Mg-Al共掺杂ZnO薄膜的制备及其光学特性

采用溶胶-凝胶（sol—gel）旋涂法在载玻片上制备了不同A1掺杂量的Mg—Al共掺杂ZnO薄膜．在室温下利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）和光致发光（PL）谱仪等手段分析了Mg—Al共掺杂Zn0薄膜的微结构、形貌和发光特性．XRD结果表明Mg．AI＆掺杂zn0薄膜具有六角纤锌矿结构;随着Al掺杂量的增加,共掺杂薄膜呈C轴取向生长．由SEM照片可知薄膜表面形貌随Al掺杂量的增加由颗粒状结构向纳米棒状结构转变．透射光谱表明共掺杂薄膜在可见光区内的透射率大于50％,紫外吸收边发生蓝移．在室温下的PL谱表明Mg—Al共掺杂zn0薄膜的紫外发射峰向短波长方向移动：Al掺杂摩尔分数为1％和3％的Mg—Al共掺杂ZnO薄膜的可见发射峰分别为596nm的黄光和565nm的绿光．黄光主要与氧间隙有关,而绿光主要与氧空位有关．     

Structural, Morphological and Optical Properties of ZnO Thin Films Grown on γ-LiAlO2 Substrate by Pulsed Laser Deposition

ZnO thin films were deposited on the substrates of (100) γ-LiAlO2 at 400, 550 and 700℃ using pulsed laser deposition (PLD) with the fixed oxygen pressure of 20 Pa, respectively. When the substrate temperature is 400℃, the grain size of the film is less than 1 μm observed by Leitz microscope and measured by X-ray diffraction (XRD). As the substrate temperature increases to 550℃, highly-preferred c-orientation and high-quality ZnO film can be attained.While the substrate temperature rises to 700℃, more defects appears on the surface of film and the ZnO films become polycrystalline again possibly because more Li of the substrate diffused into the ZnO film at high substrate temperature. The photoluminescence (PL) spectra of ZnO films at room temperature show the blue emission peaks centered at 430 nm. We suggest that the blue emission corresponds to the electron transition from the level of interstitial Zn to the valence band. Meanwhile, the films grown on γ-LiAlO2 (LAO) exhibit green emission centered at 540 nm, which seemed to be ascribed to excess zinc and/or oxygen vacancy in the ZnO films caused by diffusion of Li from the substrates into the films during the deposition.     

Influence of incorporation of Al3+ ions on the structural, optical and AC impedance characteristics of spin coated ZnO thin films

Aluminium doped zinc oxide thin films were deposited onto glass substrate using spin coating technique. The effects of Al doping on structural, optical and electrical properties of these films were investigated. X-ray diffraction analysis showed that all the thin films were of polycrystalline hexagonal wurtzite structure with (002) as preferential orientation except 2 at.% of Al doped ZnO films. The optical band gap was found to be 3.25 eV for pure ZnO film. It increases up to 1.5 at.% of Al doping (3.47 eV) and then decreased slightly for the doping level of 2 at.% (3.42 eV). The reason for this widening of the optical band gap up to 1.5 at.% is well described by Burstein–Moss effect. The photoluminescence spectra of the films showed that the blue shift and red shift of violet emission were due to the change in the radiative centre between zinc vacancy and zinc interstitial. Variation in ZnO grain boundary resistance against the doping concentration was observed through AC impedance study.     

Optical and field emission characteristics of anodic aluminium oxide/ZnO hybrid nanostructure

Arrays of ZnO nanowires (NWs) were fabricated within the well-distributed pores of anodic aluminium oxide (AAO) template by a simple chemical method. The photoluminescence (PL) and field emission (FE) properties of the AAO/ZnO NWs hybrid structure were investigated in detail. The hybrid nanostructure exhibits interesting PL characteristics. ZnO NWs exhibit UV emission at 378 nm and two prominent blue-green emissions at about 462 and 508 nm. Intense blue emission from the AAO template itself was observed at around 430 nm. Herein, for the first time we report the FE characteristics of the ZnO/AAO hybrid structure to show the influence of the AAO template on the FE property of the hybrid structure. It is found that the turn-on electric field of the vertically grown and aligned ZnO NWs within the pores of AAO template is lower than the entangled unaligned ZnO NWs extracted from the template. Although the AAO template exhibits no FE current but it helps to achieve better FE property of the ZnO NWs through better alignment. The turn-on electric field of aligned NWs was found to be 3 V μm⁻¹ at a current of 0.1 μA. Results indicate that the AAO embedded ZnO NW hybrid structure may find useful applications in luminescent and field emission display devices.     

