Characteristics of a Pd–oxide–In0.49Ga0.51P high electron mobility transistor (HEMT)-based hydrogen sensor

An interesting hydrogen sensor based on a high electron mobility transistor (HEMT) device with a Pd–oxide–In_0.49Ga_0.51P gate structure is fabricated and demonstrated. The hydrogen sensing characteristics including hydrogen detection sensitivity and transient responses of the studied device under different hydrogen concentrations and temperature are measured and studied. The hydrogen detection sensitivity is related to a change in the contact potential at the Pd/insulator interface. The kinetic and thermodynamic properties of hydrogen adsorption are also studied. Experimentally, good hydrogen detection sensitivities, large magnitude of current variations (3.96 mA in 9970 ppm H₂/air gas at room temperature) and shorter absorption response time (22 s in 9970 ppm H₂/air gas at room temperature) are obtained for a 1.4 μm × 100 μm gate dimension device. Therefore, the studied device provides a promise for high-performance solid-state hydrogen sensor, integrated circuit (IC) and micro electro-mechanical system (MEMS) applications.     

Design,simulation and validation of a novel uncooled infrared focal plane array

This paper describes a novel single-layer bi-material cantilever microstructure without silicon (Si) substrate for focal plane array (FPA) application in uncooled optomechanical infrared imaging system (UOIIS). The UOIIS, responding to the radiate infrared (IR) source with spectral range from 8 to 14 μm, may receive an IR image through visible optical readout method. The temperature distribution of the IR source could be obtained by measuring the thermal–mechanical rotation angle distribution of every pixel in the cantilever array, which is consisted of two materials with mismatching thermal expansion coefficients. In order to obtain a high detection to the IR object, gold (Au) film is coated alternately on silicon nitride (SiN_x) film in the flection beams of the cantilevers. And a thermal–mechanical model for such cantilever microstructure is proposed. The thermal and thermal–mechanical coupling field characteristics of the cantilever array structure are optimized through numerical analysis method and simulated by using the finite element simulation method. The thermal–mechanical rotation angle simulated and thermal–mechanical sensitivity tested in the experiment are 2.459 × 10⁻³ and 3.322 × 10⁻⁴ rad/K, respectively, generally in good agreement with what the thermal–mechanical model and numerical analysis forecast, which offers an effective reference for FPA structure parameters design in UOIIS.     

All-optical hydrogen sensor based on a high alloy content palladium thin film

Optical reflectance measurements were performed to determine the hydrogen response characteristics of 20 nm thick Pd_0.6Au_0.4 films. The response time and signal change characteristics were determined as a function of hydrogen concentrations ranging from 0.05% to 4% in a balance of dry CO₂ free air. The detection limit was determined to be 0.05%, with a corresponding response time of 130 s, while at 4% hydrogen concentrations the response time was 5 s at ambient temperatures. A linear decrease of both the signal change and response time was measured within an operating temperature range between 25 °C and 100 °C for a 1% hydrogen in air gas mixture. The sensor response dependence of the Pd_0.6Au_0.4 film with a change in humidity was determined between ambient levels and 95% relative humidity (RH). While the signal change was independent of humidity the response time increased due to water adsorption on the Pd alloy sensing layer. A similar increase in response time was shown for 100 ppm of background CO mixed with 1% hydrogen in nitrogen at room temperature. At an elevated operating temperature of 80 °C, 100 ppm of CO did not affect the sensor response towards 1% hydrogen in a balance of nitrogen. Reliability tests have been performed over a 1-year time period and the sensing specifications have not drifted beyond 2% and 13% of the calibrated signal change and response time, respectively. A response time on the order of seconds and the proven stability of the high alloy content Pd thin film demonstrate the promising attributes of this material for use in an all-optical hydrogen sensor.     

