利用典型Si(100)微结构对原子力显微镜探针参数进行表征

利用各向异性化学湿法刻蚀工艺在Si(100)上加工了具有本征侧墙角(54.73°)的典型微机电系统(MEMS)梯形结构.用该微结构作为线宽测试结构,对其进行了原子力显微镜(AFM)和扫描电子显微镜(SEM)线宽和轮廓的比对测量.并对AFM探针和样品耦合效应进行了研究,提出了AFM探针参数动态表征的模型,基于几何模型对线宽和轮廓测量中探针针尖形状和针尖位置参数进行了表征,提出了用曲率半径、安装倾角、扫描倾角和针尖半顶角来对原子力显微镜探针针尖进行表征.该方法是对现有AFM探针表征模型的改进和完善.     

AFM扫描过程的模拟及针尖形状反求

纳米栅格和台阶等结构的线宽准确测量,是国内外计量领域的研究热点与难点。采用原子力显微镜(AFM)能获得上述结构的三维形貌信息,但其扫描图像却是探针针尖的形貌和被测样品表面的形貌共同作用的结果,这种作用往往导致线宽边缘测量失真。为了更加精确地获得样品的表面形貌特征,首先需要重建探针针尖形貌,进而从得到的扫描图像中尽可能地消除由探针形貌带来的失真影响。基于数学形态学的盲重建理论,利用Matlab对不同形状参数的探针针尖扫描台阶样品表面进行了仿真,评价了探针形状对扫描结果的影响,初步实现了基于真实粗糙测量表面的探针针尖形状重建。     

使用AFM测量纳米尺度线宽的不确定度研究

针对Nanoscope Ⅲ型原子力显微镜,进行了纳米尺度线宽测量的不确定度分析。提出一个线宽测量的误差校正步骤,确定并分析了影响测量结果不确定度的4方面因素。根据实验和测量过程,分析和计算得到被测样品的线宽值、不确定度分量以及合成不确定度。     

硅单晶电阻率四探针法测量不确定度评定

按照GB/T 1551-2009《硅单晶电阻率测定方法》,用四探针法测量硅单晶的电阻率,分析了测试过程中的不确定度来源并量化各分量,计算出了该方法的合成标准不确定度和扩展不确定度.     

纳米尺度线宽粗糙度测量技术

综述了纳米尺度线宽粗糙度测量研究现状.分别论述了线宽粗糙度定义、各种测量工具的优缺点、目前线宽粗糙度采用的测量方法、分析方法及其表征参数,讨论了线宽粗糙度的测量障碍.分析了线宽粗糙度测量不确定度的构成,讨论了采用原子力显微镜为工具的线宽粗糙度测量的影响因素.     

M2等级砝码测量结果的不确定度评定

本文根据JJG99-2006砝码检定规程,分析各种测量不确定度的来源,通过输测量过程的引起不确定度、标准砝码引起的不确定度、天平显示分辨力引起的不确定度的评定,空气浮力引起的不确定度、磁性引入的不确定度、计算出砝码在各称量点的不确定度评估值。     

苹果汁中菌落总数测定结果不确定度评定

测量不确定度是对测量结果可疑程度的一种定理表述，为减小实验误差，提高检测精确度，我们分析了饮料中菌落总数测量不确定的来源，评定了由重复性测量的分散性引起的测量不确定度．测量结果显示扩不确定度为0．0633。     

X射线荧光光谱法测定钒铁合金中Mn含量的不确定度评定

对X射线荧光光谱法测定钒铁合金中Mn含量的不确定度来源进行分析,并对测量过程中的不确定度分量进行评定。测量不确定度主要来源于测量重复性、称量、标准样品和工作曲线回归。计算各分量的标准不确定度、合成标准不确定度和扩展不确定度。不确定度评定结果表明,标准样品引起的不确定度对总不确定度贡献最大。     

中密度纤维板静曲强度不确定度评定

对中密度纤维板静曲强度进行测量,对引起不确定性的主要来源进行逐项分析和评定,最后得出破坏载荷测量引起的不确定度是中密度纤维板静曲强度不确定度评价的关键。     

X射线荧光光谱法测定镁合金中Zn的不确定度评定

对X射线荧光光谱法测定镁合金中Zn元素的不确定度来源进行分析,并对测量过程中的不确定度分量进行评定。测量不确定度主要来源于测量重复性、标准样品和工作曲线回归。计算各分量的标准不确定度和合成标准不确定度。合成标准不确定度乘以95%置信概率下的包含因子2,得到测量结果的扩展不确定度。不确定度评定结果表明,工作曲线回归引起的不确定度对总不确定度贡献最大。     

原子力显微镜探针原位有效参数对线宽测量的修正

针对原子力显微镜（AFM）的线宽和轮廓的精确测量，对AFM探针的原位有效参数进行了定义和表征，提出使用AFM探针的原位有效参数对AFM的线宽测量结果进行修正的模型。采用有效半径和半内角表征AFM探针的复合形状，悬臂轴倾角表征探针的安装状态，设计了具有不同梯形截面的两个表征样板，通过对表征样板进行AFM和扫描电子显微镜（SEM）的比对测量获得了探针的原位有效参数。提出了在线宽测量中，当AFM的扫描轮廓线具有不同的斜度时分别采用的不同的修正公式。采用此公式和探针的原位参数对掩膜板的AFM线宽测量结果进行了修正。     

Estimation of AFM tip shape and status in linewidth and profile measurement

An atomic force microscopy image is a dilation of the specimen surface with the probe tip. Tips wear or are damaged as they are used. And AFM tip shape and position status make AFM images distorted. So it is necessary to characterize AFM tip shape and position parameters so as to reconstruct AFM images. A geometric model-based approach is presented to estimate AFM tip shape and position status by AFM images of test specimens and scanning electron microscope (SEM) images of AFM tip. In this model, the AFM tip is characterized by using a dynamic cone model. The geometric relationship between AFM tip and the sample structure is revealed in linewidth and profile measurement. The method can easily calculate the tip parameters including half-cone angle, installation angle, scanning tilting angle and curvature radius, and easily estimate the position status of AFM tip when AFM tip moves on the specimen. The results of linewidth and profile measurement are amended accurately through this approach.     