ZnO纳米棒Al掺杂和A1,N共掺杂的制备技术与光致发光性能

采用水热法首先合成了Al掺杂ZnO(AZO)纳米棒,在此基础上通过550℃的氨气氛中退火制备了Al,N共掺杂ZnO(ANZ())纳米棒.运用X射线衍射(XRD),场发射扫描电镜(FESEM),透射电子显微镜(TEM),X射线能谱(EDS)和光致发光(PL)对样品进行了表征与分析.结果表明,制备的AZO和ANZ()纳米棒...     

Influence of the annealing temperature on violet emission of ZnO films obtained by oxidation of Zn film on quartz glass

The photoluminescence (PL) emission properties of ZnO films obtained on quartz glass substrate by the oxidation of Zn films with the oxygen pressure of 50Pa at temperature of 773 K~973 K were studied. The strong single violet emission centering on 424 nm (or 2.90 eV) without any accompanying deep-level emission and UV emission was observed in the PL spectra of the ZnO films at room temperature. The intensity of violet emission increased with increasing annealing temperature in the range of 773 K~873 K and decreased with increasing annealing temperature in the range of 873 K~973 K. These violet emission bands are attributed to the electron transition from interstitial zinc (Zn_i) level (2.91 eV) to the valence band.     

纳米孔氮化镓材料的制备和研究

介绍了一种在氮化镓外延片表面制备得到孔径为纳米量级的多孔结构的工艺.用电化学方法制备出孔径为纳米量级的多孔阳极氧化铝模板作为掩模,经过电感耦合等离子体(ICP)刻蚀制备得到纳米孔氮化镓材料.孔的大小和孔间距可以通过改变阳极氧化条件来控制,改变刻蚀时间可以控制孔深.刻蚀所用气体为氯气和惰性气体的混合物.扫描电镜照片显示,掩模图形能够很好地转移到GaN材料上.刻蚀后的材料经光荧光谱(PL Spectra)谱和Raman散射谱测试,显示出良好的光学特性,并在一定程度上释放了应力.     

Optical and magnetic properties of Mn doped ZnO thin films grown by SILAR method

Polycrystalline Mn doped ZnO (MZO) semiconductor thin films were deposited onto glass substrates employing different number of dipping at room temperature using Successive Ionic Layers by Adsorption Reaction (SILAR) technique. The thin film deposition conditions were optimized by altering the various deposition parameters based on their structure. The structural study was carried out using X-ray diffractometer (XRD). The XRD analysis indicated that there is no change in the structure of ZnO thin films due to Mn doping. The films exhibited hexagonal wurtzite structure. The structural studies on Mn doped samples revealed that the predominant orientation is (002) lattice plane and the position of this orientation shifted toward lower angle during doping. The intensity of photoluminescence (PL) emission of ZnO is found to be augmented for Mn doped samples. The room temperature Raman spectra measurements revealed the presence of additional modes. The Vibrating Sample Magnetometer (VSM) studies show that MZO thin film has ferromagnetic properties.     

Effects of sapphire substrates surface treatment on epitaxial ZnO thin films grown by MOCVD

The surface treatment effects of sapphire substrate on the quality of epitaxial ZnO thin films grown by metal-organic chemical vapor deposition (MOCVD) were studied. The sapphire substrates have been investigated by means of atomic force microscopy (AFM) and X-ray diffraction rocking curves (XRCs). The results show that sapphire substrate surfaces have the best-quality by CMP with subsequent chemical etching. The surface treatment effects of sapphire substrate on the ZnO thin films were examined by X-ray diffraction (XRD), atomic force microscopy (AFM) and photoluminescence (PL) measurements. Results show that the intensity of (002) diffraction peak of ZnO thin films on sapphire substrates treated by CMP with subsequent chemical etching is strongest. FWHM of (002) diffraction peak is narrowest and the intensity of UV peak of PL spectrum is strongest, indicating surface treatment on sapphire substrate preparation may improve ZnO thin films crystal quality and photoluminescent property.     

氧氩比对磁控溅射ZnO薄膜结构及光致发光性能的影响

采用射频反应磁控溅射法以不同的氧氩比在玻璃衬底上制备了ZnO薄膜,并对薄膜进行了退火处理;利用X射线衍射仪（XRD）和原子力显微镜（AFM）分别对薄膜的物相组成和表面形貌进行了分析,利用荧光分光光度计对ZnO薄膜的室温光致发光（PL）谱进行了测试。结果表明：当氧氩气体积比为7∶5时,所制备的ZnO薄膜晶粒细小均匀,薄膜结晶质量最好;ZnO薄膜具有紫光、蓝光和绿光三个发光峰,随着氧氩比的增加,蓝光的发射强度增强,而紫光和绿光的发射强度先增强后减弱,当氧氩气体积比为7∶5时紫光和绿光的发射强度最强。     