Electrostatically actuated dip pen nanolithography probe arrays

Dip pen nanolithography (DPN) is a method of creating nanoscale chemical patterns on surfaces using an atomic force microscope (AFM) probe. Until now, efforts to increase the process throughput have focused on passive multi-probe arrays and active arrays based on thermal bimetallic actuation. This paper describes the first use of electrostatic actuation to create an active DPN probe array. Electrostatic actuation offers the benefit of actuation without the probe heating required for thermal bimetallic actuation. Actuator cross talk between neighboring probes is also reduced, permitting more densely spaced probe arrays. The array presented here consists of 10 cantilever probes, where each is 120 μm long and 20 μm wide. Each cantilever probe is actuated by the electrostatic force between the probe and a built-in counter electrode with a 20–25 μm gap. The tip-to-tip probe spacing, also called the array pitch, is 30 μm. Patterns of 1-octadecanethiol were created on gold surfaces to demonstrate single-probe actuation, simultaneous multi-probe actuation, and overlap of patterns from adjacent probes. The minimum line width was 25 nm with an average line width of 30–40 nm.     

Moisture sensor at glass/polymer interface for monitoring of photovoltaic module encapsulants

A sensor developed for measurement of water concentration inside glass/polymer encapsulation structures with a particular application area in accelerated aging of photovoltaic module encapsulants is described. An approximately 5 μm thick porous TiO₂ film applied to a glass substrate with a conductive coating acts as the moisture-sensitive component. The response is calibrated with weather chamber experiments for sensors open to the environment and with diffusion experiments for sensors laminated under an encapsulant. For the interpretation of diffusion experiment results, a transport model describing the diffusion of water across the polymer/TiO₂ interface is developed. The logarithm of AC resistance shows a linear dependence on water concentration in both open and encapsulated calibration. The first measurable response from an encapsulated 3.5 mm × 8 mm size sensor is obtained when approximately 10 μg of water has entered the film. Implications of the calibration results for sensor usage in accelerated aging tests are discussed.     

Development of a mercury optical sensor based on immobilization of 4-(2-pyridylazo)-resorcinol on a triacetylcellulose membrane

A new optical sensor for mercury(II) ions is developed based on immobilization of 4-(2-pyridylazo)-resorcinol (PAR) on a triacetylcellulose membrane. Chemical binding of Hg²⁺ ions in solution with a PAR immobilized on the triacetylcellulose surface could be monitored spectrophotometrically at 525 nm. The optode shows excellent response over a wide concentration range of 5–3360 μM Hg(II) with a limit of detection of 1.5 μM Hg(II). The influence of factors responsible for the improved sensitivity of the sensor were studied and identified. The response time of the optode was 20 min for a stable solution, and was 15 min for a stirrer solution. The influence of potential interfering ions on the determination of 5 × 10⁻⁵ M Hg(II) was studied. The sensor was applied for determination of Hg(II) in water samples.     

Passive single chip wireless microwave pressure sensor

A novel micromachined passive wireless pressure sensor is presented. The device consists of a tuned circuit operating at 10 GHz fabricated on to a SiO₂ membrane, supported on a silicon wafer. A pressure difference across the membrane causes it to deflect so that an antenna circuit detunes. The circuit is remotely interrogated to read off the sensor data wirelessly. The chip area is 5 mm × 4 mm and the membrane area is 2 mm² with a thickness of 4 μm. Two on-chip passive resonant circuits were investigated: a meandered dipole and a zigzag antenna. Both have a physical length of 4.25 mm. The sensors show a shift in their resonant frequency in response to changing pressure of 10.28–10.27 GHz for the meandered dipole, and 9.61–9.58 GHz for the zigzag antenna. The sensitivities of the meandered dipole and zigzag sensors are 12.5 kHz/mbar and 16 kHz/mbar respectively.     

