5 mm.试验表明传感器具有良好的线性,小迟滞,较高的灵敏度. 相似文献
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介绍了以温度传感器TMP04为检测器件的风速传感器的测量方法。系统以单片机AT89C51为核心,由风速传感器采集数据,单片机接收并处理数据,LED数码管显示测量风速值。采用分段插值法进行非线性数据处理;描述了电路设计和软件实现。由于采用了数字温度传感器做检测器件,省去了放大电路和A/D转换器,测量电路与单片机接口简单,编程处理简单。 相似文献