Structural,luminescence and magnetic properties of Mn doped ZnO thin films using spin coating technique

Manganese doped zinc oxide (ZnO) thin films were synthesized for various wt% doping of Mn using sol–gel spin coating technique. The effects of Mn doping on the structural, morphological, compositional, photoluminescence (PL) and magnetic behaviour of ZnO thin films were investigated. Although, Mn doping did not change the lattice constants of the films, the texture coefficient is found to be improved for the films having higher percentage of Mn doping. PL studies reveal that as doping concentration of Mn increases, the intensity of emission peaks corresponding to violet and blue colour increases and the peak position shifts slightly. The saturated magnetic moments are found to decrease with the increase in Mn doping and the reason for such behavior is discussed.     

Effect of Al concentrations on the electrodeposition and properties of transparent Al-doped ZnO thin films

Al-doped zinc oxide (AZO) thin films are prepared on polycrystalline fluorine-doped tin oxide-coated conducting glass substrates from nitrates baths by the electrodeposition process at 70 °C. The electrochemical, morphological, structural and optical properties of the AZO thin films were investigated in terms of different Al concentration in the starting solution. It was found that the carrier density of AZO thin films varied between ?3.11 and ?5.56 × 10²⁰ cm^?3 when the Al concentration was between 0 and 5 at.%. Atomic force microscopy images reveal that the concentration of Al has a very significant influence on the surface morphology and roughness of thin AZO. X-ray diffraction spectra demonstrate preferential (002) crystallographic orientation having c-axis perpendicular to the surface of the substrate and average crystallites size of the films was about 33–54 nm. With increasing Al doping, AZO films have a strong improved crystalline quality. As compared to pure ZnO, Al-doped ZnO exhibited lower crystallinity and there is a shift in the (002) diffraction peak to higher angles. Due to the doping of Al of any concentration, the films were found to be showing >80 % transparency. As Al concentration increased the optical band gap was also found to be increase from 3.22 to 3.47 eV. The room-temperature photoluminescence spectra indicated that the introduction of Al can improve the intensity of ultraviolet (UV) emission, thus suggesting its greater prospects in UV optoelectronic devices. A detailed comparison and apprehension of electrochemical, optical and structural properties of ZnO and ZnO:Al thin films is done for the determination of optimum concentration of Al doping.     

RF溅射稀土掺杂ZnO薄膜的结构与发光特性

通过射频磁控溅射技术在Si(111)衬底上制备了未掺杂和La、Nd掺杂ZnO薄膜.XRD分析表明,ZnO薄膜具有c轴择优生长,La、Nd掺杂ZnO薄膜为纳米多晶薄膜.AFM观测,La、Nd掺杂ZnO薄膜表面形貌较为粗糙.从薄膜的室温光致光谱中看到,所有薄膜都出现了395 nm的强紫光峰和495 nm的弱绿光峰,La掺杂ZnO薄膜的峰强度增大,Nd掺杂ZnO薄膜的峰强度减弱,分析了掺杂引起PL峰强度变化的原因.     

Abnormal photoluminescence of ZnO thin film on ITO glass

The photoluminescence (PL) properties of ZnO thin films on ITO glass substrate deposited by rf magnetron sputtering with different oxygen partial pressures were studied. It was found that the exciton related emission of ZnO thin films depends on oxygen partial pressure, and that the visible emission related to intrinsic defects has no obvious change with various oxygen partial pressures. Abnormal UV-PL characteristics were observed, and its intensity was obviously enhanced. The emission position has a strong red-shift with increasing excitation intensity, and the emission intensity increases notably with increasing excitation cycle.     

Synthesis and Photoluminescence Enhancement of Silver Nanoparticles Decorated Porous Anodic Alumina

Silver nanoparticles(Ag NPs) were successfully assembled in porous anodic alumina(AAO) templates via a green silver mirror reaction.The Ag NPs/AAO composite templates then were characterized by field emission scanning electron microscopy(FESEM),energy-dispersive X-ray microanalysis(EDX),and X-ray diffraction(XRD).Furthermore,the photoluminescence(PL) properties were also investigated.Compared with the blank AAO,the PL intensity of Ag NPs/AAO templates are enhanced and the maximum enhancement is 2.58 times.Based on the local electric field enhancement effect,the theoretical values were also deduced,which are basically coincident with the experimental.     