Thin film temperature sensor for real-time measurement of electrolyte temperature in a polymer electrolyte fuel cell

This paper describes a technique for the measurement of the electrolyte temperature in an operating polymer electrolyte fuel cell (PEFC). A patterned thin film gold thermistor embedded in a 16 μm thick parylene film was laminated in the Nafion^® electrolyte layer for in situ temperature measurements. Experimental results show that the sensor has a linear response of (3.03 ± 0.09) × 10⁻³ °C⁻¹ in the 20–100 °C temperature range and is robust enough to withstand the electrolyte expansion forces that occur during water uptake. An electrolyte temperature increase of 1.5 °C was observed in real-time when operating the fuel cell at 0.2 V and a current density of 0.19 A/cm². The temperature sensitivity of the present sensor is in an order of magnitude better than the conventional micro-thermocouples that have been reported. Additionally, use of micro-fabrication techniques allows for an accurate placement of the temperature sensor within the fuel cell. Simulation results show that the sensor has no significant effect on the local temperature distribution.     

A micro shear stress sensor based on laterally aligned carbon nanotubes

This paper reports the development of a micro thermal shear stress sensor that utilizes multiwalled carbon nanotubes as the sensing element. The sensor was fabricated by laterally aligning randomly distributed nanotubes into a 360 μm long and 90 μm wide conductive trace between two triangular shaped micro electrodes through the use of a high frequency AC electric field. During operation, the aligned nanotubes are electrically heated to an elevated temperature and surface shear stress is measured indirectly by the amount of convective heat transfer from the heated nanotubes to the surrounding fluid flow.The nanotube alignment process was primarily controlled by three different phenomena: dielectrophoresis, joule heating, and Brownian motion. Numerical simulations, together with experimental verifications, indicated that a successful alignment could only be realized if: (1) the dielectrophoretic force was positive, (2) the electro-thermal force was also positive, and (3) the dielectrophoretic force was high enough to overcome Brownian motion. The aligned nanotube trace has a room-temperature resistance of 580 Ω, which corresponds to a conductivity of 2.7 × 10⁴ S/m. The absolute temperature coefficient of resistivity ranges from 0.01 to 0.04% °C⁻¹. This is about one order of magnitude smaller than the highly doped polysilicon sensing material used in the MEMS micro shear stress sensor. The shear stress sensitivity of the nanotube trace operated at a 3% overheat ratio is found to follow the theoretical sensor power ∝ (shear stress)^1/3 relationship, provided the shear stress level is higher than 0.34 mPa. This result confirms the feasibility of using aligned multi-walled carbon nanotubes as a thermal shear stress sensing material.     

Spin-valve planar Hall sensor for single bead detection

The planar Hall effect (PHE) sensor with a junction size of 3 μm × 3 μm for a single micro-bead detection has been fabricated successfully using a typical spin-valve thin film Ta(5)/NiFe(16)/Cu(1.2)/NiFe(2)/IrMn(15)/Ta(5) nm. The PHE sensor exhibits a sensitivity of about 7.2 μV Oe^?1 in the magnetic field range of ±7 Oe approximately. We have performed an experiment to illustrated the possibility of single micro-bead detection by using a PHE sensor. A single micro-bead of 2.8 μm diameter size is secluded from 0.1% dilute solution of the Dynabeads^® M-280 dropped on the sensor surface and is located on the sensor junction by using a micro magnetic needle. The comparison of the PHE voltage profiles in the field range from 0 to 20 Oe in the absence and presence of a single micro-bead identifies a single Dynabeads^® M-280, the maximal signal change as large as ΔV ～ 1.1 μV can be obtained at the field ～6.6 Oe. The results are well described in terms of the reversal of a basic single domain structure.     