Accuracy of the spring constant of atomic force microscopy cantilevers by finite element method

Atomic force microscopy (AFM) probe with different functions can be used to measure the bonding force between atoms or molecules. In order to have accurate results, AFM cantilevers must be calibrated precisely before use. The AFM cantilever's spring constant is usually provided by the manufacturer, and it is calculated from simple equations or some other calibration methods. The spring constant may have some uncertainty, which may cause large errors in force measurement. In this paper, finite element analysis was used to obtain the deformation behavior of the AFM cantilever and to calculate its spring constant. The influence of prestress, ignored by other methods, is discussed in this paper. The variations of Young's modulus, Poisson's ratio, cantilever geometries, tilt angle, and the influence of image tip mass were evaluated to find their effects on the cantilever's characteristics. The results were compared with those obtained from other methods.     

纳米测量及纳米样板

介绍了纳米测量系统的组成以及纳米样板的研究现状．提出了两种制备纳米结构样板的方法：Si基底上的原子力显微镜(AFM)探针诱导阳极氧化工艺和Au膜上的AFM探针机械划刻工艺．最后对Si基底上制备的纳米结构样板进行了精度分析．     

基于条件生成式对抗网络的AFM图像盲重构方法

针对原子力显微镜(AFM)成像过程中针尖展宽效应引起的误差,提出一种基于条件生成式对抗网络(CGAN)的AFM图像盲重构方法.首先,以pix2pixHD模型为基础,通过全局生成网络对仿真样本数据进行对抗训练,引入AFM测量数据采用局部提升网络联合训练;最后,特征匹配损失函数以用于提升栅格边缘横向分辨力.实验结果表明:对...     

248 nm紫外显微镜微纳线宽校准方法的研究

248 nm波长照明的紫外显微镜能够获得高达80 nm的光学分辨率,可以实现对掩模板的线宽和一维/二维栅格参数的测量。作为测量仪器的248 nm紫外显微镜需要对其进行校准。该显微镜测量范围在nm量级,校准使用400 nm一维栅格标准物质,通过对仪器不确定度和标准物质自身不确定度的评估,得到采集图像每个像素的扩展不确定度为0.178 nm,并给出了实际测量时的不确定度评价公式。     

Atomic force microscope cantilever calibration using a focused ion beam

A calibration method is presented for determining the spring constant of atomic force microscope (AFM) cantilevers, which is a modification of the established Cleveland added mass technique. A focused ion beam (FIB) is used to remove a well-defined volume from a cantilever with known density, substantially reducing the uncertainty usually present in the added mass method. The technique can be applied to any type of AFM cantilever; but for the lowest uncertainty it is best applied to silicon cantilevers with spring constants above 0.7?N?m(-1), where uncertainty is demonstrated to be typically between 7 and 10%. Despite the removal of mass from the cantilever, the calibration method presented does not impair the probes' ability to acquire data. The technique has been extensively tested in order to verify the underlying assumptions in the method. This method was compared to a number of other calibration methods and practical improvements to some of these techniques were developed, as well as important insights into the behavior of FIB modified cantilevers. These results will prove useful to research groups concerned with the application of microcantilevers to nanoscience, in particular for cases where maintaining pristine AFM tip condition is critical.     

计量型紫外显微镜微纳米线宽测量技术的研究

计量型紫外显微镜微纳米线宽测量技术是利用光电倍增管的光电转换效应,将线宽的光学信号转换为电信号,并利用后续信号采样处理电路,提取出线宽的轮廓信号。利用激光干涉仪等精密定位装置,搭建了一套线宽测量系统,对线宽标称值为3 μm的标准样板进行测量,得到的线宽测量值为3.025 μm,与标称值仅相差25 nm。实验表明:该方法可以准确地获取线宽的边界信号,实现线宽的准确测量。     

较浅压入下针尖曲率半径对纳米压入硬度影响的比较研究

基于3种不同曲率半径压头针尖对熔融石英进行纳米压入,用原子力显微镜（AFM）直接法测得压头针尖的面积函数及针尖曲率半径。研究表明,在极浅压入条件下,压头曲率半径的变化会导致硬度值的测量误差,曲率半径越小的压头针尖随接触深度的变化会更快得到真实值;相同的压入深度,曲率半径小的压头针尖测得的压入硬度值比曲率半径大的测得的压入硬度值更接近其真实值。     

Elastic property of vertically aligned nanowires

An atomic force microscopy (AFM) based technique is demonstrated for measuring the elastic modulus of individual nanowires/nanotubes aligned on a solid substrate without destructing or manipulating the sample. By simultaneously acquiring the topography and lateral force image of the aligned nanowires in the AFM contacting mode, the elastic modulus of the individual nanowires in the image has been derived. The measurement is based on quantifying the lateral force required to induce the maximal deflection of the nanowire where the AFM tip was scanning over the surface in contact mode. For the [0001] ZnO nanowires/nanorods grown on a sapphire surface with an average diameter of 45 nm, the elastic modulus is measured to be 29 +/- 8 GPa.