Effects of oxygen pressure on the structure and photoluminescence of ZnO thin films

A series of ZnO thin films were deposited on silicon (100) substrate at 473 K by using facing target RF magnetron sputtering system at different oxygen pressure in this paper. The structure, surface morphology and photoluminescence of the ZnO thin films were characterized by X-ray diffraction, atomic force microscopy (AFM), and photoluminescence spectra (PL), respectively. The results showed that only a (002) peak of hexagonal wurtzite appeared in all ZnO thin films, indicating that ZnO films exhibited strong texture. With increasing the oxygen pressure, the results indicated that the ZnO film deposited at 1.2 Pa Ar pressure and 0.6 Pa oxygen pressure had the best preferential C-axis orientation and the weakest compressive stress. Meanwhile, AFM observation showed that ZnO film deposited at pure Ar had the highest surface roughness. With the increment of oxygen pressure, the surface roughness decreased gradually. In addition, PL measurement showed that the ZnO film deposited at 1.2 Pa Ar pressure and 0.6 Pa oxygen pressure had the strongest ultraviolet emission and the weakest blue emission.     

Microstructural and Optical Properties of Transparent Conductive ZnO : Al : Mo Films Deposited by Template-Assisted Sol–Gel Method

Transparent conductive ZnO : Al : Mo films with a molar ratio of Zn : Al : Mo = 99 : 0·99 : 0·01 were deposited on quartz glass substrate by a template-assisted sol-gel process and characterized by X-ray diffraction, atomic force microscopy, scanning electron microscopy, and UV–Vis and luminescent spectrophotometries. The four types of organic template have induced nanowire morphology with varying aspect ratio. Dip coating in one constant positive and reverse direction causes the parallel array of ZnO : Al : Mo nanowires on the quartz glass substrate. Long and parallel arrayed nanowire films show obviously blue shifts and enhanced transmittances in the UV-Vis light range. The PEG-1000 and PEG-2000 have optimal effects among four templates as constant weight content is used. The films show strong ultraviolet, violet and bluish violet emissions. The templates also lead to overall thicker film and more native defect and thereby remarkably enhancing photoluminescence of the films. Long chain organic template can be used to optimize the optical properties of the doped ZnO film.     

Preparation and Photoluminescence of Ordered ZnO Nanowire Arrays

Ordered ZnO nanowire arrays embedded in anodic aluminum oxide (AAO) membranes were fabricated by electrochemical deposition of Zn(NO3)2 H3BO3 solution in a boiling bath. Scanning electron microscope (SEM) and transmission electron microscope (TEM) observation results show that the polycrystalline ZnO nanowires with diameters around 100 nm were uniformly assembled into the ordered nanochannels of the AAO. The results of the investigation into photoluminescence (PL) and electronic paramagnetic resonance (EPR) measurements reveal that the interfaces between the ZnO nanowires and the pore walls of the AAO create a lot of oxygen vacancies, which are responsible for the green light emission (peaking around 512 nm) and the huge enhancement of the PL emission.     

Effect of solution concentration on the structural, optical and conductive properties of ZnO thin films prepared by sol–gel method

ZnO thin films with different solution concentrations (0.1–0.9 mol/L) were prepared by a simple sol–gel dip-coating technique. X-ray diffraction, ultraviolet–visible spectroscopy, Hall effect measurements and photoluminescence (PL) spectroscopy were employed to investigate the effect of solution concentration on the structural,optical and electrical conductive properties of the ZnO thin films. The results showed that the ZnO thin films preferentially oriented along the (002) direction at higher solution concentration. The careful study of the optical and electrical conductive properties showed that the resistivity decreased monotonously, while the transmittance increased first and then decreased when solution concentrations changed from 0.1 to 0.9 mol/L. Photoluminescence spectra indicated that the defect-related blue emission was increased with the enhancement of solution concentration. The mechanism of the blue emission, and the reasons why high solution concentration was favorable for forming high c-axis oriented ZnO thin films and obtaining low resistivity were also discussed in detail.     

ZnO缓冲层上低温生长Al掺杂的ZnO薄膜

采用射频磁控溅射法在ZnO缓冲层上制备了不同Al掺杂量的ZnO（AZO）薄膜。利用X射线衍射（XRD）、扫描电子显微镜（SEM）和光致发光（PL）等表征技术,研究了AZO薄膜的微观结构、表面形貌和发光特性。结果表明,随着Al掺杂量的增加,ZnO薄膜的择优取向性发生了改变,且当Al的掺杂量为0.81%（原子分数）时,（002）衍射峰与其它衍射峰强度的比值达到最大,表明适合的Al掺杂使ZnO薄膜的择优取向性得到了改善。在可见光范围内薄膜的平均透过率超过70%。通过对样品光致发光（PL）谱的研究,发现所有样品出现了3个发光峰,分别对应于以444nm（2.80eV）、483nm（2.57eV）为中心的蓝光发光峰和以521nm（2.38eV）为中心较弱的绿光峰。并对样品的发光机理进行了详细的探讨。