Electroactive polymer based microfluidic pump

A planar, valveless, microfluidic pump using electrostrictive poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] based polymer as the actuator material is presented. P(VDF-TrFE) thick films having a large electrostrictive strain ∼5–7% and high elastic energy density of 1 J/cm³ have been used in a unimorph diaphragm actuator configuration. The microfluidic pump was realized by integrating a nozzle/diffuser type fluidic mechanical-diode structure with the polymer microactuator. The P(VDF-TrFE) unimorph diaphragm actuator, 80 μm thick and 2.2 mm × 2.2 mm in lateral dimensions, showed an actuation deflection of 80 μm for an applied electric field of 90 MV/m. The microfluidic pump could pump methanol at a flow rate of 25 μl/min at 63 Hz with a backpressure of 350 Pa. The flow rate of this pump could be easily controlled by external electrical field. Two different sizes of nozzle/diffuser elements were studied and the pumping efficiency of these structures is 11 and 16%, respectively.     

Using of hydrogen ion-selective poly(vinyl chloride) membrane electrode based on calix[4]arene as thiocyanate ion-selective electrode

A hydrogen ion-selective electrode (ISE) is prepared by using 5,11,17,23-tetra-tert-butyl-25,26,27,28-tetracyanometoxy-calix[4]arene and an investigation about whether it could be used as a thiocyanate ion-selective electrode is made by using its characteristic of becoming thiocyanate sensitive in acidic regions. The electrode of the optimum characteristic has a composition of 1% ionophore, 66% 2-NPOE and 33% poly(vinyl chloride) (PVC). This electrode exhibits a linear response over the range 1.0 × 10⁻¹ to 3.0 × 10⁻⁵ M of thiocyanate with a slope of 52.0 ± 0.2 mV/pSCN. The effects of the pH and the membrane composition are also investigated. The lifetime of the electrode is at least 4 months and its response time is found to be 10–15 s. The selectivity coefficients of some anions are calculated by using mixed solution interference method. Application of the electrode to the potentiometric titration of thiocyanate ion with silver nitrate is reported. There is a good agreement between the results obtained by the proposed electrode and the Mohr method at 95% confidence level.     

Chromium(III)-selective sensor based on tri-o-thymotide in PVC matrix

Tri-o-thymotide (I) has been used as an electroactive material in PVC (poly(vinyl chloride)) matrix for fabrication of chromium(III)-selective sensor. The membrane containing tri-o-thymotide, sodium tetraphenyl borate (NaTPB), dibutyl phthalate (DBP) and PVC in the optimum ratio 5:1:75:100 (w/w) exhibits a working concentration range of 4.0 × 10⁻⁶ to 1.0 × 10⁻¹ M with a Nernstian slope of 20.0 ± 0.1 mV/decade of activity in the pH range of 2.8–5.1. The detection limit of this sensor is 2.0 × 10⁻⁷ M. The electrode exhibits a fast response time of 15 s, shows good selectivity towards Cr³⁺ over a number of mono-, bi- and trivalent cations and can also be used in partially non-aqueous medium (up to 15%, v/v) also. The assembly has been successfully used as an indicator electrode in the potentiometric titration of chromium(III) against EDTA and also to determine Cr(III) quantitatively in electroplating industry waste samples.     

Mechanical design and characterization of a resonant magnetic field microsensor with linear response and high resolution

A resonant magnetic field microsensor based on Microelectromechanical Systems (MEMS) technology including a piezoresistive detection system has been designed, fabricated, and characterized. The mechanical design for the microsensor includes a symmetrical resonant structure integrated into a seesaw rectangular loop (700 μm × 450 μm) of 5 μm thick silicon beams. An analytical model for estimating the first resonant frequency and deflections of the resonant structure by means of Rayleigh and Macaulay's methods is developed. The microsensor exploits the Lorentz force and presents a linear response in the weak magnetic field range (40–2000 μT). It has a resonant frequency of 22.99 kHz, a sensitivity of 1.94 V T^?1, a quality factor of 96.6 at atmospheric pressure, and a resolution close to 43 nT for a frequency difference of 1 Hz. In addition, the microsensor has a compact structure, requires simple signal processing, has low power consumption (16 mW), as well as an uncomplicated fabrication process. This microsensor could be useful in applications such as the automotive sector, the telecommunications industry, in consumer electronic products, and in some medical applications.     

Evaluation of response characteristics of resistive oxygen sensors based on porous cerium oxide thick film using pressure modulation method

In order to reduce the response time of resistive oxygen sensors using porous cerium oxide thick film, it is important to ascertain the factors controlling response. Pressure modulation method (PMM) was used to find the rate-limiting step of sensor response. This useful method measures the amplitude of sensor output (H(f)) for the sine wave modulation of oxygen partial pressure at constant frequency (f). In PMM, “break” response time, which is minimum period in which the sensor responds precisely, can be measured. Three points were examined: (1) simulated calculations of PMM were carried out using a model of porous thick film in which spherical particles are connected in a three-dimensional network; (2) sensor response speed was experimentally measured using PMM; and (3) the diffusion coefficient and surface reaction coefficient were estimated by comparison between experiment and calculation. The plot of log f versus log H(f) in the high f region was found to have a slope of approximately −0.5 for both porous thick film and non-porous thin film, when the rate-limiting step was diffusion. Calculations showed the response time of porous thick film was 1/20 that of non-porous thin film when the grain diameter of the porous thick film was the same as the thickness of non-porous thin film. At 973 K, “break” response time (t_b) of the resistive oxygen sensor was found by experiment to be 109 ms. It was concluded that the response of the resistive oxygen sensor prepared in this study was strongly controlled by diffusion at 923–1023 K, since the experiment revealed that the slope of plot of log f versus log H(f) in the high f region was approximately −0.5. At 923–1023 K, the diffusion coefficient of oxygen vacancy in porous ceria (D_V) was expressed as follows: D_V (m²s⁻¹) = 5.78 × 10⁻⁴ exp(−1.94 eV/kT). At 1023 K, the surface reaction coefficient (K) was found to exceed 10⁻⁴ m/s.     

Device characteristics for Pt–Ti–O gate Si–MISFETs hydrogen gas sensors

A novel Pt–Ti–O-gate Si–metal–insulator–semiconductor field-effect transistor (MISFET) hydrogen gas sensor has been proposed by Usagawa and Kikuchi (2010) [1]. The sensors consist of unique gate structures composed of Ti and oxygen accumulated regions around Pt grains on top of a novel mixing layer of nanocrystalline TiO_x and superheavily oxygen-doped amorphous Ti formed on SiO₂/Si substrates. The optimum Pt/Ti thickness and annealing conditions for most hydrogen safety monitoring sensor systems are obtained by annealing Pt(15 nm)/Ti(5 nm)-gate Si–MOS structures in air around 400 °C for 2 h. One of the advantages of the Pt–Ti–O-gate Si–MISFETs after 10 min of air-diluted 1000-ppm hydrogen exposure at 115 °C are reproducible and uniform threshold voltage of V_th in addition to large sensing amplitudes at a practically important hydrogen concentration range between 100 ppm and 1%. The analysis of device characteristics of the Pt–Ti–O-gate Si–MISFETs hydrogen sensors concludes that the oxidation process of the Ti layer is consistently explained by an oxidation model that the oxygen invasion into Ti layer comes from open air through Pt grain boundaries and at the same time Ti will evacuate into the Pt surface through Pt grain boundaries. During the course of this process, the invading oxygen will be balanced with the evacuating Ti so that the Ti layer keeps nearly the same thickness with the as grown states. Ti and oxygen will remains around Pt grains named Ti and oxygen merged corridors.     

Investigation of Ni-based thermal bimaterial structure for sensor and actuator application

Thermal bimaterial structures made of Ni and Ni-diamond nanocomposite for sensor and actuator application are proposed, fabricated, and tested. Two deflection types of thermal bimaterial structures, including upward and downward bending types, can be easily fabricated by controlling electroplating sequence of Ni and Ni-diamond nanocomposite. According to thermal performance measurement, the tip deflection of upward and downward types can reach about 82.5 μm and ?22.5 μm for a temperature change of 200 °C, respectively. In the condition, the thermomechanical sensitivity and output force are 412.5 nm/K and 97.0 μN for upward type thermal bimaterial structure; and ?112.5 nm/K and ?26.5 μN for downward type one. Due to the low electroplating process temperature (～50 °C) for both Ni-based layers, diminutive pre-deformation of as-fabricated structure and strong interlaminar bonding strength are verified by SEM and vibrational test. The resonant frequency of the structure remains unchanged after 10⁹ cycles.     

An uncooled optically readable infrared imaging detector

This paper presents a design and fabrication of bi-material micro-cantilever array (focal plane array, FPA) made of silicon nitride (SiN_x) and gold (Au) for uncooled optical readout infrared (IR) imaging system, in which silicon (Si) substrate is removed. Compared with the conventional thermal imaging detectors where the FPA must be put in high vacuum, IR thermal images can be obtained even though the cantilever array is placed in the atmosphere. The reason is the elimination of air gap (∼2 μm) between the cantilever beam and substrate, which introduces the air conduction of high temperature gradient. The preliminary experimental results with the micro-cantilever array of 140 × 98 elements and a 12-bit charge-coupled device (CCD) indicate that objects at temperature of higher than 120 °C can be detected and the noise-equivalent temperature difference (NETD) is ∼7 K. Also, the experimental results are well accordant with the thermomechanical analysis of designed micro-cantilever array.     

Design of embedded TCAM based longest prefix match search engine

The content addressable memory (CAM) based solutions are very useful in network applications due to its high speed parallel search mechanism. This paper presents a novel Ternary CAM (TCAM) based NAND Pseudo CMOS–Longest Prefix Match (NPC–LPM) search engine. The proposed system provides a simple hardware based solution using novel 11T TCAM cell structures and NPC word line technique, for network routers. The experiments were performed on 256 × 128 NPC–LPM system under 0.13 μm technology. The simulation result shows that the proposed design provides low power dissipation of 5.78 mW and high search speed of 315 MSearches/s under 1.3 V supply voltage. The presented NPC–LPM system meets the speed requirement of Optical Carrier (OC) 3072 with line-rate of 160 Gb/s in Ethernet networking and IPv6 protocol. The experimental results also show that the proposed system improves power-performance by 65%.     

Electrochemical determination of ascorbic acid in fruits on a vanadium oxide polypropylene carbonate modified electrode

A novel vanadium oxide polypropylene carbonate modified glassy carbon electrode was developed and used for the measurement of ascorbic acid (AA). The electrode was prepared by casting a mixture of vanadium tri(isopropoxide) oxide (VO(OC₃H₇)₃) and poly(propylene carbonate) (PPC) onto the surface of a glassy carbon electrode. The electrochemical behavior of the VO(OC₃H₇)₃–PPC film modified glassy carbon electrode was investigated by cyclic voltammetry and amperometry. This modified electrode exhibited electrocatalytic response to the oxidation of ascorbic acid. Compared with a bare glassy carbon electrode, the modified electrode exhibits a 220 mV shift of the oxidation potential of ascorbic acid in the cathodic direction and a marked enhancement of the current response. The response current revealed a good linear relationship with the concentration of ascorbic acid in the range of 4 × 10⁻⁸ and 1 × 10⁻⁴ mol L⁻¹ and the detection limit of 1.5 × 10⁻⁸ mol L⁻¹ (S/N = 3) in the pH 8.06 Britton–Robinson solution. Quantitative recovery of the ascorbic acid in synthetic samples has been obtained and the interferences from different species have been studied. The method has been successfully applied to the determination of ascorbic acid in fruits. The concentrations of ascorbic acid measured by this method are in good agreement with the literature value. It is much promising for the modified films to be used as an electrochemical sensor for the detection of ascorbic acid.